Positioning device for drilling silicon target
By combining a positioning plate, a clamping plate, and a support column, the problem of easy deformation of the silicon target was solved, achieving stable positioning and efficient drilling.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- LUOYANG DINGMING OPTICAL TECH CO
- Filing Date
- 2025-07-07
- Publication Date
- 2026-07-21
AI Technical Summary
The thin silicon target is prone to deformation, and the positioning and clamping structure can cause product deformation, affecting the drilling quality.
The system employs a combination structure of positioning plate, clamping plate, and support column. The silicon target is stably fixed by a pneumatic box and a rotary clamping cylinder, which increases the force-bearing area and uniformity. It is then used in conjunction with a drilling template for drilling.
It achieves stable positioning accuracy and high-efficiency machining in silicon target drilling, avoids product deformation, and improves drilling efficiency.
Smart Images
Figure CN224526555U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the technical field of drilling positioning, specifically, it relates to a positioning device for silicon target drilling. Background Technology
[0002] A silicon target is a metal alloy material primarily used in metal sputtering processes. It uses argon ion bombardment to sputter and deposit aluminum / silicon atoms, forming a conductive layer on the chip surface to achieve electrical connections for electronic components. Its common composition is Al / Si (1%), and it is suitable for applications in electronics, optoelectronics, and military fields.
[0003] Silicon targets come in various shapes, including discs, rectangles, tubes, and irregular shapes, ranging in size from discs with a diameter of 1mm to tubes exceeding 1mm. They are manufactured using vacuum magnetic levitation melting combined with thermomechanical treatment and precision machining technology, resulting in stable material properties. Depending on the application requirements, some plate-shaped silicon targets may have through holes of different specifications, necessitating drilling. Due to the small thickness of the silicon targets, the clamping structure during positioning and clamping is located on the upper surface of the target. Because of the thinness and susceptibility of the silicon targets to deformation, the clamping force is concentrated in localized areas, easily leading to product deformation and affecting the drilling quality.
[0004] In view of this, this utility model is proposed. Utility Model Content
[0005] The technical problem to be solved by this utility model is to overcome the shortcomings of the prior art and provide a positioning device for silicon target drilling. The basic concept of the technical solution adopted by this utility model to solve the above technical problem is as follows: A positioning device for drilling silicon targets includes a base support plate and a positioning plate. A positioning seat is fixedly mounted on the base support plate, and the positioning plate is mounted on the positioning seat. A pneumatic housing is provided on the side of the positioning plate, and a rotary clamping cylinder is provided on the side of the pneumatic housing. A fixed upright plate is provided on the opposite side of the positioning seat, and a clamping cylinder is installed on the outer side of the fixed upright plate. A clamping plate is installed at the end of the telescopic rod of the clamping cylinder. Multiple placement support columns are provided on the base support plate between the positioning plate and the clamping plate. A silicon target is placed on the placement support columns, and a drill template is provided above the silicon target. Drill template ear plates are provided at both ends of the drill template. Positioning mating holes are opened on the drill template ear plates, and positioning columns are correspondingly provided in the positioning mating holes. The mating of the positioning columns with the positioning mating holes is used to position the drill template.
[0006] As a further embodiment of this utility model: the drill template is provided with a drill sleeve adapted to the drilling of the silicon target, a rotary clamping cylinder is provided on the outer side of the drill jig ear plate of the drill template, a rotating pressure seat is provided at the upper end of the rotary clamping cylinder, and a clamping block is provided at the bottom pressing position of the rotating pressure seat, the hardness of the clamping block being less than the hardness of the silicon target.
[0007] As a further improvement of this utility model: the shape and specifications of the positioning plate are adapted to the shape and specifications of the silicon target, the positioning seat is an L-shaped structure, a positioning groove is provided on the upper mounting surface of the positioning seat, and a positioning block adapted to the positioning groove is provided on the outer side of the positioning plate, so as to improve the installation accuracy of the positioning plate.
[0008] As a further improvement of this utility model: the positioning plate and the positioning seat are fixedly connected by screws, a guide rod is provided on the outer side of the clamping plate, and a through hole adapted to the guide rod is provided on the fixed upright plate to improve the movement stability of the clamping plate.
[0009] As a further improvement of this utility model: the four corners of the base support plate are provided with fixing installation grooves, the fixing installation grooves are U-shaped groove structures, and the bottom surface of the base support plate is provided with positioning keyways, which are adapted to the installation grooves on the drilling machine worktable.
[0010] As a further improvement of this utility model: the position of the support column is located at the non-drilling position of the silicon target, and the upper ends of the multiple support columns are on the same horizontal plane, which is used to effectively support the silicon target and will not affect the drilling process.
[0011] By adopting the above technical solution, this utility model has the following beneficial effects compared with the prior art.
[0012] This utility model has multiple support columns on a base support plate for effective support of the silicon target. Positioning plates and clamping plates are provided on the sides of the support columns. The shape of the positioning plates is adapted to the outer dimensions of one end of the silicon target, thereby achieving effective fixation of the silicon target. A drilling template is provided above the silicon target, and a rotary clamping cylinder is provided with the drilling template to clamp and fix the drilling template while enhancing the stability of the silicon target fixation.
[0013] The drilling template of this invention enables stable positioning accuracy in silicon target drilling. At the same time, the drilling template applies a clamping force to the silicon target, increasing the force-bearing area and force uniformity. Multiple silicon targets can be installed at one time, enabling drilling of multiple silicon targets and effectively improving drilling efficiency.
[0014] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings. Attached Figure Description
[0015] The accompanying drawings, which form part of this application, are used to provide a further understanding of the present invention. The illustrative embodiments and descriptions of the present invention are used to explain the present invention, but do not constitute an undue limitation of the present invention. Obviously, the drawings described below are merely some embodiments; those skilled in the art can obtain other drawings based on these drawings without creative effort. In the drawings: Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a top view of the present invention; Figure 3 This is a side view of the present invention; Figure 4 This is the front view of the present invention.
[0016] In the diagram: 1. Foundation support plate; 2. Positioning seat; 3. Positioning plate; 4. Rotary clamping cylinder; 5. Fixed upright plate; 6. Clamping cylinder; 7. Guide rod; 8. Clamping plate; 9. Drill template; 10. Positioning column; 11. Drill template ear plate; 12. Positioning mating hole; 13. Pneumatic housing; 14. Fixed mounting groove; 15. Positioning keyway; 16. Drill sleeve; 17. Rotary pressure seat; 18. Clamping block; 19. Placement support column; 20. Positioning groove; 21. Positioning block.
[0017] It should be noted that these accompanying drawings and textual descriptions are not intended to limit the scope of the present invention in any way, but rather to illustrate the concept of the present invention to those skilled in the art by referring to specific embodiments. Detailed Implementation
[0018] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments will be clearly and completely described below with reference to the accompanying drawings. The following embodiments are used to illustrate this utility model, but are not intended to limit the scope of this utility model.
[0019] like Figures 1 to 4As shown, a positioning device for drilling silicon targets includes a base support plate 1 and a positioning plate 3. A positioning seat 2 is fixedly mounted on the base support plate 1, and the positioning plate 3 is mounted on the positioning seat 2. A pneumatic housing 13 is provided on the side of the positioning plate 3, and a rotary clamping cylinder 4 is provided on the side of the pneumatic housing 13. A fixed upright plate 5 is provided on the opposite side of the positioning seat 2, and a clamping cylinder 6 is installed on the outer side of the fixed upright plate 5. A clamping plate 8 is installed at the end of the telescopic rod of the clamping cylinder 6. Multiple placement support columns 19 are provided on the base support plate 1 between the positioning plate 3 and the clamping plate 8. A silicon target is placed on the placement support columns 19, and a drill template 9 is provided above the silicon target. Drill template 9 has drill jig ear plates 11 at both ends. The drill jig ear plates 11 have positioning mating holes 12, and positioning columns 10 are correspondingly provided in the positioning mating holes 12. The positioning columns 10 and the positioning mating holes 12 are used to position the drill template 9.
[0020] The drill template 9 is equipped with a drill sleeve 16 that is compatible with the drilling of the silicon target. A rotary clamping cylinder 4 is provided on the outer side of the drill jig ear plate 11 of the drill template 9. A rotary pressure seat 17 is provided at the upper end of the rotary clamping cylinder 4. A clamping block 18 is provided at the bottom clamping position of the rotary pressure seat 17. The hardness of the clamping block 18 is less than that of the silicon target.
[0021] The shape and specifications of the positioning plate 3 are adapted to the shape and specifications of the silicon target. The positioning seat 2 has an L-shaped structure. A positioning groove 20 is provided on the upper mounting surface of the positioning seat 2. A positioning block 21 adapted to the positioning groove 20 is provided on the outer side of the positioning plate 3 to improve the installation accuracy of the positioning plate 3.
[0022] The positioning plate 3 and the positioning seat 2 are fixedly connected by screws. A guide rod 7 is provided on the outer side of the clamping plate 8. A through hole adapted to the guide rod 7 is provided on the fixed upright plate 5 to improve the movement stability of the clamping plate 8.
[0023] The base support plate 1 has fixed mounting grooves 14 at its four corners. The fixed mounting grooves 14 are U-shaped grooves. The bottom surface of the base support plate 1 has a positioning keyway 15 that matches the mounting groove on the drilling machine worktable.
[0024] The support pillars 19 are placed at non-drilling positions on the silicon target. The upper ends of multiple support pillars 19 are on the same horizontal plane to effectively support the silicon target without affecting the drilling process.
[0025] The working principle of this utility model is as follows: the base support plate 1 is fixed on the worktable of the drilling machine, the silicon target to be processed is placed on the placement support column 19 in sequence, one end of the silicon target is in contact with the positioning plate 3, the clamping cylinder 6 drives the clamping plate 8 to move horizontally and approach the silicon target, and effectively positions both ends of the silicon target, the positioning mating hole 12 of the drilling template 9 is matched with the positioning column 10, the drilling template 9 is placed above the silicon target, the rotating clamping cylinder 4 clamps the drilling template ear plate 11, and the drilling preparation work is completed. Drilling is performed using a drill bit of the corresponding specification, and the drilling position corresponds to the drill sleeve 16. The support column 19 is placed at a non-drilling position on the silicon target, which ensures effective support for the silicon target without interfering with the drill bit during drilling and facilitates chip removal. The pneumatic housing 13 is equipped with pneumatic components such as an air pump, an air tank, and a control valve. The clamping cylinder 6 and the rotary pressing cylinder 4 are connected to the pneumatic components through air pipes. The clamping cylinder 6 and the rotary pressing cylinder 4 are existing technologies and will not be described in detail here. The positioning plate 3 is a detachable structure. Depending on the silicon target model, the positioning plate 3 of the corresponding specification can be replaced to improve the adaptability of the device. This invention features a base support plate 1 with multiple support columns 19 for effective support of the silicon target. Positioning plates 3 and clamping plates 8 are located on the sides of the support columns 19. The shape of the positioning plates 3 matches the external dimensions of one end of the silicon target, thus effectively fixing the silicon target. A drilling template 9 is positioned above the silicon target, and a rotary clamping cylinder 4 is fitted to the drilling template 9. While clamping and fixing the drilling template 9, the stability of the silicon target is enhanced. The drilling template 9 provides stable positioning accuracy for the silicon target drilling process. Simultaneously, the clamping force applied to the silicon target by the drilling template 9 increases the force-bearing area and force uniformity, allowing multiple silicon targets to be installed at once for drilling, effectively improving drilling efficiency.
[0026] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-described technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present utility model without departing from the scope of the present utility model shall still fall within the scope of the present utility model.
Claims
1. A positioning device for drilling silicon targets, comprising a base support plate (1) and a positioning plate (3), characterized in that, A positioning seat (2) is fixedly installed on the base support plate (1). A positioning plate (3) is installed on the positioning seat (2). A pneumatic box (13) is provided on the side of the positioning plate (3). A rotary clamping cylinder (4) is provided on the side of the pneumatic box (13). A fixed upright plate (5) is provided on the opposite side of the positioning seat (2). A clamping cylinder (6) is installed on the outside of the fixed upright plate (5). A clamping plate (8) is installed at the end of the telescopic rod of the clamping cylinder (6). Multiple placement support columns (19) are provided on the base support plate (1) between the positioning plate (3) and the clamping plate (8). A silicon target is placed on the placement support column (19). A drill template (9) is provided above the silicon target. Drill jig ear plates (11) are provided at both ends of the drill template (9). A positioning mating hole (12) is opened on the drill jig ear plate (11). A positioning column (10) is correspondingly provided in the positioning mating hole (12).
2. The positioning device for silicon target drilling according to claim 1, characterized in that, The drill template (9) is provided with a drill sleeve (16) adapted to the drilling of the silicon target. A rotary clamping cylinder (4) is provided on the outer side of the drill jig ear plate (11) of the drill template (9). A rotary clamping cylinder (4) is provided on the upper end of the rotary clamping cylinder (4). A clamping block (18) is provided on the bottom clamping position of the rotary clamping cylinder (17).
3. The positioning device for silicon target drilling according to claim 2, characterized in that, The shape and specifications of the positioning plate (3) are adapted to the shape and specifications of the silicon target. The positioning seat (2) is an L-shaped structure. A positioning groove (20) is provided on the upper mounting surface of the positioning seat (2). A positioning block (21) adapted to the positioning groove (20) is provided on the outer side of the positioning plate (3).
4. The positioning device for silicon target drilling according to claim 3, characterized in that, The positioning plate (3) and the positioning seat (2) are fixedly connected by screws. A guide rod (7) is provided on the outer side of the clamping plate (8). A through hole adapted to the guide rod (7) is provided on the fixed upright plate (5).
5. A positioning device for silicon target drilling according to claim 4, characterized in that, The base support plate (1) has a fixed installation groove (14) at its four corners. The fixed installation groove (14) is a U-shaped groove structure. The base support plate (1) has a positioning keyway (15) on its bottom surface.
6. The positioning device for silicon target drilling according to claim 5, characterized in that, The placement support column (19) is located at the non-drilled position of the silicon target, and the upper ends of the multiple placement support columns (19) are on the same horizontal plane.