Electron microscope damping device and electron microscope
By employing a two-layer vibration damping support structure in a desktop scanning electron microscope and utilizing a composite vibration damping mechanism to counteract vibrations in three-dimensional space, the problem of the electron optical system being susceptible to environmental vibration interference is solved, achieving stability and buffering effect for high-precision imaging.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- CHOTEST TECH INC
- Filing Date
- 2025-08-14
- Publication Date
- 2026-07-21
AI Technical Summary
The electron optical system of a desktop scanning electron microscope is susceptible to environmental vibration interference during high-precision imaging, and existing vibration reduction methods are difficult to effectively address this issue.
The structure employs a two-layer vibration damping bracket to create a dual vibration damping effect. It utilizes a composite vibration damping mechanism to offset vibrations in three-dimensional space, including a first vibration damping bracket and a second vibration damping bracket, combined with flexible support components and elastic components, to provide elastic deformation in both height and horizontal directions to buffer vibrations.
It effectively counteracts vibrations at different frequencies, ensures the stability of the main unit, and guarantees the high-precision imaging effect of the electro-optical system, including buffering vibrations of external and internal mechanisms.
Smart Images
Figure CN224533331U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of measurement equipment technology, specifically to an electron microscope vibration damping device and an electron microscope. Background Technology
[0002] Currently, desktop scanning electron microscopes (SEMs) are one of the most common types of electron microscopes. Their electron optical systems require a spatial resolution better than 4 nm to ensure clear imaging at high magnification, thus meeting the needs of nanoscale morphological observation. However, due to the high imaging precision of these systems, the imaging results are highly susceptible to environmental influences, particularly vibrations of different frequencies. These vibrations can easily interfere with the imaging performance of desktop SEMs, and conventional vibration reduction methods are insufficient to effectively address their effects. Therefore, a vibration reduction structure that can meet the high-precision imaging requirements of desktop SEMs is urgently needed. Utility Model Content
[0003] To address the problem that the optical systems for high-resolution imaging in existing electron microscopes are easily affected by environmental vibrations, this application provides an electron microscope vibration reduction device and an electron microscope.
[0004] An embodiment of the first aspect of the technical solution of this application provides an electron microscope vibration damping device, comprising: a first vibration damping bracket, the bottom of which has a first flexible support member for contacting the working platform of the electron microscope; and a second vibration damping bracket connected to the top of the first vibration damping bracket, the second vibration damping bracket having a composite vibration damping mechanism and an upper support member, the upper support member for connecting the main unit of the electron microscope, the composite vibration damping mechanism being able to generate elastic deformation in the height direction and in the horizontal plane perpendicular to the height direction to offset vibration in three-dimensional space.
[0005] In a further embodiment of this application, the composite vibration damping mechanism includes: a lower support member, which is fixedly connected to the top surface of the first vibration damping bracket; a first elastic member, which is disposed on the lower support member, and the bottom of the first elastic member is connected to the lower support member, and the top of the first elastic member is connected to the upper support member; and a second elastic member, which is nested with the first elastic member, and the bottom of the second elastic member abuts against the lower support member, and the top of the second elastic member abuts against the upper support member.
[0006] In a further embodiment of this application, in the height direction, the coverage area of the first elastic member and / or the second elastic member gradually increases from top to bottom.
[0007] In a further embodiment of this application, the second elastic element is a tower spring, which is sleeved on the outside of the first elastic element. The diameter of the end of the second elastic element connected to the upper support is smaller than the diameter of the end connected to the lower support, and the stiffness of the second elastic element in the height direction is a non-linear value; and / or, the first elastic element is a frustoconical rubber pad, and the top and bottom of the first elastic element have connecting posts extending in the height direction, which are used to connect the upper support and the lower support respectively.
[0008] In a further embodiment of this application, the top of the lower support member has a mounting groove, the shape of which is adapted to the first elastic member and the second elastic member, and the bottom of the first elastic member and the bottom of the second elastic member both extend into the mounting groove and abut against the bottom wall of the mounting groove.
[0009] In a further embodiment of this application, the number of upper support members is at least two, and the at least two upper support members are spaced apart in a first direction or a second direction, wherein both the first direction and the second direction are perpendicular to the height direction, and the first direction is perpendicular to the second direction; the number of composite vibration damping mechanisms is multiple, and each upper support member is connected to at least two composite vibration damping mechanisms.
[0010] In a further embodiment of this application, the first vibration damping bracket has a vacuum pump mounting position, which is located on one side of the second vibration damping bracket, and the vacuum pump mounting position has a plurality of openings extending through the height direction.
[0011] In a further embodiment of this application, the opening is a strip-shaped opening, and multiple strip-shaped openings are spaced apart in a first direction, and each strip-shaped opening extends along a second direction; wherein, both the first direction and the second direction are perpendicular to the height direction, and the first direction is perpendicular to the second direction; the bottom of the vacuum pump mounting position has a reinforcing beam extending along the first direction, the reinforcing beam is connected to the side frame of the multiple strip-shaped openings, and at least one reinforcing beam is located at the middle position of the strip-shaped opening in the second direction.
[0012] In a further embodiment of this application, the first flexible support includes at least one of an air cushion structure, a rubber pad structure, or a spring structure; and / or, the number of the first flexible support is multiple, and the multiple first flexible support are respectively disposed at the bottom of the first vibration damping bracket near the edge.
[0013] An embodiment of the second aspect of the technical solution of this application provides an electron microscope, including: an electron microscope vibration damping device as described in any of the embodiments of the first aspect; and a main unit, wherein the main unit is disposed on a second vibration damping bracket of the electron microscope vibration damping device and is connected to an upper support member of the second vibration damping bracket.
[0014] The beneficial effects of the above-mentioned technical solution of this application are as follows:
[0015] According to the technical solution in this application, by improving and optimizing the structure, a two-layer vibration damping structure is formed by using the first vibration damping bracket and the second vibration damping bracket, resulting in a dual vibration damping effect. This can achieve a vibration buffering effect on vibrations of different frequency bands in any direction in three-dimensional space. Moreover, it can not only buffer vibrations generated by the external environment, but also buffer vibrations generated by other internal mechanisms (such as vacuum pumps) during operation. This can effectively meet the vibration damping requirements of the main unit, thereby ensuring the imaging effect of the electron optical system in the main unit. Attached Figure Description
[0016] Figure 1 This is a schematic diagram of an electron microscope vibration reduction device in one embodiment of this application;
[0017] Figure 2 This is a schematic diagram of the second vibration damping bracket in one embodiment of this application;
[0018] Figure 3 This is a schematic diagram of the first elastic element in one embodiment of this application;
[0019] Figure 4 This is a schematic diagram of the second elastic element in one embodiment of this application;
[0020] Figure 5 This is a schematic diagram of an electron microscope in one embodiment of this application.
[0021] In the above figures, arrow X represents the first direction, arrow Y represents the second direction, and arrow Z represents the height direction.
[0022] Explanation of reference numerals in the attached figures:
[0023] 100 Electron microscope vibration damping device, 1 First vibration damping bracket, 11 First flexible support, 12 Vacuum pump mounting position, 121 Opening, 122 Reinforcing beam, 2 Second vibration damping bracket, 21 Composite vibration damping mechanism, 211 Lower support, 2111 Mounting groove, 2112 Connecting hole, 212 First elastic element, 2121 Connecting column, 213 Second elastic element, 22 Upper support;
[0024] 400 Electron Microscope, 410 Main Unit, 420 Main Unit Housing. Detailed Implementation
[0025] The present application will now be described in further detail with reference to the accompanying drawings and specific embodiments. Similar elements in different embodiments are referred to by related similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of the present application. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, certain operations related to the present application are not shown or described in the specification. This is to avoid obscuring the core parts of the present application with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.
[0026] Furthermore, the features, operations, or characteristics described in the specification can be combined in any suitable manner to form various embodiments, and the operational steps involved in each embodiment can also be rearranged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the specification and drawings are only for clearly describing a particular embodiment and do not imply that they represent the necessary components and / or order.
[0027] The serial numbers assigned to components in this document, such as "first" and "second," are used only to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages).
[0028] Common desktop scanning electron microscopes typically employ electron optical systems capable of observing nanoscale morphology to achieve high spatial resolution and ensure clear imaging at high magnification. However, these sophisticated electron optical systems are highly sensitive to environmental factors, such as vibration, which can negatively impact imaging quality. Considering that conventional vibration reduction methods are insufficient for meeting the vibration reduction requirements of such high-precision electron optical systems, this application provides an electron microscope vibration reduction device. This device utilizes a double-layer support structure to create a dual flexible vibration reduction effect, simultaneously providing vibration damping in both the vertical and horizontal directions, effectively meeting the vibration reduction requirements of high-precision electron optical systems in electron microscopes.
[0029] It should be noted that the X-axis, Y-axis and Z-axis directions described in this application are three directions that are perpendicular to each other in three-dimensional space. Among them, the X-axis and Y-axis directions are directions in the horizontal plane, and the Z-axis direction is the height direction perpendicular to the horizontal plane. The direction descriptions in the following embodiments are the same.
[0030] The following describes some embodiments of the electron microscope vibration reduction device and electron microscope provided in this application, with reference to the accompanying drawings.
[0031] An embodiment of the first aspect of this application provides an electron microscope vibration damping device 100, such as... Figure 1 As shown, the system includes a first vibration damping bracket 1 and a second vibration damping bracket 2. The first vibration damping bracket 1 serves as a base, and the second vibration damping bracket 2 is positioned on top of the first vibration damping bracket 1. A first flexible support member 11 is provided at the bottom of the first vibration damping bracket 1 for contacting the working platform of the electron microscope and supporting the entire electron microscope. The second vibration damping bracket 2 has a composite vibration damping mechanism 21 and an upper support member 22. The composite vibration damping mechanism 21 is connected to the top of the first vibration damping bracket 1 and to the upper support member 22, so as to connect the main unit 410 of the electron microscope through the upper support member 22, thereby supporting and buffering the main unit 410. The composite vibration damping mechanism 21 can undergo elastic deformation in the height direction and also in the horizontal plane perpendicular to the height direction, so as to buffer and offset environmental vibrations in different directions, forming a three-dimensional vibration damping effect, so as to keep the main unit 410 supported on the upper support member 22 stable.
[0032] It should be noted that the composite vibration damping mechanism 21 can generate elastic deformation in any direction within the horizontal plane, so as to play an elastic buffering role within a 360° circumferential range. In addition, the number of second vibration damping brackets 2 can be one or more, and their specific shape and size can also be set according to the specific usage requirements of the main unit 410.
[0033] It is understandable that common vibration reduction methods can usually only play a damping and buffering role in a single direction, or mainly play a buffering role in a certain direction. For example, when using compression springs for vibration reduction, the damping and buffering effect is mainly reflected in the height direction. It is difficult to maintain stability in the horizontal direction and it is difficult to achieve a horizontal vibration reduction effect. In order to maintain stability, it is usually necessary to use a guide mechanism (such as a sleeve) that extends along the height direction. It is difficult to achieve a damping and buffering effect in three-dimensional space.
[0034] In addition to the main unit, electron microscopes typically require other auxiliary mechanisms, such as vacuum pumps. During operation, besides vibrations from the external environment, these auxiliary mechanisms may also generate vibrations, which can affect the main unit. Therefore, these auxiliary mechanisms can be mounted on the first vibration damping bracket to effectively dampen and buffer the vibrations they generate.
[0035] The electron microscope vibration damping device 100 in this embodiment improves and optimizes the structure by using the first vibration damping bracket 1 and the second vibration damping bracket 2 to form an upper and lower two-layer vibration damping structure, thus creating a dual vibration damping effect. It can achieve a vibration buffering effect on vibrations of different frequency bands in any direction in three-dimensional space. Moreover, it can not only buffer vibrations generated by the external environment, but also buffer vibrations generated by other internal mechanisms (such as vacuum pumps) of the electron microscope. It can effectively meet the vibration damping requirements of the host device 410, thereby ensuring the imaging effect of the electron optical system in the host device 410.
[0036] In further embodiments of this application, such as Figure 1 and Figure 2 In the example, the composite vibration damping mechanism 21 includes a lower support 211, a first elastic element 212, and a second elastic element 213. The lower support 211 is fixedly connected to the top surface of the first vibration damping bracket 1 to serve as the mounting base for the first elastic element 212 and the second elastic element 213. The first elastic element 212 is disposed on the lower support 211 and nested with the second elastic element 213 so that the first elastic element 212 and the second elastic element 213 can mutually limit each other, preventing them from separating or having excessive spacing that would affect the vibration damping effect. The bottom of the first elastic element 212 is connected to the lower support element 211, and the top of the first elastic element 212 is connected to the upper support element 22, so that an elastic connection is formed between the upper support element 22 and the lower support element 211. This allows the first elastic element 212 to undergo elastic deformation in both the height and horizontal directions, resulting in a corresponding vibration damping effect. The bottom of the second elastic element 213 abuts against the lower support element 211, and the top of the second elastic element 213 abuts against the upper support element 22, allowing the second elastic element 213 to withstand pressure in the height direction and primarily perform vibration damping in the height direction. Through the cooperation of the second elastic element 213 and the first elastic element 212, the main unit 410 supported on the upper support element 22 can be supported, and a three-dimensional vibration damping effect can also be formed.
[0037] Furthermore, such as Figure 2 and Figure 3 In the example, the coverage area of the first elastic element 212 and the second elastic element 213 of the composite vibration damping mechanism 21 gradually changes in the height direction. Specifically, the coverage area gradually increases from top to bottom, which can effectively enhance the stability of the bottom connection and avoid the "top-heavy" phenomenon when supporting the main unit 410. It has a better support effect on the upper support 22 and the main unit 410. At the same time, it has a better vibration damping effect on the vibration from the first vibration damping bracket 1 (including the vibration transmitted from the external environment to the first bracket and the vibration generated by other mechanisms set on the first vibration damping bracket 1).
[0038] It should be noted that in practical applications, the coverage area of the first elastic element 212 and the second elastic element 213 in the height direction does not necessarily have to be set to gradually change at the same time. Alternatively, the coverage area of only one of the first elastic element 212 or the second elastic element 213 can be set to gradually increase from top to bottom, depending on the specific usage requirements.
[0039] Furthermore, in a specific example, such as Figure 2 , Figure 3 In the example, the second elastic element 213 is a spring. In the height direction, the diameter of the tower spring gradually increases from top to bottom, and its stiffness value is non-linear. This makes the diameter of the end of the tower spring connected to the upper support member 22 smaller than the diameter of the end connected to the lower support member 211, thereby enhancing the stability of the bottom when supporting the main unit 410. The second elastic element 213 is sleeved on the outside of the first elastic element 212, utilizing the space inside the tower spring to accommodate the second elastic element 213, forming a nested structure. This improves space utilization and reduces space occupation, while also allowing the first elastic element 212 and the second elastic element 213 to mutually limit each other in the horizontal direction, preventing a large gap between them from affecting the vibration damping effect.
[0040] Furthermore, in a specific example, such as Figures 2 to 4 In the example, the first elastic element 212 can be in the form of a rubber pad to utilize the elastic properties of the rubber pad to provide vibration damping and buffering in both the height and horizontal directions; the first elastic element 212 can be in the shape of a frustum, for example... Figure 4 The truncated cone shape shown is designed to gradually increase the coverage area from top to bottom in the height direction, thereby further enhancing the stability of the bottom when supporting the main unit 410 and improving the buffering effect against vibrations from the first vibration damping bracket 1. Wherein, as Figure 4 In the example, the top and bottom of the first elastic member 212 are provided with connecting posts 2121, which extend along the height direction to be connected and fixed to the upper support member 22 and the lower support member 211 respectively; the connecting posts 2121 can be in the form of studs, pins or the like, to facilitate connection and assembly.
[0041] Of course, in practical applications, connecting posts 2121 can also be provided on the side of the upper support member 22 and the lower support member 211 facing the first elastic member 212, and corresponding assembly holes can be provided at the top and bottom of the first elastic member 212, or connecting posts 2121 can be provided at one position at the top or bottom of the first elastic member 212, and assembly holes can be provided at the other position, while assembly holes or connecting posts 2121 can be provided at corresponding positions on the upper support member 22 and the lower support member 211. Similarly, the connecting posts 2121 and the corresponding assembly holes can be used to form a connection and fixation. The specific configuration can be set according to the actual assembly needs.
[0042] In further embodiments of this application, such as Figure 1 , Figure 2 In the example, the top of the lower support 211 is provided with a mounting groove 2111. The bottoms of the first elastic member 212 and the second elastic member 213 extend into the mounting groove 2111 and abut against the bottom wall of the mounting groove 2111. The shape of the mounting groove 2111 is adapted to the first elastic member 212 and the second elastic member 213 to limit the first elastic member 212 and the second elastic member 213 in the horizontal direction, reducing the horizontal swaying of the first elastic member 212 and the second elastic member 213, which is beneficial to further reduce vibration. When the first elastic member 212 and the second elastic member 213 are respectively a tower spring and a frustoconical rubber pad, the mounting groove 2111 can adopt a circular groove structure. Furthermore, an annular groove can also be provided on the bottom wall of the mounting groove 2111 to adapt to the bottom of the tower spring.
[0043] Furthermore, in a specific example, such as Figure 2 As shown, the bottom plate of the lower support 211 can protrude outward in the circumferential direction of the mounting groove 2111 to form an annular bottom plate, and the mounting groove 2111 protrudes upward relative to the annular bottom plate; corresponding connecting holes 2112 are provided on the annular bottom plate to facilitate connection and fixation with the first vibration damping bracket 1 by bolts. When the connecting hole 2112 is relatively close to the side wall of the mounting groove 2111, in order to facilitate bolt tightening operations, corresponding clearance grooves can also be provided on the outer side wall of the mounting groove 2111 to reserve operating space for bolt tightening operations.
[0044] In further embodiments of this application, such as Figure 1In the example, the number of upper support members 22 is at least two. Both the first direction and the second direction are perpendicular to the height direction, and the first direction and the second direction are perpendicular to each other; at least two upper support members 22 are spaced apart in the first direction, or at least two upper support members 22 are spaced apart in the second direction. Correspondingly, the number of composite damping mechanisms 21 is multiple, and each upper support member 22 is connected to at least two composite damping mechanisms 21 so that each upper support member 22 can form at least two flexible connection points with the first damping bracket 1. By simultaneously connecting and fixing at least two upper support members 22 to the main unit 410, multi-point support and damping are formed for the main unit 410. Preferably, as shown... Figure 1 and Figure 2 In the example, the upper support 22 can adopt a strip plate structure to facilitate connection with the main unit 410, and can also be connected to at least two composite vibration damping mechanisms 21 arranged at intervals, so that the vibration damping connection points are relatively dispersed, which is beneficial to improving the vibration damping capacity.
[0045] It should be noted that in practical applications, the first direction and the second direction can be the width direction and the length direction of the first vibration damping bracket 1, respectively. By arranging the upper support members 22 at intervals in the first direction or the second direction, the spatial layout can be optimized, the space utilization rate can be improved, and assembly can be facilitated. Of course, provided that the assembly space allows, the first direction and the second direction can also be directions that are inclined at a certain angle to the width direction or the length direction of the first vibration damping bracket 1, and the specific settings can be made according to the actual assembly requirements.
[0046] In further embodiments of this application, such as Figure 1 As shown, a vacuum pump mounting position 12 is provided on the first vibration damping bracket 1 for mounting a vacuum pump. The vacuum pump mounting position 12 is located on one side of the second vibration damping bracket 2, so that after the main unit 410 and the vacuum pump are installed, they can be staggered in the horizontal direction to prevent mutual interference. The vacuum pump mounting position 12 has multiple openings 121, and the multiple openings 121 all penetrate the first vibration damping bracket 1 along the height direction to form heat dissipation holes, so that the heat generated by the vacuum pump during operation can be quickly discharged through the openings 121.
[0047] Furthermore, such as Figure 1In the example shown, the opening 121 on the vacuum pump mounting position 12 is a strip-shaped opening, which increases the coverage area of the opening 121 and the heat dissipation. Both the first and second directions are perpendicular to the height direction, and the first and second directions are mutually perpendicular. Multiple strip-shaped openings are spaced apart in the first direction, and each strip-shaped opening extends along the second direction, forming a side-by-side arrangement that creates a grid-like heat dissipation structure for better heat dissipation. Furthermore, a reinforcing beam 122 extending along the first direction is provided at the bottom of the vacuum pump mounting position 12. The reinforcing beam 122 connects to the side frames of the multiple strip-shaped openings, thus connecting the side frames of the multiple strip-shaped openings into one unit. This improves the connection strength and effectively reduces vibration near the strip-shaped openings during electron microscope operation, preventing resonance near the openings.
[0048] More preferably, such as Figure 1 In the example, at least one reinforcing beam 122 is located in the middle of the strip hole in the second direction, so that the side frame of the strip hole is subjected to relatively uniform force in the second direction, resulting in better vibration reduction.
[0049] It should be noted that, in practical applications, the number and coverage area of the strip holes can be set according to the size of the vacuum pump mounting position 12 and the specific heat dissipation requirements; the number of reinforcing beams 122 can be one or more, which can be set according to specific usage requirements.
[0050] In further embodiments of this application, such as Figure 1 In the example, the first flexible support 11 at the bottom of the first vibration damping bracket 1 can adopt at least one of an air cushion structure, a rubber pad structure, or a spring structure to meet the flexible vibration damping requirements of the first vibration damping bracket 1. For example Figure 1 The air cushion structure shown can achieve a vibration damping effect in three-dimensional space by utilizing the compressibility of the gas contained inside.
[0051] Furthermore, in a specific example, such as Figure 1 In the example, the bottom of the first vibration damping bracket 1 can be provided with multiple first flexible support members 11. The multiple first flexible support members 11 are respectively located at the bottom of the first vibration damping bracket 1 near the edge. For example, when the first vibration damping bracket 1 adopts... Figure 1 When using the rectangular plate structure shown, first flexible support members 11 can be respectively set near the top corner of the first vibration damping bracket 1; of course, first flexible support members 11 can also be set at other positions at the bottom of the first vibration damping bracket 1, such as the area near the middle of the first vibration damping bracket 1, depending on the specific vibration damping requirements. By setting multiple first flexible support members 11, the first vibration damping bracket 1 can form multi-point flexible support with the working platform, which is beneficial to further enhance the vibration damping effect.
[0052] It should be noted that the above are only preferred examples of the present application. In actual applications, the shape of the air cushion structure can also be set according to specific usage needs. For example, an integrated air cushion structure can also be set, such as using a relatively large-sized air cushion that can cover the entirety of the first vibration damping bracket 1 or most of the bottom surface of the first vibration damping bracket 1.
[0053] In an embodiment of the second aspect of the present application, an electron microscope 400 is provided, as Figure 1 and Figure 5 shown. The electron microscope 400 includes the electron microscope vibration damping device 100 and the host device 410 in any of the embodiments of the first aspect described above. The host device 410 is disposed on the second vibration damping bracket 2 of the electron microscope vibration damping device 100 and is fixedly connected to the upper support member 22 of the second vibration damping bracket 2 so as to form a support for the host device 410 through the upper support member 22. During use, the host device 410 is used to perform scanning imaging on a target object, and can form a double vibration damping protection for the host device 410 through the first vibration damping bracket 1 and the second vibration damping bracket 2, and can buffer and cancel vibrations of different frequency bands in different directions in three-dimensional space, achieving a composite vibration damping effect on the host device 410.
[0054] Furthermore, in a specific example, as Figure 5 in the example, the electron microscope 400 further includes a host housing 420. The host housing 420 covers the electron microscope vibration damping device 100 and covers the host device 410 inside the host housing 420 to protect the host device 410. Correspondingly, an operation structure for docking with the host device 410 can be provided on the host housing 420. In addition, according to usage needs, a vacuum pump and other mechanisms supporting the host device 410 can also be provided on the first vibration damping bracket 1 to cooperate with the host device 410 to perform the scanning imaging function.
[0055] The following further introduces a specific example of the electron microscope of the present application in conjunction with the accompanying drawings.
[0056] As Figures 1 to 5 shown, the electron microscope 400 is a desktop scanning electron microscope, including a host housing 420, a host device 410, a vacuum pump, and the electron microscope vibration damping device 100 in the embodiments of the first aspect described above. Among them, the first direction is the width direction of the electron microscope 400, and the second direction is the length direction of the electron microscope 400.
[0057] The electron microscope vibration damping device 100 includes a first vibration damping bracket 1 and a second vibration damping bracket 2 arranged sequentially in the height direction. The first vibration damping bracket 1 is located at the bottom and adopts a rectangular plate structure. Multiple first flexible support members 11 are provided at its bottom. The first flexible support members 11 adopt an air cushion structure and are located at the top corners of the first vibration damping bracket 1 for contact with the work platform. The second vibration damping bracket 2 is located on top of the first vibration damping bracket 1. Two sets of second vibration damping brackets 2 are spaced apart in the first direction, and the bottoms of both sets of second vibration damping brackets 2 are connected and fixed to the first vibration damping bracket 1, while the tops of both sets of second vibration damping brackets 2 are connected and fixed to the main unit 410. On the first vibration damping bracket 1, a vacuum pump mounting position 12 is provided in the area of one side of the second vibration damping bracket 2 in the second direction. The vacuum pump is fixedly installed in the vacuum pump mounting position 12 so that the vacuum pump and the main unit 410 are offset in the second direction.
[0058] The second vibration damping bracket 2 includes four composite vibration damping mechanisms 21 and two upper support members 22. Each composite vibration damping mechanism 21 includes a lower support member 211, a first elastic member 212, and a second elastic member 213. The lower support member 211 has a circular structure, and its top has an upwardly protruding mounting groove 2111. Multiple connecting holes 2112 are provided on the area outside the mounting groove 2111 of the lower support member 211. The lower support member 211 is fixedly connected to the first vibration damping bracket 1 by connecting bolts. The lower support member 211 serves as the mounting base for the first elastic member 212 and the second elastic member 213. The mounting groove 2111 is a circular groove. The first elastic member 212 is specifically in the form of a tower spring, and the second elastic member 213 is a truncated cone-shaped rubber pad. The first elastic member 212 is fitted onto the outside of the second elastic member 213 to form a nested arrangement, allowing the first elastic member 212 and the second elastic member 213 to mutually limit each other. The bottoms of the first elastic member 212 and the second elastic member 213 extend into the mounting groove 2111 and abut against the bottom wall of the mounting groove 2111; the shape of the mounting groove 2111 is adapted to the first elastic member 212 and the second elastic member 213 to limit the first elastic member 212 and the second elastic member 213 in the horizontal direction.
[0059] The diameters of the first elastic element 212 and the second elastic element 213 gradually increase from top to bottom, meaning that the coverage area of the first elastic element 212 and the second elastic element 213 gradually increases from top to bottom in the height direction, thereby improving connection stability. Connecting posts 2121 are provided at both the top and bottom of the first elastic element 212, extending along the height direction. The mounting groove 2111 of the lower support member 211 has corresponding assembly holes for assembly connection with the connecting posts 2121 at the bottom of the first elastic element 212.
[0060] The upper support member 22 adopts a strip plate structure. Two upper support members 22 are spaced apart in the first direction and both extend along the second direction. The two upper support members 22 are fixedly connected to the mounting plates extending from both sides of the main unit 410. Two composite vibration damping mechanisms 21 are spaced apart below each upper support member 22 along the second direction. The upper support member 22 is provided with assembly holes corresponding to the connecting posts 2121 of the first elastic member 212 for assembly connection with the connecting posts 2121 of the first elastic member 212.
[0061] The vacuum pump mounting position 12 has multiple openings 121, specifically in the form of strip-shaped holes. All openings 121 penetrate the first vibration damping bracket 1 along the height direction to form heat dissipation holes. The multiple strip-shaped holes are spaced apart in the first direction, and each strip-shaped hole extends along a second direction, forming a side-by-side arrangement to create a grid-like heat dissipation structure. The bottom of the vacuum pump mounting position 12 also has a reinforcing beam 122 extending along the first direction. The reinforcing beam 122 connects to the side frames of the multiple strip-shaped holes, thus connecting the side frames of the multiple strip-shaped holes into a single unit. The reinforcing beam 122 is located in the middle of the strip-shaped holes in the second direction, ensuring more uniform stress on the side frames of the strip-shaped holes, thereby enhancing connection strength, reducing vibration at the strip-shaped holes, and preventing resonance at the strip-shaped holes.
[0062] The main housing 420 adopts a bottom-through housing structure. The bottom of the main housing 420 is connected and fixed to the top edge of the first vibration damping bracket 1, so that the main unit 410, the second vibration damping bracket 2, and the vacuum pump cover are housed inside the main housing 420, thereby providing a protective effect through the main housing 420. The main housing 420 can be equipped with operating structures that are compatible with the main unit 410, facilitating the main unit 410 to perform corresponding scanning and imaging operations.
[0063] The main unit 410 has an internal electron optical system with a spatial resolution better than 4nm, which can ensure clear imaging at high magnification and meet the requirements of nanoscale morphological observation. During use, the main unit 410 can be protected by a dual vibration damping system through the first vibration damping bracket 1 and the second vibration damping bracket 2. This system can buffer and cancel vibrations in different directions and frequency bands in three-dimensional space. Moreover, it can simultaneously dampen vibrations generated by the external environment and vibrations generated by other internal mechanisms of the electron microscope 400, so as to prevent them from affecting the normal operation of the electron optical system of the main unit 410.
[0064] The composite vibration damping mechanism 21 employs a combination of tower springs and rubber pads, simultaneously meeting vibration damping requirements in both the vertical and horizontal directions. Tower springs are small in size, have a large load capacity, and exhibit gradually changing stiffness, making them suitable for applications with limited space and high load requirements. The rubber pads can be made of elastic materials such as natural rubber (NR), polyurethane rubber (UR), butadiene rubber (BR), styrene-butadiene rubber (SBR), chloroprene rubber (CR), ethylene propylene rubber (EPR), polyurethane rubber (PU), silicone rubber, butyl rubber (HR), and nitrile rubber (NBR). Preferably, the rubber pads are made of polyurethane rubber (UR), which has the following advantages: (1) Excellent wear resistance. Laboratory test results show that the wear resistance of polyurethane rubber is 3-5 times that of natural rubber, and often up to 10 times in practical applications; (2) High strength and good elasticity in the Shore A60 to Shore A70 hardness range; (3) Good vibration damping. At room temperature, polyurethane rubber damping elements can absorb 10%-20% of vibration energy. The higher the vibration frequency, the greater the energy absorption; (4) Good oil and chemical resistance. Polyurethane rubber has low affinity with non-polar mineral oils and is almost unaffected by fuel oils (such as kerosene and gasoline) and machine oils (such as hydraulic oil, engine oil, lubricating oil, etc.), which is comparable to nitrile rubber; (5) High coefficient of friction, generally above 0.5; (6) Good resistance to low temperature, ozone, radiation, electrical insulation, and adhesion.
[0065] The electron microscope 400 in this embodiment can achieve vibration buffering effect for vibrations of different frequency bands in any direction in three-dimensional space. Moreover, it can not only buffer vibrations generated by the external environment, but also buffer vibrations generated by other internal mechanisms (such as vacuum pumps) during operation. It can effectively meet the vibration reduction requirements of the host device 410, thereby ensuring the imaging effect of the electron optical system in the host device 410.
[0066] Furthermore, the electron microscope 400 in this application has all the beneficial effects of the electron microscope vibration damping device 100 in any of the above embodiments, which will not be repeated here.
[0067] The above-described specific examples are for illustrative purposes only and are not intended to limit the scope of this invention. Those skilled in the art to which this invention pertains can make various simple deductions, modifications, or substitutions based on the concept of this invention.
Claims
1. A vibration damping device for an electron microscope, characterized in that, include: The first vibration damping bracket has a first flexible support at its bottom, which is used to contact the working platform of the electron microscope. The second vibration damping bracket is connected to the top of the first vibration damping bracket. The second vibration damping bracket has a composite vibration damping mechanism and an upper support member. The upper support member is used to connect the main unit of the electron microscope. The composite vibration damping mechanism can generate elastic deformation in the height direction and in the horizontal plane perpendicular to the height direction to offset vibration in three-dimensional space.
2. The electron microscope vibration reduction device according to claim 1, characterized in that, The composite vibration damping mechanism includes: The lower support member is fixedly connected to the top surface of the first vibration damping bracket; A first elastic element is disposed on the lower support element, and the bottom of the first elastic element is connected to the lower support element, and the top of the first elastic element is connected to the upper support element. And a second elastic member, which is nested with the first elastic member, with the bottom of the second elastic member abutting against the lower support member and the top of the second elastic member abutting against the upper support member.
3. The electron microscope vibration reduction device according to claim 2, characterized in that, In the vertical direction, the coverage area of the first elastic element and / or the second elastic element gradually increases from top to bottom.
4. The electron microscope vibration reduction device according to claim 3, characterized in that, The second elastic element is a tower spring, sleeved on the outside of the first elastic element. The diameter of the end of the second elastic element connected to the upper support is smaller than the diameter of the end connected to the lower support, and the stiffness of the second elastic element in the height direction is non-linear; and / or, The first elastic element is a frustoconical rubber pad, and the top and bottom of the first elastic element both have connecting posts extending along the height direction. The connecting posts are used to connect the upper support and the lower support respectively.
5. The electron microscope vibration reduction device according to claim 2, characterized in that, The top of the lower support member has a mounting groove, the shape of which is adapted to the first elastic member and the second elastic member, and the bottom of the first elastic member and the bottom of the second elastic member both extend into the mounting groove and abut against the bottom wall of the mounting groove.
6. The electron microscope vibration reduction device according to claim 1, characterized in that, The number of upper support members is at least two, and the at least two upper support members are spaced apart in a first direction or a second direction, wherein the first direction and the second direction are both perpendicular to the height direction, and the first direction is perpendicular to the second direction; The number of composite vibration damping mechanisms is multiple, and each of the upper support members is connected to at least two of the composite vibration damping mechanisms.
7. The electron microscope vibration reduction device according to claim 1, characterized in that, The first vibration damping bracket has a vacuum pump mounting position, which is located on one side of the second vibration damping bracket, and the vacuum pump mounting position has multiple openings that extend through the height direction.
8. The electron microscope vibration reduction device according to claim 7, characterized in that, The opening is a strip-shaped opening, and a plurality of the strip-shaped openings are spaced apart in a first direction, and each strip-shaped opening extends along a second direction; wherein, both the first direction and the second direction are perpendicular to the height direction, and the first direction is perpendicular to the second direction; The bottom of the vacuum pump mounting position has a reinforcing beam extending in a first direction, the reinforcing beam being connected to the side frames of the plurality of strip holes, and at least one of the reinforcing beams being located at the center of the strip holes in a second direction.
9. The electron microscope vibration reduction device according to claim 1, characterized in that, The first flexible support includes at least one of an air cushion structure, a rubber pad structure, or a spring structure; and / or, The number of the first flexible support members is multiple, and the multiple first flexible support members are respectively located at the bottom of the first vibration damping bracket near the edge.
10. An electron microscope, characterized in that, include: The electron microscope vibration damping device as described in any one of claims 1 to 9; The main unit is mounted on the second vibration damping bracket of the electron microscope vibration damping device and connected to the upper support of the second vibration damping bracket.