A test apparatus for adhesion of a photo mask protective film

Abstract

This application provides a photomask protective film adhesion testing device, relating to the field of photomask testing technology. The device includes a testing platform, a testing fixture, and weights. The testing platform has a bearing surface for placing the photomask, and a through groove for exposing the protective film on the photomask surface. The testing fixture includes a load-bearing platform and a clamping member connected to the load-bearing platform. The clamping member clamps the protective film from below the photomask. The load-bearing platform holds the weights to apply a downward pulling force to the protective film. This device applies a pulling force to the protective film on the photomask using the testing fixture and weights. The adhesion force between the photomask and the protective film can be calculated based on the total weight of the weights when the protective film is pulled down. Therefore, this device can accurately determine the adhesion between the protective film and the photomask and can also compare the adhesion strength of different protective films.

Description

Technical Field

[0001] This application relates to the field of photomask testing technology, and more specifically, to a photomask protective film adhesion testing device. Background Technology

[0002] To prevent particulate dust from falling onto the patterned surface of the photomask and causing exposure defects, a protective film is usually attached to the patterned surface of the photomask. During photolithography, the protective film faces downwards; therefore, the adhesion between the protective film and the photomask is particularly important.

[0003] Currently, technicians indirectly judge the adhesion between the protective film and the photomask by the width of the adhesive bonded together. This method is not always accurate, and different manufacturers use different types of adhesive. If the adhesive types of the two protective films are different, it is impossible to directly compare the adhesion strength of the two protective films by the width of the adhesive bond. Utility Model Content

[0004] The purpose of this application is to address the shortcomings of the prior art by providing a photomask protective film adhesion testing device, which can accurately determine the adhesion between the protective film and the photomask, and can also compare the adhesion strength of different protective films.

[0005] To achieve the above objectives, the technical solutions adopted in the embodiments of this application are as follows:

[0006] This application provides a photomask protective film adhesion testing device, including: a testing platform, a testing fixture, and weights. The testing platform has a bearing surface for placing the photomask, and a through groove is provided on the bearing surface for exposing the protective film on the surface of the photomask. The testing fixture includes a load-bearing platform and a clamping member connected to the load-bearing platform. The clamping member is used to clamp the protective film under the photomask. The load-bearing platform is used to place weights to apply a downward pulling force to the protective film.

[0007] Optionally, the test platform is equipped with a heating device for heating the photomask.

[0008] Optionally, the heating device includes a housing, a heating power switch, a temperature controller, and a heating component disposed on the housing. The temperature controller is electrically connected to the power switch and the heating component, respectively. The heating power switch is used to turn on the temperature controller, the temperature controller is used to control the heating temperature of the heating component, and the heating component is used to heat the photomask.

[0009] Optionally, the clamping end of the clamp is retractable to accommodate protective films of different sizes.

[0010] Optionally, the upper surface of the test platform is provided with a limiting groove for placing the photomask, and the through groove is located at the bottom of the limiting groove.

[0011] Optionally, the upper surface of the test platform is also provided with two clearance grooves. The two clearance grooves are located on opposite sides of the limiting groove and are connected to the limiting groove respectively. The clearance grooves are used for the clamps holding the photomask to extend into.

[0012] Optionally, the test platform includes a base and a top seat disposed above the base. The base and the top seat are connected by multiple columns. The bearing surface is located on the side of the top seat away from the base. The test fixture is located between the base and the top seat.

[0013] Optionally, the load-bearing platform is provided with a receiving slot for placing weights.

[0014] Optionally, the test fixture also includes multiple links, one end of which is rotatably connected to the load-bearing platform and the other end of which is connected to the clamping element.

[0015] Optionally, the clamping element includes a support body and at least two clamping bodies, the at least two clamping bodies being arranged in pairs on the outside of the support body, the clamping bodies being connected to the support body via a telescopic body, the end of the connecting rod being fixed to the support body, and the surface of the clamping body facing the support body being used to abut against the side of the protective film.

[0016] The beneficial effects of this application include:

[0017] This application provides a photomask protective film adhesion testing device, comprising: a testing platform, a testing fixture, and weights. The testing platform has a bearing surface for placing the photomask, and a through groove for exposing the protective film on the photomask surface. The testing fixture includes a load-bearing platform and a clamping member connected to the load-bearing platform, which clamps the protective film from below the photomask. The load-bearing platform is used to place weights to apply a downward pulling force to the protective film. This photomask protective film adhesion testing device applies a pulling force to the protective film on the photomask using the testing fixture and weights. Based on the total weight of the weights when the protective film is pulled down, the adhesion force between the photomask and the protective film can be calculated. Therefore, this photomask protective film adhesion testing device can accurately determine the adhesion between the protective film and the photomask, and can also compare the adhesion strength of different protective films. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 A schematic diagram of applying a protective film to the surface of a photomask;

[0020] Figure 2 This is one of the structural schematic diagrams of the photomask protective film adhesion testing device provided in the embodiments of this application;

[0021] Figure 3 This is the second schematic diagram of the structure of the photomask protective film adhesion testing device provided in the embodiments of this application;

[0022] Figure 4 for Figure 3 A magnified view of a portion of point A in the middle;

[0023] Figure 5 The third schematic diagram of the structure of the photomask protective film adhesion testing device provided in the embodiments of this application.

[0024] Icons: 10-Photomask; 20-Protective Film; B-Adhesive Width; 100-Photomask / Protective Film Adhesion Testing Equipment; 110-Test Platform; 110a-Base; 110b-Top Mount; 110c-Column; 111-Limiting Groove; 112-Leaning Groove; 120-Test Fixture; 121-Bearing Platform; 1211-Accommodation Groove; 122-Clamping Component; 1221-Support Body; 1222-Clamping Body; 1223-Telescopic Body; 123-Connecting Rod; 130-Weight; 140-Heating Device; 141-Outer Shell; 142-Heating Power Switch; 143-Temperature Controller. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. It should be noted that, unless otherwise specified, the various features in the embodiments of this application can be combined with each other, and the combined embodiments are still within the protection scope of this application.

[0027] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0028] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this application is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0029] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0030] Please refer to Figure 1 To prevent particulate dust from falling onto the patterned surface of the photomask 10 during the process and causing exposure defects, a protective film 20 is typically attached to the patterned surface of the photomask 10. The protective film 20 is adhered to the patterned surface of the photomask 10 with adhesive. During photolithography, the protective film 20 faces downwards; therefore, the adhesion between the protective film 20 and the photomask 10 is particularly important. Existing technology typically judges the adhesion between the protective film 20 and the photomask 10 by the adhesive width B. This method is not always accurate, and if the adhesive types of the two protective films 20 are different, it is impossible to directly compare the adhesion strength of the two protective films 20 based on the adhesive width B.

[0031] To solve the above technical problems, please refer to the following: Figure 2 and Figure 3 This application provides a photomask protective film adhesion testing device 100, which can accurately test the adhesion between the photomask 10 and the protective film 20.

[0032] The photomask protective film adhesion testing device 100 includes: a testing platform 110, a testing fixture 120, and a weight 130. The testing platform 110 has a bearing surface for placing the photomask 10. A through groove is provided on the bearing surface for exposing the protective film 20 on the surface of the photomask 10. The testing fixture 120 includes a load-bearing platform 121 and a clamping member 122 connected to the load-bearing platform 121. The clamping member 122 is used to clamp the protective film 20 under the photomask 10. The load-bearing platform 121 is used to place the weight 130 to apply a downward pulling force to the protective film 20.

[0033] Specifically, the test platform 110 has an upward-facing bearing surface with a through groove that penetrates the test platform 110. The bearing surface is used to place the photomask 10. When the photomask 10 is placed on the bearing surface, its protective film 20 faces downward. The protective film 20 is located in the through groove and exposed by the through groove. The surface of the photomask 10 exposed by the protective film 20 abuts against the bearing surface.

[0034] The clamping element 122 of the test fixture 120 is used to clamp the protective film 20. A load-bearing platform 121 is connected to the clamping element 122 below it, and weights 130 of varying weights and quantities can be placed on the load-bearing platform 121. The load-bearing platform 121 needs to have a small mass and sufficient rigidity. Under the action of the weights 130, the clamping element 122 applies a downward pulling force to the protective film 20. During the test, the weight of the weights 130 is continuously increased until the protective film 20 is pulled down. The adhesive force between the photomask 10 and the protective film 20 can be calculated based on the total weight of the weights 130 when the protective film 20 is pulled down. It can be understood that the higher the precision of the weights 130, the more accurate the measurement result.

[0035] When comparing the adhesion strength of different protective films 20, it is only necessary to measure the total weight of the corresponding weights 130 when each protective film 20 is pulled off, and then compare the total weights of each weight 130. The higher the total weight of the weights 130 when pulled off, the stronger the adhesion of the protective film 20.

[0036] The aforementioned photomask protective film adhesion testing device 100 applies a pulling force to the protective film 20 on the photomask 10 using a test fixture 120 and weights 130. Based on the total weight of the weights 130 when the protective film 20 is pulled off, the adhesion force between the photomask 10 and the protective film 20 can be calculated. Therefore, the aforementioned photomask protective film adhesion testing device 100 can accurately determine the adhesion between the protective film 20 and the photomask 10, and can also compare the adhesion strength of different protective films 20.

[0037] Alternatively, please refer to Figure 2 The test platform 110 is equipped with a heating device 140, which is used to heat the photomask 10.

[0038] The photomask 10 is heated by the heating device 140 to simulate the heat accumulated in the photomask 10 during photolithography, thereby testing the adhesion of the protective film 20 to the photomask 10 during actual photolithography.

[0039] Optionally, the heating device 140 includes a housing 141, a heating power switch 142 disposed on the housing 141, a temperature controller 143 and a heating component. The temperature controller 143 is electrically connected to the power switch and the heating component respectively. The heating power switch 142 is used to turn on the temperature controller 143. The temperature controller 143 is used to control the heating temperature of the heating component. The heating component is used to heat the photomask 10.

[0040] The user turns on the temperature controller 143 via the heating power switch 142, and then adjusts the heating temperature, heating time, and other parameters of the heating component through the temperature controller 143 to simulate the heat generated during photolithography. Furthermore, the control panel of the temperature controller 143 is exposed on the housing 141, and the user adjusts the heating component through the control panel.

[0041] It should be noted that in this embodiment, the structure of the heating component is not limited, as long as it can heat the photomask 10.

[0042] Alternatively, please refer to Figure 3 The clamping end of the clamping member 122 is retractable to accommodate protective films 20 of different sizes.

[0043] The clamping member 122 clamps the protective film 20 through its clamping end. The clamping end is retractable, which means that the clamping end can clamp protective films 20 of different sizes, so that the photomask protective film adhesion testing equipment 100 can test protective films 20 of different sizes.

[0044] Optionally, the test fixture 120 also includes a plurality of connecting rods 123, one end of which is rotatably connected to the load-bearing platform 121 and the other end of which is connected to the clamping member 122.

[0045] The clamping member 122 is connected to the load-bearing platform 121 via multiple connecting rods 123, which provide space for the weight 130. Simultaneously, the ends of the connecting rods 123 are rotatably connected to the load-bearing platform 121, allowing the angle between the connecting rods 123 and the load-bearing platform 121 to be adjustable. Thus, when the clamping end of the clamping member 122 retracts or extends, the connecting rods 123 can be adaptively adjusted according to the size of the clamping end.

[0046] It should be noted that in this embodiment, the solution for making the clamping end of the clamping member 122 retractable is not limited, as long as it can clamp protective films 20 of different sizes by stretching.

[0047] Optionally, please refer to the following: Figure 4 The clamping member 122 includes a support body 1221 and at least two clamping bodies 1222. The at least two clamping bodies 1222 are arranged in pairs on the outside of the support body 1221. The clamping bodies 1222 and the support body 1221 are connected by a telescopic body 1223. The surface of the clamping body 1222 facing the support body 1221 is used to abut against the side of the protective film 20.

[0048] The support body 1221 is located below the protective film 20 and can adhere to the surface of the protective film 20. The support bodies 1221 are arranged in pairs on their outer sides and connected to each other via a telescopic body 1223. The telescopic body 1223 extends and retracts perpendicular to the side of the protective film 20. When the telescopic body 1223 extends and retracts, it can adjust the distance between the clamping body 1222 and the support body 1221, thereby adjusting the distance between the two opposing clamping bodies 1222. Since the protective film 20 is clamped between the two opposing clamping bodies 1222, protective films 20 of different sizes can be clamped by adjusting the distance between the two clamping bodies 1222.

[0049] It is understood that the clamping body 1222 should be able to provide sufficient clamping force to prevent detachment from the protective film 20, and this clamping force can be provided by the telescopic body 1223. The telescopic body 1223 may be partially located within the support body 1221 to achieve installation limitation and prevent falling.

[0050] Optionally, the telescopic body 1223 is a spring.

[0051] Choosing a spring to connect the support 1221 and the clamping body 1222 allows for adjustment of the position of the clamping body 1222 to accommodate protective films 20 of different sizes. Furthermore, after the paired clamping bodies 1222 clamp the protective film 20, a pulling force is applied to the clamping bodies 1222 towards the protective film 20, thereby enabling the clamping bodies 1222 to clamp the protective film 20 more securely.

[0052] Alternatively, please refer to Figure 3 and Figure 5 There are two pairs of clamping bodies 1222, and the two pairs of clamping bodies 1222 are simultaneously clamped on two opposite sides of the protective film 20.

[0053] Alternatively, please refer to Figure 2 The upper surface of the test platform 110 is provided with a limiting groove 111, which is used to place the photomask 10, and the through groove is located at the bottom of the limiting groove 111.

[0054] By placing the photomask 10 in the limiting groove 111, the photomask 10 can be limited by the limiting groove 111, thereby preventing the photomask 10 from moving on the support platform.

[0055] Optionally, the upper surface of the test platform 110 is also provided with two clearance grooves 112. One clearance groove 112 is located on one side of the limiting groove 111, and the other clearance groove 112 is located on the opposite side of the limiting groove 111. The two clearance grooves 112 are respectively connected to the limiting groove 111. The clearance grooves 112 are used for the clamps holding the photomask 10 to extend into, so that the user can pick up and put down the photomask 10.

[0056] Furthermore, the two relief grooves 112 are symmetrically distributed on both sides of the limiting groove 111, and the center line of the relief groove 112 coincides with the center line of the limiting groove 111. With this arrangement, the fixture can clamp the middle position of the edge of the photomask 10, thereby preventing the photomask 10 from deflecting.

[0057] Optionally, the test platform 110 includes a base 110a and a top seat 110b disposed above the base 110a. The base 110a and the top seat 110b are connected by a plurality of columns 110c. The bearing surface is located on the side of the top seat 110b away from the base 110a. The test fixture 120 is located between the base 110a and the top seat 110b.

[0058] The test platform 110 is placed on a support platform such as a desktop or bottom surface via a base 110a. The top seat 110b is connected to the base 110a via a column 110c, and the photomask 10 is placed on the top seat 110b, so that there is a certain distance between the protective film 20 on the photomask 10 and the base 110a. This distance provides space for the installation of the test fixture 120.

[0059] Optionally, the load-bearing platform 121 is provided with a receiving groove 1211 for placing the weight 130. The receiving groove 1211 can prevent the weight 130 from falling.

[0060] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A photomask protective film adhesion testing device, characterized in that, include: The test platform includes a test fixture and weights. The test platform has a bearing surface for placing a photomask. A through groove is provided on the bearing surface to expose the protective film on the surface of the photomask. The test fixture includes a load-bearing platform and a clamping member connected to the load-bearing platform. The clamping member is used to clamp the protective film under the photomask. The load-bearing platform is used to place the weights to apply a downward pulling force to the protective film.

2. The photomask protective film adhesion testing device as described in claim 1, characterized in that, The test platform is equipped with a heating device, which is used to heat the photomask.

3. The photomask protective film adhesion testing device as described in claim 2, characterized in that, The heating device includes a housing, a heating power switch, a temperature controller, and a heating component disposed on the housing. The temperature controller is electrically connected to the power switch and the heating component. The heating power switch is used to turn on the temperature controller, the temperature controller is used to control the heating temperature of the heating component, and the heating component is used to heat the photomask.

4. The photomask protective film adhesion testing device as described in claim 1, characterized in that, The clamping end of the clamping member is retractable to accommodate protective films of different sizes.

5. The photomask protective film adhesion testing device as described in claim 1, characterized in that, The upper surface of the test platform is provided with a limiting groove, which is used to place the photomask, and the through groove is located at the bottom of the limiting groove.

6. The photomask protective film adhesion testing device as described in claim 5, characterized in that, The upper surface of the test platform is also provided with two clearance grooves. The two clearance grooves are located on opposite sides of the limiting groove and are respectively connected to the limiting groove. The clearance grooves are used for the clamps holding the photomask to extend into.

7. The photomask protective film adhesion testing device as described in claim 1, characterized in that, The test platform includes a base and a top seat disposed above the base. The base and the top seat are connected by multiple columns. The bearing surface is located on the side of the top seat opposite to the base. The test fixture is located between the base and the top seat.

8. The photomask protective film adhesion testing device as described in claim 1, characterized in that, The load-bearing platform is provided with a receiving groove for placing the weights.

9. The photomask protective film adhesion testing device as described in claim 4, characterized in that, The test fixture also includes multiple connecting rods, one end of which is rotatably connected to the load-bearing platform and the other end is connected to the clamping component.

10. The photomask protective film adhesion testing device as described in claim 9, characterized in that, The clamping member includes a support body and at least two clamping bodies. The at least two clamping bodies are arranged in pairs on the outside of the support body. The clamping bodies are connected to the support body by a telescopic body. The end of the connecting rod is fixed to the support body. The surface of the clamping body facing the support body is used to abut against the side of the protective film.

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