Process furnace and process plant

Abstract

The present disclosure relates to the field of semiconductor and photovoltaic technology, and particularly relates to a process furnace and process equipment, which solves the problem of poor uniformity and stability of the atmosphere around the sheet at different regions in the furnace in the related art, which affects the process effect. The process furnace comprises a furnace body, has at least one process chamber, the process chamber has at least one column of a plurality of gas inlets communicated with the process chamber, the plurality of gas inlets located in the same column are arranged at intervals along a first direction; a gas inlet assembly communicated with the plurality of gas inlets, the gas inlet assembly is configured to guide at least one gas from the communicated gas inlets into the process chamber; a plurality of sets of adjusting assemblies, at least arranged at the gas inlet assembly, each set of adjusting assemblies corresponds to one or a plurality of gas inlets adjacent in the first direction, and each adjusting assembly can independently adjust the gas inlet flow of the corresponding gas inlet. The process furnace and process equipment provided by the present disclosure can improve the uniformity and stability of the atmosphere around the sheet at different regions in the furnace to ensure the process quality.

Description

Technical Field

[0001] This disclosure relates to the fields of semiconductor and photovoltaic technology, and in particular to a process furnace and process equipment. Background Technology

[0002] Photovoltaic power generation technology is one of the most important renewable energy technologies. Compared with traditional energy sources, the cost of solar power generation remains high, severely restricting its development and application. Therefore, industry and the scientific community have been committed to improving the photoelectric conversion efficiency of solar cells and reducing their manufacturing costs. To improve the photoelectric conversion efficiency, process equipment is needed to process the solar cells. Taking annealing as an example, traditional annealing furnaces use an assembly line to anneal the sheets sequentially. To increase production capacity, the length of the assembly line needs to be increased. Due to various external factors, the uniformity and stability of the gas distribution around the sheets in different areas of the furnace are poor, affecting the annealing effect. Utility Model Content

[0003] In view of this, the present disclosure provides a process furnace and process equipment to solve the problem in the related art where the poor uniformity and stability of the atmosphere around the sheet in different areas of the furnace affects the process effect.

[0004] In a first aspect, one embodiment of this disclosure provides a process furnace configured to process sheet material. The process furnace includes: a furnace body having at least one process chamber configured to accommodate the sheet material, the process chamber having at least one row of multiple air inlets communicating with the process chamber, the multiple air inlets located in the same row being arranged at intervals along a first direction; an air inlet assembly communicating with the multiple air inlets, the air inlet assembly being configured to introduce at least one gas from the air inlets into the process chamber; and multiple sets of adjustment assemblies at least disposed on the air inlet assembly, each set of adjustment assemblies corresponding to one or multiple air inlets adjacent in the first direction, each adjustment assembly being capable of independently adjusting the air inlet flow rate of the corresponding air inlet.

[0005] In some embodiments, the process chamber has a plurality of interconnected air outlets, which are spaced apart along a first direction. The process chamber also has two or more rows of air inlets, which are spaced apart around the periphery of the process chamber. The air inlets are located above the air outlets in the vertical direction.

[0006] In some embodiments, the process chamber has two rows of air inlets and a vertical plane. In the cross-section of the process chamber, the two rows of air inlets are mirror images of each other on both sides of the vertical plane. The air inlets have a first extension line along their own extension direction, and there is a non-zero first angle between the first extension line and the extension line of the vertical plane. The air outlet has a second extension line along its own extension direction, and the second extension line coincides with the extension line of the vertical plane.

[0007] In some embodiments, the first included angle is less than or equal to 30°.

[0008] In some embodiments, the air intake assembly includes: a main air intake pipe extending along a first direction; a plurality of branch air intake pipes corresponding one-to-one with a plurality of air inlets, the branch air intake pipes connecting the main air intake pipe and the air inlets, and each branch air intake pipe being provided with an adjustment component capable of adjusting the gas flow rate introduced into the process chamber from the air inlet.

[0009] In some embodiments, the process furnace further includes: a gas detection component configured to detect the gas uniformity around the sheet in the process chamber and generate a gas detection signal; and a control component electrically connected to the gas detection component and the adjustment component, respectively, the control component being configured to receive the gas detection signal and adjust one or more sets of adjustment components according to the gas detection signal, thereby increasing or decreasing the gas flow rate of the corresponding branch inlet pipe.

[0010] In some embodiments, the process furnace further includes: an extraction assembly connected to a plurality of outlets, the extraction assembly being configured to exhaust gas from the process chamber; a gas recirculation assembly having an inlet and an outlet, the inlet being connected to the extraction assembly and the outlet being connected to the inlet assembly; and an exhaust gas filtration assembly connected to the outlet of the gas recirculation assembly and the inlet assembly, the exhaust gas filtration assembly being configured to filter gas exhausted from the outlet.

[0011] In some embodiments, the exhaust assembly includes: a main exhaust pipe extending along a first direction; a plurality of outgoing exhaust pipes corresponding one-to-one with a plurality of exhaust ports, the outgoing exhaust pipes connecting the main exhaust pipe and the exhaust ports; and an adjustment assembly disposed on each of the plurality of outgoing exhaust pipes, the adjustment assembly being capable of adjusting the gas flow rate discharged from the process chamber by each exhaust port.

[0012] In some embodiments, the process chambers include a plurality of process chambers arranged sequentially along a first direction, each process chamber being independent of the others, any adjacent process chambers being interconnected to allow sheet material to pass through, and each process chamber having a corresponding set of adjustment components that are individually controllable.

[0013] Secondly, embodiments of this disclosure also provide a process apparatus, including the process furnace described above, configured to process sheet material; and a conveying mechanism disposed on at least one side of the process furnace, configured to input sheet material into the process furnace or output sheet material from the process furnace.

[0014] The present invention discloses a process equipment and system that divides a process chamber into multiple regions along a first direction, such that the air intake of each region's corresponding connected air inlet is individually adjustable. This allows for real-time adjustment of the air intake of the corresponding region based on the gas distribution around each sheet in the process chamber, thereby ensuring that the sheets in different regions of the process chamber are surrounded by uniform and stable gas, which is beneficial for improving the process effect. Attached Figure Description

[0015] The above and other objects, features, and advantages of this disclosure will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the disclosure and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0016] Figure 1 The diagram shown is a schematic diagram of a process equipment provided in an embodiment of this disclosure.

[0017] Figure 2 The image shown is a perspective view of a process furnace provided in an embodiment of this disclosure.

[0018] Figure 3 The image shown is a cross-sectional view of a process furnace provided in an embodiment of this disclosure.

[0019] Figure 4 The diagram shown is a schematic diagram of a furnace body provided in an embodiment of this disclosure.

[0020] Figure 5 As shown Figure 4 The cross-sectional view of the furnace body is shown.

[0021] Figure 6 The image shown is a cross-sectional view of a process furnace provided in another embodiment of this disclosure.

[0022] Figure 7 The diagram shown is a schematic diagram of a process furnace provided in another embodiment of this disclosure.

[0023] Figure label:

[0024] 100. Process equipment; 10. Process furnace; 1. Furnace body; 1m. Preheating furnace; 1s. Cooling furnace; 11. Process chamber; 1a. Air inlet; 1b. Air outlet; 2. Air inlet assembly; 21. Main air inlet pipeline; 22. Branch air inlet pipeline; 3. Adjustment assembly; 4. Heating assembly; 5. Conveying assembly; 6. Valve assembly; 7. Air extraction assembly; 71. Main air outlet pipeline; 72. Outlet air outlet pipeline; 8. Gas circulation assembly; 9. Tail gas filtration assembly; 20. Conveying mechanism; 30. Carrier; 301. Sheet; X. First direction; Y. Second direction; Z. Vertical direction; n1. First included angle; 1N. Vertical plane. Detailed Implementation

[0025] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0026] Figure 1 The diagram shown is a schematic diagram of a process equipment provided in an embodiment of this disclosure. Figure 2 The image shown is a perspective view of a process furnace provided in an embodiment of this disclosure. Figure 3 The image shown is a cross-sectional view of a process furnace provided in an embodiment of this disclosure. Arrow X points to a first direction, which is also the axial direction of the process chamber 11; arrow Y points to a second direction; and arrow Z points to a vertical direction. The first direction X, the second direction Y, and the vertical direction Z are all perpendicular to each other, and will not be emphasized separately thereafter.

[0027] This disclosure provides a process furnace, such as Figures 1 to 3 The process furnace 10 is used in process equipment 100 and is configured to process sheet 301. The process furnace 10 includes a furnace body 1 and has at least one process chamber 11, which is configured to contain sheet 301.

[0028] The process equipment 100 can be any equipment used in the process of preparing sheet 301, such as coating equipment, passivation equipment, and heat treatment equipment (such as annealing equipment, sintering equipment, phase transformation control equipment, etc.) required for coating, without specific limitations. For ease of understanding and explanation, this disclosure describes the process equipment 100 as an annealing equipment as an example, but it is not limited thereto.

[0029] The process equipment 100 includes a conveying assembly 5, which is at least disposed in the process chamber 11. The conveying assembly 5 is configured to carry the sheet 301 and to convey the carried sheet 301 along the extension direction of the process chamber 11. The conveying assembly 5 enables the sheet 301 to undergo annealing during the conveying process. That is, the process furnace 10 and the conveying assembly 5 cooperate to form a continuous process furnace 10, thereby improving process efficiency.

[0030] Optionally, sheet 301 can be a semiconductor or photovoltaic material used to prepare solar cells. After being processed through different processes such as cutting, coating, and annealing, sheet 301 is finally called a usable solar cell. Alternatively, sheet 301 can also be a metal sheet, ceramic sheet, etc., without specific limitations. The shape of sheet 301 includes square, round, etc., and its specific dimensions can be adapted to actual needs without specific limitations.

[0031] It is understood that multiple sheets 301 can be carried in the carrier 30, and the transmission assembly can drive the carrier 30 to move within the process furnace 10. The carrier 30 can be a single-row carrier 30, or it can be arranged in double, triple, or other multiple rows along the second direction Y (which is also the width direction of the carrier 30). Each row of the carrier 30 has multiple spaced-apart sheets 301. These sheets 301 can be spaced along the first direction X or the second direction Y, as long as the extension direction of each sheet 301 is parallel to the vertical direction Z. In this embodiment, the carrier 30 is configured as a double-row carrier 30 to further improve the processing efficiency of the sheets 301, but it is not limited to this.

[0032] The process equipment 100 may also include a conveying mechanism 20, which is disposed on at least one side of the process furnace 10. The conveying mechanism 20 is configured to input the sheet 301 into the process furnace 10 or output the sheet 301 from the process furnace 10, without further details.

[0033] The process chamber 11 of the process furnace 10 may also be equipped with a heating assembly 4, which is configured to heat the process chamber 11. During the annealing process of the sheet 301 in the process chamber 11, the process chamber 11 is in a closed environment to prevent heat diffusion, thereby improving annealing efficiency. The heating assembly 4 can be configured to achieve infrared heating, without specific limitations.

[0034] It is understood that the furnace body 1 is configured as a tubular structure, and the process chamber 11 is a cylindrical cavity structure extending along the first direction X. The furnace body 1 can be configured as a quartz furnace, and the outer periphery of the furnace body 1 can be covered with an insulation layer, which will not be described in detail.

[0035] Specifically, the process furnace 10 has at least one row of multiple air inlets 1a and multiple air outlets 1b communicating with the process chamber 11. The multiple air inlets 1a located in the same row are arranged at intervals along a first direction X, and the multiple air outlets 1b are also arranged at intervals along the first direction X. The process furnace 10 also includes an air inlet assembly 2 and multiple sets of regulating assemblies 3. The air inlet assembly 2 is communicated with the multiple air inlets 1a and is configured to introduce at least one gas from the air inlets 1a into the process chamber 11. The multiple sets of regulating assemblies 3 are at least disposed on the air inlet assembly 2. Each set of regulating assemblies 3 corresponds to one or multiple air inlets 1a adjacent to each other in the first direction X, and each regulating assembly 3 can independently adjust the air inlet flow rate of the corresponding air inlet 1a.

[0036] The process furnace 10 provided in this embodiment divides the process chamber 11 into multiple regions along the first direction X, so that the air intake of each region's corresponding connected air inlet 1a is individually adjustable. This allows for real-time adjustment of the air intake of the corresponding region based on the gas distribution around each sheet 301 in the process chamber 11, thereby ensuring that the sheets 301 located in different regions of the process chamber 11 are surrounded by uniform and stable gas, which is beneficial to improving the process effect.

[0037] It is understood that an adjustment component 3 can independently adjust the air intake of one air inlet 1a, or simultaneously adjust the air intake of multiple adjacent air inlets 1a in the first direction X. It can be adaptively adjusted according to the regions pre-divided in the first direction X of the process chamber 11, with each region corresponding to one or more air inlets 1a, without specific limitations. In this embodiment, each adjustment component 3 is configured to independently adjust the air intake of one air inlet 1a.

[0038] Optionally, the regulating component 3 can be configured as a gas flow controller, such as a solenoid valve, without specific limitations.

[0039] Figure 4 The diagram shown is a schematic diagram of a furnace body provided in an embodiment of this disclosure. Figure 5 As shown Figure 4 The cross-sectional view of the furnace body is shown. Figure 6 The image shown is a cross-sectional view of a process furnace provided in another embodiment of this disclosure.

[0040] like Figure 4 and Figure 5The process chamber 11 has two or more rows of air inlets 1a. These multiple rows of air inlets 1a are arranged at intervals around the periphery of the process chamber 11. The air inlets 1a are positioned above the air outlets 1b in the vertical direction Z. The orthographic projection of the air outlets 1b into the process chamber 11 in the vertical direction Z does not overlap with any row of air inlets 1a. The multiple rows of air inlets 1a and air outlets 1b allow for multi-directional gas flow in the radial direction of the process chamber 11, preventing a single-direction airflow and improving the gas diffusion rate and uniformity in the radial direction.

[0041] For example, the process chamber 11 has two rows of air inlets 1a and a vertical plane 1N. In the cross-section of the process chamber 11, the two rows of air inlets 1a are mirror images of each other on both sides of the vertical plane 1N. Each air inlet 1a has a first extension line along its own extending direction, and the first extension line and the extension line of the vertical plane 1N have a non-zero first angle n1. The air outlet 1b has a second extension line along its own extending direction, and the second extension line coincides with the extension line of the vertical plane 1N. By arranging the air inlets 1a on both sides of the vertical plane 1N and the air outlet 1b located below, the gas entering from each air inlet 1a can form airflow disturbances in the corresponding area of ​​the process chamber 11, which is beneficial for the rapid and uniform diffusion of gas in the corresponding area of ​​the process chamber 11.

[0042] Optionally, the first included angle n1 is less than or equal to 30°. In this embodiment of the present disclosure, the first included angle n1 is set to 20°. In other examples, the first included angle n1 may also be set to 10°, 15°, 25°, etc., without specific limitation.

[0043] It is understandable that the process chamber 11 may also be provided with four rows of circumferentially spaced air inlets 1a, which are mirror images of the vertical plane 1N. The extension direction of the air inlets 1a closer to the vertical plane 1N has a second angle with the vertical plane 1N, which is no greater than 20°. The extension direction of the air inlets 1a farther from the vertical plane 1N has a third angle with the vertical plane 1N, which is no greater than 40°. In other examples, the process chamber 11 may also be provided with six, eight, or other circumferentially spaced air inlets. The process furnace 10 can be simulated based on parameters such as the number of rows of sheet 301 carried by the carrier 30 arranged in the second direction Y, the speed of the conveying component 5 conveying the carrier 30, the air inlet and outlet rates, and the heating temperature, so as to design the position and number of rows of air inlets 1a. This improves the ability of gas in different areas of the process chamber 11 to diffuse quickly and uniformly around the sheet 301, which is beneficial to improving the processing effect of the sheet 301.

[0044] In some embodiments, the air intake assembly 2 includes a main air intake pipe 21 and multiple branch air intake pipes 22. The main air intake pipe 21 extends along a first direction X and can communicate with an external air intake device. The multiple branch air intake pipes 22 correspond one-to-one with multiple air inlets 1a and connect the main air intake pipe 21 and the air inlets 1a. Each branch air intake pipe 22 is provided with an adjustment component 3, which can adjust the gas flow rate introduced into the process chamber 11 through the air inlet 1a. The air intake device can provide one or more gases to the main air intake pipe 21. The gas can be rapidly diffused through the main air intake pipe 21 and each branch air intake pipe 22 to the various regions of the process chamber 11 divided in the first direction X. Furthermore, the air intake volume of each region can be adjusted by the adjustment component 3 to improve the uniformity of gas diffusion in each region.

[0045] Optionally, if the process chamber 11 needs to be filled with multiple gases, the multiple gases can be mixed in the main intake pipe 21 before entering each branch intake pipe 22. The mixed gas is then adjusted by the adjustment component 3 to allow a certain amount of gas to enter from the intake port 1a, which is beneficial to improve the uniformity of gas diffusion in each area of ​​the process chamber 11.

[0046] In some embodiments, the process furnace 10 further includes a gas detection component and a control component (not shown in the figure). The gas detection component is configured to detect the gas uniformity around the sheet 301 in the process chamber 11 and generate a gas detection signal. The control component is electrically connected to both the gas detection component and the adjustment component 3. The control component is configured to receive the gas detection signal and adjust one or more sets of adjustment components 3 according to the gas detection signal, thereby increasing or decreasing the gas flow rate of the corresponding branch inlet pipe 22. By utilizing the cooperation of the control component and the gas detection component, dynamic flow control can be achieved in different areas divided in the first direction X of the process chamber 11. This allows for real-time compensation based on the detected differences in gas distribution around the sheet 301, ensuring that the gas distribution around the sheet 301 remains uniform, thereby improving the process effect.

[0047] Optionally, the control component includes a PID algorithm module, which can calculate based on real-time detection data of the gas distribution around each carrier 30 sheet 301 in the process chamber 11, thereby compensating for the gas intake volume, such as oxygen content, in each area in real time and improving control accuracy.

[0048] Optionally, the gas detection component can be configured as an infrared thermal imager to detect the gas distribution around the sheet 301 in each carrier 30 in the process chamber 11 in real time and generate a gas detection signal to further improve control accuracy and help maintain the gas around the sheet 301 in different areas of the process chamber 11 in a uniform distribution state.

[0049] like Figure 6The process furnace 10 also includes an extraction assembly 7, a gas circulation assembly 8, and a tail gas filter assembly 9. The extraction assembly 7 is connected to multiple gas outlets 1b and is configured to exhaust gas from the process chamber 11. The gas circulation assembly 8 has an inlet and an outlet; the inlet is connected to the extraction assembly 7, and the outlet is connected to the inlet assembly 2. The tail gas filter assembly 9 is connected to the outlet of the gas circulation assembly 8 and the inlet assembly 2, and is configured to filter the gas exiting from the outlet. Through the interconnected inlet assembly 2, extraction assembly 7, tail gas filter assembly 9, and gas circulation assembly 8, the gas in the process chamber 11 can be recycled, improving energy efficiency and reducing costs.

[0050] Optionally, the air extraction assembly 7 includes a main exhaust pipe 71 and multiple outlet exhaust pipes 72. The main exhaust pipe 71 extends along the first direction X, and the multiple outlet exhaust pipes 72 correspond one-to-one with multiple outlets 1b. The outlet exhaust pipes 72 connect the main exhaust pipe 71 and the outlets 1b. The adjustment assembly 3 is also respectively disposed on the multiple outlet exhaust pipes 72. The adjustment assembly 3 can adjust the gas flow rate discharged from the process chamber 11 from each outlet 1b, thereby realizing dynamic control of the air extraction volume of the process chamber 11 in different regions in the axial direction. This will not be described in detail.

[0051] Understandably, the gas circulation component 8 is configured as a gas circulation pump, which uses the suction force of the gas circulation pump to extract the gas in the process chamber 11 from the gas extraction component 7. After extraction, the gas passes through the tail gas filter component 9 to filter out impurities and harmful gases produced by the reaction, so that the filtered gas can flow to the gas inlet component 2 for reuse.

[0052] Optionally, the exhaust gas filter assembly 9 includes a multi-stage filter connected in sequence, which helps to improve the filtration effect.

[0053] In addition, before using the process furnace 10 for process processing, a vacuuming step is included in the process chamber 11. At this time, the air intake component 2 is closed, and the process chamber 11 is evacuated by the suction force of the gas circulation pump. Then, the air intake component 2 is opened to introduce the corresponding process gas into the process chamber 11 according to the specific process.

[0054] In some alternative embodiments, such as Figure 3 The process chamber 11 includes a plurality of chambers arranged sequentially along the first direction X. Each process chamber 11 is independent of each other, and any adjacent process chamber 11 can be connected to allow the sheet 301 to pass through. Each process chamber 11 is provided with a plurality of adjustable components 3 that are individually controllable.

[0055] Optionally, the process equipment 100 includes at least one valve assembly 6, which is disposed between adjacent process chambers 11. The valve assembly 6 is actuated to connect or disconnect the adjacent process chambers 11. By controlling the opening and closing of the valve assembly 6, the connection or disconnection of adjacent process chambers 11 can be achieved, thereby ensuring that the sheet 301 can flow smoothly in each process chamber 11 while reducing gas diffusion.

[0056] Figure 7 The diagram shown is a schematic diagram of a process furnace provided in another embodiment of this disclosure.

[0057] like Figure 7 The process equipment 100 also includes a preheating furnace 1m and a cooling furnace 1s respectively disposed on both sides of the furnace body 1 in the first direction X. The preheating furnace 1m has a preheating chamber, and the cooling furnace 1s has a cooling chamber. Conveying components 5 can be installed in the preheating chamber and the cooling chamber respectively. A valve assembly 6 can be installed between the preheating chamber and the process chamber 11 to allow the carrier 30 to pass through, and a valve assembly 6 can be installed between the process chamber 11 and the cooling chamber to allow the carrier 30 to pass through. This allows the carrier 30 carrying the sheet 301 to pass through the preheating chamber, the process chamber 11, and the cooling chamber in sequence. The sheet 301 completes the preheating, heating, and cooling annealing process during the conveying process, which will not be described in detail.

[0058] Optionally, the preheating furnace 1m can also be equipped with an air inlet assembly 2 and an air extraction assembly 7. Before preheating the preheating chamber, the preheating chamber can be evacuated and purged with gas to improve the temperature rise rate and uniformity of the preheating. In addition, the air inlet assembly 261 and the air extraction assembly 763 can also be configured with a gas recycling structure. For details, please refer to the relevant description in the process furnace 10, which will not be repeated here.

[0059] This disclosure also provides a process apparatus, such as... Figure 1 and Figure 7 The process equipment 100 includes a process furnace 10 and a conveying mechanism 20. The process furnace 10 is configured to process the sheet 301. The conveying mechanism 20 is disposed on at least one side of the process furnace 10 and is configured to input the sheet 301 into the process furnace 10 or output the sheet 301 from the process furnace 10.

[0060] Optionally, the specific structure of the process furnace 10 can be referred to the relevant descriptions of the above embodiments, and will not be repeated here.

[0061] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts and nuts, screws, clips, magnetic attraction, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, or other methods.

[0062] The basic principles of this disclosure have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this disclosure are merely examples and not limitations, and should not be considered as essential features of each embodiment of this disclosure. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the scope of this disclosure to the necessity of employing the aforementioned specific details for implementation.

[0063] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0064] It should also be noted that in the apparatus, devices, and methods of this disclosure, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions to this disclosure.

[0065] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.

[0066] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A process furnace, characterized in that, The process furnace is configured to process sheet materials, and includes: The furnace body has at least one process chamber configured to accommodate the sheet, the process chamber having at least one row of multiple air inlets communicating with the process chamber, the multiple air inlets located in the same row being spaced apart along a first direction; An air intake assembly, in communication with a plurality of said air inlets, the air intake assembly being configured to introduce at least one gas from said air inlets into the process chamber; Multiple sets of adjustment components are provided at least in the air intake component. Each set of adjustment components corresponds to one or multiple air intakes adjacent in the first direction. Each adjustment component can independently adjust the air intake flow of the corresponding air intake.

2. The process furnace according to claim 1, characterized in that, The process chamber has multiple interconnected air outlets, which are spaced apart along the first direction. The process chamber also has two or more rows of air inlets, which are spaced apart around the periphery of the process chamber. The air inlet is located vertically above the air outlet.

3. The process furnace according to claim 2, characterized in that, The process chamber has two rows of air inlets. The process chamber has a vertical plane. In the cross-section of the process chamber, two rows of air inlets are respectively mirror-image arranged on both sides of the vertical plane. Each air inlet has a first extension line along its own extension direction. The first extension line and the extension line of the vertical plane have a non-zero first angle. The air outlet has a second extension line along its own extension direction. The second extension line coincides with the extension line of the vertical plane.

4. The process furnace according to claim 3, characterized in that, The first included angle is less than or equal to 30°.

5. The process furnace according to any one of claims 1-4, characterized in that, The air intake assembly includes: The main intake pipe extends along the first direction; Multiple branch air inlet pipes correspond one-to-one with multiple air inlets. Each branch air inlet pipe connects the main air inlet pipe and the air inlet. Each branch air inlet pipe is equipped with an adjustment component, which can adjust the gas flow rate introduced into the process chamber through the air inlet.

6. The process furnace according to claim 5, characterized in that, Also includes: A gas detection component is configured to detect the gas uniformity around the sheet within the process chamber and generate a gas detection signal; A control component is electrically connected to the gas detection component and the regulating component, respectively. The control component is configured to receive the gas detection signal and adjust one or more sets of the regulating components according to the gas detection signal, thereby increasing or decreasing the gas flow rate of the corresponding branch inlet pipe.

7. The process furnace according to claim 2, characterized in that, Also includes: An extraction assembly, connected to a plurality of the said air outlets, is configured to exhaust gas from the process chamber; A gas circulation assembly has an inlet and an outlet, the inlet being connected to the extraction assembly and the outlet being connected to the intake assembly; An exhaust gas filter assembly, connecting the outlet of the gas recirculation assembly and the intake assembly, the exhaust gas filter assembly being configured to filter gas exiting from the outlet.

8. The process furnace according to claim 7, characterized in that, The air extraction assembly includes: The main exhaust pipe extends along the first direction; Multiple outlet gas lines are provided, each corresponding to one of the multiple outlet gas ports. The outlet gas lines are connected to the main outlet gas line and the outlet gas ports. The regulating components are also provided on the multiple outlet gas lines. The regulating components can regulate the gas flow rate discharged from the process chamber by each outlet gas port.

9. The process furnace according to any one of claims 1-4, characterized in that, The process chambers include a plurality of chambers arranged sequentially along the first direction. Each process chamber is independent of the others, and any adjacent process chambers can be connected to allow the sheet to pass through. Each process chamber is provided with a plurality of adjustable components that are individually controllable.

10. A process equipment, characterized in that, include: The process furnace according to any one of claims 1 to 9, wherein the process furnace is configured to process sheet material; A conveying mechanism is disposed on at least one side of the process furnace, the conveying mechanism being configured to input the sheet into the process furnace or output the sheet from the process furnace.

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