Semiconductor tube welding support
By designing a semiconductor pipeline welding bracket, the problems of weld stress sensitivity and insufficient support at spatial corners in long pipeline welding were solved, achieving efficient and stable welding results and meeting the high-precision requirements of the semiconductor industry.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 鸿舸半导体设备(上海)有限公司
- Filing Date
- 2025-05-26
- Publication Date
- 2026-07-07
AI Technical Summary
In existing technologies, long pipeline welding suffers from problems such as weld stress sensitivity, uneven welding, stress corrosion, and insufficient support for pipe components at spatial corners, resulting in unstable weld quality and difficulty in meeting the high precision requirements of the semiconductor industry.
A semiconductor pipeline welding bracket was designed, including a main bracket, a pipeline support, and a height adjustment bracket. Through the combination of sliding groove, limiting groove, and height adjustment bracket, the pipeline support can be stably supported and its height adjusted to meet the welding needs of pipelines of different lengths and angles.
It improves welding efficiency and weld quality, ensures the stability and safety of the welding process, meets the semiconductor industry's requirements for high-precision and high-reliability welding, and reduces safety risks.
Smart Images

Figure CN224464005U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor equipment technology, and more specifically, to a semiconductor pipeline welding bracket. Background Technology
[0002] In semiconductor manufacturing, the welding of gas pipelines is a critical step. Currently, for pipelines exceeding 1000mm in total length, manual welding with standard fixtures is typically used. However, this method has several drawbacks: the weld wall is extremely thin (only 0.035mm), making it highly sensitive to stress; the manual operation is arduous; and when welding long pipelines, uneven stress at the weld joint can easily lead to excessive stress, failing to meet the precision manufacturing requirements of the semiconductor industry.
[0003] In addition, existing welding fixtures are insufficient in supporting spatial corner tubing components, and cannot meet the semiconductor industry's requirements for weld seams in thin-walled tubing components and spatial corner tubing components.
[0004] Under special gas conditions, welds subjected to uneven stress are prone to stress corrosion, leading to weld failure and posing safety hazards. Utility Model Content
[0005] The purpose of this invention is to provide a semiconductor pipeline welding bracket that can effectively support pipeline components, ensure weld quality, and meet the semiconductor industry's requirements for welds on thin-walled pipeline components and spatial corner pipeline components.
[0006] This utility model provides a semiconductor pipeline welding bracket, including a main bracket, a pipeline support, and a height adjustment bracket;
[0007] The main support is provided with a sliding groove, and the pipe bracket is slidably disposed in the sliding groove;
[0008] The height adjustment bracket is mounted on the main support and connected to the pipe bracket to support the pipe bracket.
[0009] In an optional embodiment, a limiting groove is provided on the side wall of the sliding groove;
[0010] The pipe bracket has limiting protrusions at opposite ends of the portion of the sliding groove;
[0011] The limiting protrusion is slidably disposed within the limiting groove.
[0012] In an optional embodiment, the pipe bracket includes a support plate, a baffle, and a sliding part;
[0013] The baffle and the sliding part are respectively disposed at opposite ends of the support plate;
[0014] The sliding part is disposed within the sliding groove;
[0015] The baffle is positioned above the tray.
[0016] In an optional embodiment, the height adjustment frame includes a first support rod, a second support rod, an adjustment rod, a sliding member, and a locking member;
[0017] The first end of the first support rod is rotatably connected to the pipe bracket, and the first end of the second support rod is rotatably connected to the main support.
[0018] The second end of the first support rod, the second end of the second support rod, and the first end of the adjusting rod are rotatably connected.
[0019] The second end of the adjusting rod passes through the main bracket and is slidably connected to the sliding member;
[0020] The sliding element is slidably mounted on the main support;
[0021] The locking element is disposed on the adjusting rod and is used to lock the adjusting rod on the sliding element.
[0022] In an optional embodiment, the bottom of the sliding groove has a sliding hole that passes through the main support, and the adjusting rod passes through the sliding hole and is connected to the sliding member.
[0023] In an optional embodiment, the slider is U-shaped, and the main support is disposed within the U-shaped groove of the slider.
[0024] In an optional embodiment, the portion of the adjusting rod that slides in the slider has an external thread.
[0025] In an optional embodiment, the locking element is a snap ring, a locking pin, or a nut.
[0026] In an optional embodiment, the main support includes a base plate and an upright plate;
[0027] The upright plate is fixedly mounted on the base plate, and the sliding groove is mounted on the upright plate.
[0028] In an optional embodiment, the upright plate is fixedly connected to the base plate by at least one of bolting, welding, or riveting.
[0029] The beneficial effects of this utility model embodiment are:
[0030] By incorporating a main support, pipe bracket, and height adjustment frame, this system effectively solves problems encountered in existing manual welding techniques for thin-walled pipe components, such as excessive weld stress, unstable weld quality, and difficulties in welding pipes at spatial corners. The height adjustment frame allows for precise height adjustment of the pipe bracket, ensuring the stability of the pipe components during welding. It also accommodates pipe components of varying lengths and irregular spatial corners, significantly improving welding efficiency and weld quality. This meets the semiconductor industry's requirements for high-precision, high-reliability welding, reduces safety risks during the welding process, and provides reliable equipment support for semiconductor manufacturing. Attached Figure Description
[0031] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0032] Figure 1 This is a front view of the semiconductor pipeline welding support structure provided in an embodiment of the present utility model;
[0033] Figure 2 A three-dimensional structural schematic diagram of the semiconductor pipeline welding bracket provided in an embodiment of this utility model;
[0034] Figure 3 for Figure 2 A magnified view of part A;
[0035] Figure 4 A three-dimensional structural schematic diagram of the pipeline bracket of the semiconductor pipeline welding support provided in an embodiment of this utility model;
[0036] Figure 5 A three-dimensional structural diagram of the sliding component of the semiconductor pipeline welding bracket provided in an embodiment of this utility model.
[0037] Icons: 1-Base plate; 2-Upright plate; 3-Pipe bracket; 4-First support rod; 5-Second support rod; 6-Adjusting rod; 7-Sliding component; 8-Sliding groove; 9-Limiting groove; 10-Sliding hole; 11-Baffle; 12-Support plate; 13-Sliding part; 14-Limiting protrusion; 15-Through hole. Detailed Implementation
[0038] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0039] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0040] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0041] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0042] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0043] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0044] The following is combined Figures 1-5 The following describes some embodiments of the present invention in detail. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0045] This utility model provides a semiconductor pipeline welding bracket, such as Figure 1 and Figure 2 As shown, it includes a main support, a pipe bracket 3, and a height adjustment frame; the main support is provided with a sliding groove 8, and the pipe bracket 3 is slidably disposed in the sliding groove 8; the height adjustment frame is disposed on the main support and connected to the pipe bracket 3, and is used to support the pipe bracket 3.
[0046] In this embodiment, the main support is the basic structure of the entire welding support, and a sliding groove 8 is provided on it to accommodate and guide the sliding of the pipeline bracket 3.
[0047] In this embodiment, the pipe bracket 3 cooperates with the sliding groove 8 and can slide freely within the sliding groove 8, thereby realizing the height adjustment of the pipe bracket 3 to adapt to the pipe welding requirements with different height requirements.
[0048] In this embodiment, the height adjustment bracket is mounted on the main support and connected to the pipe bracket 3. Its main function is to support and adjust the height of the pipe bracket 3. Through the adjustment function of the height adjustment bracket, the height of the pipe bracket 3 can be flexibly adjusted according to the actual needs of the welded pipeline, ensuring the stability of the pipeline components during the welding process, while meeting the requirements of different welding positions and angles.
[0049] In practical use, the semiconductor gas pipeline welding component is first placed on the pipeline bracket 3. Then, the height adjustment bracket drives the pipeline bracket 3 to slide in the sliding groove 8, thereby adjusting the height of the pipeline bracket 3 so that the pipeline component reaches the optimal welding position.
[0050] This setup not only improves welding efficiency but also significantly enhances welding quality, making it particularly suitable for the semiconductor industry's high-precision welding needs for thin-walled tubing and spatial corner tubing.
[0051] In alternative implementations, such as Figure 3 As shown, a limiting groove 9 is provided on the side wall of the sliding groove 8; the pipe bracket 3 is provided at opposite ends of the sliding groove 8 and has limiting protrusions 14; the limiting protrusions 14 are slidably disposed in the limiting groove 9.
[0052] In this embodiment, a limiting groove 9 is provided on the side wall of the sliding groove 8 of the semiconductor pipeline welding bracket, and the pipeline bracket 3 has limiting protrusions 14 at both ends of its mating part with the sliding groove 8, and the limiting protrusions 14 are slidably disposed in the limiting groove 9.
[0053] Specifically, in this embodiment, the sliding groove 8 on the main support not only provides a sliding path for the pipe bracket 3, but also precisely guides and restricts the sliding of the pipe bracket 3 through the limiting groove 9, preventing the pipe bracket 3 from detaching from the sliding groove 8, ensuring the support stability of the pipe bracket 3 for the semiconductor pipe welding component, and effectively preventing the pipe bracket 3 from shifting or shaking during the sliding process, further improving the stability and reliability of the welding process.
[0054] Specifically, in this embodiment, when the position of the pipe bracket 3 needs to be adjusted, the height adjustment bracket is released. Due to gravity, the pipe bracket 3 will naturally slide downwards. When it slides to a suitable position, the height adjustment bracket supports the pipe bracket 3, ensuring the stability of the pipe bracket 3 at that height. When the support height of the height adjustment bracket changes, the pipe bracket 3 will rise or fall accordingly, thereby achieving flexible height adjustment.
[0055] This setup utilizes the interaction between gravity and the height adjustment frame, which not only simplifies the operation process but also improves the accuracy and stability of the adjustment.
[0056] In alternative implementations, such as Figure 4 As shown, the pipe bracket 3 includes a support plate 12, a baffle 11, and a sliding part 13; the baffle 11 and the sliding part 13 are respectively disposed at opposite ends of the support plate 12; the sliding part 13 is disposed in the sliding groove 8; and the baffle 11 is disposed above the support plate 12.
[0057] In this embodiment, the pipe support 3 consists of a support plate 12, a baffle 11, and a sliding part 13. The baffle 11 and the sliding part 13 are respectively disposed at opposite ends of the support plate 12. The sliding part 13 is embedded in the sliding groove 8 of the main support, while the support plate 12 is located on one side of the main support and is used to directly support the pipe fittings to be welded.
[0058] Specifically, in this embodiment, the support plate 12 provides a stable support platform for the pipeline; the baffle 11 restricts the lateral movement or rolling of the pipeline, preventing the pipeline from deviating from the predetermined position due to external force or vibration during the welding process; the sliding part 13 cooperates with the sliding groove 8 of the main support, so that the pipeline bracket 3 can move freely in the sliding groove 8, and the height of the pipeline bracket 3 can be changed by adjusting the support height of the height adjustment frame.
[0059] In use, the operator places the semiconductor tube to be welded on the tray 12. By adjusting the support height of the height adjustment frame, the tube bracket 3 can move up and down in the sliding groove 8, thereby adjusting the height of the semiconductor tube to be welded.
[0060] In an optional embodiment, the height adjustment frame includes a first support rod 4, a second support rod 5, an adjustment rod 6, a sliding member 7, and a locking member; the first end of the first support rod 4 is rotatably connected to the pipe bracket 3, and the first end of the second support rod 5 is rotatably connected to the main support; the second ends of the first support rod 4, the second end of the second support rod 5, and the first end of the adjustment rod 6 are rotatably connected; the second end of the adjustment rod 6 passes through the main support and is slidably connected to the sliding member 7; the sliding member 7 is slidably disposed on the main support; the locking member is disposed on the adjustment rod 6 and is used to lock the adjustment rod 6 on the sliding member 7.
[0061] In this embodiment, the first end of the first support rod 4 is rotatably connected to the pipe bracket 3 via a pin structure, specifically, it is connected below the support plate 12 of the pipe bracket 3; the first end of the second support rod 5 is rotatably connected to the main bracket via a pin structure; the second ends of the first support rod 4, the second end of the second support rod 5, and the first end of the adjusting rod 6 are rotatably connected via a pin structure, so that the first support rod 4, the second support rod 5, and the adjusting rod 6 can all rotate relative to each other.
[0062] At this point, the first support rod 4, the second support rod 5, and the main support form a triangular support structure, which can ensure the stability of the support for the pipe bracket 3.
[0063] The second end of the adjusting rod 6 passes through the main support and is slidably connected to the sliding member 7. Simultaneously, the sliding member 7 can slide vertically on the main support. When the height of the pipe bracket 3 changes, the angle between the first support rod 4 and the second support rod 5 changes, and the distance between the second ends of the first support rod 4 and the second support rod 5 relative to the main support will inevitably change, thus altering the distance between the first end of the adjusting rod 6 and the main support. This also causes the adjusting rod 6 to drive the sliding member 7 to move vertically on the main support. When the distance between the first end of the adjusting rod 6 and the main support is locked by the locking member, the adjusting rod 6 cannot move axially. At this time, the triangular structure formed by the second support rod 5 and the adjusting rod 6 remains fixed, and the overall structure cannot deform.
[0064] In other words, when the height of the pipe bracket 3 needs to be adjusted, the locking device is activated, and the adjusting rod 6 moves axially, which will drive the pipe bracket 3 to rise and fall in the vertical direction; when the pipe bracket 3 rises and falls to a suitable height, the locking device axially limits the adjusting rod 6, so as to achieve stable support of the height adjustment frame for the pipe bracket 3.
[0065] In an optional embodiment, the bottom of the sliding groove 8 has a sliding hole 10 that passes through the main support, and the adjusting rod 6 passes through the sliding hole 10 and is connected to the sliding member 7.
[0066] In this embodiment, the adjusting rod 6 passes through the sliding groove 8 on the main bracket via the sliding hole 10 and is slidably connected to the sliding member 7.
[0067] Specifically, in this embodiment, the sliding hole 10 is a strip-shaped hole, and its length direction is consistent with the length direction of the sliding groove 8. The length direction of the sliding hole 10 is the sliding direction of the slider 7.
[0068] In alternative implementations, such as Figure 5 As shown, the slider 7 is U-shaped, and the main support is set in the U-shaped groove of the slider 7.
[0069] In this embodiment, the slider 7 covers the outside of the main support. The slider 7 can only move up and down with the main support and cannot perform other actions, which ensures the stability of the slider 7 in supporting the adjusting rod 6.
[0070] It is understandable that the sliding member 7 can be wrapped around the outside of the main bracket, or it can be set in the sliding groove 8 and slide up and down through the sliding groove 8, as long as it can ensure the stability of the up and down sliding of the adjusting rod 6.
[0071] In an optional embodiment, the portion of the adjusting rod 6 that slides in the slider 7 has external threads.
[0072] In this embodiment, a through hole 15 is provided on the slider 7, and the adjusting rod 6 is disposed through the through hole 15.
[0073] An external thread is provided on the outer surface of the part of the adjusting rod 6 that mates with the through hole 15. This increases the friction between the adjusting rod 6 and the sliding part 7, thereby reducing the speed of height adjustment, preventing the height of the pipe bracket 3 from dropping suddenly, and ensuring the stability of the semiconductor pipe during the welding process.
[0074] In this embodiment, an external thread is used as an anti-slip structure. It can also be other anti-slip structures, such as adding anti-slip stripes or anti-slip protrusions, as long as it can achieve the anti-slip effect between the adjusting rod 6 and the through hole 15.
[0075] In an alternative implementation, the locking element is a snap ring, a locking pin, or a nut.
[0076] In this embodiment, the retaining ring is disposed on the adjusting rod 6, engages with the external thread, and is disposed on the side of the main bracket away from the first end of the adjusting rod 6.
[0077] Under the influence of gravity, the relative angle between the first support rod 4 and the second support rod 5 tends to decrease, thereby applying an axial force toward the first end of the adjusting rod 6. The retaining ring is set on the side of the main bracket away from the first end of the adjusting rod 6. The retaining ring can be fixed on the side of the main bracket away from the first end of the adjusting rod 6 by the main bracket. The retaining ring cannot pass through the through hole 15 of the sliding member 7 under the action of axial force, thereby preventing the adjusting rod 6 from moving axially, and finally achieving the positioning of the height of the pipe bracket 3.
[0078] It is understood that in this embodiment, the locking element is a snap ring, but it is not limited to snap rings. It can also be other locking structures, such as locking pins or nuts, as long as they can cooperate with the main bracket to restrict the axial movement of the adjusting rod 6.
[0079] In an optional embodiment, the main support includes a base plate 1 and an upright plate 2; the upright plate 2 is fixedly mounted on the base plate 1, and the sliding groove 8 is mounted on the upright plate 2.
[0080] In this embodiment, the base plate 1 has a large area, which can provide stable support for the semiconductor pipeline welding bracket.
[0081] In this embodiment, the upright plate 2 is vertically mounted on the base plate 1 and is fixedly connected to the base plate 1.
[0082] Specifically, in this embodiment, there are many ways to fix the upright plate 2 and the base plate 1. For example, two fixing holes are provided on the base plate 1, and two corresponding fixing grooves are provided at the lower end of the upright plate 2. Fixing bolts are threaded into the fixing grooves after passing through the fixing holes, so as to achieve the purpose of making the height of the upright plate 2 on the base plate 1.
[0083] It is understandable that the fixed connection between the upright plate 2 and the base plate 1 can be the bolt fixing method mentioned above, or it can be other fixed connection methods, such as welding, riveting, or a combination of multiple methods, as long as the upright plate 2 can be fixedly set on the base plate 1.
[0084] The beneficial effects of this utility model embodiment are:
[0085] By incorporating the main support, pipe bracket 3, and height adjustment frame, the system effectively solves problems such as excessive weld stress, unstable weld quality, and difficulties in welding pipes at spatial corners during manual welding of thin-walled pipe components in existing technologies. The height adjustment frame allows for precise height adjustment of the pipe bracket 3, ensuring the stability of the pipe components during welding. It also accommodates pipe components of different lengths and irregular spatial corners, significantly improving welding efficiency and weld quality. This meets the semiconductor industry's requirements for high-precision, high-reliability welding, reduces safety risks during the welding process, and provides reliable equipment support for semiconductor manufacturing.
[0086] The above are merely preferred embodiments of this utility model and are not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.
Claims
1. A semiconductor conduit welding bracket, characterized in that, Includes main support frame, pipe bracket, and height adjustment bracket; The main support is provided with a sliding groove, and the pipe bracket is slidably disposed in the sliding groove; The height adjustment bracket is mounted on the main support and connected to the pipe bracket to support the pipe bracket.
2. The semiconductor pipeline welding bracket according to claim 1, characterized in that, A limit groove is provided on the side wall of the sliding groove; The pipe bracket has limiting protrusions at opposite ends of the portion of the sliding groove; The limiting protrusion is slidably disposed within the limiting groove.
3. The semiconductor pipeline welding bracket according to claim 1, characterized in that, The pipe support includes a support plate, a baffle, and a sliding part; The baffle and the sliding part are respectively disposed at opposite ends of the support plate; The sliding part is disposed within the sliding groove; The baffle is positioned above the tray.
4. The semiconductor pipeline welding bracket according to claim 1, characterized in that, The height adjustment frame includes a first support rod, a second support rod, an adjustment rod, a sliding member, and a locking member; The first end of the first support rod is rotatably connected to the pipe bracket, and the first end of the second support rod is rotatably connected to the main support. The second end of the first support rod, the second end of the second support rod, and the first end of the adjusting rod are rotatably connected. The second end of the adjusting rod passes through the main bracket and is slidably connected to the sliding member; The sliding element is slidably mounted on the main support; The locking element is disposed on the adjusting rod and is used to lock the adjusting rod on the sliding element.
5. The semiconductor conduit welding bracket according to claim 4, characterized in that, The bottom of the sliding groove has a sliding hole that passes through the main support, and the adjusting rod passes through the sliding hole and is connected to the sliding member.
6. The semiconductor conduit welding bracket according to claim 4, characterized in that, The sliding member is U-shaped, and the main support is disposed in the U-shaped groove of the sliding member.
7. The semiconductor conduit welding bracket according to claim 4, characterized in that, The portion of the adjusting rod that slides within the sliding member has external threads.
8. The semiconductor pipeline welding bracket according to claim 4, characterized in that, The locking element is a snap ring, a locking pin, or a nut.
9. The semiconductor conduit welding bracket according to claim 1, characterized in that, The main support includes a base plate and an upright plate; The upright plate is fixedly mounted on the base plate, and the sliding groove is mounted on the upright plate.
10. The semiconductor conduit welding bracket according to claim 9, characterized in that, The upright plate is fixedly connected to the base plate by at least one of bolt connection, welding or riveting.