Air conditioning system based on double cold and heat sources

By designing a dual-source air conditioning system, the problem of unstable air supply caused by a single source of cooling and heating is solved. Redundant switching of cooling and heating sources and efficient use of energy are achieved, ensuring the stability of the semiconductor production environment and the quality of air supply.

CN224479773UActive Publication Date: 2026-07-10NANJING SHENGXIN SEMICON MATERIAL CO LTD +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
NANJING SHENGXIN SEMICON MATERIAL CO LTD
Filing Date
2025-08-26
Publication Date
2026-07-10

AI Technical Summary

Technical Problem

Existing modular air conditioning units (MAUs) use a single source of cooling and heating, which results in the quality of the cooling and heating source having an excessive impact on the fresh air system. This can easily affect the air supply requirements due to problems with the supply of cooling and heating sources, thus impacting the semiconductor manufacturing environment and product quality.

Method used

An air conditioning system based on dual cold and heat sources is adopted, which supplies energy through multiple sets of cold and heat sources and is equipped with switching valves and pipeline connections to achieve switching and redundancy of cold and heat sources, ensuring the stability of air supply quality.

Benefits of technology

It improves the stability of the cold and heat sources and the quality of air supply, and can switch to other cold and heat sources when one cold or heat source fails, ensuring the stability of air supply requirements and saving energy costs.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a kind of air conditioning system based on double cold heat source, including the new air section, primary efficiency filter section, preheating section, heating section, humidification section, surface cooling section, fan section, middle efficiency filter section, high efficiency filter section, air supply section connected in sequence, surface cooling section includes primary surface cooling section, secondary surface cooling section;The preheating section, heating section, primary surface cooling section, secondary surface cooling section both sides are equipped with water supply line and return water line, preheating section water supply line is connected with heating section water supply line, preheating section return water line is connected with heating section return water line;Primary surface cooling section water supply line is connected with secondary surface cooling section water supply line, primary surface cooling section return water line is connected with secondary surface cooling section return water line, and switching valve is equipped on each connecting pipeline.The utility model sets two groups of heat source and two groups of cold source, and connects cold heat source by connecting pipeline, increases the quantity of cold heat source, can realize the switching of cold heat source, improves cold heat source stability and air supply quality stability.
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