PH adjusting device for semiconductor pure wastewater treatment system

By using an inverted frustum-shaped structure and a compound motion stirring assembly, the problem of insufficient stirring uniformity in semiconductor wastewater treatment is solved, achieving efficient pH adjustment and energy utilization, and reducing treatment costs.

CN224493886UActive Publication Date: 2026-07-14CHUNYUE ENVIRONMENTAL TECHNOLOGY (CHENGDU) CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
CHUNYUE ENVIRONMENTAL TECHNOLOGY (CHENGDU) CO LTD
Filing Date
2025-05-26
Publication Date
2026-07-14

AI Technical Summary

Technical Problem

Existing pH adjustment devices lack uniformity in semiconductor wastewater treatment, and the adjustment container for loading wastewater lacks effective linkage with the mixing components, resulting in low energy utilization and high treatment costs.

Method used

Design a pH adjustment tank with an inverted frustum structure, equipped with a swing-type stirring assembly and a power mechanism. Through the combined motion of the L-shaped swing arm and the rotation of the pH adjustment tank, three-dimensional stirring is achieved. Combined with a PLC control system and a pH probe, precise dosing and real-time adjustment are realized.

Benefits of technology

It significantly improves the mixing uniformity of acid and alkali solutions with wastewater, reduces energy consumption, lowers treatment costs, optimizes fluid dynamics, and improves pH adjustment efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to pH adjusting equipment technical field, concretely is a kind of PH adjusting device for semiconductor pure wastewater treatment system, including inverted round table type's wastewater pH adjusting box, box support base, swing type stirring assembly and power mechanism, wastewater pH adjusting box bottom is rotatably installed on box support base, top is equipped with L type swing bar and stirring vane, drives worm and worm gear mechanism by main servo motor, makes L type swing bar realize up and down swing and left and right rotation, simultaneously drives adjusting box rotation, improves stirring uniformity and energy utilization rate. The utility model solves the problem that the prior art stirring uniformity is insufficient, and energy utilization rate is low, especially applicable to the treatment of semiconductor high-purity wastewater.
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Description

Technical Field

[0001] This utility model relates to the field of pH adjustment equipment technology, specifically a pH adjustment device for a semiconductor pure wastewater treatment system. Background Technology

[0002] The semiconductor industry generates a large amount of high-purity wastewater (also known as "ultrapure water wastewater" or "process wastewater") during production. Its main sources include: the use of ultrapure water (UPW) to remove particulate matter, metal ions, and other contaminants; chemicals containing fluorides (such as HF), nitric acid, and phosphoric acid; nano-sized abrasive particles (such as silica); organic additives; and high concentrations of acids and alkalis (such as HCl and NaOH).

[0003] Before such wastewater is discharged, it needs to be treated professionally to prevent it from polluting the environment. The core treatment process includes: (1) pretreatment

[0004] Neutralization adjustment: Adjust pH using acid or alkali (e.g., HF wastewater needs to be neutralized to alkalinity first).

[0005] Coagulation / flocculation: Removal of colloidal particles (e.g., by adding PAC, PAM).

[0006] (2) Deep processing

[0007] Membrane technology:

[0008] UF (ultrafiltration): traps nanoparticles.

[0009] RO (Reverse Osmosis): Removes ions and TOC, and the produced water can be reused.

[0010] EDI (electrodeionization): Further purifying water to ultrapure water standards.

[0011] Ion exchange: targeting specific metal ions (such as Cu²⁺). + Selective adsorption of ).

[0012] Advanced oxidation: UV / H2O2 degradation of trace organic matter.

[0013] (3) Special treatment of fluoride

[0014] Two-stage precipitation method: First, add CaCl2 to generate CaF2, and then optimize the removal rate by pH adjustment (which can be reduced to <10 mg / L).

[0015] (4) Sludge treatment

[0016] Chemical sludge (such as CaF2) needs to be dewatered before being disposed of as hazardous waste.

[0017] Among the treatment processes, adjusting the pH of the wastewater is a crucial step, as the pH value of the wastewater significantly affects the degree of pollution after discharge.

[0018] Therefore, the operating efficiency of the pH adjustment device plays a crucial role in the entire process of semiconductor wastewater treatment. Existing pH adjustment devices suffer from insufficient mixing uniformity during operation, and there is a lack of effective linkage between the adjustment container for loading wastewater and the related mixing components, resulting in low energy utilization and high overall treatment costs.

[0019] Therefore, this technical solution designs a device that can solve the above problems. Utility Model Content

[0020] The purpose of this invention is to provide a pH adjustment device for a semiconductor pure wastewater treatment system to solve the problems mentioned in the background art.

[0021] To achieve the above objectives, this utility model provides the following technical solution:

[0022] A pH adjustment device for a semiconductor pure wastewater treatment system includes a wastewater pH adjustment tank and a tank support base. The wastewater pH adjustment tank is configured as an inverted frustum structure with its bottom rotatably mounted on the upper side of the tank support base. A set of oscillating stirring components is installed on the top of the wastewater pH adjustment tank for stirring the pure wastewater placed inside the tank during pH adjustment, thereby improving the uniformity and speed of mixing acid / alkali solutions with pure wastewater. A driven gear ring is installed on the upper part of the outer circumferential wall of the wastewater pH adjustment tank. A set of power mechanisms is provided on one side of the driven gear ring and the stirring components. When the power mechanisms are running, they synchronously drive the stirring components to oscillate and stir inside the wastewater pH adjustment tank and control the rotation of the wastewater pH adjustment tank, thereby fully improving the efficiency of pH adjustment, increasing the energy conversion and utilization rate, and reducing treatment costs.

[0023] The stirring assembly includes an L-shaped swing arm. The end of the L-shaped swing arm facing the upper part of the wastewater pH adjustment tank is detachably connected to a stirring blade. The part of the L-shaped swing arm away from the stirring blade is oscillatingly and rotatably connected to the power mechanism. The operation of the power mechanism drives the L-shaped swing arm to swing horizontally and vertically at the same time, thereby moving it up and down and rotating inside and outside the wastewater pH adjustment tank, and then stirring and adjusting the pure wastewater in contact with it.

[0024] The power mechanism includes a main servo motor, an output shaft connected to the output end of the main servo motor, a worm gear connected to the end of the output shaft, a worm wheel threaded to one side of the upper part of the worm gear, and an L-shaped swing arm whose end away from the stirring blade is rotatably connected to a limiting hole opened on the side wall of the worm wheel, realizing up-and-down swinging and left-and-right rotation. A rotating ball is rolled inside the limiting hole, and ball sleeves are rolled on both sides of the rotating ball. The ball sleeve facing the L-shaped swing arm is fixedly connected to the L-shaped swing arm. When the main servo motor is started to drive the worm gear to rotate, the worm wheel is controlled to rotate synchronously, and then the rotating ball placed in the limiting hole rotates around the worm wheel as it rotates, thereby driving the L-shaped swing arm to swing up and down and rotate back and forth left and right. Then, the connecting part at the end is controlled to move up and down and back and forth inside the wastewater pH adjustment tank, stirring the wastewater inside the wastewater pH adjustment tank.

[0025] The L-shaped rocker arm moves radially through the swing shaft near the worm gear. Both ends of the swing shaft are movably connected to a set of U-shaped swing frames. A rotating disk is installed at the bottom of the U-shaped swing frames. The bottom of the rotating disk is connected to a support base through a top rotating component. At the same time, a drive tooth is connected to the bottom of the support base through a bottom rotating component. One side of the drive tooth meshes with the driven gear ring. Meanwhile, the center of the drive tooth is connected to a connecting shaft through a rotating transmission component. The end of the connecting shaft is connected to the output shaft through a transmission belt. That is, when the main servo motor is running, it drives the output shaft to rotate. Then, under the action of the transmission belt, the connecting shaft, and the rotating connecting component, the drive tooth is synchronously driven to rotate, which in turn drives the wastewater pH adjustment tank to rotate, realizing the full conversion and utilization of kinetic energy.

[0026] Compared with the prior art, the beneficial effects of this utility model are: by combining the L-shaped swing arm's compound motion (up and down swinging + left and right rotation) and the rotation of the wastewater pH adjustment tank, three-dimensional stirring is achieved, which significantly improves the mixing uniformity of acid and alkali solutions with wastewater.

[0027] By using a single main servo motor to simultaneously drive the stirring assembly and the regulating tank, energy consumption is reduced and processing costs are lowered.

[0028] The inverted frustum-shaped regulating box design optimizes fluid dynamics and reduces stirring resistance.

[0029] By integrating a pH probe and a PLC control system, precise dosing and real-time adjustment can be achieved. Attached Figure Description

[0030] Figure 1 This is a three-dimensional structural diagram of a pH adjustment device for a semiconductor pure wastewater treatment system.

[0031] Figure 2 This is a schematic diagram of the front view of a pH adjustment device for a semiconductor pure wastewater treatment system.

[0032] Figure 3 for Figure 2 A magnified structural diagram of A in the diagram.

[0033] Figure 4 for Figure 2 A magnified structural diagram of B in the diagram.

[0034] The components include: wastewater pH adjustment tank 10, tank support base 11, rotating support rod 12, support rotating groove 13, discharge hole 14, main servo motor 15, output shaft 16, worm gear 17, worm wheel 18, wheel axle 19, rotating ball 20, ball sleeve 21, L-shaped swing rod 22, stirring blade 23, connecting piece 24, support base 25, bottom rotating shaft 26, bottom rotating groove 27, drive gear 28, bevel gear one 29, bevel gear two 30, connecting shaft 31, transmission belt 32, top rotating shaft 33, top rotating groove 34, rotating disk 35, U-shaped swing frame 36, swing shaft 37, driven gear ring 38. Detailed Implementation

[0035] It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0036] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0037] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0038] The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0039] Please see Figures 1-4 A pH adjustment device for a semiconductor pure wastewater treatment system includes a wastewater pH adjustment tank 10 and a tank support base 11. The wastewater pH adjustment tank 10 is configured as an inverted frustum structure and is rotatably mounted on the tank support base 11. A set of swing-type stirring components is provided on the top of the wastewater pH adjustment tank 10 for stirring the pure wastewater placed inside the wastewater pH adjustment tank 10 during pH adjustment, thereby improving the uniformity and speed of mixing acid and alkali solutions with pure wastewater. A driven toothed ring 38 is installed on the upper part of the outer circumference of the wastewater pH adjustment tank 10. A set of power mechanisms is provided on one side of the driven toothed ring 38 and the stirring components. When the power mechanisms are running, they synchronously drive the stirring components to swing and stir inside the wastewater pH adjustment tank 10 and control the rotation of the wastewater pH adjustment tank 10, thereby fully improving the efficiency of pH adjustment, increasing the energy conversion and utilization rate, and reducing the treatment cost.

[0040] The stirring assembly includes an L-shaped swing arm 22. The end of the L-shaped swing arm 22 facing the upper part of the wastewater pH adjustment tank 10 is detachably connected to a stirring blade 23. The part of the L-shaped swing arm 22 away from the stirring blade 23 is oscillatingly and rotatably connected to a power mechanism. The operation of the power mechanism drives the L-shaped swing arm 22 to swing laterally and up and down, thereby moving up, down and rotating inside and outside the wastewater pH adjustment tank 10, and then stirring and adjusting the pure wastewater in contact with it.

[0041] The power mechanism includes a main servo motor 15, with an output shaft 16 connected to the output end of the main servo motor 15. A worm gear 17 is connected to the end of the output shaft 16, and a worm wheel 18 is threaded onto one side of the upper part of the worm gear 17. The end of the L-shaped rocker arm 22 away from the stirring blade 23 is rotatably connected to a limiting hole opened on the side wall of the worm wheel 18, realizing up-and-down swinging and left-and-right rotation. A rotating ball 20 is rolled inside the limiting hole, and ball sleeves 21 are rolled on both sides of the rotating ball 20, facing the side of the L-shaped rocker arm 22. The ball sleeve 21 is fixedly connected to the L-shaped swing rod 22. When the main servo motor 15 is started to drive the worm gear 17 to rotate, the worm wheel 18 is controlled to rotate synchronously. Then, the rotating ball 20 placed in the limit hole rotates around the worm wheel 18 while rotating with the worm wheel 18. This drives the L-shaped swing rod 22 to swing up and down while rotating back and forth left and right. Then, the connecting piece 24 at the end is controlled to move up and down and swing back and forth inside the wastewater pH adjustment tank 10 to stir the wastewater inside the wastewater pH adjustment tank 10.

[0042] The L-shaped swing arm 22, near the worm gear 18, radially moves through the swing shaft 37. The two ends of the swing shaft 37 are movably connected to a set of U-shaped swing frames 36. A rotating disk 35 is installed at the bottom of the U-shaped swing frame 36. The bottom of the rotating disk 35 is connected to a support base 25 through a top rotating component. At the same time, a drive tooth 28 is connected to the bottom of the support base 25 through a bottom rotating component. One side of the drive tooth 28 meshes with the driven gear ring 38. Meanwhile, the center of the drive tooth 28 is connected to a connecting shaft 31 through a rotating transmission component. The end of the connecting shaft 31 is connected to the output shaft 16 through a transmission belt 32. That is, when the main servo motor 15 is running, it drives the output shaft 16 to rotate. Then, under the action of the transmission belt 32, the connecting shaft 31, and the rotating connecting component, the drive tooth 28 is driven to rotate synchronously, thereby driving the wastewater pH adjustment tank 10 to rotate, realizing the full conversion and utilization of kinetic energy.

[0043] In this embodiment of the invention, a plurality of mounting holes are evenly provided on the tank support base 11, and the tank support base 11 is fixed with bolts and other positioning components to maintain the stable operation of the wastewater pH adjustment tank 10; a discharge hole 14 is provided on the lower part of the side wall of the wastewater pH adjustment tank 10 for the discharge and transfer of the adjusted pure wastewater.

[0044] A T-shaped rotating support rod 12 is installed at the bottom center of the wastewater pH adjustment tank 10. The tank support base 11 corresponding to the rotating support rod 12 has a support rotation groove 13 that is rotatably connected to the rotating support rod 12. That is, with the rotating connection between the rotating support rod 12 and the support rotation groove 13, the wastewater pH adjustment tank 10 is kept in place on the tank support base 11 and rotates stably.

[0045] The L-shaped swing arm 22 is detachably connected to the stirring blade 23 via a connector 24. When the L-shaped swing arm 22 swings, it controls the stirring blade 23 to rotate and rise simultaneously. The stirring blade 23 increases the contact area with the pure wastewater, thereby improving the stirring efficiency. The connector 24 includes a screw installed at the end of the L-shaped swing arm 22. The stirring blade 23 has an internal threaded hole. The screw is threaded into the internal threaded hole, thereby realizing the detachable connection between the stirring blade 23 and the L-shaped swing arm 22. In addition to the above-mentioned choice, the structure of the connector 24 can also be connected by a pin + hole, a rod + groove, etc. The specific selection will not be elaborated here.

[0046] In one embodiment of the present invention, a wheel axle 19 is connected to the center of the worm gear 18. Support seats are movably connected to the middle of the output shaft 16 and the connecting shaft 31, the worm 17 and the end of the wheel axle 19 to maintain their stable rotational operation. The connecting shaft 31 and the output shaft 16 at both ends of the transmission belt 32 are mounted on the output shaft 16 and the connecting shaft 31 by pulleys to maintain the anti-slip rotational connection between the transmission belt 32 and the output shaft 16 and the connecting shaft 31. At the same time, the support base 25 is supported and fixed on one side by a fixing rod or a fixing frame. The fixing rod and the fixing frame can adopt common installation and fixing structures, which will not be described in detail here.

[0047] As a preferred embodiment of the present invention, the top rotating component and the bottom rotating component respectively include a rotating connection structure of a top rotating shaft 33, a top rotating groove 34 and a bottom rotating shaft 26, a bottom rotating groove 27, which can maintain the rotating connection while limiting the position to prevent separation.

[0048] As a preferred embodiment of the present invention, the rotating transmission component includes a bevel gear 29 mounted on the bottom of the drive gear 28 via a connecting rod, a bevel gear 30 vertically meshing on one side of the bevel gear 29, and a bevel gear 30 fixedly connected to the connecting shaft 31 on one side of the bevel gear 29.

[0049] The connector 24 and the L-shaped swing arm 22 are made of acid and alkali resistant materials to ensure safe and long-term use when in contact with pure wastewater.

[0050] As a preferred embodiment of the present invention, a pH probe with its end extending into the interior of the wastewater pH adjustment tank 10 is provided on one side of the top of the wastewater pH adjustment tank 10, for real-time monitoring of the acidity and alkalinity of the pure wastewater inside the wastewater pH adjustment tank 10, so as to ensure real-time packing control based on the detection results when pH adjustment is performed.

[0051] The wastewater pH adjustment tank 10 is equipped with an acid dosing unit, an alkali dosing unit, a precise metering pump, and a chemical storage tank on its top exterior. It is also integrated with a PLC control system. When adjusting the pH of pure wastewater, the corresponding solution is precisely injected into the tank through the cooperation of the above-mentioned units, metering pump, and storage tank.

[0052] Specifically, the high-precision pH probe (±0.01pH) monitors the pH value of the wastewater in real time. The PLC control system receives the pH signal and compares it with the set value. It calculates the required dosage through the PID algorithm and outputs control signals to the servo motor 15 and the metering pump.

[0053] When pH is high:

[0054] Start the acid metering pump (dilute sulfuric acid / HCl).

[0055] The pump speed is adjusted according to the pulse frequency output by the PLC (adjustable from 0.1-10L / min).

[0056] When pH is low:

[0057] Start the alkali metering pump (NaOH solution).

[0058] The medicine solution is precisely drawn from a storage tank equipped with a level alarm.

[0059] Mixed reaction system:

[0060] Servo motor 15 receives PLC commands:

[0061] The stirring speed is automatically adjusted based on the flow signal (usually 500-1500 rpm).

[0062] Ensure that the chemical solution and wastewater are thoroughly mixed in the reaction tank.

[0063] Static mixers assist in rapid homogenization.

[0064] It should be noted that for the specific details of the connection relationship and cooperation principle between the above-mentioned PLC control system, acid dosing unit, alkali dosing unit, precision metering pump and drug storage tank, please refer to the existing technology. Since the core of this technical solution lies in the design of the stirring component, it will not be elaborated here.

[0065] The working principle of this utility model is as follows: In the idle position of this device, all the aforementioned driving components (representing power elements, electrical devices, and compatible power supplies) are connected via wires. The electrical connections are completed in sequence between the working components. The detailed connection methods are well-known in the field. The following mainly describes the working principle and process, without further explanation of the electrical control.

[0066] Wastewater injection: Semiconductor pure wastewater is injected into the wastewater pH adjustment tank 10 through pipeline.

[0067] pH monitoring: The pH probe detects the pH value of the wastewater in real time and transmits the data to the PLC control system.

[0068] Dosing adjustment: The PLC starts the acid or alkali metering pump according to the pH value to accurately add the agent into the adjustment tank.

[0069] Stirring and mixing: The main servo motor 15 starts, driving the worm gear 17 and worm wheel 18, which in turn drive the L-shaped rocker arm 22 and stirring blade 23 to perform compound motion; at the same time, the power is transmitted to the driven gear ring 38 through the transmission belt 32, bevel gears 29 and 30 and drive gear 28, causing the regulating box to rotate.

[0070] Wastewater discharge: After the adjustment is completed, the wastewater is discharged through the discharge hole 14 and enters the subsequent treatment unit.

[0071] The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention.

Claims

1. A pH adjustment device for a semiconductor pure wastewater treatment system, characterized in that, It includes a wastewater pH adjustment tank (10), a tank support base (11), a swing-type stirring assembly, and a power mechanism; the wastewater pH adjustment tank (10) has an inverted frustum structure and is rotatably mounted on the tank support base (11) at the bottom; the swing-type stirring assembly includes an L-shaped swing rod (22) and detachable stirring blades (23) for stirring the wastewater; the power mechanism includes a main servo motor (15), a worm gear (17), and a worm wheel (18) to drive the stirring assembly to swing and synchronously drive the wastewater pH adjustment tank (10) to rotate.

2. The pH adjustment device for a semiconductor pure wastewater treatment system according to claim 1, characterized in that, The bottom of the wastewater pH adjustment tank (10) is provided with a rotating support rod (12), which is rotatably connected to the support rotation groove (13) on the tank support base (11).

3. The pH adjustment device for a semiconductor pure wastewater treatment system according to claim 1, characterized in that, The L-shaped swing arm (22) is connected to the limiting hole of the worm gear (18) through the rotating ball (20) and the ball sleeve (21) to realize the up-and-down swing and left-and-right rotation.

4. The pH adjustment device for a semiconductor pure wastewater treatment system according to claim 1, characterized in that, The wastewater pH adjustment tank (10) has a driven gear ring (38) on the upper part of its outer wall, which meshes with the drive gear (28). The drive gear (28) is linked with the output shaft (16) of the main servo motor (15) through bevel gear one (29), bevel gear two (30) and connecting shaft (31).

5. A pH adjustment device for a semiconductor pure wastewater treatment system according to claim 1, characterized in that, It also includes a pH probe, a PLC control system, an acid dosing unit, and an alkali dosing unit, used for real-time monitoring and adjustment of the pH value of wastewater.

6. The pH adjusting device according to claim 1, characterized in that, The stirring blade (23) is detachably connected to the L-shaped rocker arm (22) via a screw and an internal threaded hole.

7. A pH adjustment device for a semiconductor pure wastewater treatment system according to claim 1, characterized in that, The power mechanism also includes a transmission belt (32) connected to an output shaft (16) and a connecting shaft (31) to realize power transmission.

8. A pH adjustment device for a semiconductor pure wastewater treatment system according to claim 1, characterized in that, The wastewater pH adjustment tank (10) has a discharge hole (14) on the lower side wall.