Vacuum coating apparatus and shielding mechanism for vacuum coating apparatus
By designing a shielding mechanism in the vacuum coating equipment, and using staggered baffles to separate the evaporation source group from the coating area, the problem of contamination of the evaporation source group during operation is solved, thus achieving stability of coating quality and efficient operation of the equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- CHANGZHOU QUARK COATING TECH CO LTD
- Filing Date
- 2025-07-25
- Publication Date
- 2026-07-21
AI Technical Summary
When changing the evaporation source target material in a vacuum coating equipment, the non-working evaporation source is easily coated, resulting in impurities in the coating layer and affecting product quality.
Design a shielding mechanism for vacuum coating equipment, which separates the evaporation source group from the coating area by staggered baffles, and uses a control module to control the opening and closing of the baffles to prevent the vaporized target material from contaminating other evaporation source groups.
It effectively prevents contamination of the evaporation source group and target material, ensuring the consistency and stability of coating quality and reducing the frequency of equipment maintenance.
Smart Images

Figure CN224530993U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of coating technology, specifically relating to vacuum coating, and more particularly to a vacuum coating equipment and a shielding mechanism for the vacuum coating equipment. Background Technology
[0002] In actual production applications, vacuum coating equipment requires different evaporation source targets with different compositions for different products. The traditional approach is to replace the evaporation source target in advance before product switching, which leads to frequent disassembly and reassembly of the evaporation source structure of the coating equipment.
[0003] In related technologies, some high-end vacuum coating products often require complex process design, involving the sequential use of evaporation source targets with various different compositions. Therefore, vacuum coating equipment usually reserves as many rows of evaporation source target installation positions as possible to meet the coating process requirements of various products.
[0004] However, in the above scenario, when one of the evaporation sources is working, the other non-working evaporation sources are also easily coated, resulting in impurities in the coating layer during subsequent use.
[0005] Therefore, how to solve the above problems is a problem that urgently needs to be solved by those skilled in the art.
[0006] It should be noted that the information disclosed in this background section is only for understanding the background technology of this application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content
[0007] This disclosure provides at least one vacuum coating apparatus and a shielding mechanism for the vacuum coating apparatus.
[0008] In a first aspect, embodiments of this disclosure provide a vacuum coating apparatus, comprising: a housing having a coating chamber inside, the center of which is a coating area; a turntable placement position disposed within the coating area for placing a turntable carrying a workpiece; a plurality of evaporation source groups located within the coating chamber and surrounding the periphery of the coating area; a plurality of shielding mechanisms disposed at corresponding evaporation source groups for separating the evaporation source groups from the coating area, each including: a pair of staggered baffles with overlapping ends; and a control module electrically connected to each shielding mechanism and configured to control the opening of the two baffles of the corresponding shielding mechanism when the corresponding evaporation source group needs to operate.
[0009] In one optional embodiment, the shielding mechanism further includes: a drive assembly located on the outer wall of the housing; wherein the drive assembly is connected to two baffles inside the housing; and the control module is configured to control the drive assembly to drive the two baffles to rotate simultaneously.
[0010] In one optional embodiment, the drive assembly includes: a mounting bracket on which a pair of guide rails are provided, each guide rail having a rack slidably mounted thereon; a swing cylinder on the mounting bracket, the drive end of which is provided with a first gear, the first gear being connected to the two racks; and a pair of transmission gear sets connecting the corresponding racks to the corresponding baffles; wherein the control module is configured to control the swing cylinder to drive the two racks to move simultaneously so that the baffles rotate simultaneously.
[0011] In one optional embodiment, the shielding mechanism further includes: a pair of mounting plates located on the inner wall of the housing; wherein a pair of mounting shafts are rotatably disposed on the two mounting plates, and the baffle is connected to the corresponding mounting shaft; one end of the mounting shaft is connected to a corresponding transmission gear set; when the rack moves, the rack is adapted to drive the mounting shaft to rotate through the transmission gear set.
[0012] In one alternative implementation, the two mounting shafts are offset in the height direction, with the mounting plate as a reference.
[0013] In one optional embodiment, the transmission gear set includes: a rotating shaft with a second gear at one end and a third bevel gear at the other end; the second gear is connected to a corresponding rack; and the third bevel gear is connected to a fourth bevel gear at the end of the mounting shaft.
[0014] In one alternative embodiment, the guide rail includes: a pair of parallel guide shafts; the rack passes through the two guide shafts.
[0015] Secondly, this disclosure also provides a shielding mechanism for a vacuum coating equipment, comprising: a driving component disposed on the outer wall of the vacuum coating equipment; a pair of baffles disposed inside the vacuum coating equipment for separating the evaporation source group from the coating area of the vacuum coating equipment; wherein the two baffles are staggered and their ends overlap; and a control module configured to control the driving component to rotate and open the two baffles when the corresponding evaporation source group needs to work.
[0016] In one optional embodiment, the drive assembly includes: a mounting bracket on which a pair of guide rails are provided, each guide rail having a rack slidably mounted thereon; a swing cylinder on the mounting bracket, the drive end of which is provided with a first gear, the first gear being connected to the two racks; and a pair of transmission gear sets connecting the corresponding racks to the corresponding baffles; wherein the control module is configured to control the swing cylinder to drive the two racks to move simultaneously so that the baffles rotate simultaneously.
[0017] In one optional embodiment, the shielding mechanism for the vacuum coating equipment further includes: a pair of mounting plates; wherein the mounting plates are located on the inner wall of the housing; a pair of mounting shafts are rotatably disposed on the two mounting plates, and the baffle is connected to the corresponding mounting shaft; one end of the mounting shaft is connected to a corresponding transmission gear set; wherein, when the rack moves, the rack is adapted to drive the mounting shaft to rotate through the transmission gear set.
[0018] The beneficial effect of this utility model is that the vacuum coating equipment and the shielding mechanism for the vacuum coating equipment use two baffles in the shielding mechanism, and the two baffles are staggered and overlapped at the ends, so that the evaporation source group is separated from the coating area. That is, when one evaporation source group is working, the vaporized target material will be blocked by the corresponding shielding mechanism when it flies to other evaporation source groups, thereby preventing the evaporation source group and the target material on it from being contaminated.
[0019] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.
[0020] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description
[0021] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0022] Figure 1 This is a schematic diagram of the structure of a vacuum coating apparatus provided in an embodiment of the present disclosure; Figure 2 This is a cross-sectional view of a vacuum coating apparatus provided in an embodiment of the present disclosure; Figure 3 This is a structural schematic diagram of a baffle position provided in an embodiment of the present disclosure; Figure 4 This is a schematic diagram of the structure of a driving component provided in an embodiment of the present disclosure; Figure 5 A schematic diagram of the mating structure of a swing cylinder and a rack provided in an embodiment of this disclosure; Figure 6 A schematic diagram of the installation structure of a baffle provided in an embodiment of this disclosure; Figure 7This is a schematic diagram of a transmission gear set provided in an embodiment of the present disclosure.
[0023] In the picture: Box 1, Coating Area 11; Turntable placement position 2; Evaporation source group 3; The components include: a shielding mechanism 4, a baffle 41, a drive assembly 42, a mounting bracket 421, a guide rail 422, a guide shaft 4221, a rack 423, a swing cylinder 424, a first gear 425, a transmission gear set 426, a rotating shaft 4261, a second gear 4262, a third bevel gear 4263, a mounting plate 43, and a mounting shaft 431. Detailed Implementation
[0024] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0025] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the figures, the thickness of parts may be exaggerated or reduced for the purpose of effectively depicting the technical content.
[0026] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0027] like Figures 1 to 3 As shown, at least one embodiment provides a vacuum coating apparatus, comprising: a housing 1, which contains a coating chamber, the center of which is a coating area 11; a turntable placement position 2, disposed within the coating area 11, for placing a turntable carrying a workpiece; a plurality of evaporation source groups 3, located within the coating chamber and arranged around the periphery of the coating area 11; a plurality of shielding mechanisms 4, respectively disposed at corresponding evaporation source groups 3, for separating the evaporation source groups 3 from the coating area 11, each including: a pair of staggered baffles 41 with overlapping ends; and a control module electrically connected to each shielding mechanism 4, configured to control the opening of the two baffles 41 of the corresponding shielding mechanism 4 when the corresponding evaporation source group 3 needs to operate.
[0028] Specifically, the evaporation source group 3 is positioned facing the coating area 11. Each evaporation source group 3 consists of several evaporation sources arranged in a row, and the target material in each evaporation source group 3 is different. When a coating of the corresponding material is to be applied, the corresponding evaporation source group 3 can be controlled to work.
[0029] Specifically, turntable placement position 2 is used to place the turntable carrying the workpiece. The turntable is driven by a motor to rotate at a constant speed, so that the workpiece on the turntable can be coated evenly.
[0030] In this embodiment, the two baffles 41 of the shielding mechanism 4 separate the evaporation source group 3 from the coating area 11, so that when one evaporation source group 3 is working, the vaporized target material flying towards other evaporation source groups 3 will be blocked by the corresponding shielding mechanism 4, thereby preventing the evaporation source group 3 and the target material on it from being contaminated.
[0031] like Figure 3 As shown, in some embodiments, the shielding mechanism 4 further includes: a drive assembly 42 located on the outer wall of the housing 1; the drive assembly 42 is connected to two baffles 41 inside the housing 1; wherein, the control module is configured to control the drive assembly 42 to drive the two baffles 41 to rotate simultaneously.
[0032] In this embodiment, the drive assembly 42 is disposed on the outer wall of the housing 1, which not only reduces the space occupied by the coating chamber, but also prevents the drive assembly 42 from being coated, thus affecting its operation.
[0033] like Figure 4 , Figure 5 As shown, in some embodiments, the drive assembly 42 includes: a mounting bracket 421, two guide rails 422, two racks 423, a swing cylinder 424, and two transmission gear sets 426.
[0034] Specifically, the mounting bracket 421 is installed on the outer wall of the housing 1 and is located on one side of the baffle 41.
[0035] Specifically, the mounting bracket 421 is provided with a pair of guide rails 422, which are parallel to each other.
[0036] Specifically, a rack 423 is slidably mounted on the guide rail 422, with the tooth surfaces of the two racks 423 facing each other.
[0037] Specifically, such as Figure 4 As shown, the swing cylinder 424 is mounted on the mounting bracket 421. A first gear 425 is provided on the drive end of the swing cylinder 424. The first gear 425 meshes with two racks 423. That is, when the first gear 425 rotates, it drives the two racks 423 to move simultaneously and in opposite directions. Optionally, the swing cylinder 424 stops after rotating 180 degrees. At this time, the two baffles 41 are opened to the required position.
[0038] Specifically, one end of the transmission gear set 426 meshes with the rack 423, and the other end extends into the housing 1 and is connected to the baffle 41. That is, when the rack 423 moves, the transmission gear set 426 drives the baffle 41 to rotate.
[0039] In this embodiment, the control module is configured to control the swing cylinder 424 to drive the two racks 423 to move simultaneously so that the baffle 41 rotates simultaneously and in opposite directions.
[0040] like Figure 6 As shown, in some embodiments, the shielding mechanism 4 further includes: a pair of mounting plates 43, the mounting plates 43 being located on the inner wall of the housing 1; wherein a pair of mounting shafts 431 are rotatably disposed on the two mounting plates 43, and the baffle 41 is connected to the corresponding mounting shaft 431; one end of the mounting shaft 431 is connected to the corresponding transmission gear set 426; wherein, when the rack 423 moves, the rack 423 is adapted to drive the mounting shaft 431 to rotate through the transmission gear set 426.
[0041] In this embodiment, the drive assembly 42 is located outside the housing 1, and the baffle 41 is located inside the housing 1. The baffle 41 rotates by the drive of the mounting shaft 431.
[0042] like Figure 3 As shown, in some embodiments, with the mounting plate 43 as a reference, the two mounting shafts 431 are offset in the height direction to completely block the evaporation source group 3; where the arrow in the figure represents the height direction.
[0043] like Figure 7 As shown, in some embodiments, the transmission gear set 426 includes: a rotating shaft 4261, one end of which is provided with a second gear 4262 and the other end of which is provided with a third bevel gear 4263; the second gear 4262 is connected to a corresponding rack 423; and the third bevel gear 4263 is connected to a fourth bevel gear 4311 at the end of the mounting shaft 431.
[0044] In this embodiment, the power of the rack 423 is transmitted to the mounting shaft 431 through the transmission gear set 426, thereby driving the baffle 41 to rotate.
[0045] like Figure 4 As shown, in some embodiments, the guide rail 422 includes: a pair of parallel guide shafts 4221; and a rack 423 passing through the two guide shafts 4221.
[0046] In this embodiment, the two guide shafts 4221 can limit the rack 423, so that the rack 423 can only slide.
[0047] like Figure 3 As shown, in some embodiments, the two baffles 41 have a certain gap in the height direction, so that the two baffles 41 will not collide during the opening process.
[0048] At least one embodiment also provides a shielding mechanism for a vacuum coating equipment, comprising: a drive assembly 42 disposed on the outer wall of the vacuum coating equipment; a pair of baffles 41 disposed inside the vacuum coating equipment for separating the evaporation source group 3 from the coating area 11 of the vacuum coating equipment; wherein the two baffles 41 are staggered and their ends overlap; and a control module configured to control the drive assembly 42 to rotate and open the two baffles 41 when the corresponding evaporation source group 3 needs to work.
[0049] In some embodiments, the drive assembly 42 includes: a mounting frame 421 on which a pair of guide rails 422 are disposed, and racks 423 are slidably disposed on each of the guide rails 422; a swing cylinder 424 disposed on the mounting frame 421, and a first gear 425 disposed at its drive end, the first gear 425 being connected to the two racks 423; and a pair of transmission gear sets 426 connecting the corresponding racks 423 and the corresponding baffles 41; wherein, the control module is configured to control the swing cylinder 424 to drive the two racks 423 to move simultaneously so that the baffles 41 rotate simultaneously.
[0050] In some embodiments, the shielding mechanism for the vacuum coating equipment further includes: a pair of mounting plates 43; wherein the mounting plates 43 are located on the inner wall of the housing 1; a pair of mounting shafts 431 are rotatably disposed on the two mounting plates 43, and the baffle 41 is connected to the corresponding mounting shaft 431; one end of the mounting shaft 431 is connected to the corresponding transmission gear set 426; wherein, when the rack 423 moves, the rack 423 is adapted to drive the mounting shaft 431 to rotate through the transmission gear set 426.
[0051] In summary, this vacuum coating equipment and the shielding mechanism for the vacuum coating equipment use two baffles 41 of the shielding mechanism 4, and the two baffles 41 are staggered and overlapped at the ends, so that the evaporation source group 3 is separated from the coating area 11. That is, when one evaporation source group 3 is working, the vaporized target material will be blocked by the corresponding shielding mechanism 4 when it flies towards other evaporation source groups 3, thereby preventing the evaporation source group 3 and the target material on it from being contaminated.
[0052] In this document, when it is said that the first component is located on the second component, this can mean that the first component can be directly formed on the second component, or that the third component can be inserted between the first component and the second component.
[0053] In this document, when an element or layer is referred to as “located,” “joined to,” “connected to,” “attached to,” or “coupled to” another element or layer, it may be directly located, joined, connected, attached to, or coupled to the other element or layer, or there may be intermediate elements or layers present. Conversely, when an element is referred to as “directly on another element or layer,” “directly joined to,” “directly connected to,” “directly attached to,” or “directly coupled to” another element or layer, there may be no intermediate elements or layers present. Other terms used to describe relationships between elements should be interpreted in a similar manner (e.g., “between” versus “directly between,” “adjacent” versus “directly adjacent,” etc.). As used herein, the term “and / or” includes any and all combinations of one or more of the related listed items.
[0054] In this document, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than individual elements in the list. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.
[0055] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise clearly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.
[0056] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.
[0057] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0058] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as the second element, component, region, layer, or segment.
[0059] Spatially relative terms, such as “inside,” “outside,” “below,” “below,” “down,” “above,” “up,” etc., may be used herein to describe the relationship between one element or feature illustrated in the figures and another element or feature. In addition to the orientations depicted in the figures, spatially relative terms may be intended to cover different orientations of the device in use or operation. For example, if the device in the figure is flipped, an element described as “below” or “below” other elements or features would be oriented as “above” other elements or features. Thus, the example term “below” can cover both above and below orientations. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.
[0060] In the above discussion, unless otherwise stated, when used to describe numerical values, the terms “about,” “approximately,” “basically,” etc., indicate a change of + / - 10% in that value.
[0061] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.
Claims
1. A vacuum coating equipment, characterized in that, include: The box (1) contains a coating chamber, and the coating area (11) is located in the middle of the coating chamber. Turntable placement position (2) is set in the coating area (11) and is used to place the turntable carrying the workpiece; Several evaporation source groups (3) are located inside the coating chamber and are arranged around the coating area (11); Several shielding mechanisms (4) are respectively set at the corresponding evaporation source group (3) to separate the evaporation source group (3) from the coating area (11), and include: a pair of staggered baffles (41) with overlapping ends. as well as The control module, electrically connected to each shielding mechanism (4), is configured to control the opening of the two baffles (41) of the corresponding shielding mechanism (4) when the corresponding evaporation source group (3) needs to work.
2. The vacuum coating equipment as described in claim 1, characterized in that, The shielding mechanism (4) further includes: a drive assembly (42) located on the outer wall of the housing (1); wherein The drive assembly (42) is connected to two baffles (41) inside the housing (1); The control module is configured to control the drive assembly (42) to drive the two baffles (41) to rotate simultaneously.
3. The vacuum coating equipment as described in claim 2, characterized in that, The driving component (42) includes: Mounting bracket (421) is provided with a pair of guide rails (422), and each guide rail (422) is slidably provided with a rack (423). A swing cylinder (424) is mounted on a mounting bracket (421), and a first gear (425) is provided on its driving end. The first gear (425) is connected to two racks (423). A pair of transmission gear sets (426) connects the corresponding rack (423) and the corresponding baffle (41); The control module is configured to control the swing cylinder (424) to drive the two racks (423) to move simultaneously so that the baffle (41) rotates simultaneously.
4. The vacuum coating equipment as described in claim 3, characterized in that, The shielding mechanism (4) further includes: a pair of mounting plates (43), the mounting plates (43) being located on the inner wall of the housing (1); wherein A pair of mounting shafts (431) are rotatably provided on the two mounting plates (43), and the baffle (41) is connected to the corresponding mounting shaft (431); One end of the mounting shaft (431) is connected to the corresponding transmission gear set (426); When the rack (423) moves, the rack (423) is adapted to drive the mounting shaft (431) to rotate via the transmission gear set (426).
5. The vacuum coating equipment as described in claim 4, characterized in that, With the mounting plate (43) as a reference, the two mounting shafts (431) are offset in the height direction.
6. The vacuum coating equipment as described in claim 5, characterized in that, The transmission gear set (426) includes: a rotating shaft (4261), one end of which is provided with a second gear (4262), and the other end of which is provided with a third bevel gear (4263); The second gear (4262) is connected to the corresponding rack (423); The third bevel gear (4263) is connected to the fourth bevel gear (4311) at the end of the mounting shaft (431).
7. The vacuum coating equipment as described in claim 6, characterized in that, The guide rail (422) includes: a pair of parallel guide shafts (4221); The rack (423) is mounted on the two guide shafts (4221).
8. A shielding mechanism for a vacuum coating equipment, characterized in that, include: The drive assembly (42) is disposed on the outer wall of the vacuum coating equipment; A pair of baffles (41) are provided inside the vacuum coating equipment to separate the evaporation source group (3) from the coating area (11) of the vacuum coating equipment; wherein the two baffles (41) are staggered and their ends overlap. The control module is configured to control the drive assembly (42) to rotate and open the two baffles (41) when the corresponding evaporation source group (3) needs to work.
9. The shielding mechanism for vacuum coating equipment as described in claim 8, characterized in that, The driving component (42) includes: Mounting bracket (421) is provided with a pair of guide rails (422), and each guide rail (422) is slidably provided with a rack (423). A swing cylinder (424) is mounted on a mounting bracket (421), and a first gear (425) is provided on its driving end. The first gear (425) is connected to two racks (423). A pair of transmission gear sets (426) connects the corresponding rack (423) and the corresponding baffle (41); The control module is configured to control the swing cylinder (424) to drive the two racks (423) to move simultaneously so that the baffle (41) rotates simultaneously.
10. The shielding mechanism for vacuum coating equipment as described in claim 9, characterized in that, Also includes: A pair of mounting plates (43); among which The mounting plate (43) is located on the inner wall of the housing (1); A pair of mounting shafts (431) are rotatably provided on the two mounting plates (43), and the baffle (41) is connected to the corresponding mounting shaft (431); One end of the mounting shaft (431) is connected to the corresponding transmission gear set (426); When the rack (423) moves, the rack (423) is adapted to drive the mounting shaft (431) to rotate through the transmission gear set (426).