A multi-axis motion platform

By employing multiple Z-axis linear motors and air-bearing limiters in a multi-axis motion platform, rapid leveling and high-precision positioning of the stage are achieved, solving the problems of low precision and high cost in existing technologies and reducing dependence on the performance of individual motors.

CN224509021UActive Publication Date: 2026-07-17FOSHAN DMT INTELLIGENT EQUIPMENT TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202521514162.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-07-19
Publication Date
2026-07-17
Estimated Expiration
2035-07-19

AI Technical Summary

Technical Problem

Existing multi-axis motion platforms suffer from low accuracy and high cost during leveling and positioning. In particular, single-motor driven stages are difficult to self-adjust under off-center load conditions, and excess displacement is difficult to compensate for, affecting machining accuracy and cost.

Method used

Multiple Z-axis linear motors are arranged at intervals around the central axis of the servo stage. The servo stage and the frame are connected by air-bearing limiters. Combined with grating rulers and photoelectric switches, the stage can be quickly leveled, reducing the dependence on the performance of individual motors.

Benefits of technology

It improves the repeatability of the stage and the ease of leveling operation, reduces the performance requirements of individual motors, and lowers the overall cost of the machine.

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Abstract

The utility model belongs to lathe technical field discloses a kind of multi-axis motion platform, including base, X-axis sliding table, X-axis linear motor, Y-axis sliding table, Y-axis linear motor, lifting device being set on Y-axis sliding table and object carrier being fixed in the top end of lifting device.Lifting device includes Z-axis linear motor, frame being fixed on Y-axis sliding table and follow-up table being located in frame;Follow-up table is fixed in object carrier lower side, and radial limit connection is carried out using air bearing between the outer circumferential side of follow-up table and the inner circumferential side of frame;The quantity of Z-axis linear motor is multiple, and multiple Z-axis linear motor is arranged at the center axis of Z-axis direction around follow-up table, the stator of each Z-axis linear motor is fixed on Y-axis sliding table 4, and the rotor of each Z-axis linear motor is respectively connected with follow-up table fixedly connected.Adopting multiple Z-axis linear motor is convenient for leveling operation to object carrier, and it is favorable to improve the precision of object carrier lifting movement.
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Claims

1. A multi-axis motion platform, comprising a base, an X-axis slide, an X-axis linear motor disposed between the base and the X-axis slide, a Y-axis slide located above the X-axis slide, a Y-axis linear motor disposed between the X-axis slide and the Y-axis slide, a lifting device disposed on the Y-axis slide, and a workpiece platform fixed to the top of the lifting device; characterized in that, The lifting device includes a Z-axis linear motor, a frame fixed on the Y-axis slide, and a follower table located within the frame; The follower stage is fixed to the lower side of the platform, and the outer periphery of the follower stage and the inner periphery of the frame are connected radially by air flotation. There are multiple Z-axis linear motors, which are arranged at intervals around the central axis of the follower stage in the Z-axis direction. The stator of each Z-axis linear motor is fixed on the Y-axis slide, and the mover of each Z-axis linear motor is fixedly connected to the follower stage.

2. The multi-axis motion platform of claim 1, wherein, The frame has a through hole for connecting to an external air source, and an air flotation block connected to the through hole is provided on the inner circumference of the frame.

3. The multi-axis motion platform of claim 1, wherein, The height of the frame is greater than the height of the servo stage; an air flotation block connected to an external air source is provided on the outer periphery of the servo stage.

4. The multi-axis motion platform of claim 1, wherein, The frame has a polygonal structure, with a mounting slot at each corner and a reading head in each slot. The shape of the follower stage is adapted to the frame, and a grating ruler is provided at each corner of the follower stage, with each grating ruler corresponding to each reading head.

5. The multi-axis motion platform of claim 1, wherein, A limit block is provided on the outer side of the follow-up stage, and a photoelectric switch is provided on the inner side of the frame. The limit block and the photoelectric switch cooperate to stop the movement.

6. The multi-axis motion platform of claim 1, wherein, On both opposite sides of the X-axis linear motor, there are first slide rails and a set of first sliding seats that cooperate with the first slide rails. The first slide rails and the first sliding seats are respectively fixed to the lower side of the base and the X-axis slide table.

7. The multi-axis motion platform of claim 1, wherein, A second slide rail and a second sliding seat that cooperate with the second slide rail are provided on both opposite sides of the Y-axis linear motor. The second slide rail is fixed on the upper side of the X-axis slide table, and the second sliding seat is fixed on the lower side of the Y-axis slide table.

8. The multi-axis motion platform according to any one of claims 1-7, wherein, Both the frame and the follower stage are quadrilateral structures; there are four Z-axis linear motors, which are respectively located on the four sides or four corners of the follower stage.

9. The multi-axis motion platform according to claim 8, characterized in that, The frame is made up of a first side plate and a second side plate, both of which are "L" shaped, connected by bolts to allow the gap between the frame and the follower table to be adjustable.

10. The multi-axis motion platform of claim 9, wherein, The lower ends of both the first and second side plates are provided with fixing parts with fixing holes, which are fixedly connected to the Y-axis slide table through the fixing holes.