A driving mechanism and exposure equipment

Abstract

This utility model relates to the field of exposure equipment technology, specifically to a driving mechanism and an exposure device. The driving mechanism includes a linear motion module disposed within a cavity of the exposure device frame. The linear motion module includes a slide table capable of reciprocating horizontally; a connecting component that penetrates the frame platform located at the top of the cavity, with its bottom end connected to the slide table; and a pushing component located above the frame platform and connected to the connecting component, including a pressure plate capable of vertically lifting and lowering. This pressure plate mechanism, by placing the linear motion module within the cavity of the frame, eliminates the need for technicians to enter the cavity during installation and maintenance, significantly reducing installation difficulty and risk, and improving installation, debugging, and maintenance efficiency. It also contributes to improving the accuracy and stability of the pressure plate mechanism and the overall laser equipment.

Description

Technical Field

[0001] This utility model relates to the field of exposure equipment technology, specifically to a driving mechanism and an exposure device. Background Technology

[0002] The increasingly fierce competition in the exposure equipment industry, especially in the laser direct exposure equipment sector, has driven companies to continuously raise their requirements for product quality and performance. This, in turn, leads to increasingly stringent requirements for key parameters of laser direct exposure equipment, encompassing aspects such as equipment precision, stability, and processing area. The frame or bed, as the core supporting component of laser direct exposure equipment, significantly impacts the overall precision and stability of the equipment. Traditional laser direct exposure equipment typically uses welded frames, but to improve precision and stability, more and more companies are exploring the use of cast iron beds to replace traditional welded frames. Currently, installation often involves mounting the existing pressure plate mechanism from inside the machine tool. However, this method requires technicians to enter the equipment for installation and maintenance. To reduce costs, the height of cast iron beds is usually limited, which restricts the installation of the existing pressure plate mechanism. This results in challenges such as limited space, difficult layout and fixing during installation, and severely restricts technicians' operations, greatly increasing the difficulty of operation, reducing installation efficiency, and lowering maintenance efficiency after long-term operation. Furthermore, it increases the risk of equipment failure or safety accidents due to improper installation. Therefore, there is an urgent need to optimize and improve the existing pressure plate mechanism. Utility Model Content

[0003] The purpose of this invention is to provide a driving mechanism and exposure equipment to solve the problems of difficult installation and low installation and maintenance efficiency caused by the limited height of the cast iron bed in the prior art.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a driving mechanism, comprising:

[0005] A linear motion module, the linear motion module including a slide table that can reciprocate in a horizontal direction;

[0006] A connecting component, the bottom end of which is connected to the slide table;

[0007] A pressing assembly, connected to the connecting assembly, the pressing assembly including a pressure plate that can be raised and lowered vertically.

[0008] Furthermore, the connecting assembly includes a pressure plate, a push plate, and a push plate limiting plate;

[0009] The push plate limiting plate is fixedly installed on the slide table and forms a receiving cavity on the slide table; one end of the pressure plate push plate is fixedly inserted into the receiving cavity, and the other end passes through the frame platform and is connected to the pushing assembly.

[0010] Furthermore, the pushing assembly also includes a driving component and a connecting rod; the connecting rod is fixedly connected to the pressure plate push plate, and the driving component is fixedly mounted on the connecting rod; the driving component is connected to the pressure plate and is used to drive the pressure plate to move vertically up and down.

[0011] Furthermore, the pressing assembly includes at least one of the pressure plates, and each pressure plate is connected to at least one of the driving members.

[0012] Furthermore, each of the pressure plates is connected to a driving component at both ends.

[0013] Furthermore, the driving mechanism also includes a guiding mechanism; the guiding mechanism includes:

[0014] A guide rail is mounted on the frame platform and extends along the horizontal direction;

[0015] The guide rail slider is slidably connected to the guide rail, and the guide rail slider is also connected to the connecting rod.

[0016] This application also provides an exposure apparatus for exposing a workpiece, comprising:

[0017] The base includes the frame and the frame platform, the frame platform being used to support the workpiece;

[0018] The aforementioned driving mechanism is mounted on the base and is used to drive the workpiece to a designated position and to position the workpiece placed on the frame platform.

[0019] The linear motion module is disposed in the cavity on the frame, the top end of the connecting component penetrates the frame platform located at the top of the cavity, and the pushing component is disposed above the frame platform.

[0020] Furthermore, the frame platform is provided with a through hole in the shape of an elongated strip through which the connecting component passes; the extending direction of the through hole is parallel to the linear motion module.

[0021] Furthermore, the frame platform is also provided with grooves for accommodating the guide rails.

[0022] The beneficial effects of this utility model are as follows: By redesigning the original drive mechanism, this application transforms it into a pressure plate mechanism comprising components such as a linear motion module and a pressing component. The linear motion module is placed inside the cavity of the machine tool, and the working position of the pressing component is adjusted by driving the horizontal movement of the pressing component through the linear motion module. This eliminates the need for technicians to enter the cavity of the machine tool during installation, debugging, and maintenance of the pressure plate mechanism. It avoids problems such as limited space due to the limited height of the cast iron bed and difficulties in the installation and layout of the original mechanism, thereby reducing the installation difficulty and risk of the pressure plate mechanism and improving the efficiency of installation, debugging, and maintenance. At the same time, it helps to improve the accuracy and stability of the pressure plate mechanism and the overall exposure equipment, and reduces the equipment failure rate.

[0023] By precisely adjusting the working position of the pressing component through the linear motion module, the pressure plate can be automatically positioned. Combined with the reasonable design and layout of the number and connection relationship of the driving components and the pressure plate, the pressure applied by the pressure plate is balanced and stable, thereby significantly improving the accuracy and stability of the pressure plate machine and meeting the performance requirements of the laser direct exposure industry.

[0024] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0025] Figure 1 This is a three-dimensional structural schematic diagram of the driving mechanism shown in a preferred embodiment of the present invention;

[0026] Figure 2 This is a partial enlarged view of the drive mechanism shown in a preferred embodiment of the present invention;

[0027] Figure 3 This is a right view of the drive mechanism shown in a preferred embodiment of the present invention;

[0028] Figure 4 This is a schematic diagram of the structure of the exposure device shown in a preferred embodiment of the present invention;

[0029] 1. Base; 11. Frame; 12. Cavity; 13. Frame platform; 14. Through hole; 15. Groove; 2. Linear motion module; 21. Slide table; 3. Pushing assembly; 31. Drive component; 32. Pressure plate; 33. Connecting rod; 4. Connecting assembly; 41. Pressure plate push plate; 42. Push plate limit plate; 51. Guide rail; 52. Guide rail slider. Detailed Implementation

[0030] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0031] In the description of this utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0032] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0033] Please see Figure 1 A preferred embodiment of this application shows a driving mechanism including a linear motion module 2, a connecting component 4, and a pushing component 3. Specifically, the linear motion module 2 is fixedly disposed within a cavity 12 on the frame 11 of the exposure equipment. The linear motion module 2 includes a slide 21 that can reciprocate horizontally. The connecting component 4 is disposed on the slide 21 and passes through the frame platform 13 located at the top of the cavity 12, connecting to the pushing component 3 located above the frame platform 13. This allows the linear motion module 2 to drive the pushing component 3 to reciprocate horizontally, moving or fine-tuning the pushing component 3 to a suitable working position, or quickly moving it away from the working position after it has completed its work. The pushing component 3 includes a pressure plate 32 that can be raised and lowered vertically, used to press or release the workpiece placed on the frame platform 13, positioning it during the exposure process.

[0034] By employing a long-stroke linear motion module 2 that penetrates the cavity 12 on the frame 11, the pressure plate mechanism enables rapid installation, debugging, and maintenance even with the limited height of the cast iron bed of the exposure equipment, without requiring technicians to enter the confined internal space. This significantly reduces the difficulty of installation, debugging, and maintenance, and improves installation and maintenance efficiency.

[0035] like Figure 2 As shown, the connecting component 4 includes a pressure plate pusher plate 41 and a pusher plate limiting plate 42. The pusher plate limiting plate 42 is fixedly mounted on the slide table 21, forming a receiving cavity on the slide table 21. One end of the pressure plate pusher plate 41 is fixedly inserted into the receiving cavity, connecting one end of the pressure plate pusher plate 41 to the slide table 21. By using the pusher plate limiting plate 42 to limit the connection between the pressure plate pusher plate 41 and the slide table 21 instead of the traditional bolt connection, not only can jamming and other phenomena be effectively reduced, but the difficulty of installation, disassembly, and maintenance can also be effectively reduced. This increases the overall structural stability while ensuring the reliability and stability of the pressure plate mechanism during long-term operation. In other embodiments, to further improve the reliability and stability of the pressure plate mechanism, it is preferable to have one end of the pressure plate pusher plate 41 interference-fitted with the receiving cavity. The other end of the pressure plate pusher plate 41 passes through the frame platform 13 located at the top of the cavity 12 and is fixedly connected to the pressing component 3, allowing the linear motion module 2 to drive the pressing component 3 to move horizontally. In this embodiment, the linear motion module 2 includes a matching servo motor and a lead screw. In other embodiments, the linear motion module 2 can be any module capable of driving the pushing component 3 to perform linear motion.

[0036] like Figure 3As shown, the pressing assembly 3 includes four driving components 31, two pressure plates 32, and a connecting rod 33. The connecting rod 33 is fixedly connected to the pressure plate push plate 41. The four driving components 31 are spaced apart on the connecting rod 33, and each driving component 31 is a cylinder. Each pressure plate 32 has its two ends fixedly connected to a driving component 31, enabling the driving component 31 to drive the pressure plate 32 to move vertically up and down, thus pressing and releasing the workpiece placed on the machine platform. By fixing both ends of the pressure plate 32 to the output end of a driving component 31, the force on both ends of the pressure plate 32 can be evenly distributed, ensuring balanced and stable pressure during the application process, thereby further improving the stability and reliability of the entire pressing mechanism. In other embodiments, the pressing assembly 3 includes at least one pressure plate 32, and the number of driving members 31 is at least the same as the number of pressure plates 32. Each pressure plate 32 is reliably connected to at least one driving member 31, ensuring that each pressure plate 32 is driven by a corresponding driving member 31. This guarantees the coordination and precision of the vertical lifting and lowering movement of the entire pressing assembly 3 during operation. Furthermore, to further improve the reliability and stability of the pressure plate mechanism, the number of driving members 31 can be set to more than twice the number of pressure plates 32, meaning that positions on the pressure plates 32 other than the ends, such as the middle position, are also connected to driving members 31. In this way, during operation, the pressure on the ends and middle area of ​​the pressure plate 32 is uniform, ensuring that the applied pressure is balanced and stable. This significantly improves the reliability and accuracy of the entire pressure plate mechanism, meeting the high-precision requirements of the exposure equipment for the operation of the pressure plate mechanism.

[0037] The drive mechanism also includes a guide mechanism, which includes a guide rail 51 and a guide rail slider 52. The guide rail 51 is parallel to the linear motion module 2 and is set on the frame platform 13, which facilitates the accurate and rapid installation, debugging and maintenance of the pressure plate mechanism in a limited space. The connecting rod 33 is slidably connected to the guide rail 51 through the guide rail slider 52, so that the pressing component 3 moves along the guide rail 51 under the drive of the linear motion module 2, which avoids the pressing component 3 from shaking or swaying during operation and improves the stability of the pressing component 3 when it moves in the horizontal direction.

[0038] This preferred embodiment also provides a laser forming exposure apparatus, such as... Figure 4As shown, the system includes a base 1 and the aforementioned drive mechanism mounted on the base 1. The base 1 is a cast iron base with limited height and includes a frame 1 and a frame platform 13. The frame 1 has a cavity 12 for accommodating the linear motion module 2. The frame platform 13 also has a through hole 14 in the shape of an elongated strip for the connecting component 4 to pass through. The through hole 14 is parallel to the linear motion module 2, allowing the connecting component 4 to move horizontally under the drive of the linear motion module 2. A groove 15 for accommodating the guide rail 51 is also provided at a corresponding position on the frame platform 13. In this embodiment, the guide rail 51 located near the pressure plate push plate 41 has its corresponding groove 15 connected to the through hole 14.

[0039] The above-mentioned drive mechanism is installed on the base 1 as follows: First, the push plate limiting plate 42 is fixedly set on the slide table 21, and a receiving cavity is formed on the slide table 21. Then, the linear motion module 2 is inserted into the cavity 12 and fixedly set in the cavity 12. Next, one end of the pressure plate push plate 41 is inserted into the receiving cavity after passing through the through hole 14. Then, the pushing component 3 is fixedly connected to the pressure plate push plate 41, the guide mechanism is set on the frame platform 13, and the pushing component 3 is slidably connected to the guide rail 51 through the guide rail slider 52.

[0040] During operation, the linear motion module 2 is activated, which drives the pressing component 3 to move along the guide rail 51 to the working position; then, the drive component 31 is activated, which drives the pressure plate 32 to move vertically up and down, which is used to press or release the workpiece placed on the frame platform 13.

[0041] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0042] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A drive mechanism characterized by, include: A linear motion module (2) includes a slide (21) that can reciprocate in the horizontal direction; A connecting component (4) is connected at its bottom end to the slide (21); The push assembly (3) is connected to the connecting assembly (4), and the push assembly (3) includes a pressure plate (32) that can be raised and lowered vertically.

2. The drive mechanism of claim 1, wherein, The connecting component (4) includes a pressure plate push plate (41) and a push plate limiting plate (42). The push plate limiting plate (42) is fixedly installed on the slide table (21) and forms a receiving cavity on the slide table (21); one end of the pressure plate push plate (41) is fixedly inserted into the receiving cavity, and the other end passes through the frame platform (13) and is connected to the pushing assembly (3).

3. The driving mechanism as described in claim 2, characterized in that, The pushing assembly (3) further includes a driving component (31) and a connecting rod (33); the connecting rod (33) is fixedly connected to the pressure plate push plate (41), and the driving component (31) is fixedly mounted on the connecting rod (33); the driving component (31) is connected to the pressure plate (32) and is used to drive the pressure plate (32) to move vertically up and down.

4. The driving mechanism as described in claim 3, characterized in that, The pushing assembly (3) includes at least one of the pressure plates (32), and each of the pressure plates (32) is connected to at least one of the driving members (31).

5. The driving mechanism as described in claim 4, characterized in that, Each of the pressure plates (32) is connected to a drive member (31) at both ends.

6. The drive mechanism as described in any one of claims 3-5, characterized in that, The driving mechanism further includes a guiding mechanism; the guiding mechanism includes: Guide rail (51) extends along the horizontal direction; The guide rail slider (52) is slidably connected to the guide rail (51), and the guide rail slider (52) is also connected to the connecting rod (33).

7. An exposure apparatus for exposing a workpiece, characterized in that, include: The base (1) includes the frame (11) and the frame platform (13), the frame platform (13) being used to support the workpiece; The driving mechanism according to any one of claims 1-6; the driving mechanism is disposed on the base (1) for driving the workpiece to a designated position and positioning the workpiece placed on the frame platform (13).

8. The exposure apparatus as described in claim 7, characterized in that, The linear motion module (2) is disposed in the cavity (12) on the frame (11); The top of the connecting component (4) extends through the rack platform (13) located on top of the cavity (12). The pushing assembly (3) is positioned above the frame platform (13).

9. The exposure apparatus as described in claim 8, characterized in that, The frame platform (13) is provided with a long through hole (14) through which the connecting component (4) passes; the extension direction of the through hole (14) is parallel to the linear motion module (2).

10. The exposure apparatus as described in claim 8, characterized in that, The rack platform (13) is also provided with a groove (15) for accommodating the guide rail (51).

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