A connection structure of a magnetic suspension rotating vane and a rotor main shaft

Abstract

The utility model discloses a kind of connection structure of magnetic suspension rotary moving vane and rotor main shaft, mainly related to the technical field of magnetic suspension molecular pump. Including several connecting rods, the top of rotor main shaft is equipped with the connecting portion being contacted with integrated moving vane, connecting rod is set on connecting portion, integrated moving vane is equipped with several through holes, further including fixed cap, connecting rod is connected with fixed cap after passing through through hole, limit block is equipped on fixed cap, vertical groove and the limit slot being communicated with vertical groove are equipped on connecting rod, vertical groove extends to outside, limit block is sequentially slidably arranged in vertical groove and limit slot, clamping ring is equipped between fixed cap and integrated moving vane. The utility model has the beneficial effect that: solve the problem that existing connection structure is easy to produce loosening or micro-displacement, affect magnetic suspension molecular pump dynamic balance, improve the stability and efficiency of magnetic suspension rotary moving vane and rotor main shaft connection.

Description

Technical Field

[0001] This utility model relates to the technical field of magnetic levitation molecular pumps, specifically a connection structure between a magnetically levitation rotating vane and a rotor main shaft. Background Technology

[0002] As a vacuum device, the core components of a magnetically levitated molecular pump include a high-speed rotating rotor and a precisely controlled magnetic levitation system. The rotating vane, as the key element for the molecular pump to transfer momentum of gas molecules, is usually fixed on the rotor shaft and requires extremely high rotational accuracy, dynamic balance, and structural stability.

[0003] The existing connection structure between the magnetically levitated rotating vane and the rotor shaft mostly adopts screw fastening, conical surface fit, or interference fit. Under high-speed operation, the connection structure is prone to loosening or slight displacement, which affects the dynamic balance of the magnetically levitated molecular pump. Utility Model Content

[0004] The purpose of this invention is to provide a connection structure between a magnetically levitated rotating vane and a rotor shaft, which solves the problem that existing connection structures are prone to loosening or micro-displacement, affecting the dynamic balance of the magnetically levitated molecular pump, and improves the stability and efficiency of the connection between the magnetically levitated rotating vane and the rotor shaft.

[0005] To achieve the above objectives, the utility model employs the following technical solution:

[0006] A connection structure between a magnetically levitated rotating plate and a rotor spindle includes several connecting rods for connecting the rotor spindle and the integrated rotating plate. The top of the rotor spindle is provided with a connecting part that contacts the integrated rotating plate. The connecting rods are disposed on the connecting part. The integrated rotating plate is provided with several through holes. The structure also includes a fixing cap. The connecting rods pass through the through holes and are slidably connected to the fixing cap. The fixing cap is provided with a limiting block. The connecting rods are provided with a vertical groove and a limiting groove communicating with the vertical groove. The vertical groove extends to the outside. The limiting block is slidably disposed in the vertical groove and the limiting groove in sequence. A clamping ring is provided between the fixing cap and the integrated rotating plate.

[0007] Furthermore, a plurality of clamping sleeves are provided on one side of the clamping ring, and the clamping sleeves are disposed between the integral moving plate and the connecting rod.

[0008] Furthermore, both the clamping ring and the clamping sleeve are made of elastic material.

[0009] Furthermore, the rotor spindle is made of 40Cr, and the integrated moving plate is made of 7075T651 aluminum.

[0010] Furthermore, a horizontal groove is provided between the limiting groove and the vertical groove, the height of the limiting block is lower than the height of the vertical groove, and a locking spring is provided between the fixing cap and the clamping ring.

[0011] Furthermore, the top of the fixing cap is provided with a hexagonal nut head.

[0012] Furthermore, it also includes a first flat plate and a second flat plate, the first flat plate being disposed between the fixing cap and the locking spring, and the second flat plate being disposed between the clamping ring and the locking spring.

[0013] Furthermore, the integrated moving piece is provided with a positioning block, and the connecting part is provided with a positioning groove that slides in contact with the positioning block.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0015] 1. After inserting the connecting rod into the corresponding mounting hole, the connecting rod is set on the connecting part by welding. Compared with the traditional threaded connection, this avoids the friction between the threaded pairs from easily decreasing under vibration, impact or variable load, which can lead to loosening of the connecting structure and affect the normal operation of the magnetic levitation molecular pump. In addition, it prevents the phenomenon of stripping of the connecting rod and the connecting part, which affects the overall stability of the connecting structure.

[0016] 2. After placing the integrated moving plate on the rotor spindle, the connecting rod is passed through the through hole and slidably connected to the fixing cap, so that the limiting block on the fixing cap slides into the vertical groove until the fixing cap contacts the clamping ring. Then, the fixing cap is rotated so that the limiting block enters the limiting groove from the vertical groove. The resistance generated by the upper and lower sides of the limiting block contacting the connecting rod restricts the vertical movement of the fixing cap, thereby fixing the rotor spindle and the integrated moving plate without the need to tighten the nut. This avoids the connection structure from being loose due to insufficient preload on the connecting rod, or the bolt breaking or the integrated moving plate deforming due to excessive preload. At the same time, it improves the efficiency of connecting the integrated moving plate and the rotor spindle.

[0017] 3. The clamping ring is positioned between the fixed cap and the integrated moving plate. When the integrated moving plate drives the connecting rod to tilt slightly, the fixed cap further compresses the clamping ring. The rebound force generated after the clamping ring is compressed and restored allows the integrated moving plate to finely adjust its position during high-speed rotation, automatically compensating for vibration or deformation, ensuring the dynamic balance of the magnetic levitation molecular pump, and improving the smooth operation of the magnetic levitation molecular pump. Attached Figure Description

[0018] Appendix Figure 1 This is a schematic diagram of the structure of the rotor spindle and the integrated moving plate of this utility model.

[0019] Appendix Figure 2 This is an appendix to the utility model Figure 1 A magnified view of part A in the middle.

[0020] Appendix Figure 3This is a schematic structural view of the limit block of the present utility model.

[0021] Attached Figure 4 This is a schematic structural view of the connecting rod of the present utility model.

[0022] Attached Figure 5 This is a schematic structural view of the positioning block of the present utility model.

[0023] Reference numerals shown in the attached drawings:

[0024] 1, rotor main shaft; 2, integral moving piece; 3, connecting rod; 4, connecting part; 5, through hole; 6, fixing cap; 7, limit block; 8, vertical groove; 9, limit groove; 10, clamping ring; 11, clamping sleeve; 12, horizontal groove; 13, locking spring; 14, hexagonal nut head; 15, first flat piece; 16, second flat piece; 17, positioning block; 18, positioning groove. Detailed implementation manners

[0025] The present utility model will be further described below in conjunction with specific embodiments. It should be understood that these embodiments are only used to illustrate the present utility model and not to limit the scope of the present utility model. In addition, it should be understood that after reading the content taught by the present utility model, those skilled in the art can make various changes or modifications to the present utility model, and these equivalent forms also fall within the scope defined by this application.

[0026] The present utility model provides a connection structure between a magnetic levitation rotating moving piece and a rotor main shaft 1. As Figure 1 , Figure 2 , Figure 3 and Figure 4 shown, it includes a plurality of connecting rods 3 for connecting the rotor main shaft 1 and the integral moving piece 2. A connecting part 4 in contact with the integral moving piece 2 is provided at the top of the rotor main shaft 1. The connecting rod 3 is arranged on the connecting part 4. Specifically, after the connecting rod 3 is inserted into the corresponding mounting hole, the connecting rod 3 is arranged on the connecting part 4 by welding. Compared with the traditional threaded connection, it avoids that under the action of vibration, impact or variable load, the friction force between the threaded pair is likely to decrease, resulting in the loosening of the connection structure and affecting the normal operation of the magnetic levitation molecular pump.

[0027] The integrated moving plate 2 has several through holes 5 and also includes a fixing cap 6. The connecting rod 3 passes through the through holes 5 and is slidably connected to the fixing cap 6. The fixing cap 6 is provided with a limiting block 7. The connecting rod 3 is provided with a vertical groove 8 and a limiting groove 9 communicating with the vertical groove 8. The vertical groove 8 extends to the outside. The limiting block 7 is slidably disposed in the vertical groove 8 and the limiting groove 9 in sequence. A clamping ring 10 is provided between the fixing cap 6 and the integrated moving plate 2. After the integrated moving plate 2 is placed on the rotor main shaft 1, the connecting rod 3 is then passed through the through holes 5 and slidably connected to the fixing cap 6, so that the limiting block 7 on the fixing cap 6 slides into the vertical groove 8 until the fixing cap 6 contacts the clamping ring 10. Then the fixing cap 6 is rotated so that the limiting block 7 moves from the vertical groove 8 into the limiting groove 9. The limiting block 7 is connected to the clamping ring 10 through the upper and lower sides of the vertical groove 8. When the connecting rods 3 come into contact, the resulting resistance restricts the up-and-down movement of the fixing cap 6, thereby fixing the rotor spindle 1 and the integrated moving plate 2 without the need for tightening nuts. This avoids insufficient preload on the connecting rods 3, which could cause the connection structure to loosen, or excessive preload, which could cause the bolts to break or the integrated moving plate 2 to deform. It also improves the efficiency of connecting the integrated moving plate 2 and the rotor spindle 1. In addition, the clamping ring 10 is set between the fixing cap 6 and the integrated moving plate 2. When the integrated moving plate 2 drives the connecting rods 3 to tilt slightly, the fixing cap 6 further compresses the clamping ring 10. The rebound force generated after the clamping ring 10 is compressed and restored allows the integrated moving plate 2 to fine-tune its position during high-speed rotation, automatically compensating for vibration or deformation, ensuring the dynamic balance of the magnetic levitation molecular pump, and improving the smooth operation of the magnetic levitation molecular pump.

[0028] Preferred, such as Figure 2 As shown, a plurality of clamping sleeves 11 are provided on one side of the clamping ring 10. The clamping sleeves 11 are disposed between the integrated moving plate 2 and the connecting rod 3. When the integrated moving plate 2 drives the connecting rod 3 to tilt slightly, the connecting rod 3 further compresses the clamping sleeves 11. The rebound force generated after the clamping sleeves 11 are compressed and restored allows the integrated moving plate 2 to finely adjust its position when rotating at high speed, automatically compensate for vibration or deformation, ensure the dynamic balance of the magnetic levitation molecular pump, and improve the smooth operation of the magnetic levitation molecular pump.

[0029] Preferably, both the clamping ring 10 and the clamping sleeve 11 are made of elastic material. The design of the elastic clamping ring 10 and the elastic clamping sleeve 11 further improves the effect of fine-tuning the position of the integrated moving plate 2 when rotating at high speed, automatically compensates for vibration or deformation, ensures the dynamic balance of the magnetic levitation molecular pump, and improves the smooth operation of the magnetic levitation molecular pump.

[0030] Preferably, the rotor spindle 1 is made of 40Cr steel, and the integrated moving plate 2 is made of 7075T651 aluminum. By utilizing the difference in the coefficient of thermal expansion between 40Cr steel and 7075T651 aluminum alloy, the molecular pump can form adaptive compensation when rotating and heating at high speed, reducing thermal stress and enhancing connection stability. In addition, by heating the rotor spindle 1 and cooling the rotor, the rotor can be quickly fitted into the heated rotor spindle 1 when the temperature difference is at its maximum. After assembly, it is placed in a room temperature environment to cool naturally, and a precise interference fit is achieved by utilizing the principle of thermal expansion and contraction.

[0031] Preferred, such as Figure 2 and Figure 3 As shown, a horizontal groove 12 is provided between the limiting groove 9 and the vertical groove 8. The height of the limiting block 7 is lower than the height of the vertical groove 8. A locking spring 13 is provided between the fixing cap 6 and the clamping ring 10. When the fixing cap 6 slides down, the locking spring 13 is compressed until the limiting block 7 moves to the horizontal groove 12. By rotating the fixing cap 6, the limiting block 7 moves from the vertical groove 8 into the horizontal groove 12 until the limiting block 7 moves from the horizontal groove 12 to the limiting groove 9. Then, an external force is applied again, and under the action of the rebound force generated by the compression of the locking spring 13, This allows the limiting block 7 to enter the limiting groove 9, and the upper side of the limiting block 7 to contact the connecting rod 3, thus connecting the integrated moving plate 2 and the rotor main shaft 1. At the same time, the rebound force generated by the compression of the locking spring 13 will be transmitted to the connecting rod 3 through the limiting block 7 and the fixing cap 6, thereby pulling the connecting rod 3 upward and applying a preload force between the integrated moving plate 2 and the rotor main shaft 1. This counteracts the external force generated during the rotation process, automatically compensates for vibration or deformation, ensures the dynamic balance of the magnetic levitation molecular pump, and improves the smooth operation of the magnetic levitation molecular pump.

[0032] Preferred, such as Figure 2 As shown, the top of the fixing cap 6 is provided with a hexagonal nut head 14, which facilitates the rotation of the fixing cap 6 on the connecting rod 3, thereby improving the efficiency of connecting the integrated moving plate 2 and the rotor spindle 1.

[0033] Preferred, such as Figure 2 As shown, it also includes a first flat plate 15 and a second flat plate 16. The first flat plate 15 is disposed between the fixing cap 6 and the locking spring 13, and the second flat plate 16 is disposed between the clamping ring 10 and the locking spring 13, increasing the contact area between the locking spring 13 and the fixing cap 6 and the clamping ring 10, and preventing the pressure applied by the locking spring 13 from damaging the fixing cap 6 and the clamping ring 10.

[0034] Preferred, such as Figure 5 As shown, the integrated moving plate 2 is provided with a positioning block 17, and the connecting part 4 is provided with a positioning groove 18 that slides in contact with the positioning block 17. The resistance generated by the contact between the positioning block 17 and the positioning groove 18 further improves the stability of the connection between the integrated moving plate 2 and the rotor spindle 1.

[0035] Example 1

[0036] This utility model provides a connection structure between a magnetically levitated rotating plate and a rotor main shaft 1, such as... Figures 1-4 As shown, after inserting the connecting rod 3 into the corresponding mounting hole, the connecting rod 3 is set on the connecting part 4 by welding. Compared with the traditional threaded connection, this avoids the friction between the threaded pairs from easily decreasing under vibration, impact or variable load, which could lead to loosening of the connection structure and affect the normal operation of the magnetic levitation molecular pump. In addition, it prevents the phenomenon of slippage between the connecting rod 3 and the connecting part 4, which would affect the overall stability of the connection structure.

[0037] After placing the integrated moving plate 2 on the rotor spindle 1, the connecting rod 3 is passed through the through hole 5 and slidably connected to the fixing cap 6, so that the limiting block 7 on the fixing cap 6 slides into the vertical groove 8 until the fixing cap 6 contacts the clamping ring 10. Then, the fixing cap 6 is rotated so that the limiting block 7 moves from the vertical groove 8 into the limiting groove 9. The resistance generated by the upper and lower sides of the limiting block 7 contacting the connecting rod 3 restricts the vertical movement of the fixing cap 6, thereby fixing the rotor spindle 1 and the integrated moving plate 2 without the need to tighten the nut, thus avoiding insufficient preload applied to the connecting rod 3 by the nut. This can cause the connection structure to loosen, or the preload to be too large, causing the bolts to break or the integrated moving plate 2 to deform. At the same time, it can improve the efficiency of connecting the integrated moving plate 2 and the rotor spindle 1. In addition, the clamping ring 10 is set between the fixed cap 6 and the integrated moving plate 2. When the integrated moving plate 2 drives the connecting rod 3 to tilt slightly, the fixed cap 6 further compresses the clamping ring 10. The rebound force generated after the clamping ring 10 is compressed and restored allows the integrated moving plate 2 to finely adjust its position when rotating at high speed, automatically compensate for vibration or deformation, ensure the dynamic balance of the magnetic levitation molecular pump, and improve the smooth operation of the magnetic levitation molecular pump.

[0038] Example 2

[0039] Based on Example 1, such as Figure 1 and Figure 2 As shown, when the integrated moving plate 2 drives the connecting rod 3 to tilt slightly, the connecting rod 3 further compresses the clamping sleeve 11. The rebound force generated after the clamping sleeve 11 is compressed and restored allows the integrated moving plate 2 to finely adjust its position when rotating at high speed, automatically compensate for vibration or deformation, ensure the dynamic balance of the magnetic levitation molecular pump, and improve the smooth operation of the magnetic levitation molecular pump.

[0040] In addition, both the clamping ring 10 and the clamping sleeve 11 are made of elastic material. The design of the elastic clamping ring 10 and the elastic clamping sleeve 11 further improves the effect of fine-tuning the position of the integrated moving plate 2 when rotating at high speed, automatically compensates for vibration or deformation, ensures the dynamic balance of the magnetic levitation molecular pump, and improves the smooth operation of the magnetic levitation molecular pump.

[0041] Meanwhile, the rotor spindle 1 is made of 40Cr steel, and the integrated moving plate 2 is made of 7075T651 aluminum. By utilizing the difference in the coefficient of thermal expansion between 40Cr steel and 7075T651 aluminum alloy, the molecular pump can form an adaptive compensation when it rotates and heats up at high speed, reducing thermal stress and enhancing connection stability. In addition, by heating the rotor spindle 1 and cooling the rotor, the rotor can be quickly fitted into the heated rotor spindle 1 when the temperature difference is at its maximum. After assembly, it is placed in a room temperature environment to cool naturally, using the principle of thermal expansion and contraction to achieve a precise interference fit.

[0042] Example 3

[0043] Based on Example 2, such as Figures 2-4 As shown, when the fixed cap 6 slides down, the locking spring 13 is compressed until the limiting block 7 moves to the horizontal groove 12. The glove is placed on the hexagonal nut head 14 of the fixed cap 6 through the deep hole sleeve. By rotating the handle of the deep hole sleeve, the fixed cap 6 is rotated on the connecting rod 3, causing the limiting block 7 to move from the vertical groove 8 into the horizontal groove 12, until the limiting block 7 moves from the horizontal groove 12 to the limiting groove 9. Then, an external force is applied again. Under the action of the rebound force generated after the locking spring 13 is compressed, the limiting block 7 enters the groove. Within the limiting groove 9, the upper side of the limiting block 7 contacts the connecting rod 3, thus connecting the integrated moving plate 2 with the rotor main shaft 1. At the same time, the rebound force generated after the locking spring 13 is compressed is transmitted to the connecting rod 3 through the limiting block 7 and the fixing cap 6, thereby pulling the connecting rod 3 upward and applying a preload force between the integrated moving plate 2 and the rotor main shaft 1. This counteracts the external force generated during rotation, automatically compensates for vibration or deformation, ensures the dynamic balance of the magnetic levitation molecular pump, and improves the smooth operation of the magnetic levitation molecular pump.

Claims

1. A connection structure between a magnetically levitated rotating plate and a rotor main shaft, comprising a plurality of connecting rods (3) for connecting the rotor main shaft (1) and the integral rotating plate (2), characterized in that: The top of the rotor spindle (1) is provided with a connecting part (4) that contacts the integrated moving plate (2). The connecting rod (3) is provided on the connecting part (4). The integrated moving plate (2) is provided with several through holes (5) and also includes a fixing cap (6). The connecting rod (3) passes through the through holes (5) and is slidably connected to the fixing cap (6). The fixing cap (6) is provided with a limiting block (7). The connecting rod (3) is provided with a vertical groove (8) and a limiting groove (9) that communicates with the vertical groove (8). The vertical groove (8) extends to the outside. The limiting block (7) is slidably disposed in the vertical groove (8) and the limiting groove (9) in sequence. A clamping ring (10) is provided between the fixing cap (6) and the integrated moving plate (2).

2. The connection structure between a magnetically levitated rotating plate and a rotor main shaft according to claim 1, characterized in that: The clamping ring (10) has several clamping sleeves (11) on one side, and the clamping sleeves (11) are arranged between the integrated moving plate (2) and the connecting rod (3).

3. The connection structure between a magnetically levitated rotating plate and a rotor main shaft according to claim 2, characterized in that: Both the clamping ring (10) and the clamping sleeve (11) are made of elastic material.

4. The connection structure between a magnetically levitated rotating plate and a rotor main shaft according to claim 1, characterized in that: The rotor spindle (1) is made of 40Cr, and the integrated moving plate (2) is made of 7075T651 aluminum.

5. The connection structure between a magnetically levitated rotating plate and a rotor main shaft according to claim 1, characterized in that: A horizontal groove (12) is provided between the limiting groove (9) and the vertical groove (8). The height of the limiting block (7) is lower than the height of the vertical groove (8). A locking spring (13) is provided between the fixing cap (6) and the clamping ring (10).

6. The connection structure between a magnetically levitated rotating plate and a rotor main shaft according to claim 1, characterized in that: The top of the fixing cap (6) is provided with a hexagonal nut head (14).

7. The connection structure between a magnetically levitated rotating plate and a rotor main shaft according to claim 5, characterized in that: It also includes a first flat plate (15) and a second flat plate (16), the first flat plate (15) being disposed between the fixing cap (6) and the locking spring (13), and the second flat plate (16) being disposed between the clamping ring (10) and the locking spring (13).

8. The connection structure between a magnetically levitated rotating plate and a rotor main shaft according to claim 1, characterized in that: The integrated moving piece (2) is provided with a positioning block (17), and the connecting part (4) is provided with a positioning groove (18) that slides in contact with the positioning block (17).

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