Substrate holder device for releasing deformation stress

Abstract

The application relates to a substrate holder device for releasing deformation stress, which comprises a frame body, a reference clamp and movable clamps; the frame body is a hollow cuboid structure with front and rear openings; the reference clamps are arranged on the frame body, the number of the reference clamps is two, and the reference clamps are arranged at the middle positions of the upper and lower edges of the frame body and are suitable for fixing and supporting substrates; the movable clamps are arranged on the frame body, the number of the movable clamps is multiple, and the movable clamps are arranged on the upper and lower edges of the frame body and are suitable for releasing the deformation stress generated in the heating process of the substrates; and the application solves the technical problem that the damage and breakage of the substrates caused by the deformation stress generated in the heating process of the substrates cannot be released.

Description

Technical Field

[0001] This utility model relates to the field of coating technology, and in particular to a substrate holder device for relieving deformation stress. Background Technology

[0002] In the current coating industry, most products require a substrate holder for processing, including the coating process in the solar photovoltaic industry, and this is also true for the coating process in perovskite production lines. Current perovskite products are typically large-area, generally 1 square meter or even more than 2 square meters. Taking rigid glass substrates as an example, due to their large area, the deformation caused by gravity when the glass is laid flat is a significant issue affecting the coating effect. Therefore, magnetron sputtering coating generally uses vertical coating machine technology. During the movement of the glass substrate in the vertical chamber, it must rely on a substrate holder for processing, and a stable method is needed to fix the glass substrate upright on the substrate holder.

[0003] Currently, substrates are typically fixed in place using clamps. However, since substrates often require heating, the middle part of the substrate is prone to deformation and indentation during the heating process, forming a "C" shape. Since the substrate is bound and fixed in the clamps of the substrate holder, the stress from the deformation cannot be released. This stress can easily cause the substrate to be squeezed against the clamps, damaging it. If this stress accumulates to a certain extent, the glass substrate is likely to break. Utility Model Content

[0004] In view of this, this application provides a substrate holder device for releasing deformation stress. By designing the fixing clamp of the frame to have the function of moving freely in the direction perpendicular to the substrate, when the substrate has a need for deformation release, the fixing clamp can move freely and provide release space, avoiding damage to the substrate caused by the restraint and compression of the fixing clamp.

[0005] According to one aspect of this application, a substrate holder device for relieving deformation stress is provided, comprising a frame, a reference clamp, and a bottom movable clamp; the frame is a hollow cuboid structure with openings at the front and back; the reference clamp is disposed on the frame, and two reference clamps are disposed at the middle positions of the upper and lower edges of the frame; the bottom movable clamp is disposed on the lower edge of the frame, and multiple bottom movable clamps are disposed; the bottom movable clamp includes a first optical axis guide rail, a first linear ceramic bearing, a first slot block, a first spring, and a first limiting plate; one of the first optical axis guide rails... The first end is fixedly connected to the frame; the first linear ceramic bearing is sleeved on the optical axis guide rail; the first slot block is annular, with its outer periphery recessed inward to form an annular groove, and a first through hole is provided on the first slot block, through which the first slot block is fixedly sleeved on the first linear ceramic bearing; the first limiting plate is fixedly disposed at the opposite end of the connection between the first optical axis guide rail and the frame; the first spring is sleeved on the first optical axis guide rail, located between the first linear ceramic bearing and the first limiting plate, and the diameter of the tangential circle of the first spring is larger than the diameter of the linear ceramic bearing.

[0006] In one possible implementation, a top movable clamp is also included, which is disposed on the upper frame of the frame. The number of top movable clamps is multiple. The top movable clamp includes a first outer shell, a first clamping tongue, a second linear ceramic bearing, a second optical axis guide rail, a second spring, and a second limiting plate. The number of the second linear ceramic bearing, the second optical axis guide rail, the second spring, and the second limiting plate are all two.

[0007] In one possible implementation, the first outer shell is a hollow shell structure with an open top, the first outer shell is disposed on the frame, the bottom of the first outer shell has a second through hole, and force-bearing parts extend from both sides of the first outer shell; the first clamping tongue is movably disposed inside the first outer shell, the first clamping tongue is an inverted "L" shaped structure, the bottom of the first clamping tongue extends out a first protrusion, and the first protrusion passes through the second through hole.

[0008] In one possible implementation, the second optical axis guide rail passes through the force-bearing part and is fixedly connected to the frame; the second linear ceramic bearing is sleeved on the second optical axis guide rail; the second limiting plate is disposed at the other end where the second optical axis guide rail is connected to the frame; the second spring is disposed on the second optical axis guide rail and is located between the second linear ceramic bearing and the second limiting plate.

[0009] In one possible implementation, the reference fixture includes a bottom reference fixture, which includes a second slot block having the same shape as the first slot block and being fixedly connected to the frame.

[0010] In one possible implementation, the reference fixture further includes a top reference fixture, which includes a second housing and a second clamping tongue. The second housing is fixedly connected to the frame, and a third through hole is provided at the bottom of the second housing. The second clamping tongue is movably disposed inside the second housing and has an L-shaped structure. A second protrusion extends from the bottom of the second clamping tongue and passes through the third through hole.

[0011] In one possible implementation, a first elongated hole is provided on both the lateral side of the first housing and the lateral side of the second housing.

[0012] In one possible implementation, a second elongated hole is provided on both the first clamping tongue and the second clamping tongue, and the second elongated hole has an inclination angle of 45 degrees relative to the first elongated hole.

[0013] In one possible implementation, the projection of the first elongated hole and the projection of the second elongated hole can intersect.

[0014] The beneficial effects of this utility model are as follows: By setting up a frame, a reference clamp, and a movable clamp; the frame is a hollow plate-like structure with openings at the top and bottom, and a wide body is provided to support the substrate. Two reference clamps are set on the frame to cooperate with the frame to fix and support the substrate. Multiple movable clamps are set on the frame to provide space for the substrate when it deforms, releasing deformation stress. Through the above arrangement, the deformation stress generated on the substrate can be released when it is heated, preventing damage and breakage of the substrate. Attached Figure Description

[0015] Figure 1 This diagram shows an overall view of the substrate holder device for relieving deformation stress according to an embodiment of this application;

[0016] Figure 2 A detailed diagram of the bottom reference fixture of the substrate holder device for relieving deformation stress according to an embodiment of this application is shown;

[0017] Figure 3 A detailed structural diagram of the bottom movable clamp of the substrate holder device for relieving deformation stress according to an embodiment of this application is shown.

[0018] Figure 4A front view of the top movable clamp of the substrate holder device for relieving deformation stress according to an embodiment of this application is shown;

[0019] Figure 5 A detailed structural diagram of the top movable clamp of the substrate holder device for relieving deformation stress according to an embodiment of this application is shown;

[0020] Figure 6 A detailed structural diagram of the top reference fixture of the substrate holder device for releasing deformation stress according to an embodiment of this application is shown. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0022] Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar symbols denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0023] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model or simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0024] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0025] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," "fixing," "linking," and "hinged" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0026] like Figure 1 As shown, the substrate holder device for releasing deformation stress includes a frame 100, a reference clamp 200, and a movable clamp 300. The frame 100 is a hollow plate structure with openings at the front and back. The reference clamp 200 is disposed on the frame 100, and two reference clamps 200 are disposed thereon, which are used to fix and support the substrate. The movable clamp 300 is disposed on the frame, and multiple movable clamps 300 are disposed thereon, which are used to release the deformation stress generated by the substrate during the heating process.

[0027] Specifically, a frame 100, a reference clamp 200, and a movable clamp 300 are provided. Both the reference clamp 200 and the movable clamp 300 are mounted on the frame 100 and are located on the same surface of the frame 100. The frame 100, in conjunction with the reference clamp 200 and the movable clamp 300, can support and fix the substrate. To keep the overall cost low, the frame 100 is designed as a hollow plate-like structure with openings at the front and back. In this embodiment, a hollow cuboid is selected. For example... Figure 1 The front side of the frame 100 shown is the front of the frame 100, and both the reference clamp 200 and the movable clamp 300 are located on the front of the frame 100. The back side is the rear of the frame 100. To better support and fix the substrate, multiple reference clamps 200 and movable clamps 300 are provided, and they are evenly distributed on the upper and lower edges of the frame 100. The movable clamps 300 are provided to release the deformation stress of the substrate during the heating process.

[0028] In one possible implementation, the movable clamp 300 includes a bottom movable clamp 310, and there are multiple bottom movable clamps 310. Each bottom movable clamp 310 includes a first optical axis guide rail 311, a first linear ceramic bearing 312, a first slot block 313, a first spring 314, and a first limiting plate 315. One end of the first optical axis guide rail 311 is fixedly connected to the frame 100. The first linear ceramic bearing 312 has a first through hole, and the first linear ceramic bearing 312 is sleeved on the optical axis guide rail 311. The first slot block 313 is annular, with its outer periphery recessed inward to form an annular groove. The first slot block 313 has a first through hole, and the first slot block 313 is fixedly sleeved on the first linear ceramic bearing 312 through the first through hole. The first limiting plate 315 is fixedly disposed at the opposite end where the first optical axis guide rail 311 connects to the frame 100. The first spring sleeve 314 is mounted on the first optical axis guide rail 311, located between the first linear ceramic bearing 312 and the first limiting plate 315, and the diameter of the tangential circle of the first spring 314 is larger than the diameter of the first linear ceramic shaft 312.

[0029] Specifically, such as Figure 3 As shown, the movable clamp 300 includes a bottom movable clamp 310. The specific structure of the bottom movable clamp 310 includes a first optical axis guide rail 311, a first linear ceramic bearing 312, a first slot block 313, a first spring 314, and a first limiting plate 315. The first optical axis guide rail 311 is fixedly connected to the frame 100 and is vertically disposed in front of the frame 100. The first slot block 313 is provided to support the substrate and to receive the stress when the substrate deforms. The first linear ceramic bearing 312 is provided, and in order to house the first slot block 313, a first through hole is opened on the first slot block 313. The first slot block 313 is fixedly sleeved on the first linear ceramic bearing 312, and the first slot block 313 can drive the first linear ceramic bearing 312 to slide. The first linear ceramic bearing 312 is selected to reduce the friction between it and the first slot block 313. To position the first linear ceramic bearing 312 on the first optical axis guide rail 311 and to ensure that the first linear ceramic bearing 312 returns to its original position after heating, a first spring 314 is provided. The first spring 314 is mounted on the first optical axis guide rail 311. To ensure the normal operation of the first spring 314, a first limiting plate 315 is provided. The first limiting plate 315 is located at the opposite end where the first optical axis guide rail 311 connects to the frame 100, creating a preset space between the first limiting plate 315 and the first linear ceramic bearing 312. The first spring 314 is positioned within this preset space, with one end of the first spring 314 connected to the first linear ceramic bearing 312 and the other end connected to the first limiting plate 315.

[0030] When the substrate is heated, deformation stress is generated. The first slot block 313 receives the deformation stress and transmits it to the first linear ceramic bearing 312. After receiving the deformation stress, the first linear ceramic bearing 312 begins to slide relative to the first optical axis guide rail 311, squeezing the first spring 314 to release the deformation stress. After the release is completed, the first linear ceramic bearing 312 returns to its original position through the recovery of the first spring 314.

[0031] In one possible implementation, the movable clamp 300 further includes a top movable clamp 320, and the number of top movable clamps 320 is multiple; the top movable clamp 320 includes a first housing 321, a first clamping tongue 322, a second linear ceramic bearing 323, a second optical axis guide rail 324, a second spring 325, and a second limiting plate 326, and the number of the second linear ceramic bearing 323, the second optical axis guide rail 324, the second spring 325, and the second limiting plate 326 are all two. The first outer shell 321 is a hollow shell structure with an open top. The first outer shell 321 is fixedly connected to the frame 100. The bottom of the first outer shell 321 is provided with a second through hole, and the first outer shell 321 extends two force-bearing parts 327 to both sides. The first clamping tongue 322 is movably disposed inside the first outer shell 321, and the first clamping tongue 322 is an inverted "L" shaped structure. The bottom of the first clamping tongue 322 extends a first protrusion 328, which passes through the second through hole.

[0032] Specifically, such as Figures 4-5 As shown, the specific structure of the top movable clamp 320 includes a first outer shell 321, a first clamping tongue 322, a second linear ceramic bearing 323, a second optical axis guide rail 324, a second spring 325, and a second limiting plate 326. To make the whole structure more complete, there are two of each of the following: the second linear ceramic bearing 323, the second optical axis guide rail 324, the second spring 325, and the second limiting plate 326. The first outer shell 321 is a hollow shell structure with an open top. The first outer shell 321 is provided to allow the first clamping tongue 322 to move up and down relative to the frame 100 without falling off. A first protrusion 328 extends from the bottom of the first clamping tongue 322, and the first protrusion 328 passes through a second through hole. The first clamping tongue 322 has an inverted "L" shape. This design prevents the first clamping tongue 322 from falling off and detaching from the first outer shell 321. There is a certain space between the first clamping tongue 322 and the frame 100, which is designed to fix the substrate. The first outer shell 321 extends to two force-bearing parts 327 on both sides.

[0033] In one possible implementation, the second optical axis guide rail 324 passes through the force-bearing part 327 and is fixedly connected to the frame 100; the second linear ceramic bearing 323 is sleeved on the second optical axis guide rail 324; the second limiting plate 326 is disposed at the other end where the second optical axis guide rail 324 is connected to the frame 100; and the second spring 325 is disposed on the second optical axis guide rail 324 and is located between the second linear ceramic bearing 323 and the second limiting plate 326.

[0034] Specifically, such as Figures 4-5 As shown, the second optical axis guide rail 324 is fixedly connected to the frame 100 through the force-bearing part 327. The second linear ceramic bearing 323 is disposed on the second optical axis guide rail 324. The second limiting plate 326 is disposed on the other end of the second optical axis guide rail 324 connected to the frame 100, so that the second linear ceramic bearing 323 and the second limiting plate 326 form a second space. The second spring 325 is disposed on the second space. One end of the second spring 325 is connected to the second linear ceramic bearing 323, and the other end of the second spring 325 is connected to the second limiting plate 326. When the substrate is heated, deformation stress is generated. The first clamp tongue 322 receives the deformation stress and transmits it to the first housing 321. The first housing 321 transmits the deformation stress to the second linear ceramic bearing 323. After receiving the deformation stress, the second linear ceramic bearing 323 begins to slide relative to the second optical axis guide rail 324, compressing the second spring 325 to release the deformation stress. After the release is completed, the second linear ceramic bearing 323 returns to its original position through the recovery of the second spring 325.

[0035] In one possible implementation, specifically, such as Figure 2 As shown, the reference fixture 200 includes a bottom reference fixture 210, which includes a second slot block 211. The shape of the second slot block 211 is the same as that of the first slot block 313, and it is fixedly connected to the frame 100.

[0036] In one possible implementation, the reference fixture 200 further includes a top reference fixture 220, which includes a second housing 221 and a second fixture tongue 222. The second housing 221 is fixedly connected to the frame 100, and a third through hole is provided at the bottom of the second housing 221. The second fixture tongue 222 is movably disposed inside the second housing 221, and a second protrusion 223 extends from the bottom of the second fixture tongue 222. The second protrusion 223 passes through the third through hole, and the shape of the second fixture tongue 222 is the same as that of the first fixture tongue 322.

[0037] Specifically, such as Figure 4As shown, a second outer shell 221 is provided and fixedly mounted on the frame 100. The second clamping tongue 222 is disposed inside the second outer shell 221. The second outer shell 221 prevents the second clamping tongue 222 from falling off when it slides relative to the frame 100. A second protrusion 223 extends from the bottom of the second clamping tongue 222 and passes through a third through hole. This arrangement is also to fix the substrate and prevent it from tilting and falling off. The shape of the second clamping tongue 222 is the same as that of the first clamping tongue 322 to prevent the second clamping tongue 222 from detaching from the second outer shell 221.

[0038] In one possible implementation, a first elongated hole 400 is formed in the lateral direction of both the first housing 321 and the second housing 221. A second elongated hole 500 is formed in both the first clamping tongue 322 and the second clamping tongue 222. The projections of the first elongated hole 400 and the second elongated hole 500 can intersect.

[0039] Specifically, such as Figure 4-6 As shown, current automation requirements are increasingly stringent. To meet the requirements of automatic substrate loading and unloading by robotic arms, the top reference clamp 220 needs to have an electrical control function for automatic clamp opening and closing. The second clamping tongue 222 is located inside the second housing 221 and can move up and down within it. When the second clamping tongue 222 moves to the bottom, the second protrusion 223 extends beyond the lower edge of the second housing 221, at which point the top reference clamp 220 is in a closed state. When the second clamping tongue 222 moves to the top, it retracts completely above the lower edge of the second housing 221, at which point the top reference clamp 220 is in an open state. A first elongated hole 400 is provided in the transverse direction of the second housing 221, wherein the transverse direction of the second housing 221 is... Figure 4 From left to right, the second clamping tongue 222 has a second elongated hole 500 at a 45° angle, and the projections of the first elongated hole 400 and the second elongated hole 500 intersect. When a metal rod is inserted into the intersection point via a control electrical component (e.g., a cylinder) and moves laterally along the first elongated hole 400 of the second housing 221, the second clamping tongue 222 moves up and down inside the second housing 221, functioning as the switch for the top reference clamp 220. The top movable clamp 320 meets the requirements for the robotic arm to automatically load and unload the substrate, achieving automation. This is analogous to the top reference clamp 220 needing to have the function of automatically switching the clamp via electrical control.

[0040] The preferred material for the frame 100 is metal.

[0041] This application addresses the problem of substrate damage and breakage caused by the inability to release deformation stress generated during heating. The frame 100 is made of metal, and multiple reference clamps 200 and movable clamps 300 are arranged on its upper and lower edges. The reference clamps 200 maintain the substrate's tilt angle, preventing tilting or detachment. The top reference clamp 220 and bottom reference clamp 210 prevent movement of the substrate's central reference position. The top movable clamp 320 and bottom movable clamp 310 can move freely according to substrate deformation, releasing deformation stress and reducing or avoiding the risk of substrate fragmentation. Through these features, this application solves the technical problem of substrate damage and breakage caused by the inability to release deformation stress generated during heating.

[0042] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the scope disclosed in the present invention, based on the technical solution and concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A substrate holder apparatus for releasing a deformation stress, characterized by, Includes the frame, reference fixture, and bottom movable fixture; The frame is a hollow cuboid structure with openings at the front and back; The reference fixture is set on the frame, and there are two reference fixtures, which are set at the middle position of the upper frame and the middle position of the lower frame. The bottom movable clamp is disposed on the lower edge of the frame, and the number of the bottom movable clamps is multiple; The bottom movable clamp includes a first optical axis guide rail, a first linear ceramic bearing, a first slot block, a first spring, and a first limiting plate; One end of the first optical axis guide rail is fixedly connected to the frame; The first linear ceramic bearing is sleeved on the optical axis guide rail; The first slot block is annular, and the outer periphery of the first slot block is recessed inward to form an annular groove. A first through hole is provided on the first slot block, and the first slot block is fixedly sleeved on the first linear ceramic bearing through the first through hole. The first limiting plate is fixedly installed at the opposite end where the first optical axis guide rail connects to the frame; The first spring is sleeved on the first optical axis guide rail, located between the first linear ceramic bearing and the first limiting plate, and the diameter of the tangential circle of the first spring is larger than the diameter of the linear ceramic bearing.

2. The warpage stress relief substrate rack apparatus of claim 1, wherein, It also includes a top movable clamp, which is disposed on the upper edge of the frame, and the number of the top movable clamps is multiple; The top movable clamp includes a first outer shell, a first clamping tongue, a second linear ceramic bearing, a second optical axis guide rail, a second spring, and a second limiting plate, and the number of the second linear ceramic bearing, the second optical axis guide rail, the second spring, and the second limiting plate are all two.

3. The warpage stress relief substrate rack apparatus of claim 2, wherein, The first outer shell is a hollow shell structure with an open top. The first outer shell is disposed on the frame. A second through hole is provided at the bottom of the first outer shell. Force-bearing parts extend from both sides of the first outer shell. The first clamping tongue is movably disposed inside the first housing. The first clamping tongue has an inverted "L" shaped structure. A first protrusion extends from the bottom of the first clamping tongue and passes through the second through hole.

4. The warpage stress relief substrate rack apparatus of claim 3, wherein, The second optical axis guide rail passes through the force-bearing part and is fixedly connected to the frame; The second linear ceramic bearing is sleeved on the second optical axis guide rail; The second limiting plate is located at the other end where the second optical axis guide rail connects to the frame; The second spring is disposed on the second optical axis guide rail and is located between the second linear ceramic bearing and the second limiting plate.

5. The stress release substrate holder apparatus of claim 4, wherein, The reference fixture includes a bottom reference fixture, which includes a second slot block. The shape of the second slot block is the same as that of the first slot block, and it is fixedly connected to the frame.

6. The stress release substrate holder apparatus of claim 5, wherein, The reference fixture also includes a top reference fixture, which includes a second outer shell and a second fixture tongue. The second outer shell is fixedly connected to the frame, and a third through hole is provided at the bottom of the second outer shell. The second clamping tongue is movably disposed inside the second housing. The second clamping tongue has an L-shaped structure. A second protrusion extends from the bottom of the second clamping tongue and penetrates the third through hole.

7. The stress relief substrate holder apparatus of claim 6, wherein, A first elongated hole is provided on both the lateral side of the first outer shell and the lateral side of the second outer shell.

8. The warpage stress relief substrate rack apparatus of claim 7, wherein, A second elongated hole is provided on both the first clamping tongue and the second clamping tongue, and the second elongated hole has an inclination angle of 45 degrees relative to the first elongated hole.

9. The warpage stress relief substrate rack apparatus of claim 8, wherein, The projection of the first elongated hole and the projection of the second elongated hole can intersect.

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