Heat-resistant reflector support frame

Abstract

This utility model discloses a heat-deformation resistant reflector support frame, specifically relating to the field of reflector support technology. It includes a lower arc frame, with a bidirectional assembly mounted above it. The bidirectional assembly includes: an upper arc frame, abutting against the upper surface of the lower arc frame, with side inserts slidably embedded on both sides of each upper arc frame; and a mounting block, fixedly connected to the top of the side inserts. A locking bolt is inserted into the interior of the side insert, and a locking nut is threaded onto the outer wall of the locking bolt near one end. Through this bidirectional assembly, the lower and upper arc frames vertically fix the optical instrument reflector, allowing the side inserts to be inserted laterally along the upper arc frame and pressed against the lateral surface of the optical instrument reflector. This achieves dual edge locking of the optical instrument reflector both vertically and laterally, enabling bidirectional anti-deformation operation of the optical instrument reflector.

Description

Technical Field

[0001] This utility model relates to the field of reflector support technology, and more specifically, to a reflector support frame resistant to heat deformation. Background Technology

[0002] In optical systems such as lithography machines, high-precision optical instruments, and semiconductor equipment, heat-resistant mirror support frames are key components that ensure the high precision and stability of optical elements, especially mirrors, under complex thermal environments. Their core function is to maintain the imaging quality, wavefront accuracy, and long-term reliability of the optical system by actively or passively controlling thermal deformation.

[0003] Among existing published documents, patent publication number CN205301686U discloses a two-dimensional mirror frame for circumferentially supporting a large-aperture mirror. This technology uses a left bracket and a right bracket to be fixedly mounted on the left and right sides of a gimbal, respectively. Both the left and right brackets are provided with through holes with openings. The mirror frame is connected to the left and right brackets via a horizontal axis, which can meet the actual needs of optical inspection engineering for circumferentially supporting a large-aperture mirror. However, this patent has the following defects.

[0004] During use, a support frame is needed to prevent the reflector from deforming due to heat. However, vertical support is used, making it difficult to achieve horizontal embedded support, which results in poor resistance to heat deformation at the lateral edges of the reflector. Utility Model Content

[0005] To overcome the aforementioned deficiencies of the prior art, this utility model provides the following technical solution: a heat-resistant reflector support frame, including a lower arc frame, with a bidirectional assembly mounted above the lower arc frame, the bidirectional assembly comprising:

[0006] The upper arc frame is abutted against the upper surface of the lower arc frame, and side inserts are slidably embedded on both sides of each upper arc frame;

[0007] The mounting block is fixedly connected to the top of the side bracket. The locking bolt is inserted into the inside of the side bracket. A locking nut is threaded onto the outer wall of the locking bolt near one end.

[0008] Two mounting bolts are inserted into the inner wall of the upper arc frame, and mounting nuts are threaded onto the outer wall of the mounting bolts near their bottom ends.

[0009] In a preferred embodiment, the vertical cross-sectional shape of both upper arc frames is annular, and the outer wall of the side insert and the inner wall of the upper arc frame are both smooth surfaces.

[0010] In a preferred embodiment, the locking nut and locking bolt are used to compress and lock two adjacent side brackets, both of which are made of plastic.

[0011] In a preferred embodiment, the lower arc frame and the upper arc frame are symmetrically arranged, and the mounting bolts and mounting nuts are used to press and lock the lower arc frame and the upper arc frame.

[0012] In a preferred embodiment, a connecting frame is fixedly connected to the bottom end of the outer wall of the lower arc frame;

[0013] Two support blocks are fixedly installed on both sides of the connecting frame, and the support blocks are used to support the connecting frame.

[0014] In a preferred embodiment, a plurality of the support blocks are arranged in a rectangular distribution, and both the support blocks and the connecting frame are made of stainless steel.

[0015] In a preferred embodiment, each of the side inserts is fixedly connected to a sleeve block on its outer wall, and a guide post is slidably inserted into the inner wall of the sleeve block, the guide post being used to guide the sliding of the sleeve block;

[0016] A protruding strip is fixedly connected to one side of the outer wall of the guide post, and both of the sleeve blocks are slidably connected to the protruding strip. A support rod is fixedly connected to the other side of the outer wall of the guide post, and the support rod is fixedly connected to the upper arc frame.

[0017] The technical effects and advantages of this utility model are as follows:

[0018] 1. This utility model uses a bidirectional assembly to place the optical instrument reflector in the gap between the upper and lower arc frames. The mounting nut and mounting bolt are rotated and engaged to lock the reflector vertically. The lower and upper arc frames fix the optical instrument reflector vertically. The locking bolt and locking nut engage to lock the reflector horizontally, allowing the side bracket to be inserted and pressed against the horizontal surface of the optical instrument reflector along the upper arc frame. This achieves double edge locking of the optical instrument reflector both vertically and horizontally, enabling bidirectional anti-deformation operation for the optical instrument reflector.

[0019] 2. This utility model uses a side insert bracket that drives the socket block to move, and a support rod that supports the guide column. In this way, the socket block can slide along the outer wall of the protrusion and the support rod, ensuring that the two side insert brackets perform a lateral locking operation on the optical instrument reflector according to the specified guide path, and achieve a lateral locking operation on the edge of the optical instrument reflector. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of the heat-resistant reflector support frame of this utility model.

[0021] Figure 2 This is a partial structural diagram of the connection between the upper arc frame and the side insert frame of this utility model.

[0022] Figure 3 This is a partial structural diagram of the connection between the lower arc frame and the mounting nut of this utility model.

[0023] Figure 4 This is a partial structural diagram of the connection between the convex strip and the guide post of this utility model.

[0024] The attached diagram is labeled as follows: 1. Lower arc frame; 2. Upper arc frame; 3. Side insert frame; 4. Mounting block; 5. Locking bolt; 6. Locking nut; 7. Mounting bolt; 8. Mounting nut; 9. Connecting frame; 10. Support block; 11. Sleeve block; 12. Guide column; 13. Protruding strip; 14. Support rod. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] As attached Figure 1 - Appendix Figure 4 The present invention relates to a heat-resistant reflector support frame, which is provided with a bidirectional component. The bidirectional component enables the side insert 3 to be inserted laterally along the upper arc frame 2 and pressed against the lateral surface of the optical instrument reflector. This achieves double edge locking of the optical instrument reflector in both vertical and horizontal directions, realizing bidirectional anti-deformation operation of the optical instrument reflector. The specific structural configuration of the bidirectional component is as follows.

[0027] In this embodiment, as shown in the appendix Figure 1 - Appendix Figure 3As shown, a bidirectional assembly is installed above the lower arc frame 1. The bidirectional assembly includes: an upper arc frame 2, which abuts against the upper surface of the lower arc frame 1, with side inserts 3 slidably embedded on both sides of each upper arc frame 2; a mounting block 4, fixedly connected to the top of the side inserts 3, with a locking bolt 5 inserted into the interior of the side insert 3, and a locking nut 6 threadedly connected to the outer wall of the locking bolt 5 near one end; and two mounting bolts 7, both inserted into the inner wall of the upper arc frame 2, with a mounting nut 8 threadedly connected to the outer wall of the mounting bolt 7 near its bottom. The vertical cross-section of both upper arc frames 2 is annular, and the outer wall of the side inserts 3 and the inner wall of the upper arc frame 2 are smooth surfaces. The locking nuts 6 and locking bolts 5 are used to compress and lock adjacent side inserts 3. Both the side inserts 3 and the upper arc frames 2 are made of plastic. The lower arc frame 1 and the upper arc frame 2 are symmetrically arranged, and the mounting bolts 7 and mounting nuts 8 are used to compress and lock the lower arc frame 1 and the upper arc frame 2.

[0028] In this embodiment, as shown in the appendix Figure 1 As shown, a connecting frame 9 is fixedly connected to the bottom of the outer wall of the lower arc frame 1; two support blocks 10 are fixedly installed on both sides of the connecting frame 9, and the support blocks 10 are used to support the connecting frame 9. Multiple support blocks 10 are arranged in a rectangular distribution, and both the support blocks 10 and the connecting frame 9 are made of stainless steel. This arrangement ensures that the support blocks 10 support the connecting frame 9, and the connecting frame 9 supports the lower arc frame 1, thus ensuring that the connecting frame 9 stably provides support to the lower arc frame 1 and preventing the lower arc frame 1 from swaying.

[0029] When using this heat-deformation resistant reflector support bracket, expansion bolts are inserted into the holes inside the support block 10. The support block 10 supports the connecting frame 9, which in turn supports the lower arc frame 1. The optical instrument reflector is then placed in the gap between the upper arc frame 2 and the lower arc frame 1. The mounting bolt 7 is then fixed in place, and the mounting nut 8 is rotated, engaging with the mounting bolt 7 to lock it in place. This vertically fixes the optical instrument reflector to the lower arc frame 1 and the upper arc frame 2, achieving vertical heat-deformation resistance. Next, the locking bolt 5 is fixed in place, and the locking nut 6 is rotated, engaging with the locking nut 6 to lock it in place. This causes the two mounting blocks 4 to press against each other, which in turn causes the two side inserts 3 to press against each other. The side inserts 3 are then inserted laterally along the upper arc frame 2 and pressed against the lateral surface of the optical instrument reflector.

[0030] In this embodiment, as shown in the appendix Figure 3 As shown, each side insert 3 has a fixedly connected sleeve block 11 on its outer wall, and a guide post 12 is slidably inserted into the inner wall of the sleeve block 11. The guide post 12 is used to guide the sleeve block 11 to slide. A protrusion 13 is fixedly connected to one side of the outer wall of the guide post 12, and both sleeve blocks 11 are slidably connected to the protrusion 13. A support rod 14 is fixedly connected to the other side of the outer wall of the guide post 12, and the support rod 14 is fixedly connected to the upper arc frame 2.

[0031] When this heat-deformation resistant reflector support bracket is in use, the side insert bracket 3 will simultaneously drive the sleeve block 11 to move, and the upper arc bracket 2 will support the support rod 14, the support rod 14 will support the guide post 12, and the guide post 12 will support the protrusion 13. In this way, the sleeve block 11 can slide along the outer wall of the protrusion 13 and the support rod 14 to ensure that the two side insert brackets 3 perform lateral locking operation on the optical instrument reflector according to the specified guide path.

[0032] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A heat-resistant reflector support frame, comprising a lower arc frame (1), characterized in that: A bidirectional assembly is installed above the lower arc frame (1), the bidirectional assembly comprising: The upper arc frame (2) is abutted against the upper surface of the lower arc frame (1), and each upper arc frame (2) has a side insert (3) slidably embedded on both sides. Mounting block (4) is fixedly connected to the top of side bracket (3) and also includes locking bolt (5), which is inserted into the inside of side bracket (3), and a locking nut (6) is threaded on the outer wall of the locking bolt (5) and near one end thereof. Two mounting bolts (7) are inserted into the inner wall of the upper arc frame (2), and mounting nuts (8) are threaded onto the outer wall of the mounting bolts (7) near their bottom ends.

2. The heat-resistant reflector support frame according to claim 1, characterized in that: The vertical cross-sectional shape of both upper arc frames (2) is circular, and the outer wall of the side insert frame (3) and the inner wall of the upper arc frame (2) are smooth surfaces.

3. The heat-resistant reflector support frame according to claim 1, characterized in that: The locking nut (6) and locking bolt (5) are used to press and lock the two adjacent side brackets (3). The side brackets (3) and the upper arc bracket (2) are both made of plastic.

4. The heat-resistant reflector support frame according to claim 1, characterized in that: The lower arc frame (1) and the upper arc frame (2) are symmetrically arranged, and the mounting bolts (7) and mounting nuts (8) are used to press and lock the lower arc frame (1) and the upper arc frame (2).

5. The heat-resistant reflector support frame according to claim 1, characterized in that: A connecting frame (9) is fixedly connected to the bottom of the outer wall of the lower arc frame (1). Two support blocks (10) are fixedly installed on both sides of the connecting frame (9), and the support blocks (10) are used to support the connecting frame (9).

6. The heat-resistant reflector support frame according to claim 5, characterized in that: Multiple support blocks (10) are arranged in a rectangular distribution, and both the support blocks (10) and the connecting frame (9) are made of stainless steel.

7. The heat-resistant reflector support frame according to claim 1, characterized in that: Each of the side inserts (3) has a fixedly connected sleeve block (11) on its outer wall, and a guide post (12) is slidably inserted into the inner wall of the sleeve block (11). The guide post (12) is used to guide the sleeve block (11) to slide. A protruding strip (13) is fixedly connected to one side of the outer wall of the guide post (12), and both of the sleeve blocks (11) are slidably connected to the protruding strip (13). A support rod (14) is fixedly connected to the other side of the outer wall of the guide post (12), and the support rod (14) is fixedly connected to the upper arc frame (2).

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