Flat plate battery piece warehouse carrier structure and reaction chamber

Abstract

The utility model discloses a flat plate type battery piece warehouse carrier structure and reaction chamber, include: the carrier plate, and the multiple battery piece warehouse of its upper place have, and the battery piece warehouse between the carrier plate, and along the vertical direction setting adjacent two battery piece warehouse between all be provided with positioning assembly, and positioning assembly is used for making the battery piece warehouse on the carrier plate along the vertical direction each other stacked setting. To realize the positioning of the battery piece warehouse of the bottom layer and the carrier plate and the positioning of the battery piece warehouse between the adjacent layer and layer, thereby remove the frame to simplify the battery piece warehouse carrier structure, need not worry that the frame will take place the situation of the plastic deformation of unrecoverable, thereby guarantee production safety and equipment long -term operation stability.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic device technology, and in particular to a flat-plate cell carrier structure and reaction chamber. Background Technology

[0002] With the development of the semiconductor, integrated circuit and photovoltaic industries, ALD (atomic layer deposition technology) has been promoted as a key thin film deposition process. Compared with traditional CVD and PVD technologies, its low-temperature process and high-precision and high-uniformity coating capabilities give it unique advantages in the field of thin film preparation in the photovoltaic industry.

[0003] Existing cell storage carrier structures are frame-type structures, which include a frame housing several fixed cell compartments and require gas channels. This results in a large size and weight, which increases significantly when the cell compartments are full. Prolonged operation of such frame-type cell storage carriers under full cell compartment load conditions can lead to irreversible plastic deformation of the frame, affecting production safety and long-term operational stability. Utility Model Content

[0004] This invention provides a flat-plate battery cell storage carrier structure and reaction chamber to solve the problem that the frame of the existing frame-type battery cell storage carrier will undergo irreversible plastic deformation, leading to production safety and long-term operational stability issues.

[0005] The technical solution of this utility model is a flat-panel battery cell carrier structure, comprising:

[0006] The carrier plate has multiple cell compartments placed on it. Positioning components are provided between the cell compartments and the carrier plate, as well as between two adjacent cell compartments arranged vertically. The positioning components are used to make the cell compartments stacked on the carrier plate vertically.

[0007] Furthermore, the carrier plate has two sets of cell compartments arranged side by side along its width direction, and the cell coating surfaces of the two sets of cell compartments are arranged facing away from each other.

[0008] All cell compartments in each cell compartment group are arranged to extend along the length of the carrier plate.

[0009] Furthermore, the positioning component includes a positioning groove and a positioning block;

[0010] The cell compartment has multiple positioning slots along the bottom wall in the vertical direction;

[0011] The side of the carrier plate facing the cell compartment and the top wall of the cell compartment along the vertical direction are equipped with matching positioning blocks corresponding to the positioning slots. The positioning blocks are matched and inserted into the corresponding positioning slots.

[0012] Furthermore, the positioning groove can be any one of a trapezoidal groove, a V-shaped groove, or a multi-stage stepped groove.

[0013] This utility model also proposes a reaction chamber, including the above-mentioned flat-plate battery cell carrier structure.

[0014] Furthermore, the reaction chamber includes:

[0015] First side plates are respectively provided on both sides along the width direction of the carrier plate, and heating components are provided on the inner side of the first side plates; the side of the cell compartment facing the nearest first side plate is the cell coating surface, and the cell coating surface is parallel to the heating surface of the corresponding heating component and forms a first gas channel at intervals.

[0016] A second side plate that can be opened and closed is provided on one side along the length direction of the carrier plate, and a spray assembly is provided on the second side plate corresponding to the first gas channel.

[0017] Furthermore, the reaction chamber also includes:

[0018] A third side plate is provided on the top and / or bottom side of the carrier plate along the vertical direction, and a heating component is provided on the inner side of the third side plate.

[0019] Furthermore, the reaction chamber includes:

[0020] A third side plate is provided on the top side of the vertical direction of the carrier plate, and a heating component is provided on the inner side of the third side plate;

[0021] The cell compartments are not stacked vertically on the carrier plate, and the side of the cell compartment facing the top of the reaction chamber is the cell coating surface. The cell coating surface is parallel to the heating surface of the corresponding heating component and forms a second gas channel at intervals.

[0022] A second side plate that can be opened and closed is provided on one side along the length direction of the carrier plate, and a spray assembly is provided on the second side plate corresponding to the second gas channel.

[0023] Furthermore, the reaction chamber also includes:

[0024] A first side plate is provided on both sides along the width direction of the carrier plate, and a heating component is provided on the inner side of the first side plate.

[0025] Furthermore, the heating surface of any side panel includes a first temperature zone, a second temperature zone, and a third temperature zone, with a corresponding heating component surrounding each temperature zone.

[0026] Compared with the prior art, the present invention has at least the following beneficial effects:

[0027] The carrier plate of this utility model uses a positioning component to stack the cell compartments vertically, thereby achieving the positioning of the bottom cell compartment and the carrier plate, as well as the positioning of the cell compartments between adjacent layers. This eliminates the need for a frame, simplifying the cell compartment carrier structure and eliminating concerns about irreversible plastic deformation of the frame, thus ensuring production safety and long-term operational stability of the equipment. Attached Figure Description

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains; the terminology used herein in the specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and accompanying drawings of this invention are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or accompanying drawings of this invention are used to distinguish different objects and not to describe a particular order.

[0029] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of the flat-plate battery cell carrier structure proposed in this utility model;

[0031] Figure 2 for Figure 1 An enlarged schematic diagram of reference numeral A in the attached figure;

[0032] Figure 3 for Figure 1 An enlarged view of reference numeral B in the attached diagram;

[0033] Figure 4 This is a partially exploded schematic diagram of the first flat-plate battery cell carrier structure proposed in this utility model placed in the reaction chamber.

[0034] Figure 5 This is a schematic diagram of the gas flow in the reaction chamber proposed in this utility model;

[0035] Figure 6 This is a partially exploded schematic diagram of the second flat-plate battery cell carrier structure proposed in this utility model placed in the reaction chamber.

[0036] Figure 7This is a schematic diagram of the interior of the first side plate proposed in this utility model.

[0037] Figure label:

[0038] 10. Carrier plate; 101. Connecting block;

[0039] 20. Cell compartment; 201. Coated surface of the cell;

[0040] 30. Positioning component; 301. Positioning groove; 302. Positioning block;

[0041] 40. First side panel;

[0042] 50. Heating assembly; 501. Heating surface; 502. First temperature zone; 503. Second temperature zone; 504. Third temperature zone; 505. First outlet flange; 506. Second outlet flange; 507. Third outlet flange; 508. First fastener; 509. Second fastener;

[0043] 60. First gas passage;

[0044] 70. Second side panel;

[0045] 80. Spray assembly; 801. Spray nozzle; 802. Air vent;

[0046] 90. Third side panel. Detailed Implementation

[0047] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model. Therefore, a feature pointed out in this specification is used to describe one feature of one embodiment of the present utility model, and does not imply that every embodiment of the present utility model must have the described feature. Furthermore, it should be noted that this specification describes many features. Although certain features may be combined to illustrate possible system designs, these features may also be used in other combinations not explicitly stated. Therefore, unless otherwise stated, the described combinations are not intended to be limiting.

[0048] The principle and structure of this utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0049] The existing cell storage carrier structure is a frame structure, which includes a frame with several fixed cell storage compartments. The frame also has gas channels so that the passivation surface of the cell in the cell storage compartment is located on both sides of the gas channels. This means that the passivation surface of the cell and the gas channels are both located inside the frame, and the outer wall of the frame must be designed with special clamping, positioning and operation space for automated equipment (such as robotic arms, grippers, positioning pins) to ensure accurate picking, placing and docking.

[0050] Thus, to fulfill the aforementioned functions, the frame-type cell storage carrier structure inevitably results in a large size and weight; and when fully loaded with cells, the total weight is even more considerable. Prolonged operation of this frame-type cell storage carrier under full load can lead to irreversible plastic deformation of the frame, affecting production safety and the long-term operational stability of the equipment.

[0051] Therefore, to address the issue of irreversible plastic deformation in the frame of a frame-type battery cell storage carrier, which leads to production safety and long-term equipment operational stability problems, in some embodiments, such as... Figures 1-3 As shown, this utility model proposes a flat-plate battery cell carrier structure, comprising:

[0052] The carrier plate 10 has multiple cell compartments 20 placed on it. Positioning components 30 are provided between the cell compartments 20 and the carrier plate 10, and between two adjacent cell compartments 20 arranged in the vertical direction. The positioning components 30 are used to make the cell compartments 20 stacked on the carrier plate 10 in the vertical direction.

[0053] It should be noted that the vertical direction proposed in this embodiment is preferably the Z-axis direction. Furthermore, the shape of the cell compartment 20 is preferably cuboid, cube, or approximately cuboid. The flat-plate cell compartment carrier structure proposed in this embodiment is used to fill the cell compartment 20, which is filled with cells to be passivated. The flat-plate cell compartment carrier structure is then sent into the reaction chamber of the ALD edge passivation equipment for the edge passivation coating process.

[0054] In this way, the carrier plate 10 stacks the cell compartments 20 vertically together through the positioning component 30, realizing the positioning of the bottom cell compartment 20 with the carrier plate 10 and the positioning of the cell compartments 20 between adjacent layers. In this way, compared with the frame-type cell compartment carrier, the present invention eliminates the frame to simplify the structure of the cell compartment carrier, and there is no need to worry about the frame undergoing irreversible plastic deformation, thereby ensuring production safety and long-term operational stability of the equipment; moreover, the stacked cell compartments 20 can increase production capacity and reduce equipment operating costs.

[0055] In some embodiments, for ease of understanding, such as Figure 1As shown in the figure, this embodiment presents the composition of one type of flat-panel battery cell carrier structure:

[0056] The carrier plate 10 has two sets of cell compartments arranged side by side along its width direction, and the cell coating surfaces 201 of the two sets of cell compartments are arranged facing away from each other.

[0057] All cell compartments 20 in each cell compartment group are arranged to extend along the length of the carrier plate 10.

[0058] It should be noted that the width direction proposed in this embodiment is preferably the Y-axis direction, and the length direction proposed in this embodiment is preferably the X-axis direction.

[0059] In any given set of cell cell compartments, the cell coating surfaces 201 of all cell compartments 20 are located on the same vertical plane.

[0060] In some embodiments, to ensure the positioning of the bottommost cell compartment 20 and the carrier plate 10, as well as the positioning of the cell compartments 20 between adjacent layers, such as... Figures 2-3 As shown, the positioning component 30 includes a positioning groove 301 and a positioning block 302;

[0061] The cell compartment 20 has multiple positioning grooves 301 along its vertical bottom wall;

[0062] The side of the carrier plate 10 facing the cell compartment 20 and the top wall of the cell compartment 20 along the vertical direction are provided with matching positioning blocks 302 corresponding to the positioning slots 301. The positioning blocks 302 are matched and inserted into the corresponding positioning slots 301.

[0063] It should be noted that, for ease of understanding, this embodiment proposes that one positioning groove 301 be provided on each of the four sides of the bottom wall edge of the battery cell compartment 20. Of course, multiple positioning grooves 301 can also be provided on each of the four sides of the bottom wall edge of the battery cell compartment 20, which is not limited here.

[0064] Specifically, the positioning groove 301 is any one of a trapezoidal groove, a V-shaped groove, or a multi-stage stepped groove.

[0065] Furthermore, the positioning groove 301 proposed in this embodiment is preferably a trapezoidal groove, so that the two inclined sides form a gradually narrowing channel. When the positioning block 302 is inserted into the corresponding positioning groove 301, it will automatically correct the position offset to achieve self-guiding positioning. Moreover, the inclined side of the trapezoidal groove can also distribute the load and improve the service life of the positioning component 30.

[0066] In some embodiments, such as Figure 1As shown, the carrier plate 10 extends outward along its width direction to form a docking block 101. The docking block 101 is used to dock with automated equipment (including any one of robots, robotic arms or grippers, which is not limited here) so that the automated equipment can dock or grasp the carrier plate 10 through the docking block 101, thereby placing or removing the carrier plate 10 into or out of the reaction chamber.

[0067] In some embodiments, the present invention also provides a reaction chamber, which includes the above-described flat-plate battery cell carrier structure.

[0068] It should be noted that the reaction chamber proposed in this embodiment is illustrated by the reaction chamber of the ALD edge passivation device, and the shape of the reaction chamber is preferably cuboid or approximately cuboid. Of course, the shape of the reaction chamber can also be cube or other shapes suitable for placing the flat battery cell carrier structure, which are not limited here.

[0069] Among them, such as Figures 4-5 As shown, the reaction chamber includes:

[0070] First side plates 40 are respectively provided on both sides along the width direction of the carrier plate 10, and heating components 50 are provided on the inner side of the first side plates 40; the side of the cell compartment 20 facing the nearest first side plate 40 is the cell coating surface 201, and the cell coating surface 201 is parallel to the heating surface 501 of the corresponding heating component 50 and forms a first gas channel 60 at intervals.

[0071] A second side plate 70 that can be opened and closed is provided on one side along the length direction of the carrier plate 10, and a spray assembly 80 is provided on each of the second side plates 70 corresponding to the first gas channel 60.

[0072] It should be noted that the reaction chamber proposed in this embodiment also includes a control unit (not shown, the same throughout); and this embodiment proposes two first gas channels 60, each first gas channel 60 is provided with a corresponding spray assembly 80, the two spray assemblies 80 are not connected to each other.

[0073] In this way, when the reaction chamber is not working, the second side plate 70 opens relative to the reaction chamber to form an entrance. Then, the automated equipment connects the carrier plate 10 through the docking block 101, so that the entire flat-plate battery cell carrier structure enters the reaction chamber through the entrance and is correctly placed. The control unit will first start the spray assembly 80, which will sequentially and evenly spray the passivation precursor gas and inert gas into the first gas channel 60. Then, the control unit will start the heating assembly 50 to start the edge passivation coating process on the battery cell coating surface 201 of the battery cell compartment 20.

[0074] Compared to the frame-type cell storage carrier where the passivation surface of the cell (equivalent to the coating surface 201 of the cell, the same throughout) and the gas channel are both located inside the frame, this utility model places the first gas channel 60 on the outside of the flat-plate cell storage carrier structure, and the coating surface 201 of the cell is all facing outwards. Furthermore, the space reserved for the clamping and positioning of automated equipment coincides with the first gas channel 60, thereby simplifying the structure of the flat-plate cell storage carrier and reducing its volume and weight.

[0075] The cell coating surface 201 of the clustered cell storage group is parallel and spaced apart from the heating surface 501 of the corresponding heating component 50, so that the heating surface 501 of the heating component 50 can directly radiate heat to the cell coating surface 201. This improves the working efficiency of the heating component 50 when heating the gas in the first gas channel 60, and enables rapid temperature control of the gas. It also ensures the temperature uniformity of the cell coating surface 201 and the convenience of adjustable process temperature window, ensuring the uniformity of coating quality, effectively improving production efficiency and capacity, reducing equipment operating costs, and enhancing product competitiveness. Moreover, compared with the frame-type cell storage carrier, there is no frame to prevent the heat provided by the heating component 50 from reaching the cell coating surface 201.

[0076] Specifically, the spray assembly 80 includes spray holes 801 and air holes 802;

[0077] The inner side of the second side plate 70 is provided with spray hole groups on both sides of the first gas channel 60 along the vertical direction and at uniform intervals. The spray holes 801 of each spray hole group extend along the width direction of the carrier plate 10, and the maximum extension length shall not exceed the width of the first gas channel 60. The spray hole groups corresponding to the two first gas channels 60 are staggered in the vertical direction to ensure that the inert gas flows uniformly through the coating surface 201 of the battery cell. The inner side of the second side plate 70 is also provided with a vent 802 for the outflow of precursor gas on both sides of the first gas channel 60. In this way, the spray assembly 80 ensures that the precursor gas and inert gas enter the first gas channel 60 in pulses alternately through the spray holes 801 and the vent 802 to achieve the functions of gas uniform flow and spraying.

[0078] In order to further increase the heating rate, ensure the uniformity of coating quality, and improve production efficiency and capacity, such as Figure 4 As shown, the reaction chamber also includes:

[0079] A third side plate 90 is provided on the top and / or bottom sides of the carrier plate 10 in the vertical direction, and a heating component 50 is provided on the inner side of the third side plate 90.

[0080] Of course, a heating component 50 can also be provided on the inner side of the second side plate 70 away from the spray assembly 80 of the reaction chamber to further improve the temperature control efficiency of the heating component 50, which is not limited here.

[0081] In other embodiments, such as Figure 6 As shown, the reaction chamber includes:

[0082] A third side plate 90 is provided on the top side along the vertical direction of the carrier plate 10, and a heating component 50 is provided on the inner side of the third side plate 90.

[0083] The cell compartment 20 is not stacked on the carrier plate 10 in the vertical direction, and the side of the cell compartment 20 facing the top of the reaction chamber is the cell coating surface 201. The cell coating surface 201 is parallel to the heating surface 501 of the corresponding heating component 50 and forms a second gas channel (not shown, the same throughout the text).

[0084] A second side plate 70 that can be opened and closed is provided on one side along the length direction of the carrier plate 10, and a spray assembly 80 is provided on each of the second side plates 70 corresponding to the second gas channel.

[0085] It is understood that the non-stacked arrangement proposed in this embodiment is equivalent to placing only one layer of battery cell compartment 20 on the carrier plate 10.

[0086] In this way, when the reaction chamber is not in operation, the second side plate 70 opens relative to the reaction chamber to form an entrance. Then, the automated equipment connects the carrier plate 10 through the docking block 101, so that the entire flat-plate battery cell carrier structure enters the reaction chamber through the entrance and is correctly placed. The control unit will first start the spray assembly 80, which will sequentially and evenly spray the passivation precursor gas and inert gas into the second gas channel. Then, the control unit will start the heating assembly 50 to start the edge passivation coating process on the battery cell coating surface 201 of the battery cell compartment 20.

[0087] Furthermore, the battery cell coating surface 201 and the corresponding heating surface 501 of the heating component 50 are arranged parallel and spaced apart, so that the heating surface 501 of the heating component 50 can directly radiate heat to the battery cell coating surface 201. This improves the working efficiency of the heating component 50 when heating the gas in the second gas channel, and enables rapid temperature control of the gas. It also ensures the temperature uniformity of the battery cell coating surface 201 and the convenience of adjustable process temperature window, ensuring the uniformity of coating quality, effectively improving production efficiency and capacity, reducing equipment operating costs, and enhancing product competitiveness.

[0088] Furthermore, the spray assembly 80 can change the opening position of the spray hole 801 to match the position of the battery cell coating surface 201, thereby changing the direction of the spray air intake, making it flexible and versatile.

[0089] To further increase the heating rate, ensure the uniformity of coating quality, and improve production efficiency and capacity, the reaction chamber also includes:

[0090] A first side plate 40 is provided on both sides along the width direction of the carrier plate 10, and a heating component 50 is provided on the inner side of the first side plate 40.

[0091] Of course, a heating component 50 may also be provided on the inner side of the third side plate 90 located on the bottom side of the vertical direction of the carrier plate 10, and / or a heating component 50 may also be provided on the inner side of the second side plate 70 of the reaction chamber away from the spray assembly 80, so as to further improve the temperature control efficiency of the heating component 50, which is not limited here.

[0092] In some embodiments, to further improve the accuracy of temperature control of the heating assembly 50, such as Figure 7 As shown, the heating surface 501 of any side panel includes a first temperature zone 502, a second temperature zone 503 and a third temperature zone 504, and each temperature zone is surrounded by a corresponding heating component 50.

[0093] Specifically, the temperature of the first temperature zone 502 can be controlled by the first outlet flange 505, the temperature of the second temperature zone 503 can be controlled by the second outlet flange 506, and the temperature of the third temperature zone 504 can be controlled by the third outlet flange 507. The outlet flange leads the wire of the heating element (thermocouple) inside the heating component 50 in the corresponding temperature zone out of the reaction chamber. The outlet flange is a sealing flange that forms a seal with the tail of the reaction chamber (the tail of the reaction chamber is equivalent to the second side plate 70 of the reaction chamber away from the inlet).

[0094] Therefore, when the temperature of a certain temperature zone in the first gas channel 60 or the second gas channel is inconsistent with the temperature of other temperature zones, the temperature of that temperature zone can be adjusted accordingly to make the temperature of that temperature zone consistent with the temperature of other temperature zones, thereby improving the consistency of gas temperature in the first gas channel 60 or the second gas channel, thereby improving the coating uniformity of the battery cell coating surface 201; and zoned temperature control facilitates the maintenance of the heating component 50. When the heating component 50 of a certain temperature zone is damaged, only the damaged temperature zone can be disassembled for repair.

[0095] In addition, heating components 50 are arranged around each temperature zone to provide sufficient heat to the temperature zone. In order to enable the heating components 50 to achieve stable operation in the corresponding temperature zone, a plurality of first fixing members 508 are provided along the length direction and / or a plurality of second fixing members 509 are provided along the width direction in each heating component 50. The first fixing members 508 and the second fixing members 509 are both used to fix the heating components 50. The first fixing member 508 is preferably a pin buckle.

[0096] Obviously, the embodiments described above are only some embodiments of this utility model, not all embodiments. The accompanying drawings show preferred embodiments of this utility model, but do not limit the patent scope of this utility model. This utility model can be implemented in many different forms; rather, the purpose of providing these embodiments is to provide a more thorough and comprehensive understanding of the disclosure of this utility model. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing specific embodiments, or make equivalent substitutions for some of the technical features. Any equivalent structures made using the content of this utility model specification and drawings, directly or indirectly applied to other related technical fields, are similarly within the patent protection scope of this utility model.

Claims

1. A flat-panel battery cell storage carrier structure, characterized in that, include: A carrier plate (10) is provided on which multiple battery cell compartments (20) are placed. Positioning components (30) are provided between the battery cell compartments (20) and the carrier plate (10), and between two adjacent battery cell compartments (20) arranged in the vertical direction. The positioning components (30) are used to make the battery cell compartments (20) stacked on the carrier plate (10) in the vertical direction. The positioning component (30) includes a positioning groove (301) and a positioning block (302); The cell compartment (20) has multiple positioning grooves (301) along the bottom wall in the vertical direction. The carrier plate (10) facing the cell compartment (20) and the top wall of the cell compartment (20) in the vertical direction are provided with matching positioning blocks (302) corresponding to the positioning groove (301), and the positioning blocks (302) are matched and inserted into the corresponding positioning groove (301).

2. The flat-plate battery cell carrier structure according to claim 1, characterized in that, The carrier plate (10) has two sets of battery cell compartments arranged side by side along its width direction, and the battery cell coating surfaces (201) of the two sets of battery cell compartments are arranged facing away from each other. All the cell compartments (20) in each cell compartment group are arranged to extend along the length of the carrier plate (10).

3. The flat-plate battery cell carrier structure according to claim 1, characterized in that, The positioning groove (301) is any one of a trapezoidal groove, a V-shaped groove, or a multi-level stepped groove.

4. A reaction chamber, characterized in that, The reaction chamber includes the flat-plate cell carrier structure as described in any one of claims 1 to 3.

5. The reaction chamber according to claim 4, characterized in that, The reaction chamber includes: First side plates (40) are respectively provided on both sides along the width direction of the carrier plate (10), and heating components (50) are provided on the inner side of the first side plates (40); the side of the cell compartment (20) facing the nearest first side plate (40) is the cell coating surface (201), and the cell coating surface (201) is parallel to and spaced apart from the heating surface (501) of the corresponding heating component (50) to form a first gas channel (60). A second side plate (70) that can be opened and closed is provided on one side along the length direction of the carrier plate (10), and the second side plate (70) is provided with a spray assembly (80) corresponding to the first gas channel (60).

6. The reaction chamber according to claim 5, characterized in that, The reaction chamber further includes: A third side plate (90) is provided on the top and / or bottom side of the carrier plate (10) in the vertical direction, and a heating component (50) is provided on the inner side of the third side plate (90).

7. The reaction chamber according to claim 4, characterized in that, The reaction chamber includes: A third side plate (90) is provided on the top side of the vertical direction of the carrier plate (10), and a heating component (50) is provided on the inner side of the third side plate (90). The battery cell compartment (20) is not stacked on the carrier plate (10) in the vertical direction, and the side of the battery cell compartment (20) facing the top of the reaction chamber is the battery cell coating surface (201). The battery cell coating surface (201) is parallel to and spaced apart from the heating surface (501) of the corresponding heating component (50) to form a second gas channel. A second side plate (70) that can be opened and closed is provided on one side along the length direction of the carrier plate (10), and a spray assembly (80) is provided on each of the second side plates (70) corresponding to the second gas channel.

8. The reaction chamber according to claim 7, characterized in that, The reaction chamber further includes: A first side plate (40) is provided on both sides along the width direction of the carrier plate (10), and a heating component (50) is provided on the inner side of the first side plate (40).

9. The reaction chamber according to any one of claims 5 to 8, characterized in that, The heating surface (501) of any side panel includes a first temperature zone (502), a second temperature zone (503) and a third temperature zone (504), and each temperature zone is surrounded by a corresponding heating component (50).

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