A floating suction mechanism

Abstract

This utility model relates to the field of semiconductor technology and discloses a floating suction mechanism. The floating suction mechanism includes a suction rod, a suction nozzle fixedly mounted on the lower surface of the suction rod, a buffer mechanism and a promoting mechanism disposed on the outer side of the suction nozzle, a fixed frame fixedly mounted on the outer wall of the suction nozzle, and holes formed on the surface of the fixed frame. A limit ring is fixedly mounted on the side wall of the suction nozzle, and a return spring is fixedly mounted on the side wall of the suction nozzle. The end of the return spring away from the suction nozzle is fixedly connected to a movable head. In this floating suction mechanism, when the suction nozzle adsorbs raw material, the impact force of the raw material contacting the suction nozzle causes the movable head to squeeze the return spring for buffering. Simultaneously, the deformation of the return spring causes it to sway. The rubber ring on the arc surface of the movable head slows down the swaying of the return spring under the action of the ring groove, ensuring the stability of the movable head and thus ensuring stability during raw material adsorption.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, specifically to a floating material suction mechanism. Background Technology

[0002] Currently, semiconductor components are transported using a suction mechanism with a suction nozzle. The floating suction nozzle structure can effectively prevent material deformation and position changes, while ensuring the accuracy of its placement.

[0003] According to a publicly disclosed suction mechanism (Announcement No.: CN206834163U), the threaded connection between the suction rod and the suction nozzle in the aforementioned application has been changed to a direct insertion type. This allows operators to directly insert and remove the suction nozzle without the aid of tools such as wrenches, greatly improving the efficiency of nozzle replacement. Furthermore, the change in the connection method between the suction rod and the suction nozzle in the suction mechanism also alters the structure of the suction nozzle.

[0004] However, in actual use, when the above-mentioned equipment is used, the material will touch the surface of the suction nozzle during the adsorption process, which will cause the material to vibrate and potentially lead to unstable adsorption. In view of this, we propose a floating suction mechanism. Utility Model Content

[0005] The purpose of this invention is to provide a floating material suction mechanism to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a floating suction mechanism, including a suction rod, a suction nozzle fixedly mounted on the lower surface of the suction rod, a buffer mechanism provided on the outer side of the suction nozzle, and a promoting mechanism provided on the outer side of the suction nozzle, the buffer mechanism comprising:

[0007] A fixed frame is fixedly installed on the outer wall of the suction nozzle. The surface of the fixed frame is provided with holes. A limit ring is fixedly installed on the side wall of the suction nozzle. A return spring is fixedly installed on the side wall of the suction nozzle. The end of the return spring away from the suction nozzle is fixedly connected to the movable head.

[0008] The inner wall of the limiting ring is provided with an annular groove, and a rubber ring is fixedly installed on the arc surface of the movable head.

[0009] Preferably, the promoting mechanism includes a connecting plate, which is fixedly installed on the side wall of the movable head. An airbag is fixedly installed on the side of the connecting plate away from the movable head, and a rubber frame is fixedly installed on the side of the connecting plate away from the movable head. A protrusion is fixedly installed on the side wall of the rubber frame.

[0010] Preferably, the support legs of the rubber frame are also made of rubber material, so that the rubber frame fits better against the surface of the raw material.

[0011] Preferably, the diameter of the hole is adapted to the diameter of the connecting plate, so that the connecting plate can move inside the hole.

[0012] Preferably, the shape of the rubber ring is the same as the shape of the ring groove, and a plurality of rubber rings are provided. The plurality of rubber rings are fixedly installed on the arc surface of the movable head in a linear array. The arrangement of the rubber rings restricts the movement of the movable head by the ring groove, thereby reducing the speed of the return spring.

[0013] Preferably, the movable head is fitted inside the limiting ring, thereby enabling the movable head to move inside the limiting ring.

[0014] Preferably, the height of the limiting ring is adapted to the height of the fixing frame, and the number of limiting rings is set to several. The several limiting rings are fixedly installed on the side wall of the suction nozzle in a circumferential array. The setting of multiple limiting rings facilitates the installation of multiple movable heads to buffer the collision of raw materials.

[0015] Compared with the prior art, the present invention provides a floating suction mechanism, which has the following advantages:

[0016] 1. This floating suction mechanism is equipped with a buffer mechanism. When the suction nozzle adsorbs the raw material, the impact force of the raw material contacting the suction nozzle causes the movable head to squeeze the return spring to buffer the impact force of the raw material. At the same time, the deformation of the return spring will cause it to shake. The rubber ring on the arc surface of the movable head will reduce the degree of shaking of the return spring under the action of the ring groove, ensuring the stability of the movable head, and thus ensuring the stability of the raw material adsorption.

[0017] 2. This floating suction mechanism, with its facilitating mechanism and the rubber frame on the movable head combined with the airbag, provides a buffering effect against the collision of raw materials. At the same time, the rubber frame and the protrusions deform the rubber frame, causing the protrusions to fit against the surface of the raw materials, thereby ensuring the stability of the raw materials during suction and preventing the raw materials from shifting. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the main structure of this utility model;

[0019] Figure 2 This is a partial explosion diagram of the limiting ring structure of this utility model;

[0020] Figure 3 This is a partial exploded view of the movable head of the present invention.

[0021] Figure 4 This is a schematic diagram of a partial explosion of the resetting spring structure of this utility model.

[0022] In the diagram: 1. Suction rod; 2. Suction nozzle; 3. Buffer mechanism; 301. Fixing frame; 302. Hole; 303. Limiting ring; 304. Return spring; 305. Ring groove; 306. Moving head; 307. Rubber ring; 4. Promoting mechanism; 401. Connecting plate; 402. Rubber frame; 403. Protrusion; 404. Airbag. Detailed Implementation

[0023] like Figures 1-4 As shown, this utility model provides a technical solution: a floating suction mechanism, including a suction rod 1, a suction nozzle 2 fixedly installed on the lower surface of the suction rod 1, a buffer mechanism 3 provided on the outside of the suction nozzle 2, and a promoting mechanism 4 provided on the outside of the suction nozzle 2. The buffer mechanism 3 includes a fixing frame 301, a hole 302, a limiting ring 303, a return spring 304, a ring groove 305, a movable head 306, and a rubber ring 307.

[0024] In one embodiment of this utility model, a fixing bracket 301 is fixedly installed on the outer wall of the suction nozzle 2. A hole 302 is opened on the surface of the fixing bracket 301. A limiting ring 303 is fixedly installed on the side wall of the suction nozzle 2. A return spring 304 is fixedly installed on the side wall of the suction nozzle 2. The end of the return spring 304 away from the suction nozzle 2 is fixedly connected to the movable head 306. A ring groove 305 is opened on the inner wall of the limiting ring 303. A rubber ring 307 is fixedly installed on the arc surface of the movable head 306.

[0025] In addition, the promoting mechanism 4 includes a connecting plate 401, which is fixedly installed on the side wall of the movable head 306. An airbag 404 is fixedly installed on the side of the connecting plate 401 away from the movable head 306. A rubber frame 402 is fixedly installed on the side of the connecting plate 401 away from the movable head 306. A protrusion 403 is fixedly installed on the side wall of the rubber frame 402. The support feet of the rubber frame 402 are also made of rubber material, so that the rubber frame 402 fits better against the surface of the raw material.

[0026] In this embodiment of the invention, the diameter of the hole 302 is adapted to the diameter of the connecting plate 401, allowing the connecting plate 401 to move inside the hole 302. The shape of the rubber ring 307 is the same as the shape of the ring groove 305. Several rubber rings 307 are arranged in a linear array and fixedly installed on the arc surface of the movable head 306. The arrangement of the rubber rings 307 restricts the movement of the movable head 306 by the ring groove 305, reducing the speed of the return spring 304. The movable head 306 is sleeved inside the limiting ring 303, allowing the movable head 306 to move inside the limiting ring 303. The height of the limiting ring 303 is adapted to the height of the fixing frame 301. Several limiting rings 303 are arranged in a circumferential array and fixedly installed on the side wall of the suction nozzle 2. The arrangement of multiple limiting rings 303 facilitates the installation of multiple movable heads 306 to buffer the collision of raw materials.

[0027] In this invention, when the suction nozzle 2 adsorbs the raw material, the impact force of the raw material contacting the suction nozzle 2 causes the movable head 306 to squeeze the return spring 304 to buffer the impact force of the raw material. At the same time, the deformation of the return spring 304 will cause it to shake. The rubber ring 307 on the arc surface of the movable head 306 will reduce the degree of shaking of the return spring 304 under the action of the ring groove 305, ensuring the stability of the movable head 306, and thus ensuring the stability when adsorbing the raw material.

[0028] Furthermore, the rubber frame 402 on the movable head 306, together with the airbag 404, has a buffering effect on the collision of raw materials. At the same time, the rubber frame 402 and the protrusion 403 together deform the rubber frame 402 and make the protrusion 403 fit against the surface of the raw material, thereby ensuring the stability of the position of the raw material during adsorption and preventing the raw material from shifting.

[0029] The present invention has been described in detail above. However, modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, any modifications or improvements that do not depart from the spirit of the present invention are within the protection scope of the present invention.

Claims

1. A floating suction mechanism, comprising a suction rod (1), wherein a suction nozzle (2) is fixedly mounted on the lower surface of the suction rod (1), characterized in that: A buffer mechanism (3) is provided on the outer side of the suction nozzle (2), and a promoting mechanism (4) is provided on the outer side of the suction nozzle (2). The buffer mechanism (3) includes: A fixing frame (301) is fixedly installed on the outer wall of the suction nozzle (2). The surface of the fixing frame (301) is provided with holes (302). A limit ring (303) is fixedly installed on the side wall of the suction nozzle (2). A return spring (304) is fixedly installed on the side wall of the suction nozzle (2). The end of the return spring (304) away from the suction nozzle (2) is fixedly connected to the movable head (306). The inner wall of the limiting ring (303) is provided with an annular groove (305), and a rubber ring (307) is fixedly installed on the arc surface of the movable head (306).

2. The floating suction mechanism according to claim 1, characterized in that: The promoting mechanism (4) includes a connecting plate (401), which is fixedly installed on the side wall of the movable head (306). An airbag (404) is fixedly installed on the side of the connecting plate (401) away from the movable head (306). A rubber frame (402) is fixedly installed on the side of the connecting plate (401) away from the movable head (306). A protrusion (403) is fixedly installed on the side wall of the rubber frame (402).

3. The floating suction mechanism according to claim 2, characterized in that: The support legs of the rubber frame (402) are also made of rubber material.

4. The floating suction mechanism according to claim 2, characterized in that: The diameter of the hole (302) is adapted to the diameter of the connecting plate (401).

5. The floating suction mechanism according to claim 1, characterized in that: The shape of the rubber ring (307) is the same as that of the ring groove (305). The number of rubber rings (307) is set to several, and the several rubber rings (307) are fixedly installed on the arc surface of the movable head (306) in a linear array.

6. The floating suction mechanism according to claim 1, characterized in that: The movable head (306) is fitted inside the limiting ring (303).

7. A floating suction mechanism according to claim 1, characterized in that: The height of the limiting ring (303) is adapted to the height of the fixing frame (301). The number of limiting rings (303) is set to several, and the several limiting rings (303) are fixedly installed on the side wall of the suction nozzle (2) in a circumferential array.

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