Bonding wedge

Abstract

This application discloses a bonding wedge, comprising a body having a through hole extending through the body along its axis, a head of the body having an end face intersecting the inner circumferential surface of the through hole, the end face including a plurality of circumferentially uniformly distributed sector areas, each of the plurality of sector areas extending from the radially inner side of the end face intersecting the inner circumferential surface of the through hole to the radially outer side of the end face, wherein each sector area includes a plurality of first grooves parallel to its first edge, the plurality of first grooves including at least one first through groove extending from the radially outer edge of the sector area to the inner circumferential surface of the through hole.

Description

Technical Field

[0001] This application primarily relates to the field of ultrasonic welding tools for semiconductor chip packaging. More specifically, this application relates to a bonding wedge for bonding metal wires to a bonding pad / pin. Background Technology

[0002] Currently, packaging is a crucial step in the semiconductor device manufacturing process. Wire bonding is one of the most commonly used techniques in packaging, which involves soldering the two ends of a metal wire to the pads on the die and the lead, respectively, to achieve electrical connection between the die and the lead.

[0003] Typically, wire bonding includes the steps of forming a first bonding point (also known as a ball bond) and forming a second bonding point. During the second bonding point bonding, a bonding wedge presses the metal lead vertically through its end face. The metal lead receives ultrasonic energy transmitted from the end face and melts, depositing onto the pad. When the wire bonding system stops supplying ultrasonic energy, the metal lead quickly returns to a solid state. Subsequently, the bonding wedge moves vertically upward, pulling the metal lead within the wedge's through-hole to the adjacent metal lead on the pad, causing them to separate. Thus, the second bonding point is completed, forming a fishtail shape on the pad.

[0004] It is evident that the bonding wedge is a crucial tool in wire bonding, significantly impacting bond quality. Therefore, there is a need in the art to continuously improve all aspects of the bonding wedge to achieve optimized bond performance. Utility Model Content

[0005] The purpose of this application is to provide a novel bonding cutter that can improve bonding performance.

[0006] According to one aspect of this application, a bonding wedge is provided. The bonding wedge includes: a body having a through hole extending through the body along its axial direction; a head of the body having an end face intersecting the inner circumferential surface of the through hole; the end face including a plurality of circumferentially uniformly distributed sector regions; each of the plurality of sector regions extending radially inward from the radially inner side of the intersection of the end face and the inner circumferential surface of the through hole to a radially outer side of the end face; wherein each sector region includes a plurality of first grooves disposed parallel to its first edge; the plurality of first grooves including at least one first through groove extending from the radially outer edge of the sector region to the inner circumferential surface of the through hole.

[0007] In some embodiments, the cross-section of the plurality of first grooves is one of a parallelogram, trapezoid, V-shape, or U-shape.

[0008] In some embodiments, the width of the plurality of first grooves at the end face is 1 micrometer to 10 micrometers.

[0009] In some embodiments, the depth of the plurality of first grooves relative to the end face is 1 micrometer to 7 micrometers.

[0010] In some embodiments, the spacing between two adjacent first slots in the plurality of first slots is 3 micrometers to 20 micrometers.

[0011] In some embodiments, a plurality of recesses are linearly arranged between two adjacent first grooves in each sector, with adjacent recesses being adjacent to each other or spaced 3 to 20 micrometers apart.

[0012] In some embodiments, the recessed portion on the end face is shaped as one of a circle, an ellipse, a triangle, a rectangle, or a trapezoid.

[0013] In some embodiments, the depth of the recess relative to the end face is 1 micrometer to 7 micrometers.

[0014] In some embodiments, a plurality of protrusions are linearly arranged between two adjacent first slots in each sector, with adjacent protrusions being adjacent to each other or spaced 3 to 20 micrometers apart.

[0015] In some embodiments, the protrusion is constructed as one of the following: cylindrical, hemispherical, conical, arched, polygonal prism, polygonal pyramid, fan-shaped prism, and fan-shaped pyramid.

[0016] In some embodiments, a plurality of in-hole grooves are provided on the inner surface of the through hole near the end face, and the plurality of in-hole grooves extend from the corresponding first through groove along the inner peripheral surface of the through hole away from the end face by 1 micrometer to 10 micrometers.

[0017] In some embodiments, the depth of the plurality of in-hole grooves relative to the inner peripheral surface is 0.5 micrometers to 3 micrometers.

[0018] In some embodiments, each sector further includes a plurality of second grooves, the plurality of second grooves being parallel to a second edge of each sector or perpendicular to a first edge of each sector, the plurality of second grooves including at least one second through groove extending from the radially outer edge of the sector to the inner peripheral surface of the through hole.

[0019] In some embodiments, the width of the plurality of second grooves at the end face is 1 micrometer to 10 micrometers.

[0020] In some embodiments, the depth of the plurality of second grooves relative to the end face is 1 micrometer to 7 micrometers.

[0021] In some embodiments, the first slots are equally spaced, the second slots are equally spaced, the spacing between adjacent first slots is equal to the spacing between adjacent second slots, and / or the cross-sectional shape and size of the second slots are the same as those of the first slots.

[0022] In some embodiments, the end face is a plane perpendicular to the central axis of the through hole, and the depth of the first groove is equal at all points along the radial direction.

[0023] In some embodiments, the angle FA between the end face and the plane perpendicular to the central axis of the through hole is greater than 0 degrees and less than or equal to 15 degrees.

[0024] In some embodiments, the depth of the first groove and / or the second groove is equal at all points along its longitudinal direction.

[0025] In some embodiments, the number of sector regions is a multiple of 4.

[0026] The bonding wedge of this application has an end face comprising multiple fan-shaped regions, each fan-shaped region including multiple first grooves parallel to its first edge. Each first groove includes at least one first through groove extending inward from the radially outer edge of the fan-shaped region to the inner circumferential surface of a through-hole. During bonding, the first through groove effectively guides the metal radially outward, effectively reducing slippage of the metal lead relative to the bonding wedge end face, better controlling the formation of metal balls from the metal lead, improving bonding quality, and reducing undesirable breakage and fishtail tearing of the metal lead. Furthermore, the design of the first and second grooves or recesses allows the bonding wedge to provide frictional forces in different directions to the molten metal lead, thereby further improving the quality of lead bonding. It can be expected that the service life of the bonding wedge of this application will be increased by approximately 30%.

[0027] It should be understood that the foregoing general description and the following detailed description are exemplary and illustrative only, and not intended to limit the scope of the invention. Furthermore, the accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles and concepts of the invention. Attached Figure Description

[0028] The above and other features of this utility model will become more fully clear from the following description and appended claims, taken in conjunction with the accompanying drawings. It is understood that these drawings depict only a few embodiments of the present application and should not be considered as limiting the scope of the application. The present application will be described more clearly and in more detail with reference to the accompanying drawings.

[0029] Figure 1 An exemplary perspective view of a bonding cleaver in the prior art is shown.

[0030] Figures 2A to 2C A bonding cleaver according to a first embodiment of this application is illustrated by way of example.

[0031] Figures 3A to 3C A bonding cleaver according to a second embodiment of this application is illustrated by way of example.

[0032] Figures 4A to 4B A bonding cleaver according to a third embodiment of this application is illustrated by way of example.

[0033] Figures 5A to 5B A bonding cleaver according to a fourth embodiment of this application is illustrated by way of example.

[0034] Figures 6A to 6B A bonding cleaver according to a fifth embodiment of this application is illustrated by way of example.

[0035] Figures 7A to 7B A bonding cleaver according to a sixth embodiment of this application is illustrated by way of example.

[0036] Explanation of reference numerals in the attached figures: Bonded cleavers: 100, 200, 300, 400, 500, 600 Main body: 10, 110, 210 Base: 10a Head: 10b Metal leads: 11 Through holes: 12, 101, 201, 301, 401, 501, 601 Cylindrical inner circumferential surface: 101a, 201a Conical inner circumferential surface: 101b, 201b, 601b End face: 102, 202, 302, 402, 502, 602 Lateral wall: 103, 203, 303, 403, 503 Sector areas: 120, 220, 320, 420, 520, 620 First edge: 120-1a, 220-1a, 320-1a, 420-1a, 520-1a Second edge: 120-1b, 220-1b, 320-1b, 420-1b Slots: 121, 221, 222, 321, 322, 421, 422, 521, 621 Bottom of the tank: 121a, 221a, 222a Protrusions: 130, 230, 330, 430 Base of the protrusion: 130a Depression: 540 Inner groove: 640 Detailed Implementation

[0037] In the following detailed description, reference is made to the accompanying drawings, which form part of this application. In the drawings, unless the context otherwise requires, similar symbols generally denote similar components. The illustrative embodiments described in the detailed description, drawings, and claims are not intended to be limiting. Other embodiments and variations may be employed without departing from the spirit or scope of the subject matter of this application. It is understood that various different configurations, substitutions, and combinations can be made to the various aspects of the application generally described herein and illustrated in the drawings, and all of these should not be construed as limiting the scope of protection of this application. The scope of protection of this application is limited only by the definition of the appended claims.

[0038] In this application, unless otherwise expressly stated, the use of singular terms should also include the plural meaning. In this application, unless otherwise stated, the use of “or” means “and / or”. Furthermore, the use of the term “comprising” and other forms of expression such as “including” and “containing” is not restrictive. Additionally, the section headings used in this specification are for organizational purposes only and should not be construed as limiting the subject matter described.

[0039] As used herein, the “distal end” of a bonding wedge refers to the end of the bonding wedge used to press the metal leads together to form a bonding point, while the “proximal end” is the end opposite the “distal end.” Spatially relative terms, such as “up,” “down,” “left,” “right,” etc., are used to describe the relationship between one element or feature and another, as shown in the accompanying figures. In addition to the orientations depicted in the figures, spatially relative terms are intended to cover different orientations of the bonding wedge in use or operation. The bonding wedge may be oriented in other ways (rotated 90 degrees, 180 degrees, or in other orientations), and the spatially relevant descriptors used herein can be interpreted accordingly.

[0040] In this document, unless otherwise specified, the endpoints of the range should be included for all numerical ranges.

[0041] Figure 1 This is an exemplary perspective view of an existing bonding wedge in its working position, wherein a metal lead 11 for welding passes through a through-hole 12 located in the central region of the bonding wedge. Figure 1As shown, the bonding wedge includes a body 10 having a base 10a at a proximal end and a head 10b at a distal end. The base 10a is used for mounting to a frame of a wire bonding system (e.g., a wire bonding machine), and the head 10b is used to pressure contact the metal lead 11 with the pad for bonding. The body 10 of the bonding wedge has a through-hole 12 extending along its axial direction Y. The metal lead 11 passes through the through-hole 12 from the base 10a at the proximal end of the bonding wedge and extends out of the head 10b at the distal end of the bonding wedge. It is understood that the wire bonding system includes a clamp for controlling the movement of the metal lead 11. When the clamp clamps the metal lead 11, the metal lead 11 cannot move relative to the bonding wedge; and when the clamp releases the metal lead 11, the metal lead 11 can move along the axial direction Y within the through-hole 12 of the bonding wedge.

[0042] Figures 2A to 2C An exemplary embodiment of a bonding cleaver 100 according to a first embodiment of this application is shown, wherein... Figure 2A This is a perspective view of the bonded cleaver 100; Figure 2B From Figure 2A Top view of the bonding cleaver 100 viewed from above; Figure 2C It is the edge of the bonded cleaver Figure 2B Enlarged view of the longitudinal section of the central section line AA.

[0043] refer to Figures 2A to 2C ,and Figure 1 Similar to existing bonding cleavers, bonding cleaver 100 includes a body 110, the body 110 having a proximal end ( Figure 2A The lower end of the body 110 extends along the axis Y of the body 110 to the distal end of the body 110. Figure 2A The through hole 101 (at the upper end of the hole) includes a cylindrical inner circumferential surface 101a with a diameter of H and a tapered inner circumferential surface 101b. The tapered inner circumferential surface 101b is located at its distal end (i.e., Figure 2C The lower side of the through hole 101 has the largest diameter CD and an inner taper angle ICA. Of course, in some embodiments, the through hole 101 may also include only a cylindrical inner peripheral surface without having a tapered inner peripheral surface located at the distal end, i.e., the cylindrical inner peripheral surface extends to the distal end of the through hole.

[0044] The head of the main body 110 has an end face 102 and an outer wall 103. The radially inner side of the end face 102 intersects with the inner circumferential surface of the through hole 101 (i.e., the tapered inner circumferential surface 101b), and the radially outer side of the end face 102 is in contact with the outer wall 103. Figure 2A-2CIn the illustrated embodiment, the end face 102 of the bonding wedge 100 is constructed as a conical surface P, with an angle FA between the conical surface P and the horizontal plane L. The horizontal plane L is perpendicular to the axis Y of the main body 110 and intersects the farthest point of the bonding wedge 100. The angle FA can be greater than 0 to less than or equal to 15 degrees. In some embodiments, the angle FA can also be equal to 0 degrees, in which case the end face 102 of the bonding wedge 100 coincides with the horizontal plane L. The extension portion of the outer sidewall 103 of the bonding wedge 100 ( Figure 2C The dashed portion intersects with the horizontal plane L to form a ring with a diameter of T. The proximal side of the main body 110 is connected to a wire bonding system (e.g., a wire bonding machine, not shown). The structure of the main body 110 of the bonding wedge 100 of this application can adopt... Figure 1 The form shown or any other suitable form, as long as the distal end of the bonding cleaver 100 has Figures 2A to 2C The structure shown is sufficient.

[0045] Continue to refer to the appendix Figures 2A to 2C The end face 102 includes eight adjacent sector regions 120 (i.e. sector regions 120-1, 120-2, 120-3, 120-4, 120-5, 120-6, 120-7 and 120-8), each sector region extending radially from the inner peripheral surface 101b of the through hole 101 to the outer side wall 103 of the body 110.

[0046] like Figure 2B As shown, multiple (7 in the illustrated example) parallel slots 121 are formed within each sector 120. The specific structure of sector 120 will be explained below using sector 120-1 as an example. Figure 2B As shown, in sector 120-1, groove 121 is parallel to its first edge (the left edge of the sector in the figure) 120-1a in the clockwise direction. Of the seven grooves 121 in sector 120-1, groove 121-1 near the first edge 120-1a is a through groove extending approximately radially, and the two adjacent grooves 121 are also through grooves extending radially outward from the outer side of sector 120-1 (i.e., the side near the outer wall 103) to the through hole 101; while the remaining four grooves 121 extend inward from the radially outward side of sector 120-1 to the first edge of the adjacent sector 120-2 in the clockwise direction. A protrusion 130 is formed between two adjacent grooves 121 within the same sector 120.

[0047] exist Figures 2A to 2C In the embodiment shown, the grooves 121 in each sector 120 are parallel to their first edge and form an angle (e.g., 45 degrees) with the grooves 121 of the adjacent sector. This allows for more uniform guidance of metal flow at the end face 102 during bonding, improving the bonding effect.

[0048] like Figure 2C As shown, the cross-section of groove 121 is approximately parallelogram-shaped, and the cross-section of protrusion 130 is also approximately parallelogram-shaped. The depth d1 of groove 121 (i.e., the distance from end face 102 to bottom 121a of groove 121) is 1 micrometer to 7 micrometers. The opening width W of groove 121 at end face 102 (its width is parallel to its bottom 121a) is 1 micrometer to 10 micrometers. The spacing between adjacent grooves 121 (i.e., the width of protrusion 130 at its top) is 3 micrometers to 20 micrometers. It is understood that the height of protrusion 130 (i.e., the distance from end face 102 to its base 130a) is the same as the depth d1 of groove 121. It is understood that the depth of multiple grooves 121 is equal everywhere in its longitudinal direction.

[0049] In some embodiments, the cross-section of the groove 121 can also be configured with other shapes, such as trapezoidal, V-shaped, or U-shaped, to adapt to the requirements of bonding quality. It is understood that the number of sector regions 120 is not limited to the eight shown in the figure, and can also be set to other even numbers, such as 4, 6, 10, 12, 14, 16, etc., preferably a multiple of 4. This is because when the number of sector regions is a multiple of 4, the arrangement of the sector regions on the end face is axially symmetrical, which allows the end face to apply uniform compressive force to the metal, thus improving bonding quality. Furthermore, the number of grooves in each sector region can also be adjusted according to actual needs (e.g., increasing or decreasing the number of grooves), and is not limited to... Figures 2A to 2C The quantity shown.

[0050] Figures 3A to 3C An exemplary embodiment of a bonding cleaver 200 according to a second embodiment of this application is shown, wherein... Figure 3A This is a perspective view of the bonded cleaver 200; Figure 3B From Figure 3A An enlarged top view of the bonding cleaver 200 as seen from above; Figure 3C It is along Figure 3B Enlarged view of the cross-sectional view along line AA.

[0051] and Figures 2A to 2C Compared to the bonding cleaver 100 shown, Figures 3A to 3C The main difference of the bonding cleaver 200 shown is that two sets of intersecting grooves are formed in each sector of the bonding cleaver 200. The following will mainly introduce the differences between the bonding cleaver 200 and the bonding cleaver 100. For the similarities between the two, please refer to the description of the bonding cleaver 100, which will not be repeated here.

[0052] refer to Figures 3A to 3CThe end face 202 of the bonding cutter 200 also includes eight sector regions 220 (i.e., 220-1, 220-2, 220-3, 220-4, 220-5, 220-6, 220-7, and 220-8). The characteristics of sector region 220 will be explained below using sector region 220-1 as an example; the construction of the other sector regions 220 can be referred to the description of sector region 220-1.

[0053] like Figure 3B As shown, a first set of seven parallel grooves 221 and a second set of six parallel grooves 222 are formed in the sector region 220-1. As shown, the grooves 221 are parallel to the first edge of the sector region 220-1 in a clockwise direction (i.e.,...). Figure 3B The groove 222 is parallel to the second edge of the sector 220-1 in the clockwise direction (i.e., the opposite left edge). Figure 3B The relative right edge of the sector 220 (220-1b) has grooves 221 and 222 intersecting each other (e.g., forming an angle of 45 or 135 degrees), thereby dividing the sector 220 into several grids, each grid corresponding to a protrusion 230.

[0054] In the slots 221 of sector region 220-1, the slot 221-1 closest to the first edge 220-1a is a through slot extending radially outward from the outer side of sector region 220-1 to the inner circumferential surface of through hole 201. The two slots 221 adjacent to slot 221-1 are also through slots extending radially outward from the outer side of sector region 220-1 to the inner circumferential surface of through hole 201. The remaining slots 221 extend radially outward from the outer side of sector region 220-1 to the second edge 220-1b of sector region 220-1. Those skilled in the art will understand that adjacent sector regions share a common edge; for example, the first edge of sector region 220-1 is the second edge of adjacent sector region 220-8, and the second edge of sector region 220-1 is the first edge of adjacent sector region 220-2.

[0055] In the slots 222 of the sector region 220-1, the two slots 222 closest to and parallel to the second edge 220-1b are through slots that extend radially from the outer side of the sector region 220-1 to the inner peripheral surface of the through hole 201 in a generally radial direction. The other slots 222 extend inward from the outer side of the sector region 220-1 parallel to the slot 222-1 to the first edge 220-1a of the sector region 220-1.

[0056] The opening width W1 of groove 221 at end face 202 is 1 micrometer to 10 micrometers, and the spacing L1 between adjacent grooves 221 is 3 micrometers to 20 micrometers. The width W2 of groove 222 at end face 202 is 1 micrometer to 10 micrometers, and the spacing L2 between adjacent grooves 222 is 3 micrometers to 20 micrometers. For example... Figure 3BAs shown, the spacing between grooves 221 and grooves 222 is equal. Except for the protrusions 230 on the radially outer and radially inner sides of the fan-shaped area 220, which are partially rhomboid in shape, most of the protrusions 230 are rhomboid in shape on the end face 202. It can be understood that the spacing L1 of grooves 221 and the spacing L2 of grooves 222 can also be unequal to each other. In this case, the protrusions 230 will be parallelogram-shaped.

[0057] Further as Figure 3C As shown, the cross-sections of both groove 221 and groove 222 are approximately parallelograms. The depth d1 of groove 221 (i.e., the distance from end face 202 to bottom 221a of groove 221) and the depth d2 of groove 222 (i.e., the distance from end face 202 to bottom 222a of groove 222) are 1 micrometer to 7 micrometers, preferably equal to each other, so as to better guide the flow of metal.

[0058] Figures 4A to 4B An exemplary embodiment of a bonding cleaver 300 according to a third embodiment of this application is shown, wherein... Figure 4A This is a perspective view of the bonded cleaver 300; Figure 4B From Figure 4A The top view of the bonding cleaver 300 as seen from above.

[0059] and Figures 3A to 3C Compared to the bonding cleaver 200 shown, Figures 4A to 4B The main difference between the bonded cleaver 300 shown is that the number of the first set of grooves 321 and the second set of grooves 322 in the sector area 320 of the bonded cleaver 300 is different. The following will mainly introduce the differences between the bonded cleaver 300 and the bonded cleaver 200. For the similarities between the two, please refer to the above description of the bonded cleaver 200.

[0060] refer to Figures 4A to 4B The end face 302 includes eight sector areas 320 (i.e., sector areas 320-1, 320-2, 320-3, 320-4, 320-5, 320-6, 320-7 and 320-8). The structure of each sector area 320 will be explained below using sector area 320-1 as an example.

[0061] As shown in the figure, the sector area includes a first group of grooves 321 and a second group of grooves 322. The first group of grooves 321 includes five grooves 321 parallel to the first edge 320-1a on the clockwise upstream side of the sector area 320-1. The second group of grooves 322 includes four grooves 322 parallel to the second edge 320-1b on the clockwise downstream side of the sector area 320-1. Among them, the two grooves 321 closest to the first edge 320-1a extend from the radial outer side of the sector region 320-1 inward to the inner peripheral surface of the through hole 301, and the remaining grooves 321 extend from the radial outer side of the sector region 320-1 inward to the second edge 320-1b of the sector region 320-1; the groove 322 closest to the second edge 320-1b extends from the radial outer side of the sector region 320-1 inward to the inner peripheral surface of the through hole 301, and the remaining grooves 322 extend from the radial outer side of the sector region 320-1 inward to the first edge 320-1a of the sector region 320-1.

[0062] Similar to the bonding cleaver 200, the cross-sections of grooves 321 and 322 are approximately parallelogram-shaped. The opening width of groove 321 at the end face 302 is 1 to 10 micrometers, and the spacing between adjacent grooves 321 is 3 to 20 micrometers. The opening width of groove 322 at the end face 302 is 1 to 10 micrometers, and the spacing between adjacent grooves 322 is 3 to 20 micrometers. Other features of grooves 321 and 322 can be found in the bonding cleaver 200 and will not be repeated here.

[0063] Figures 5A to 5B An exemplary embodiment of a bonding cleaver 400 according to a fourth embodiment of this application is shown, wherein... Figure 5A This is a perspective view of the bonded cleaver 400; Figure 5B From Figure 5A Top view of the Bonded Cleaver 400 as viewed from above.

[0064] and Figures 2A to 2C Compared to the bonding cleaver 100 shown, Figures 5A to 5B The main difference of the bonding cutter 400 shown is that the arrangement of the first set of grooves 421 and the second set of grooves 422 in the sector area 420 of the bonding cutter 400 is different. The following will mainly introduce the differences between the bonding cutter 400 and the bonding cutter 100. For the similarities between the two, please refer to the above description of the bonding cutter 100.

[0065] refer to Figures 5A to 5B The end face of the bonding cleaver 400 also includes eight sector regions 420 (i.e., sector regions 420-1, 420-2, 420-3, 420-4, 420-5, 420-6, 420-7 and 420-8). The structure of each sector region 420 will be explained below using sector region 420-1 as an example.

[0066] like Figure 5BAs shown, the first group of grooves 421 includes 7 grooves, all of which are parallel to the first edge 420-1a of the sector region 420-1 in a clockwise direction (i.e., Figure 5B The first group of slots 421 (with the left edge of the first edge 420-1a) extends radially inward from the outer edge of the sector 420-1. Each slot 421 has an opening width of 1 to 10 micrometers at the end face 402, and the spacing between adjacent slots 421 is 3 to 20 micrometers. The second group of slots 422 comprises seven slots, all perpendicular to the first edge 420-1a of the sector. Each slot 422 has an opening width of 1 to 10 micrometers at the end face 402, and the spacing between adjacent slots 422 is 3 to 20 micrometers. Figure 5B In the embodiment shown, the opening width and spacing of slots 421 and 422 are equal to each other, thereby dividing the sector area 420-1 into multiple grids, each grid corresponding to a protrusion 430. Except for the protrusions 430 near the radially outer and radially inner sides of the sector area 420-1 which are part of a square, the remaining protrusions 430 are approximately square on the end face 402 (i.e., the protrusions 430 are generally in the shape of a regular square prism).

[0067] It is understandable that the opening width and spacing of grooves 421 and 422 can be unequal, thus the protrusion 430 presents a rectangular or partially rectangular shape on the end face 402. Other features of grooves 421 and 422 can be found in the description of groove 121 of the bonding cutter 100 above, and will not be repeated here.

[0068] In some variations of the bonding cutter 400, the sector region 420 may only include grooves 421, while multiple protrusions are provided between adjacent grooves 421. These protrusions may be constructed as cylindrical, hemispherical, conical, arched, multi-faceted prisms (e.g., triangular prisms, pentagonal prisms, hexagonal prisms, etc.), multi-faceted pyramids (e.g., triangular pyramids, square pyramids, pentagonal pyramids, hexagonal pyramids, etc.), prisms or cones with a sector-shaped or other shapes in cross-section, etc., to adapt to different bonding requirements.

[0069] Figures 6A to 6B An exemplary illustration shows the head of a bonding cleaver 500 according to a fifth embodiment of this application, wherein... Figure 6A This is a perspective view of the bonded cleaver 500; Figure 6B From Figure 6A Top view of the Bonded Cleaver 500 as viewed from above.

[0070] refer to Figure 6A and 6B The end face of the bonding cleaver 500 also includes eight sector regions 520 (i.e., sector regions 520-1, 520-2, 520-3, 520-4, 520-5, 520-6, 520-7 and 520-8). The structure of each sector region 520 will be explained below using sector region 520-1 as an example.

[0071] like Figure 6B As shown, seven grooves 521 are formed within the sector region 520-1. These grooves 521 are parallel to the first edge 520-1a of the sector region 520-1 in the clockwise direction (i.e., Figure 6B The grooves extend from the left edge of the sector 520-1. Of the seven grooves 521 in the sector 520-1, the groove 521-1 near the first edge 520-1a is a through groove extending generally in the radial direction, and the two adjacent grooves 521 are also through grooves extending radially outward from the sector 520-1 to the through hole 501; while the remaining four grooves 521 extend radially outward from the sector 520-1 inward to the second edge 520-1b of the adjacent sector 520-2, downstream in a clockwise direction. At least one recess 540 is formed between two adjacent grooves 521 within the same sector 520.

[0072] like Figure 6B As shown, the recesses 540 are partially circular at positions near the radially outer and radially inner sides of the fan-shaped region 520-1, and some recesses 540 near the edge of the fan-shaped region are also partially circular. Other recesses 540 have a circular shape on the end face 502. The diameter of the circular recesses 540 is 3 to 10 micrometers. Adjacent recesses 540 are spaced a certain distance apart on the end face 502, for example, 3 to 20 micrometers. The depth of the bottom of the recess 540 relative to the end face 502 can be 1 to 7 micrometers. In some embodiments, adjacent recesses 540 may also be adjacent to each other at the end face 502.

[0073] In some variations of the bonding cutter 500, the recess 540 may have other shapes on the end face 502, such as ellipse, triangle, rectangle, trapezoid, etc. The longitudinal section of the recess 540 (cut along a direction perpendicular to the end face 502) may be parallelogram, trapezoid, V-shaped, U-shaped, etc.

[0074] Figures 7A to 7B An exemplary embodiment of a bonding cleaver 600 according to a sixth embodiment of this application is shown, wherein... Figure 7A This is a perspective view of the bonded cleaver 600; Figure 7B From Figure 7A The top view of the bonding cleaver 600 as seen from above.

[0075] and Figures 2A to 2C Compared to the bonding cleaver 100 shown, Figures 7A to 7B The main difference of the bonding cutter 600 shown is that the inner circumferential surface of the through hole 601 is further provided with a plurality of in-hole grooves 640. The following will mainly introduce the differences between the bonding cutter 600 and the bonding cutter 100. The similarities between the two can be referred to the description of the bonding cutter 100, which will not be repeated here.

[0076] like Figure 7A and 7B As shown, a plurality of in-hole grooves 640 are provided on the inner peripheral surface of the through hole 601. These in-hole grooves 640 extend from the corresponding grooves 621 located at the first edge of the clockwise upstream side of each sector 620 along the inner peripheral surface of the through hole 601 in a direction away from the end face 602, from 1 micrometer to 10 micrometers. The depth of the in-hole grooves 640 recessed relative to the inner peripheral surface of the through hole 601 (i.e., the conical inner peripheral surface 601b) (i.e., the distance from the conical inner peripheral surface 601b to the bottom of the in-hole grooves 640) is 0.5 micrometers to 3 micrometers, so as to better guide the metal to flow into the through hole 601 along the in-hole grooves.

[0077] exist Figure 7A and 7B In the illustrated embodiment, the bonding wedge 600 has eight in-hole grooves 640, which are equidistantly distributed in the circumferential direction, with each groove corresponding to the edge of a sector. It is understood that the number of in-hole grooves is not limited to the eight shown in the figure; other numbers can be used. Those skilled in the art can adjust the number according to actual needs (e.g., increasing or decreasing the number of in-hole grooves), and are not limited to this. Figure 7A and 7B The quantity shown.

[0078] Continue to refer to Figure 7A The inner groove 640 extends from the end where the conical inner circumferential surface 601b intersects with the end face 602 to the junction of the conical inner circumferential surface 601b and the cylindrical inner circumferential surface. In some embodiments, the inner groove 640 may further extend to the cylindrical inner circumferential surface. It is understood that the inner groove 640 may also extend only through a portion of the conical inner circumferential surface 601b without extending to the cylindrical inner circumferential surface; those skilled in the art can adjust this according to actual needs.

[0079] Although the various embodiments of this application use metal leads and nickel-palladium-gold frames with different properties as welding materials, this application does not limit the welding materials. Those skilled in the art will understand that any suitable form of welding material can be used in the various embodiments of this application.

[0080] Although the various embodiments shown in the accompanying drawings are not explicitly illustrated, those skilled in the art will understand that, in order to improve the bonding effect, arc-shaped transition surfaces can be provided at the junctions of the surfaces in the bonding wedge. For example, an arc-shaped transition portion can be provided at the junction of the cylindrical surface and the inner conical surface of the through hole, and an arc-shaped transition portion can be provided at the junction of the inner conical surface and the end face, etc. Those skilled in the art can combine them arbitrarily according to actual needs.

[0081] Those skilled in the art can use appropriate existing measurement methods to determine the height, inner cone angle, bottom side length, and top side length of the protrusion, for example, by using 3D scanning to measure these parameters, and this application does not limit this.

[0082] The discussion herein includes numerous illustrative drawings that illustrate the structure of the distal end of a bonding cleaver according to different embodiments. For clarity, these drawings do not show all aspects of each embodiment. Any embodiment provided herein may share any or all features with any or all other embodiments provided herein, and features in different embodiments may be combined arbitrarily as needed, all within the scope of protection of this application.

[0083] Various embodiments have been described herein with reference to the accompanying drawings. However, it will be apparent that various modifications and changes can be made thereto, and other embodiments can be implemented without departing from the broader scope of the invention as set forth in the appended claims. For example, in the embodiments described above, the first and second edges of each sector are defined in a clockwise direction; conversely, the first and second edges of the sector can be defined in a counter-clockwise direction, thereby causing the orientation of the grooves within the sector to differ from that shown in the drawings.

[0084] Furthermore, other embodiments will be apparent to those skilled in the art upon consideration of the practice of one or more embodiments of the present invention disclosed herein. Therefore, the embodiments in this application and herein are intended to be considered exemplary only, and the true scope and spirit of the present invention are indicated by the list of exemplary claims appended.

Claims

1. A bonding cleaver, comprising: The main body has a through hole extending through it along its axis, and the head of the main body has an end face intersecting the inner circumferential surface of the through hole. The end face is characterized by comprising a plurality of circumferentially evenly distributed sector-shaped regions, each of the plurality of sector-shaped regions extending radially inward from the radially inward side where the end face intersects the inner circumferential surface of the through hole to the radially outward side of the end face. Each sector includes a plurality of first grooves arranged parallel to its first edge, and the plurality of first grooves includes at least one first through groove extending inward from the radially outer edge of the sector to the inner peripheral surface of the through hole.

2. The bonding cleaver according to claim 1, characterized in that, The cross-section of the plurality of first grooves is one of parallelogram, trapezoid, V-shape, or U-shape.

3. The bonding cleaver according to claim 1 or 2, characterized in that, The opening width of the plurality of first grooves at the end face is 1 micrometer to 10 micrometers.

4. The bonding cleaver according to claim 1 or 2, characterized in that, The depth of the plurality of first grooves relative to the end face is from 1 micrometer to 7 micrometers.

5. The bonding cleaver according to claim 1 or 2, characterized in that, The spacing between any two adjacent first slots in the plurality of first slots is 3 micrometers to 20 micrometers.

6. The bonding cleaver according to any one of claims 1-5, characterized in that, Multiple recesses are linearly arranged between two adjacent first grooves in each sector area, with adjacent recesses being adjacent to each other or spaced 3 to 20 micrometers apart.

7. The bonding cleaver according to claim 6, characterized in that, The recessed portion on the end face has a shape that is one of the following: circular, elliptical, triangular, rectangular, or trapezoidal.

8. The bonding cleaver according to claim 6 or 7, characterized in that, The depth of the recess relative to the end face is 1 micrometer to 7 micrometers.

9. The bonding cleaver according to any one of claims 1-5, characterized in that, Multiple protrusions are linearly arranged between two adjacent first grooves in each sector area, with adjacent protrusions being adjacent to each other or spaced 3 to 20 micrometers apart.

10. The bonding cleaver according to claim 9, characterized in that, The protrusion is constructed in one of the following shapes: cylindrical, hemispherical, conical, arched, polygonal prism, polygonal pyramid, fan-shaped prism, or fan-shaped pyramid.

11. The bonding cleaver according to any one of claims 1-10, characterized in that, The through hole has a plurality of in-hole grooves located on the inner circumferential surface near the end face. The plurality of in-hole grooves extend from the corresponding first through groove along the inner circumferential surface of the through hole away from the end face by 1 micrometer to 10 micrometers.

12. The bonding cleaver according to claim 11, characterized in that, The depth of the plurality of grooves relative to the inner circumferential surface is 0.5 micrometers to 3 micrometers.

13. The bonding cleaver according to any one of claims 1-12, characterized in that, Each sector further includes a plurality of second grooves, which are parallel to a second edge of each sector or perpendicular to a first edge of each sector. The plurality of second grooves include at least one second through groove extending from the radially outer edge of the sector to the inner circumferential surface of the through hole.

14. The bonding cleaver according to claim 13, characterized in that, The width of the plurality of second grooves at the end face is 1 micrometer to 10 micrometers.

15. The bonding cleaver according to claim 13, characterized in that, The depth of the plurality of second grooves relative to the end face is from 1 micrometer to 7 micrometers.

16. The bonding cleaver according to any one of claims 13-15, characterized in that, The first slots are equally spaced, the second slots are equally spaced, the spacing between adjacent first slots is equal to the spacing between adjacent second slots, and / or the cross-sectional shape and size of the second slots are the same as those of the first slots.

17. The bonding cleaver according to any one of claims 13-16, characterized in that, The end face is a plane perpendicular to the central axis of the through hole, and the depth of the first groove is equal at all points along the radial direction.

18. The bonding cleaver according to any one of claims 13-16, characterized in that, The angle FA between the end face and the plane perpendicular to the central axis of the through hole is greater than 0 degrees and less than or equal to 15 degrees.

19. The bonding cleaver according to claim 18, characterized in that, The depth of the first groove and / or the second groove is equal everywhere in its longitudinal direction.

20. The bonding cleaver according to any one of claims 1-19, characterized in that, The number of sector regions is a multiple of 4.

Images