Graphite vapor deposition base lining fixing tool

Abstract

The utility model relates to silicon carbide epitaxial growth technical field, concretely relates to a kind of bottom lining fixing tool of graphite vapor deposition, including equipment ontology, hollow operation platform, cutting piece and fixing device, fixing device includes mounting seat, moving assembly, drive assembly, clamping assembly and auxiliary assembly, mounting seat is fixedly connected with equipment ontology, moving assembly is set on mounting seat, drive assembly is set on mounting seat, clamping assembly is set on equipment ontology, in the processing process to graphite piece, graphite piece is placed on hollow operation platform, start drive assembly, drive assembly drives moving assembly to move on mounting seat along the direction of mounting seat, so that moving assembly drives clamping assembly to move on equipment ontology towards the direction of graphite piece, so that two sets of clamping assembly are mutually matched to graphite piece and are clamped and fixed, so that it is convenient to fix different size graphite piece, and processing is more convenient.

Description

Technical Field

[0001] This utility model relates to the field of silicon carbide epitaxial growth technology, and in particular to a substrate fixing fixture for graphite vapor deposition. Background Technology

[0002] Manual scraping with a handheld silicon carbide blade or silicon carbide wafer is a method that cannot precisely control the scraping thickness during processing. This may cause contamination or damage to the graphite parts, leading to an increase in the number of surface defects on the epitaxial layer due to impurity particles when used at high temperatures, and even resulting in the scrapping of silicon carbide epitaxial wafers.

[0003] The prior art CN219359856U discloses a device for removing silicon carbide deposits from graphite parts, including a device body. The device body includes a first cavity and a second cavity from top to bottom. A hollow operating table is provided between the first cavity and the second cavity. An air inlet is provided on the first cavity. A detachable clamping fixture is provided on the hollow operating table. Using this device, the silicon carbide deposit can be effectively removed from graphite parts and the integrity of the silicon carbide coating can be ensured, thereby reducing epitaxial layer defects caused by particles released from the graphite parts exposed in the high-temperature reaction chamber.

[0004] However, using the above method, it is impossible to fix graphite parts of different sizes during the processing of graphite parts, which makes processing inconvenient. Utility Model Content

[0005] The purpose of this invention is to provide a substrate fixing fixture for graphite vapor deposition, which makes it easier to fix graphite parts of different sizes during the processing of graphite parts, thus making the processing more convenient.

[0006] To achieve the above objectives, this utility model provides a substrate fixing fixture for graphite vapor deposition, including a device body, a perforated operating table and a cutting component. The perforated operating table is fixedly connected to the device body and is located on one side of the device body. The cutting component is disposed on the device body and also includes a fixing device.

[0007] The fixing device includes a mounting base, a moving component, a driving component, a clamping component, and an auxiliary component. The mounting base is fixedly connected to the device body and is located on one side of the device body. The moving component is disposed on the mounting base, the driving component is disposed on the mounting base, the clamping component is disposed on the device body, and the auxiliary component is disposed on the device body.

[0008] The movable component includes a movable track and a movable slider. The movable track is fixedly connected to the mounting base and is located on one side of the mounting base. The movable slider is slidably connected to the movable track and is located on one side of the movable track.

[0009] The drive assembly includes a drive motor and a drive rod. The drive motor is fixedly connected to the mounting base and located on one side of the mounting base. The drive rod is threadedly connected to the movable slider and is fixedly connected to the output end of the drive motor.

[0010] The clamping assembly includes a push rod and a clamping panel. The push rod is slidably connected to the device body and fixedly connected to the movable slider. The clamping panel is fixedly connected to the push rod and slidably connected to the hollowed-out operating table.

[0011] The auxiliary components include a storage box and a labeling board. The storage box is fixedly connected to the device body and located on one side of the device body; the labeling board is fixedly connected to the device body and located on one side of the device body.

[0012] This utility model discloses a substrate fixing fixture for graphite vapor deposition, comprising a device body, a perforated operating table, a cutting component, and a fixing device. The fixing device includes a mounting base, a moving component, a driving component, a clamping component, and an auxiliary component. During the processing of the graphite part, the graphite part is placed on the perforated operating table, and the driving component is activated. The driving component drives the moving component to move along the direction of the mounting base on the mounting base, causing the moving component to drive the clamping component to move on the device body towards the graphite part. This allows the two sets of clamping components to cooperate to clamp and fix the graphite part, making it convenient to fix graphite parts of different sizes and facilitating processing. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0014] Figure 1 This is a schematic diagram of the overall structure of the graphite vapor deposition substrate fixing fixture according to the first embodiment of this utility model.

[0015] Figure 2 This is an overall front view of the graphite vapor deposition substrate fixing fixture according to the first embodiment of this utility model.

[0016] Figure 3 This is a structural schematic diagram of the fixing device according to the first embodiment of this utility model.

[0017] Figure 4 This is a schematic diagram of the overall structure of the graphite vapor deposition substrate fixing fixture according to the second embodiment of this utility model.

[0018] In the diagram: 101-Equipment body, 102-Hollowed operating table, 103-Cutting part, 104-Mounting base, 105-Moving track, 106-Moving slider, 107-Drive motor, 108-Drive rod, 109-Push rod, 110-Clamping panel, 201-Storage box, 202-Pattern. Detailed Implementation

[0019] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, but should not be construed as limiting the present invention.

[0020] The first embodiment of this application is as follows:

[0021] Please see Figures 1 to 3 ,in Figure 1 This is a schematic diagram of the overall structure of the substrate fixing fixture for graphite vapor deposition. Figure 2 This is an overall front view of the fixture for fixing the substrate in graphite vapor deposition. Figure 3 Yes, this is a structural diagram of the fixing device. This utility model provides a substrate fixing fixture for graphite vapor deposition: it includes a device body 101, a hollowed-out operating table 102, a cutting component 103, and a fixing device. The fixing device includes a mounting base 104, a moving component, a driving component, a clamping component, and auxiliary components. The moving component includes a moving track 105 and a moving slider 106. The driving component includes a driving motor 107 and a driving rod 108. The clamping component includes a push rod 109 and a clamping panel 110. The aforementioned solution solves the problem of not being able to fix graphite parts of different sizes during the processing of graphite parts, which leads to processing inconvenience. It is understood that the aforementioned solution can facilitate the fixing of graphite parts of different sizes during processing, making processing more convenient. It can also be used to visually display processing precautions and the tasks to be processed that day.

[0022] In this specific embodiment, the hollow operating table 102 is fixedly connected to the device body 101 and located on one side of the device body 101. The cutting component 103 is disposed on the device body 101. The device body 101 includes a first cavity and a second cavity from top to bottom. The hollow operating table 102 is disposed between the first cavity and the second cavity. An air inlet is provided on the first cavity. The cutting component 103 is disposed at the top of the inner cavity of the device body 101, directly above the hollow operating table 102, for processing graphite parts. Using this equipment can effectively remove the silicon carbide deposited layer of graphite parts and ensure the integrity of the silicon carbide coating of graphite parts, thereby reducing epitaxial layer defects caused by the release of particles from the graphite parts exposed in the high-temperature reaction chamber. All of the above are prior art, so this application does not describe them in detail.

[0023] The mounting base 104 is fixedly connected to the device body 101 and located on one side of the device body 101. The moving component, the driving component, the clamping component, and the auxiliary component are all mounted on the mounting base 104. There are two mounting bases 104, symmetrically fixed to the left and right sides of the outer surface of the device body 101. Each mounting base 104 has a moving component capable of horizontal movement. Each mounting base 104 also has a driving component that drives the moving component. Clamping components are located on both sides of the device body 101. One end of the clamping component is connected to the moving component, and the other end of the clamping component moves on the hollow operating table 102. The clamping component can clamp and fix the graphite part placed on the hollow operating table 102. The auxiliary component is located on the right side of the outer surface of the device body 101. The auxiliary component can enrich the function of this device. During the processing of graphite parts, the graphite part is placed on the hollow operating table 102, and the driving component is activated. The driving component drives the moving component to move along the direction of the mounting base 104 on the mounting base 104, so that the moving component drives the clamping component to move on the device body 101 towards the graphite part. Thus, the two sets of clamping components cooperate to clamp and fix the graphite part, which makes it easy to fix graphite parts of different sizes and makes processing more convenient.

[0024] Secondly, the moving track 105 is fixedly connected to the mounting base 104 and located on one side of the mounting base 104; the moving slider 106 is slidably connected to the moving track 105 and located on one side of the moving track 105. The moving track 105 is provided on the upper surface of both mounting bases 104. The moving track 105 forms a top opening on the mounting base 104. The moving slider 106 is located inside the moving track 105. The cross-sectional dimensions of the moving slider 106 are adapted to the cross-sectional dimensions of the moving track 105, so that the moving slider 106 can move along the direction of the moving track 105 within the moving track 105, thereby causing the moving slider 106 to drive the clamping assembly to move.

[0025] Meanwhile, the drive motor 107 is fixedly connected to the mounting base 104 and located on one side of the mounting base 104; the drive rod 108 is threadedly connected to the movable slider 106, and the drive rod 108 is fixedly connected to the output end of the drive motor 107. The drive motor 107 is provided on the side of each of the two mounting bases 104 that is far apart from each other. The output end of the drive motor 107 passes through the movable track 105. One end of the drive rod 108 is fixed together with the output end of the drive motor 107, and the other end of the drive rod 108 rotates with the movable track 105 through a bearing. The movable slider 106 is penetrated by the drive rod 108, so that when the drive motor 107 is started, it drives the drive rod 108 to rotate, so that the movable slider 106 moves along the direction of the movable track 105 in the movable track 105 under the threaded drive of rotating the drive rod 108, thereby driving the clamping assembly to move on the device body 101.

[0026] In addition, the push rod 109 is slidably connected to the device body 101 and fixedly connected to the movable slider 106; the clamping panel 110 is fixedly connected to the push rod 109 and slidably connected to the hollow operating table 102. The upper surfaces of the two movable sliders 106 are provided with the push rod 109. The push rod 109 is L-shaped with an inclination of 90°. One end of the push rod 109 is inserted into the device body 101 and slides with the device body 101. The end of the push rod 109 away from the movable slider 106 is welded to the clamping panel 110. The lower surface of the clamping panel 110 abuts against the hollow operating table 102, so that when the movable slider 106 moves in the moving track 105, it drives the push rod 109 to move on the device body 101, thereby driving the clamping panel 110 to move on the hollow operating table 102. The two clamping panels 110 cooperate with each other to clamp and fix the graphite part, which is easy to operate.

[0027] When using the graphite vapor deposition substrate fixing fixture of this embodiment, during the processing of the graphite part, the graphite part is placed on the hollow operating table 102, and the drive motor 107 is started. The drive motor 107 drives the drive rod 108 to rotate, so that the moving slider 106 moves in the moving track 105 under the thread drive of the rotating drive rod 108, thereby driving the push rod 109 to move on the equipment body 101, and then the push rod 109 drives the clamping panel 110 to move on the hollow operating table 102, so that the two clamping panels 110 cooperate with each other to clamp and fix the graphite part, which makes it easy to fix graphite parts of different sizes and makes processing more convenient.

[0028] The second embodiment of this application is as follows:

[0029] Based on the first embodiment, please refer to Figure 4 , Figure 4 This is a schematic diagram of the overall structure of the graphite vapor deposition substrate fixing fixture in the second embodiment. The auxiliary components in this embodiment include a storage box 201 and a mounting plate 202.

[0030] In this specific embodiment, the storage box 201 is fixedly connected to the device body 101 and located on one side of the device body 101; the poster board 202 is fixedly connected to the device body 101 and located on one side of the device body 101. The storage box 201 is fixed to the bottom right side of the device body 101. The storage box 201 is a box structure with a top opening, used to place the workpieces required during processing, making it convenient for operators to retrieve tools. The poster board 202 is provided on the upper right side of the device body 101, located above the storage box 201. The poster board 202 can post notices and today's processing tasks, making the operation more intuitive.

[0031] When using the graphite vapor deposition substrate fixing fixture of this embodiment, during the processing of graphite parts, the operator can easily take out the tools required for processing from the storage box, and the operator can intuitively see the processing precautions and the processing tasks for today on the posting board, making the operation more intuitive and convenient.

[0032] The above-disclosed embodiments are merely one or more preferred embodiments of this application and should not be construed as limiting the scope of this application. Those skilled in the art can understand that all or part of the processes for implementing the above embodiments and equivalent changes made in accordance with the claims of this application still fall within the scope of this application.

Claims

1. A substrate fixing fixture for graphite vapor deposition, comprising an equipment body, a perforated operating table, and a cutting component, wherein the perforated operating table is fixedly connected to the equipment body and located on one side of the equipment body, and the cutting component is disposed on the equipment body, characterized in that: It also includes fixing devices; The fixing device includes a mounting base, a moving component, a driving component, a clamping component, and an auxiliary component. The mounting base is fixedly connected to the device body and is located on one side of the device body. The moving component is disposed on the mounting base, the driving component is disposed on the mounting base, the clamping component is disposed on the device body, and the auxiliary component is disposed on the device body.

2. The substrate fixing fixture for graphite vapor deposition as described in claim 1, characterized in that: The moving component includes a moving track and a moving slider. The moving track is fixedly connected to the mounting base and located on one side of the mounting base; the moving slider is slidably connected to the moving track and located on one side of the moving track.

3. The substrate fixing fixture for graphite vapor deposition as described in claim 2, characterized in that: The drive assembly includes a drive motor and a drive rod. The drive motor is fixedly connected to the mounting base and located on one side of the mounting base. The drive rod is threadedly connected to the movable slider and is fixedly connected to the output end of the drive motor.

4. The substrate fixing fixture for graphite vapor deposition as described in claim 3, characterized in that: The clamping assembly includes a push rod and a clamping panel. The push rod is slidably connected to the device body and fixedly connected to the movable slider. The clamping panel is fixedly connected to the push rod and slidably connected to the hollowed-out operating table.

5. The substrate fixing fixture for graphite vapor deposition as described in claim 1, characterized in that: The auxiliary components include a storage box and a labeling board. The storage box is fixedly connected to the device body and located on one side of the device body; the labeling board is fixedly connected to the device body and located on one side of the device body.

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