Anti-decomposition stable storage container for high-purity chlorine trifluoride

Abstract

The utility model relates to high -purity chlorine trifluoride storage technical field, and disclose high -purity chlorine trifluoride's anti -decomposition stable storage container, including storage jar main part and cooling pipeline, and the storage jar main part includes outer jar body and inner jar body, and the inner jar body sets up in the inside of outer jar body, this high -purity chlorine trifluoride's anti -decomposition stable storage container, through setting up the cooling pipeline of spiral structure in the inside of inner jar body, compared with arranging condensing assembly in the outer sleeve interlayer, has shortened the heat -exchange cooling path, does not need to pass through the inner jar jar wall, improved the cooling effect, and the cooling pipeline is set up as spiral structure, can make the cooling more uniform.

Description

Technical Field

[0001] This utility model relates to the field of high-purity chlorine trifluoride storage technology, specifically to a stable storage container for high-purity chlorine trifluoride that prevents decomposition. Background Technology

[0002] Chlorine trifluoride is a strong oxidizing agent with high chemical reactivity and flammability. It can react explosively with water and organic compounds, and is mainly used in the electronics industry, nuclear uranium enrichment, and military applications. High-purity chlorine trifluoride is primarily used for cleaning CVD chambers and their piping in semiconductor, LCD, solar energy, and LED industries, offering significant advantages in cleaning quality, efficiency, and greenhouse gas reduction. Unlike other fluorinated gases used for cleaning (such as NF3, C2F6, and CF4), chlorine trifluoride reacts with semiconductor materials at room temperature without requiring heating of the cleaning area. Therefore, using chlorine trifluoride eliminates the need for heating components and steps, as well as the need for plasma plasma dissociation equipment to produce fluorine gas; chlorine trifluoride can be used directly to clean CVD chambers at room temperature. Furthermore, chlorine trifluoride cleaning avoids the high-energy ion bombardment process found in plasma during chemical etching, minimizing damage to the equipment. Meanwhile, chlorine trifluoride cleaning is an on-site cleaning process, eliminating the need to disassemble equipment to clean dead corners in the equipment and pipelines. This reduces equipment downtime, lowers the amount of particulate impurities, and minimizes operator exposure time. High-purity chlorine trifluoride, used as a cleaning gas in CVD chambers, offers significant advantages in cleaning quality, efficiency, and reduction of the greenhouse effect.

[0003] Currently, some high-purity chlorine trifluoride anti-decomposition stable storage containers on the market include, for example, a utility model patent with authorization announcement number CN214622507U that discloses an electronic-grade chlorine trifluoride collection device. This device cools down the chlorine trifluoride by arranging condensation components in the outer jacket. However, the heat exchange cooling path of this method is relatively long and needs to pass through the inner tank wall, resulting in an unsatisfactory cooling effect.

[0004] Therefore, we proposed a high-purity chlorine trifluoride anti-decomposition and stable storage container to solve the problems mentioned above. Utility Model Content

[0005] The purpose of this invention is to solve the problem that some existing high-purity chlorine trifluoride anti-decomposition stable storage containers use a device that arranges condensing components in the outer jacket for cooling. However, this method has a long heat exchange cooling path and needs to pass through the inner tank wall, resulting in an unsatisfactory cooling effect.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a high-purity chlorine trifluoride anti-decomposition and stable storage container, comprising: a storage tank body, wherein the storage tank body includes an outer tank and an inner tank, and the inner tank is disposed inside the outer tank;

[0007] A cooling pipe is installed inside the inner tank, with both ends passing through the outer and inner tanks respectively, located on the outside of the storage tank body. The cooling pipe is used for the flow of low-temperature refrigerant.

[0008] The storage tank body is provided with an inlet pipe and an outlet pipe at the top and bottom respectively, and both the inlet pipe and the outlet pipe are connected to the inner tank body;

[0009] The storage tank body is equipped with an inlet pipe and an outlet pipe, both of which are connected to the outer tank body. Through the cooperation of the inlet and outlet pipes, inert gas flows between the outer and inner tank bodies. A chlorine trifluoride gas detector is installed on the outlet pipe.

[0010] Furthermore, both the inner surface of the outer tank and the outer surface of the inner tank are provided with heat insulation pads.

[0011] Furthermore, the portion of the cooling pipe located inside the inner tank is configured as a spiral structure.

[0012] Furthermore, both the inner tank and the cooling pipe are made of Hastelloy, and the inner surface of the inner tank is provided with a chlorine trifluoride passivation layer and a fluorine passivation layer, and the outer surface of the portion of the cooling pipe located inside the inner tank is also provided with a chlorine trifluoride passivation layer and a fluorine passivation layer.

[0013] Furthermore, multiple support columns are provided between the outer tank and the inner tank.

[0014] The beneficial effects of this utility model are as follows: by setting a spiral cooling pipe inside the inner tank, compared with arranging the condensation components in the outer jacket, the heat exchange cooling path is shortened, and it does not need to pass through the inner tank wall, thus improving the cooling effect. Moreover, setting the cooling pipe as a spiral structure can make the cooling more uniform. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of the high-purity chlorine trifluoride anti-decomposition and stable storage container of this utility model;

[0016] Figure 2 This is a utility model Figure 1 A magnified schematic diagram of the local structure A.

[0017] The names corresponding to each mark in the diagram:

[0018] 1. Storage tank body; 2. Outer tank body; 3. Inner tank body; 4. Cooling pipe; 5. Feed pipe; 6. Discharge pipe; 7. Heat insulation pad; 8. Air inlet pipe; 9. Air outlet pipe; 10. Chlorine trifluoride gas detector; 11. Support column. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model are within the protection scope of the present utility model.

[0020] Embodiments of this utility model:

[0021] like Figures 1-2 As shown, this utility model provides a stable storage container for high-purity chlorine trifluoride that prevents decomposition, including a storage tank body 1 and a cooling pipe 4. The storage tank body 1 includes an outer tank 2 and an inner tank 3. The inner tank 3 is located inside the outer tank 2. Multiple support columns 11 are provided between the outer tank 2 and the inner tank 3. An inlet pipe 5 and an outlet pipe 6 are respectively provided at the top and bottom of the storage tank body 1. Both the inlet pipe 5 and the outlet pipe 6 are connected to the inner tank 3. The cooling pipe 4 is located inside the inner tank 3, and both ends of the cooling pipe 4 pass through the outer tank 2 and the inner tank 3 respectively. It is located outside the storage tank body 1. The cooling pipe 4 is used for the flow of low-temperature refrigerant. The part of the cooling pipe 4 inside the inner tank 3 is set with a spiral structure. By introducing the flowing low-temperature refrigerant into the cooling pipe 4, heat exchange and cooling are performed on the high-purity chlorine trifluoride inside the inner tank 3 to keep it in a liquid state and prevent vaporization and decomposition.

[0022] like Figures 1-2 As shown, both the inner surface of the outer tank 2 and the outer surface of the inner tank 3 are provided with heat insulation pads 7. This arrangement can provide heat insulation and prevent the transfer of external heat.

[0023] like Figures 1-2 As shown, the main body 1 of the storage tank is equipped with an inlet pipe 8 and an outlet pipe 9, both of which are connected to the outer tank 2. Through the cooperation of the inlet pipe 8 and the outlet pipe 9, inert gas flows between the outer tank 2 and the inner tank 3. This arrangement can form a gas phase seal between the outer tank 2 and the inner tank 3. A chlorine trifluoride gas detector 10 is installed on the outlet pipe 9, which can detect the chlorine trifluoride component in the inert gas and detect leaks in a timely manner.

[0024] like Figures 1-2As shown, both the inner tank 3 and the cooling pipe 4 are made of Hastelloy alloy. The inner surface of the inner tank 3 is provided with a chlorine trifluoride passivation layer and a fluorine passivation layer. The outer surface of the part of the cooling pipe 4 located inside the inner tank 3 is also provided with a chlorine trifluoride passivation layer and a fluorine passivation layer. The fluorine passivation layer is formed by evacuating the inner tank 3 and then filling it with high-purity fluorine with a purity of 99% or higher for 1 to 5 days. The chlorine trifluoride passivation layer is formed by evacuating the inner tank 3 with the fluorine passivation layer and then filling it with high-purity chlorine trifluoride with a purity of 99.9% or higher for 1 to 5 days.

Claims

1. A high-purity chlorine trifluoride anti-decomposition and stable storage container, characterized in that, include: The storage tank body (1) includes an outer tank body (2) and an inner tank body (3), wherein the inner tank body (3) is disposed inside the outer tank body (2); Cooling pipe (4) is installed inside the inner tank (3), and the two ends of the cooling pipe (4) pass through the outer tank (2) and the inner tank (3) respectively, located outside the main body (1) of the storage tank. The cooling pipe (4) is used for the flow of low temperature refrigerant. The storage tank body (1) is provided with an inlet pipe (5) and an outlet pipe (6) at the top and bottom respectively, and the inlet pipe (5) and the outlet pipe (6) are connected to the inner tank body (3); The storage tank body (1) is provided with an air inlet pipe (8) and an air outlet pipe (9). Both the air inlet pipe (8) and the air outlet pipe (9) are connected to the outer tank body (2). Through the cooperation of the air inlet pipe (8) and the air outlet pipe (9), an inert gas flows between the outer tank body (2) and the inner tank body (3). A chlorine trifluoride gas detector (10) is provided on the air outlet pipe (9).

2. The high-purity chlorine trifluoride anti-decomposition stable storage container according to claim 1, characterized in that: The inner surface of the outer tank (2) and the outer surface of the inner tank (3) are both provided with heat insulation pads (7).

3. The high-purity chlorine trifluoride anti-decomposition stable storage container according to claim 1, characterized in that: The portion of the cooling pipe (4) located inside the inner tank (3) is configured as a spiral structure.

4. The high-purity chlorine trifluoride anti-decomposition stable storage container according to claim 3, characterized in that: The inner tank (3) and the cooling pipe (4) are both made of Hastelloy, and the inner surface of the inner tank (3) is provided with a chlorine trifluoride passivation layer and a fluorine passivation layer. The outer surface of the part of the cooling pipe (4) located inside the inner tank (3) is also provided with a chlorine trifluoride passivation layer and a fluorine passivation layer.

5. The high-purity chlorine trifluoride anti-decomposition stable storage container according to claim 1, characterized in that: Multiple support columns (11) are provided between the outer tank (2) and the inner tank (3).

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