Baffle structure and vacuum coating equipment

By setting a non-smooth blocking surface and a bump structure on the baffle structure, combined with a detachable substrate panel design, the problem of easy metal vapor shedding is solved, the metal adhesion strength is improved and cleaning is convenient, and the cost and impurity generation are reduced.

CN224394991UActive Publication Date: 2026-06-23JIANGSU ENPACK COMPOSITE CURRENT COLLECTORS CO LTD
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Patent Information

Application Number
CN202521693611.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-08-08
Publication Date
2026-06-23
Estimated Expiration
2035-08-08

AI Technical Summary

Technical Problem

In the existing baffle structure, during the evaporation process, metal vapor easily reacts chemically with the stainless steel baffle to form a strong bonding layer, which leads to metal shedding and splashing, affecting the purity of the evaporation boat.

Method used

A baffle structure is designed with a non-smooth blocking surface and a textured surface to improve adhesion strength. It features a detachable substrate and panel connection, combined with an adsorption layer and a self-cleaning structure to enhance metal adhesion and facilitate cleaning.

Benefits of technology

It effectively reduces the chance of metal layer falling off into the evaporation boat, avoids metal splashing and impurity generation, makes the cleaning process convenient, reduces replacement costs, and extends service life.

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Abstract

The utility model discloses a baffle plate structure and vacuum coating equipment. The baffle plate structure comprises a base plate; the panel is detachably connected with the base plate; wherein the panel is provided with a blocking surface for blocking metal vapor, and the blocking surface is a non-smooth surface for improving the adhesion strength. By adopting the structure, the deposited metal layer can be better attached to the blocking surface, the probability that the metal layer falls off to the evaporation boat is effectively reduced, and the blocking surface is more convenient to clean.
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