An evaporation device with a uniform thermal field

Abstract

This invention discloses an evaporation device with a uniform thermal field, comprising an evaporation tank and multiple graphite crucibles disposed within the evaporation tank. The graphite crucibles are arranged in multiple rows and staggered front to back. Each graphite crucible has an insulation structure and a heating structure sequentially disposed on its outer side. This invention generates a uniform thermal field through the staggered arrangement of graphite crucibles, ensuring the uniformity of the vapor-deposited film thickness, enabling better melting and evaporation of the metal to be deposited, effectively improving the melting effect of the metal within the crucible, increasing evaporation efficiency, and guaranteeing the uniformity of the coating.

Description

Technical Field

[0001] This utility model relates to the field of vacuum evaporation coating technology, specifically to an evaporation device with a uniform thermal field. Background Technology

[0002] Vacuum evaporation is a process in which the substance to be deposited is placed in a vacuum and evaporated or sublimated, thereby precipitating the substance on the surface of a workpiece or substrate. Vacuum evaporation can form a thin film on the surface of a workpiece or substrate, which not only improves the aesthetic appearance but also enhances the material's hardness and corrosion resistance.

[0003] A typical vapor deposition machine mainly consists of a vacuum vapor deposition chamber, a heating system, an evaporation source, a substrate rack, and a control system. In use, the substrate is placed on the substrate rack, the vacuum system is started, and the vacuum vapor deposition chamber is placed in a vacuum environment. Then, the evaporation source is heated by the heating system, so that the evaporation material evaporates or sublimates, forming a thin film on the surface of the workpiece or substrate.

[0004] Currently, crucibles are commonly used as evaporation sources. However, crucibles with larger diameters often suffer from poor melting effects and leave behind a large amount of metal residue after evaporation due to uneven thermal fields during the evaporation process, resulting in material waste and low evaporation efficiency. Utility Model Content

[0005] To overcome the shortcomings of the prior art, this utility model provides an evaporation device with a uniform thermal field, which effectively improves the melting effect of metal in the crucible, increases evaporation efficiency, and ensures the uniformity of the coating.

[0006] The technical solution adopted by this utility model to solve its technical problem is:

[0007] An evaporation device with a uniform thermal field includes an evaporation tank and a plurality of graphite crucibles disposed in the evaporation tank. The plurality of graphite crucibles are arranged in multiple rows and staggered front to back. Each graphite crucible has a heat preservation structure and a heating structure arranged sequentially on its outer side.

[0008] As a further improvement to the above technical solution, the heat insulation structure includes a graphite felt disposed on the outside of the graphite crucible.

[0009] As a further improvement to the above technical solution, the heat preservation structure also includes a refractory outer pot disposed on the outside of the graphite crucible, and the graphite felt is connected between the graphite crucible and the refractory outer pot.

[0010] As a further improvement to the above technical solution, the heating structure includes an induction heating coil, which is wound around the outside of the refractory outer pot.

[0011] As a further improvement to the above technical solution, a cooling water channel is provided inside the induction heating coil.

[0012] As a further improvement to the above technical solution, the outer side of the induction heating coil is wrapped with glass fiber cloth.

[0013] As a further improvement to the above technical solution, refractory silica cloth is provided at the bottom of the evaporation tank in the gaps between the graphite crucibles.

[0014] As a further improvement to the above technical solution, the graphite crucible has a diameter of 150mm, a height of 120mm, and a wall thickness of 10mm; the graphite felt and the refractory outer pot are both 10mm thick.

[0015] As a further improvement to the above technical solution, the length, width and height of the evaporation tank are 1920mm, 450mm and 350mm respectively.

[0016] As a further improvement to the above technical solution, the number of graphite crucibles is 11, and the 11 graphite crucibles are arranged in two rows and staggered in front and behind in the evaporation tank.

[0017] The beneficial effects of this invention are as follows: A uniform electromagnetic field is generated by a heating induction coil surrounding the outside of the graphite crucible. This uniform electromagnetic field ensures that the outside of the crucible is heated evenly, and heat is gradually transferred by radiation from the outside in. The heat is maintained during the evaporation process by an insulation structure, allowing the metal to be plated to melt and evaporate more effectively. After evaporation, there is less metal residue inside the crucible. Simultaneously, the staggered arrangement of the graphite crucibles generates a uniform thermal field, ensuring the uniformity of the evaporated film thickness. Combined with adjustments to the evaporation power of the graphite crucible, the goal of uniform film deposition is gradually achieved. Attached Figure Description

[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0019] Figure 1 This is an assembly schematic diagram of an evaporation device with a uniform thermal field according to an embodiment of the present invention;

[0020] Figure 2 This is a top view of an evaporation device with a uniform thermal field according to an embodiment of the present invention;

[0021] Figure 3 This is a top view of a graphite crucible in an evaporation apparatus with a uniform thermal field according to an embodiment of the present invention;

[0022] Figure 4 This is a cross-sectional view of a graphite crucible in an evaporation apparatus with a uniform thermal field according to an embodiment of the present invention.

[0023] Reference numerals: 1. Evaporation tank; 2. Graphite crucible; 3. Graphite felt; 4. Refractory outer pot. Detailed Implementation

[0024] The following will clearly and completely describe the concept, specific structure, and technical effects of this utility model in conjunction with embodiments and accompanying drawings, so as to fully understand the purpose, features, and effects of this utility model. Obviously, the described embodiments are only a part of the embodiments of this utility model, not all of them. Other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are all within the scope of protection of this utility model. Furthermore, all connections / connections involved in the patent do not simply refer to direct contact between components, but rather to the ability to form a better connection structure by adding or reducing connecting accessories according to specific implementation conditions. For example, fixed connections / fixed installations can use screw connections, bolt connections, pin connections, key connections, adhesive connections, mortise and tenon connections, welding, riveting, etc., as needed. For detachable connections, screw connections, bolt connections, threaded connections, snap-fit ​​connections, mortise and tenon connections, Velcro connections, etc., can be used as needed. The various technical features in this utility model can be combined interactively without contradicting each other.

[0025] Reference Figure 1 , Figure 2 An embodiment of this utility model provides an evaporation device with a uniform thermal field, including an evaporation tank 1 and a plurality of graphite crucibles 2 disposed in the evaporation tank 1. The plurality of graphite crucibles 2 are arranged in multiple rows and staggered front to back. Each graphite crucible 2 has a heat preservation structure and a heating structure arranged sequentially on its outer side. The heating structure includes an induction heating coil surrounding the outer side of the graphite crucible 2, and the induction heating coil is connected to a power source.

[0026] It is understandable that this utility model uses a graphite crucible 2. Compared with crucibles made of boron nitride, graphite can melt metal materials with higher melting points and is more stable. For example, high-temperature aluminum liquid will not have a strong corrosive effect on graphite crucible 2.

[0027] Furthermore, this invention generates a uniform electromagnetic field around the graphite crucible 2 using the aforementioned heating induction coil. This uniform electromagnetic field ensures that the outer side of the crucible is heated evenly, with heat gradually radiating inwards to achieve heat transfer. The heat is maintained during the evaporation process by the insulation structure, allowing the metal to be plated to melt and evaporate more effectively. After evaporation, the crucible contains less metal residue. Simultaneously, the staggered arrangement of the graphite crucibles 2 creates a uniform thermal field, ensuring the uniformity of the evaporated film thickness. Combined with adjustments to the evaporation power of the graphite crucibles 2, the goal of achieving uniform film coating is gradually achieved.

[0028] Furthermore, a cooling water channel is provided inside the aforementioned induction heating coil to cool it in a timely manner, thereby improving its service life. Additionally, the outer side of the induction heating coil is wrapped with fiberglass cloth. Since the induction heating heat field generated by the coil can be distributed throughout the entire graphite crucible 2, the fiberglass cloth wrapping maintains the stability of the heat field, thus improving the stability and efficiency of the heating structure.

[0029] In this embodiment, refer to Figure 3 and Figure 4 The aforementioned insulation structure includes a graphite felt 3 and a refractory outer pot 4. The graphite felt 3 and the refractory outer pot 4 are sequentially attached to the outside of the graphite crucible 2, that is, the graphite felt 3 connects the graphite crucible 2 and the refractory outer pot 4. The graphite felt 3 plays a role in heat insulation. Then, the aforementioned induction heating coil is wound around the outside of the refractory outer pot 4. The refractory outer pot 4 isolates the heat source from direct contact with the graphite felt 3. The refractory outer pot 4 withstands the temperature of the aforementioned induction heating coil, avoiding damage to the graphite felt 3 and the graphite crucible 2 due to high temperature. At the same time, it prevents heat loss from the graphite crucible 2, further improving the heat insulation effect.

[0030] In a preferred embodiment, refractory silica cloth is provided at the bottom of the evaporation tank 1 at the gap between the multiple graphite crucibles 2, which can prevent the metal solution splashed from the graphite crucibles 2 from burning the tank body of the evaporation tank 1.

[0031] In a specific embodiment, the graphite crucible 2 has a diameter of 150 mm, a height of 120 mm, and a wall thickness of 10 mm; the graphite felt 3 and the refractory outer pot 4 both have a thickness of 10 mm; the length, width, and height of the evaporation tank 1 are 1920 mm, 450 mm, and 350 mm, respectively. Based on the dimensions of the evaporation tank 1 and the graphite crucible 2, 11 graphite crucibles 2 are installed in the evaporation tank 1, arranged in two rows. The front row has 5 graphite crucibles 2, and the back row has 6 graphite crucibles 2. The two rows of graphite crucibles 2 are staggered. This layout enables the evaporation source in the evaporation tank 1 to generate a more uniform heat field, improving the uniformity of the vapor-deposited film thickness.

[0032] The above is a detailed description of the preferred embodiments of the present utility model. However, the present utility model is not limited to the described embodiments. Those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present utility model. All such equivalent modifications or substitutions are included within the scope defined by the claims of this application.

Claims

1. An evaporation apparatus with a uniform thermal field, characterized in that: It includes an evaporation tank and multiple graphite crucibles disposed in the evaporation tank. The multiple graphite crucibles are arranged in multiple rows and staggered front to back. Each graphite crucible has a heat preservation structure and a heating structure arranged sequentially on its outer side. The heat insulation structure includes a graphite felt and a refractory outer pot disposed on the outside of the graphite crucible, wherein the graphite felt is connected between the graphite crucible and the refractory outer pot. The heating structure includes an induction heating coil, which is wound around the outside of the refractory outer pot.

2. An evaporation device with a uniform thermal field according to claim 1, characterized in that: The induction heating coil is equipped with a cooling water channel.

3. The evaporation device with a uniform thermal field of claim 1, wherein: The outer side of the induction heating coil is wrapped with glass fiber cloth.

4. The evaporation device with a uniform thermal field of claim 1, wherein: The bottom of the evaporation tank is provided with refractory silica cloth in the gaps between the graphite crucibles.

5. An evaporation apparatus with a uniform thermal field according to claim 1, characterized in that: The graphite crucible has a diameter of 150 mm, a height of 120 mm, and a wall thickness of 10 mm; the graphite felt and the refractory outer pot are both 10 mm thick.

6. An evaporation device with a uniform heat field according to claim 5, characterized in that: The evaporation tank has a length, width, and height of 1920mm, 450mm, and 350mm, respectively.

7. An evaporation device with a uniform heat field according to claim 6, characterized in that: The number of graphite crucibles is 11, and the 11 graphite crucibles are arranged in two rows and staggered in front and behind in the evaporation tank.

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