Basket structure facilitating silicon wafer cleaning

By improving the telescopic plate and support mechanism of the silicon wafer cleaning basket, the problems of contact dead angles and silicon wafer damage during silicon wafer cleaning were solved, resulting in higher cleaning effect and equipment adaptability.

CN224521574UActive Publication Date: 2026-07-17WUXI RONG NENG SEMICON MATERIALS CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
WUXI RONG NENG SEMICON MATERIALS CO LTD
Filing Date
2025-07-28
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

The existing bottom crossbar structure design of silicon wafer cleaning baskets leads to problems such as cleaning fluid stagnation in dead corners and silicon wafer scratches and chipping, affecting the cleaning effect and silicon wafer loss.

Method used

It employs four telescopic plates and a support mechanism, combined with a triangular support crossbar and an adjustment mechanism, to reduce the contact area with the silicon wafers. It also adapts to different batches of silicon wafers with an adjustable positioning tooth and screw system, thereby improving cleaning flexibility.

Benefits of technology

It effectively reduces cleaning dead spots, improves the cleanliness of silicon wafers, reduces silicon wafer loss, and enhances the flexibility and convenience of cleaning equipment.

✦ Generated by Eureka AI based on patent content.

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  • Figure CN224521574U_ABST
    Figure CN224521574U_ABST
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Abstract

The utility model relates to the technical field of semiconductor manufacturing equipment, and disclose convenient silicon wafer cleaning's flower basket structure, including four expansion plates, the expansion plate one side sliding connection has the support mechanism, the surface fixed connection of support mechanism has two connecting blocks, the surface fixed connection of connecting block has the adjusting mechanism, the support mechanism includes the fixed plate sliding connection in expansion plate one side. This convenient silicon wafer cleaning's flower basket structure, through the setting of support mechanism, when using, the external silicon wafer main part is inserted in the middle part of two positioning teeth, the bottom lap is in the support mechanism surface, and the top of the two triangular support cross bars on the support mechanism is lapped on the bottom cross section of the external silicon wafer main part, reduces the contact area with the external silicon wafer main part cross section, effectively solves the problem that the contact area is dirty and is difficult to flush in the traditional support structure, and further improves the overall cleaning cleanliness of the silicon wafer.
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Claims

1. A wafer basket structure for facilitating wafer cleaning, comprising four telescopic plates (1), characterized in that: A support mechanism (2) is slidably connected to one side of the telescopic plate (1). Two connecting blocks (3) are fixedly connected to the surface of the support mechanism (2), and an adjustment mechanism (4) is fixedly connected to the surface of the connecting blocks (3). The support mechanism (2) includes a fixed plate (201) slidably connected to one side of the telescopic plate (1), and a triangular support crossbar (202) is fixedly connected to the lower surface of the fixed plate (201). The adjustment mechanism (4) includes a double-ended screw (401) fixedly connected to the surface of the connecting block (3). Positioning blocks (402) are inserted into both sides of the double-ended screw (401), and positioning nuts (403) are installed on both sides of the positioning blocks (402).

2. The wafer cleaning facilitating boat structure of claim 1, wherein: The positioning nut (403) is threaded onto the surface of the double-ended screw (401), and a vertical plate (5) is fixedly connected to one side of the positioning block (402).

3. The wafer cleaning facilitating boat structure of claim 1, wherein: The telescopic plate (1) is fixedly connected to one side of the upright plate (5), and the triangular support crossbar (202) is an isosceles triangle.

4. The wafer cleaning facilitating boat structure of claim 2, wherein: A through hole is provided in the middle of the surface of the upright plate (5), and several positioning teeth (6) are fixedly connected to the upper and lower surfaces of the upright plate (5).

5. The wafer cleaning facilitating boat structure of claim 4, wherein: The positioning teeth (6) are made of plastic, and an external silicon wafer body is inserted into the middle of the positioning teeth (6).

6. The wafer cleaning facilitating boat structure of claim 2, wherein: A handle (7) is fixedly connected to the top of the upright plate (5), and an anti-slip sleeve (8) is fitted onto the surface of the handle (7).

7. The wafer cleaning facilitating boat structure of claim 2, wherein: The bottom of the upright plate (5) is fixedly connected to a support leg (9), and the number of the support legs (9) is four.