A single crystal furnace heavy hammer guide sheath mechanism

Abstract

The utility model relates to single crystal furnace heavy hammer maintenance technical field, concretely relates to a single crystal furnace heavy hammer guide sheath mechanism, including conical guide bush, the top of conical guide bush is provided with conical guide block, the side of conical guide bush is provided with the thread groove no. 2 that sets up for tungsten wire rope to wear, the outside of conical guide bush sets up with heavy hammer. The utility model discloses the setting of conical guide block has guaranteed the stress point in the process of pulling crystal to be consistent with the original sheath, makes the horizontal centering of heavy hammer not be affected by any, single crystal furnace in the process of charging, heavy hammer promotes, even if heavy hammer material cylinder occurs radial displacement, sheath taper surface still corrects radial displacement, guarantees that heavy hammer normally enters the vice room, normal charging, thereby improves the service life of heavy hammer, tungsten wire rope, the slope of conical guide block and vice room guide flow port form self-alignment guide mechanism, in the process of heavy hammer ascending through the contact friction of taper surface and guide flow port, automatically corrects heavy hammer lateral deviation.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace counterweight maintenance technology, specifically to a single crystal furnace counterweight guide sleeve mechanism. Background Technology

[0002] The single crystal furnace hammer sheath is used to prevent silicon vapor deposition from contaminating the hammer, protect the hammer body from high-temperature damage, and help improve the stability and reliability of the pulling system.

[0003] In semiconductor and photovoltaic product manufacturing, Czochralski single crystals are used, which can be continuously fed. The total running time is about 5-7 feedings per furnace and about 35 lifting and lowering of the weight during feeding. Since the feeding is fully automated on site and there are few personnel, it is impossible to monitor each piece of equipment throughout the feeding process. This has led to quality accidents such as some weights being bumped and tungsten wire ropes being pulled. Traditional cylindrical sheath structures have radial gaps during vertical lifting. The weights are affected by the swing of the tungsten wire ropes, resulting in lateral displacement. Collisions with the bottom edge of the auxiliary chamber cause deformation of the sheath and damage to the tungsten wire ropes.

[0004] Therefore, it is necessary to invent a single crystal furnace counterweight guide sleeve mechanism to solve the above problems. Utility Model Content

[0005] To address the shortcomings of existing technologies, the purpose of this utility model is to provide a single crystal furnace hammer guide sleeve mechanism, which solves problems such as sleeve deformation and tungsten wire rope damage caused by the hammer lifting and colliding with the bottom edge of the auxiliary chamber during actual use.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A single crystal furnace counterweight guide sleeve mechanism includes a conical guide sleeve, a conical guide block is provided at the top of the conical guide sleeve, a threading groove for tungsten wire rope to pass through is provided on one side of the conical guide sleeve, and the conical guide sleeve is fitted onto the outside of the counterweight.

[0008] As a preferred embodiment of this utility model, the inner side of the conical guide sleeve is further provided with an inner protective sleeve that is sleeved on the outer side of the counterweight. The inner protective sleeve includes a protective sleeve body and a bottom support plate. An annular stop is provided on the outer side of the bottom support plate. A reset cavity is formed between the annular stop and the bottom support plate. A reset component is slidably arranged on the inner side of the reset cavity. The annular stop is used to intercept the reset component.

[0009] As a preferred embodiment of this utility model, the conical guide sleeve includes a conical guide block, and a buffer pad that fits against the end face of the inner sheath is installed on the inner side of the conical guide block. A bottom slot is provided at the bottom end of the conical guide sleeve, and the bottom slot is inserted into the inner side of the reset assembly. The conical guide block is located at the top of the inner sheath and is made of solid metal.

[0010] As a preferred embodiment of the present invention, the reset assembly includes a plurality of reset springs located in the reset cavity and a reset push block located outside the reset cavity. The plurality of reset springs are connected together by a connecting ring. The bottom end of the reset push block is connected to a guide ring push plate extending to the inside of the reset cavity.

[0011] As a preferred embodiment of this utility model, the top end of the reset push block is provided with a positioning support plate, the positioning support plate is located at the top end of the reset cavity, and the top end of the reset push block is provided with a guide slope to facilitate the insertion of the conical guide sleeve.

[0012] In a preferred embodiment of this utility model, the outer side of the tapered guide block is flush with the outer side of the bottom support plate.

[0013] As a preferred embodiment of this utility model, both the inner sheath and the reset assembly are provided with a threading groove one in the same position as the threading groove two.

[0014] As a preferred embodiment of this utility model, the outer surface of the conical guide block is a conical surface that gradually narrows from top to bottom, and its cone angle α satisfies 30°≤α≤60°, and the ratio of the cone height H to the diameter D of the counterweight is 0.2-0.5:1.

[0015] The technical effects and advantages provided by this utility model in the above technical solution are as follows:

[0016] In this invention, the conical guide block ensures that the stress point during crystal pulling is consistent with the original sheath, so that the horizontal alignment of the hammer is not affected. During the feeding process of the single crystal furnace, the hammer is raised, and even if the hammer cylinder undergoes radial displacement, the conical surface of the sheath still corrects the radial displacement, ensuring that the hammer enters the secondary chamber normally and is fed normally, thereby improving the service life of the hammer and tungsten wire rope. When the hammer is affected by the swing of the tungsten wire rope and undergoes lateral displacement, the buffer pad can reduce the impact on the hammer. The inclined surface of the conical guide block and the flow port of the secondary chamber form a self-aligning guiding mechanism. During the rise of the hammer, the contact friction between the conical surface and the flow port automatically corrects the lateral offset of the hammer. The end face of the bottom support plate is aligned with the conical guide block, which will not affect the rise of the hammer and reduces the probability of collision. The tapered structure of the conical sheath allows the hammer to contact the flow port in advance when it is close to the bottom of the secondary chamber, avoiding sudden hard collisions through gradual guidance. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the tapered guide sleeve of this utility model;

[0018] Figure 2 This is a schematic diagram of the overall partial cross-sectional structure of this utility model;

[0019] Figure 3 This utility model Figure 2 Enlarged structural diagram at point A in the middle;

[0020] Figure 4 This is a schematic diagram of the reset push block and annular stop block structure of this utility model;

[0021] Figure 5 This is a schematic diagram of the structure of the conical guide sleeve and the inner sheath of this utility model in the separated state.

[0022] Explanation of reference numerals in the attached drawings: 1. Inner sheath; 101. Sheath body; 102. Bottom support plate; 103. Reset cavity; 104. Annular stop block; 105. Wire groove one; 2. Conical guide sleeve; 201. Conical guide block; 202. Wire groove two; 203. Buffer pad; 204. Bottom slot; 3. Reset assembly; 301. Reset spring; 302. Connecting ring; 304. Reset push block; 305. Positioning support plate; 306. Guide slope; 307. Guide ring push plate. Detailed Implementation

[0023] The present invention will be further described below with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and should not be used to limit the scope of protection of the present invention.

[0024] This utility model provides, for example Figure 1-5 The illustrated single-crystal furnace counterweight guide sleeve mechanism includes a conical guide sleeve 2. A conical guide block 201 is provided at the top of the conical guide sleeve 2. A threading groove 202 for tungsten wire rope to pass through is provided on one side of the conical guide sleeve 2. The conical guide sleeve 2 is fitted onto the outside of the counterweight. The conical guide block 201 ensures that changes in the radial clearance during feeding will not affect the normal entry of the counterweight into the auxiliary chamber, effectively reducing the risk of damage to the tungsten wire rope and counterweight, and improving production efficiency.

[0025] The inner side of the conical guide sleeve 2 is also provided with an inner protective sleeve 1 that is fitted onto the outside of the counterweight. The inner protective sleeve 1 includes a sleeve body 101 and a bottom support plate 102. An annular stop 104 is provided on the outside of the bottom support plate 102. A reset cavity 103 is formed between the annular stop 104 and the bottom support plate 102. A reset component 3 is slidably arranged on the inner side of the reset cavity 103. The annular stop 104 is used to intercept the reset component 3. During the process of the conical guide sleeve contacting the auxiliary furnace chamber, it may impact the counterweight. The impact on the counterweight can be reduced by the setting of the buffer pad 201. The reset component 3 can drive the conical guide sleeve 2 to reset after the counterweight rises, ensuring the guiding effect during subsequent use.

[0026] The conical guide sleeve 2 includes a conical guide block 201. A buffer pad 203, which fits against the end face of the inner sleeve 1, is installed on the inner side of the conical guide block 201. A bottom slot 204 is provided at the bottom end of the conical guide sleeve 2, and the bottom slot 204 is inserted into the inner side of the reset assembly 3. The conical guide block 201 is located at the top of the inner sleeve 1 and is made of solid metal. The conical guide sleeve 2 is made of wear-resistant materials such as alloys, and the buffer pad 203 can be made of buffer rubber, providing both shock absorption and reset capabilities. The conical guide sleeve 2 is detachable, facilitating replacement of the conical guide sleeve 2 after the buffer pad 203 fails.

[0027] The reset assembly 3 includes multiple reset springs 301 located in the reset cavity 103 and a reset push block 304 located outside the reset cavity 103. The multiple reset springs 301 are connected to a connecting ring 302. The bottom end of the reset push block 304 is connected to a guide ring push plate 307 extending into the inside of the reset cavity 103. The core function of the reset assembly 3 is to provide a stable and recoverable reset force and a pushing / guiding function. When an external force is applied to the reset push block 304, the assembly compresses the reset springs 301, storing energy. When the external force is removed, the compressed springs 301 release energy, pushing the entire assembly and associated mechanisms back to their initial position. Simultaneously, the guide ring push plate 307 ensures the directionality and stability of the reset action.

[0028] The top of the reset push block 304 is provided with a positioning support plate 305, which is located at the top of the reset cavity 103. The top of the reset push block 304 is provided with a guide slope 306 to facilitate the insertion of the conical guide sleeve 2. The top of the positioning support plate 305 is in contact with the bottom of the conical guide block 201, so that when the reset assembly 3 is reset, a reset force can be applied to the conical guide sleeve 2 simultaneously.

[0029] The outer surface of the tapered guide block 201 is flush with the outer surface of the bottom support plate 102. The flush end face setting can ensure the guiding effect during the lifting process and avoid the bottom support plate 102 from colliding with the auxiliary furnace chamber.

[0030] Both the inner sheath 1 and the reset assembly 3 have a wire threading groove 105 located at the same position as the second wire threading groove 202. The wire threading groove 202 and the wire threading groove 105 are located in the same position, which facilitates the simultaneous passage of the tungsten wire rope through the inner sheath 1 and the conical guide sleeve 2 during operation, reducing the difficulty of disassembly.

[0031] The outer surface of the conical guide block 201 is a tapered cone that gradually narrows from top to bottom, with a cone angle α satisfying 30°≤α≤60°. The ratio of the cone height H to the diameter D of the hammer is 0.2-0.5:1. A suitable cone angle helps to disperse the impact force of the falling object, converting it into a normal force along the cone surface and a relatively small frictional force, with the sliding friction force being less than the impact load. A cone angle that is too large or too small is detrimental to the smooth transmission of force.

[0032] This invention ensures that the stress point during crystal pulling is consistent with the original sheath by setting the conical guide block 201, so that the horizontal alignment of the hammer is not affected. During the feeding process of the single crystal furnace, the hammer is raised, and even if the hammer cylinder is radially displaced, the conical surface of the sheath still corrects the radial displacement, ensuring that the hammer enters the secondary chamber normally and is fed normally, thereby improving the service life of the hammer and tungsten wire rope. When the hammer is laterally displaced due to the swing of the tungsten wire rope, the buffer pad 203 can reduce the impact on the hammer. The inclined surface of the conical guide block 201 forms a self-aligning guiding mechanism with the flow port of the secondary chamber. During the rise of the hammer, the contact friction between the conical surface and the flow port automatically corrects the lateral offset of the hammer. The end face of the bottom support plate 102 is aligned with the conical guide block 201, which will not affect the rise of the hammer and reduces the probability of collision. The tapered structure of the conical sheath allows the hammer to contact the flow port in advance when it is close to the bottom of the secondary chamber, avoiding sudden hard collisions through gradual guidance.

[0033] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A single crystal furnace counterweight guide sleeve mechanism, characterized in that: It includes a conical guide sleeve (2), the top of which is provided with a conical guide block (201), and a threading groove (202) for tungsten wire rope to pass through is provided on one side of the conical guide sleeve (2). The conical guide sleeve (2) is fitted onto the outside of the counterweight.

2. The single crystal furnace counterweight guide sleeve mechanism according to claim 1, characterized in that: The inner side of the conical guide sleeve (2) is also provided with an inner protective sleeve (1) sleeved on the outside of the counterweight. The inner protective sleeve (1) includes a sleeve body (101) and a bottom support plate (102). An annular stop (104) is provided on the outside of the bottom support plate (102). A reset cavity (103) is formed between the annular stop (104) and the bottom support plate (102). A reset component (3) is slidably arranged on the inner side of the reset cavity (103). The annular stop (104) is used to intercept the reset component (3).

3. The single crystal furnace counterweight guide sleeve mechanism according to claim 2, characterized in that: The conical guide sleeve (2) includes a conical guide block (201). A buffer pad (203) that fits against the end face of the inner sleeve (1) is installed on the inner side of the conical guide block (201). A bottom slot (204) is opened at the bottom end of the conical guide sleeve (2). The bottom slot (204) is inserted into the inner side of the reset assembly (3). The conical guide block (201) is located at the top of the inner sleeve (1) and is made of solid metal.

4. The single crystal furnace counterweight guide sleeve mechanism according to claim 3, characterized in that: The reset assembly (3) includes a plurality of reset springs (301) located in the reset cavity (103) and a reset push block (304) located outside the reset cavity (103). The plurality of reset springs (301) are connected together to a connecting ring (302). The bottom end of the reset push block (304) is connected to a guide ring push plate (307) extending to the inside of the reset cavity (103).

5. The single crystal furnace counterweight guide sleeve mechanism according to claim 4, characterized in that: The top of the reset push block (304) is provided with a positioning support plate (305), which is located at the top of the reset cavity (103). The top of the reset push block (304) is provided with a guide slope (306) to facilitate the insertion of the conical guide sleeve (2).

6. The single crystal furnace counterweight guide sleeve mechanism according to claim 5, characterized in that: The outer side of the tapered guide block (201) is flush with the outer side of the bottom support plate (102).

7. The single crystal furnace counterweight guide sleeve mechanism according to claim 2, characterized in that: Both the inner sheath (1) and the reset assembly (3) are provided with a wire groove (105) in the same position as the wire groove (202).

8. The single crystal furnace counterweight guide sleeve mechanism according to claim 1, characterized in that: The outer surface of the conical guide block (201) is a conical surface that gradually narrows from top to bottom, with a cone angle α satisfying 30°≤α≤60°, and the ratio of the cone height H to the diameter D of the counterweight is 0.2-0.5:1.

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