Multi-size compatible silicon wafer basket
By setting limiting holes and detachable limiting rods on the end plate of the silicon wafer basket, the problem of the silicon wafer basket being unable to quickly switch between different sizes in the existing technology is solved, realizing stable bearing and efficient production of multi-size silicon wafers.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- CHANGZHOU S C EXACT EQUIP
- Filing Date
- 2025-07-18
- Publication Date
- 2026-07-24
AI Technical Summary
Existing silicon wafer baskets cannot quickly switch between compatible silicon wafers of different sizes, resulting in low production efficiency, especially since they cannot simultaneously accommodate full-size and half-size silicon wafers.
A multi-size silicon wafer basket was designed. By setting limiting holes of different depths on the end plate and using detachable limiting rods and intermediate pressure rods, stable support for silicon wafers of different sizes can be achieved.
It enables rapid switching and stable support for multi-size silicon wafers, is easy to operate, improves production efficiency, and reduces the complexity of maintenance and repair.
Smart Images
Figure CN224556220U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the technical field of battery production equipment, and in particular relates to a silicon wafer basket that is compatible with multiple sizes. Background Technology
[0002] With the rapid development of the solar photovoltaic industry, silicon wafer sizes are becoming increasingly diverse, with various specifications available on the market, such as 182mm full or half wafers and 210mm full or half wafers. During solar cell production, silicon wafers need to be transported and cleaned between different processes using baskets. Existing technologies for compatibility solutions for different wafer sizes have the following shortcomings: CN219040421U discloses a wafer cassette end plate structure for both upright and inverted placement. This structure adapts to silicon wafers of different thicknesses by using a first and second bottom edge. However, it requires replacing the robotic arm to handle the wafers, making the operation complex and inefficient. This solution only addresses variations in wafer thickness and cannot accommodate wafers of different lengths and widths.
[0003] CN216213312U discloses a half-wafer basket that forms two accommodating spaces by setting a sliding first limiting rod and a fixed second limiting rod. Although the width of the accommodating space can be adjusted, the structure is complex, the position of the limiting rod needs to be adjusted frequently, and it cannot be compatible with both whole and half silicon wafers at the same time.
[0004] Existing flower baskets often have fixed or complex positioning structures, which prevent quick switching between different silicon wafer sizes and affect production efficiency.
[0005] Therefore, it is necessary to provide a silicon wafer basket with a simple structure that can be quickly switched and is compatible with multiple sizes.
[0006] It should be noted that the information disclosed in this background section is only for understanding the background technology of this application concept, and therefore, the above description is not considered to constitute information related to the technology. Utility Model Content
[0007] This disclosure provides at least one embodiment of a silicon wafer basket compatible with multiple sizes.
[0008] In a first aspect, embodiments of this disclosure provide a multi-size compatible silicon wafer basket, comprising: Two opposing end plates, with limiting holes of different depths opened on the edges of the end plates; At least one upper pressure bar and at least one lower pressure bar are disposed between the two end plates, and at least one detachably disposed middle pressure bar; At least two limiting rods, which are detachably inserted into limiting holes of corresponding depths; Among them, the middle pressure bar is disassembled to form a whole silicon wafer placement area between the two end plates; The pressure bar is retained, and the limiting bar is inserted into the limiting hole of the corresponding depth to form a placement area for at least two half-wafer sizes between the two end plates.
[0009] In one optional embodiment, limiting teeth are provided on both sides of the pressure rod to limit the vertical movement of the half silicon wafer.
[0010] In one optional implementation, the limiting holes are arranged in multiple rows and columns on the end plate to correspond to the limiting requirements of silicon wafers of different sizes.
[0011] In one optional embodiment, the limiting rod is provided with locking structures at both ends that are adapted to the limiting holes. After the limiting rod is inserted into the limiting holes, the limiting rod can be rotated circumferentially, and the locking structures are adapted to limit the horizontal movement of the limiting rod.
[0012] In one alternative embodiment, the end plate sidewall is provided with a hook for gripping by a robotic arm.
[0013] In one optional embodiment, a side pressure bar is provided between the two end plates, and the side pressure bar is disposed opposite to the hook-up point.
[0014] In one optional embodiment, the outer walls of the upper pressure rod, lower pressure rod, and side pressure rod are each evenly distributed with a plurality of limiting teeth, and the limiting teeth are fixed to the pressure rod by welding.
[0015] In one optional embodiment, the mandrels of the end plate, upper pressure rod, lower pressure rod, middle pressure rod, side pressure rod, and limiting rod are made of carbon fiber material and wrapped with PVDF material.
[0016] In one optional embodiment, a plurality of limiting teeth are provided on the side wall of the limiting rod, which are arranged opposite to the limiting teeth on the side wall of the side pressure rod.
[0017] In one alternative embodiment, the surface of the PVDF material is treated with black nano-fluorine.
[0018] The beneficial effects of this utility model are that it provides a silicon wafer basket compatible with multiple sizes. By opening limiting holes at different positions on the end plate and removing the limiting rods set in each limiting hole, a basket can stably support silicon wafers of multiple sizes. For silicon wafers of different sizes, only the position of the limiting rod needs to be changed to achieve stable support of the silicon wafer. It is simple to operate and convenient to maintain.
[0019] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.
[0020] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description
[0021] To more clearly illustrate the technical solutions in the specific embodiments or related technologies of this utility model, the drawings used in the description of the specific embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0022] Figure 1 Left view of a multi-size compatible silicon wafer basket provided for an embodiment of this disclosure; Figure 2 A front view of a multi-size compatible silicon wafer basket provided in an embodiment of this disclosure; Figure 3 A schematic diagram of the basket toothed rod provided in an embodiment of this disclosure; Figure 4 This is a schematic diagram showing the state of a flower basket carrying a half-silicon wafer provided in an embodiment of this disclosure; Figure 5 This is a schematic diagram of a flower basket carrying a whole silicon wafer, provided in an embodiment of this disclosure.
[0023] In the picture: 1. End plate; 2. Upper pressure rod; 3. Side pressure rod; 4. Middle pressure rod; 5. Lower pressure rod; 6. Limiting rod; 7. Limiting hole; 8. Silicon wafer; 9. Limiting tooth; 10. Hanging point. Detailed Implementation
[0024] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0025] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.
[0026] In this document, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than individual elements in the list. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.
[0027] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise clearly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.
[0028] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.
[0029] Research has revealed the following shortcomings in compatibility solutions for silicon wafers of different sizes within the relevant technologies: CN219040421U discloses a wafer cassette end plate structure for both upright and inverted placement. This structure adapts to silicon wafers of different thicknesses by using a first and second bottom edge. However, it requires replacing the robotic arm to handle the wafers, making the operation complex and inefficient. This solution only addresses variations in wafer thickness and cannot accommodate wafers of different lengths and widths.
[0030] CN216213312U discloses a half-wafer basket that forms two accommodating spaces by setting a sliding first limiting rod and a fixed second limiting rod. Although the width of the accommodating space can be adjusted, the structure is complex, the position of the limiting rod needs to be adjusted frequently, and it cannot be compatible with both whole and half silicon wafers at the same time.
[0031] Existing flower baskets often have fixed or complex positioning structures, which prevent quick switching between different silicon wafer sizes and affect production efficiency.
[0032] Therefore, it is necessary to provide a silicon wafer basket with a simple structure that can be quickly switched and is compatible with multiple sizes.
[0033] The defects in the above solutions and the reasons for their occurrence are the results of the inventors' practice and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure should be considered as the inventors' contributions to this disclosure.
[0034] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0035] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0036] like Figures 1 to 5 As shown, at least one embodiment provides a multi-size compatible silicon wafer basket, comprising: Two opposing end plates 1, each with limiting holes 7 of different depths on its edges; at least one upper pressure rod 2 and at least one lower pressure rod 5, and at least one detachable middle pressure rod 4, are disposed between the two end plates 1; multiple sets of limiting holes 7 are provided on the end plates 1; at least two limiting rods 6 are provided, each detachably inserted into a limiting hole 7 of a corresponding depth; wherein, the middle pressure rod 4 is removed to form a whole silicon wafer placement area between the two end plates 1; the middle pressure rod 4 is retained, and the limiting rod 6 is inserted into a limiting hole 7 of a corresponding depth to form at least two types of half-wafer size placement areas between the two end plates 1. By providing limiting holes 7 at different positions on the end plates 1 and removing the limiting rods 6 disposed in each limiting hole 7, a basket can stably support silicon wafers 8 of multiple sizes. For silicon wafers 8 of different sizes, only the position of the limiting rod 6 needs to be changed to achieve stable limiting support of the silicon wafers 8, which is simple to operate and convenient to maintain.
[0037] Reference Appendix Figure 1The pressure rod 4 is provided with limiting teeth 9 on both sides to limit the upper and lower positions of the half silicon wafer 8.
[0038] Reference Appendix Figure 1 and Figure 4 The limiting holes 7 are arranged in multiple rows and columns on the end plate 1 to correspond to the limiting requirements of silicon wafers 8 of different sizes. The limiting rod 6 has locking structures at both ends that are adapted to the limiting holes 7. After the limiting rod 6 is inserted into the limiting hole 7, rotating the limiting rod 6 circumferentially, the locking structure is suitable for limiting the horizontal movement of the limiting rod 6. There are four limiting holes 7, with every two limiting holes 7 corresponding to both sides of the intermediate pressure rod 4.
[0039] Reference Appendix Figure 4 When supporting a half-wafer 8, the intermediate pressure rod 4 is fixed between the two end plates 1, with the limiting teeth 9 on both sides of the intermediate pressure rod 4 facing the limiting teeth 9 of the upper pressure rod 2 and the lower pressure rod 5, respectively. The half-wafer 8 is placed on both sides of the intermediate pressure rod 4. Depending on the specific size of the silicon wafer 8, for smaller half-wafers 8 (e.g., 182mm), the limiting rod 6 is inserted into the corresponding limiting hole 7. Figure 4 Position on the left side of the middle.
[0040] For large-size half-wafer silicon wafers 8 (e.g., 210mm in size), insert the limiting rod 6 into the corresponding limiting hole 7, such as... Figure 4 Positioned on the right side. Rotating the limiting rod 6 fixes the locking structure to the end plate 1, thereby preventing the limiting rod 6 from moving relative to the end plate 1.
[0041] Reference Appendix Figure 5 When it is necessary to support the entire silicon wafer 8, remove the middle pressure rod 4, insert the entire silicon wafer 8 between the upper pressure rod 2 and the lower pressure rod 5, and select the limit rod 6 to insert into the corresponding limit hole 7 according to the specific size of the silicon wafer 8, and rotate the limit rod 6 to connect and fix it with the end plate 1.
[0042] Reference Appendix Figure 1 The end plate 1 has a hook-and-grab area 10 on its side wall for gripping by a robotic arm.
[0043] Reference Appendix Figure 1 and Figure 2 A side pressure rod 3 is provided between the two end plates 1, and the side pressure rod 3 is positioned opposite to the hook-up point 10. Several limiting teeth 9 are evenly distributed on the outer walls of the upper pressure rod 2, lower pressure rod 5, and side pressure rod 3, and the limiting teeth 9 are fixed to the pressure rods by welding. The core rods of the end plates 1, upper pressure rod 2, lower pressure rod 5, middle pressure rod 4, side pressure rod 3, and limiting rod 6 are made of carbon fiber material and covered with PVDF material. Several limiting teeth 9 are partially provided on the side wall of the limiting rod 6, and are positioned opposite to the limiting teeth 9 on the side wall of the side pressure rod 3. The surface of the PVDF material is treated with black nano-fluorine.
[0044] In this embodiment, the core rods of all structural components (upper pressure rod 2, lower pressure rod 5, middle pressure rod 4, side pressure rod 3, and limiting rod 6) are made of high-strength carbon fiber material, ensuring structural strength while reducing weight; all structural components are wrapped with PVDF (polyvinylidene fluoride) material, which has excellent chemical corrosion resistance and mechanical strength; the surface of the PVDF material is treated with black nano-fluorine to enhance surface hydrophobicity and anti-fouling ability; the limiting teeth 9 are fixed to the pressure rod by precision welding process to ensure positioning accuracy; each component adopts a modular design, which facilitates quick disassembly and maintenance.
[0045] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0046] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as the second element, component, region, layer, or segment.
[0047] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.
Claims
1. A multi-size compatible silicon wafer flower basket, characterized in that, include: Two opposing end plates (1), with limiting holes (7) of different depths opened on the edges of the end plates (1); At least one upper pressure rod (2) and at least one lower pressure rod (5) are provided between the two end plates (1), and at least one detachably provided middle pressure rod (4). At least two limiting rods (6) are provided, which are detachably inserted into limiting holes (7) of corresponding depths; Among them, the middle pressure rod (4) is disassembled to form a whole silicon wafer placement area between the two end plates (1); The pressure bar (4) is retained, and the limiting bar (6) is inserted into the limiting hole (7) of the corresponding depth to form at least two half-wafer size placement areas between the two end plates (1).
2. The multi-size compatible silicon wafer basket as described in claim 1, characterized in that, The pressure rod (4) is provided with limiting teeth (9) on both sides to limit the upper and lower positions of the half silicon wafer (8).
3. The multi-size compatible silicon wafer basket as described in claim 1, characterized in that, The limiting holes (7) are arranged in multiple rows and columns on the end plate (1) to meet the limiting requirements of silicon wafers (8) of different sizes.
4. The multi-size compatible silicon wafer basket as described in claim 3, characterized in that, The limiting rod (6) is provided with locking structures at both ends that are adapted to the limiting hole (7). After the limiting rod (6) is inserted into the limiting hole (7), the limiting rod (6) is rotated circumferentially. The locking structure is adapted to limit the horizontal movement of the limiting rod (6).
5. The multi-size compatible silicon wafer basket as described in claim 1, characterized in that, The end plate (1) has a hook-and-grab area (10) on its side wall for gripping by a robotic arm.
6. The multi-size compatible silicon wafer basket as described in claim 5, characterized in that, A side pressure rod (3) is provided between the two end plates (1), and the side pressure rod (3) is arranged opposite to the hook (10).
7. The multi-size compatible silicon wafer basket as described in claim 6, characterized in that, The outer walls of the upper pressure rod (2), lower pressure rod (5) and side pressure rod (3) are each evenly distributed with a number of limiting teeth (9), and the limiting teeth (9) are fixed to the pressure rod by welding.
8. The multi-size compatible silicon wafer basket as described in claim 7, characterized in that, The mandrels of the end plate (1), upper pressure rod (2), lower pressure rod (5), middle pressure rod (4), side pressure rod (3) and limiting rod (6) are made of carbon fiber material and wrapped with PVDF material.
9. The multi-size compatible silicon wafer basket as described in claim 8, characterized in that, The limiting rod (6) has several limiting teeth (9) on its side wall, which are arranged opposite to the limiting teeth (9) on the side wall of the side pressure rod (3).
10. The multi-size compatible silicon wafer basket as described in claim 8, characterized in that, The PVDF material surface is treated with black nano-fluorine.