A puncture structure

Abstract

This application provides a puncture structure, belonging to the field of die bonding technology. The puncture structure provided in this application includes a needle cap, a ejector pin, a first driving mechanism, and a second driving mechanism. The needle cap is used to abut against a blue film, and has a hollow structure with a through hole at its bottom. The ejector pin is movably disposed within the hollow structure of the needle cap, and can extend through the through hole to puncture the blue film and eject the wafer from it. The first driving mechanism is connected to the needle cap and drives the needle cap to reciprocate. The second driving mechanism is connected to the ejector pin and drives the ejector pin to reciprocate.

Description

Technical Field

[0001] This application belongs to the field of die bonding technology, and more specifically, relates to a puncture structure. Background Technology

[0002] During die bonding, the die needs to be removed from the blue film to be fixed onto the substrate. Since there are a large number of chips on the blue film, these chips need to be separated to remove them for die bonding. Currently, ejector pins are generally used to push the blue film, lifting the chips and peeling them off.

[0003] When the crystal ring is mounted in an inverted configuration, the blue film needs to be positioned downwards. This mounting structure can easily cause the blue film to sag due to its own characteristics or external forces, creating a gap. Existing equipment lacks a structure specifically designed to eliminate this gap. As a result, during subsequent puncture and separation of the blue film and the wafer, the blue film is prone to shaking, which in turn causes the wafer to shift position, affecting the accuracy and success rate of puncture. Utility Model Content

[0004] The purpose of this application is to provide a puncture structure to solve the problem that the blue film sags naturally due to its own characteristics or external forces, forming gaps, which causes the blue film to shake during subsequent puncture and separation of the wafer, resulting in wafer position displacement and affecting puncture accuracy and wafer transfer success rate.

[0005] To achieve the above objectives, the technical solution adopted in this application is as follows:

[0006] This application provides a puncture structure, including a needle cap, a ejector pin, a first driving mechanism, and a second driving mechanism. The needle cap is used to abut against a blue film and has a hollow structure with a through hole at its bottom. The ejector pin is movably disposed within the hollow structure of the needle cap and can extend through the through hole to puncture the blue film and eject the wafer from it. The first driving mechanism is connected to the needle cap and drives the needle cap to reciprocate. The second driving mechanism is connected to the ejector pin and drives the ejector pin to reciprocate.

[0007] Building upon this, in this application, the needle cap is placed against the blue film, eliminating the gap caused by the blue film's droop and preventing the wafer from shifting due to the blue film's movement. The ejector pin, passing through the needle cap's through-hole, precisely pierces the blue film and ejects the wafer, ensuring targeted operation. The first and second drive mechanisms respectively drive the needle cap and ejector pin in reciprocating motion, allowing independent control of the action timing to adapt to different needs of blue film contact and wafer ejection, improving wafer transfer accuracy and efficiency. In this application, the needle cap can also have an adsorption function; after the needle cap contacts the blue film, it can hold the blue film, and then the ejector pin pierces the blue film.

[0008] In one possible design, the system further includes a fixed base, a first mounting base, a first connecting block, and a second connecting block. The first mounting base is fixedly connected to the fixed base, the first drive mechanism is disposed within the first mounting base, the first connecting block is connected to the drive end of the first drive mechanism, the second connecting block is fixedly connected to the first connecting block, and the needle cap is fixedly connected to the second connecting block.

[0009] Based on this, the fixing base provides stable support for the overall structure. The fixing base can be movable to adjust the position of the overall structure. The first mounting base fixes the first driving mechanism, ensuring driving stability. The first connecting block and the second connecting block are fixedly connected to transmit driving force, enabling the first driving mechanism to accurately drive the needle cap, avoiding the misalignment that can easily occur when the driving end is directly connected to the needle cap, ensuring accurate positioning of the needle cap when it abuts the blue film, and reducing gaps to eliminate errors.

[0010] In one possible design, a second mounting base is also included, which is fixedly connected to the fixed base. The second drive mechanism is fixedly connected to the second mounting base, and the ejector pin is connected to the drive end of the second drive mechanism.

[0011] Based on this, the second mounting base fixes the second drive mechanism, cooperating with the first mounting base to achieve separate fixation of the two drive mechanisms, realizing independent installation of the two drive mechanisms and avoiding mutual interference between them. The second drive mechanism drives the ejector pin, realizing independent drive of the ejector pin, making the ejector pin respond more quickly, ensuring that the wafer can be ejected in time after the pin cap presses against the blue film, and improving the continuity of operation.

[0012] In one possible design, a third connecting block and a reading head are also included. The third connecting block is fixedly connected to the driving end of the second driving mechanism, and one end of the ejector pin is fixedly connected to the third connecting block. A grating is provided on the side of the third connecting block, and the grating is positioned opposite the reading head. The reading head detects the displacement distance of the grating.

[0013] Based on this, the third connecting block ensures a stable connection between the ejector pin and the second drive mechanism, preventing pin wobbling. The grating, in conjunction with the reading head, can detect the ejector pin displacement distance in real time, accurately controlling the pin puncture depth. This prevents excessive puncture that could damage the wafer or insufficient puncture that would prevent ejection, providing precision feedback for the wafer ejection process and improving operational reliability.

[0014] In one possible design, the third connecting block is provided with an elastic element, one end of which is connected to the third connecting block and the other end of which is connected to the fixed base.

[0015] Based on this, the elastic element connects the third connecting block and the fixed base. When the second drive mechanism is de-energized, the elastic element prevents the moving parts, including the third connecting block and the ejector pin, from falling off, keeping them near their origin when power is off. Simultaneously, the elastic element's resetting function assists the ejector pin in quickly returning to its original position after puncture, reducing waiting time and offsetting some vibrations, ensuring smooth ejector pin movement and extending the overall structural lifespan.

[0016] In one possible design, the ejector pin is also provided with a limiting device, which includes a linear bearing and a limiting plate. The linear bearing is fixedly connected to the second connecting block, one end of the limiting plate is connected to the shaft of the linear bearing, the other end of the limiting plate is fixedly connected to the ejector pin, and the third connecting block is fixedly connected to the limiting plate.

[0017] Based on this, the linear bearing guides the movement of the ejector pin, preventing it from deviating and ensuring that it pierces the blue film along a fixed trajectory. A limiting plate connects the linear bearing shaft to the ejector pin and is fixed in conjunction with a third connecting block, allowing the ejector pin and the third connecting block to move along the linear bearing shaft. This restricts the freedom of movement of the ejector pin and the third connecting block, preventing the ejector pin from wobbling or tilting, ensuring that the ejector pin can accurately pass through the pin cap through-hole, and improving the accuracy of wafer ejection.

[0018] In one possible design, a sliding device is provided between the first connecting block and the first mounting base, with the fixed side of the sliding device fixedly connected to the first mounting base and the sliding side of the sliding device fixedly connected to the first connecting block.

[0019] Based on this, the sliding device slidably connects the first connecting block to the first mounting base, providing guidance for the movement of the needle cap and preventing it from shifting when the first connecting block moves the needle cap, ensuring that the needle cap accurately abuts the designated position on the blue film. The fixed side of the sliding device is fixedly connected to the first mounting base, and the sliding side of the sliding device is fixedly connected to the first connecting block, ensuring the sliding stability between the first connecting block and the first mounting base, reducing wobbling during the movement of the needle cap, and improving the gap elimination effect.

[0020] In one possible design, a limiting block is provided at the end of the first mounting base away from the fixed base, and part of the limiting block is located on the displacement path of the first connecting block.

[0021] Based on this, the limiting block is located on the movement path of the first connecting block, which can restrict the first connecting block from falling. When the puncture structure is in a power-off state or in a debugging state, and the position of the first connecting block needs to be manually adjusted, the movement position of the first connecting block is limited to prevent the first connecting block and other components such as the needle cap from falling excessively. The drive mechanism provides safety protection for the movement of the needle cap in the power-off state and the debugging state.

[0022] In one possible design, the sliding mechanism uses cross rails.

[0023] Based on this, the cross guide rail has good rigidity and high guiding accuracy. As a sliding device, it allows the first connecting block to slide along a precise trajectory, preventing the needle cap from deviating and ensuring accurate positioning when it abuts the blue film. The cross guide rail also has strong anti-overturning moment capability, which can withstand the lateral force during the movement of the first connecting block, reducing swaying and further improving the stability of the needle cap movement and the accuracy of gap elimination.

[0024] In one possible design, a bushing is provided between the needle cap and the second connecting block, the ejector pin passes through the bearing sleeve, a guide is provided inside the bushing, and the ejector pin is slidably connected to the guide.

[0025] Based on this, a bushing connects the needle cap and the second connecting block, enhancing the stability of their connection. The guide component slides with the ejector pin, providing secondary guidance for the ejector pin's movement. Together with other guiding structures, it further prevents the ejector pin from deviating, ensuring that the ejector pin always moves along the hollow structure and through-hole of the needle cap, accurately piercing the blue film and ejecting the wafer, thus improving operational precision. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a frontal structural diagram of a puncture structure provided in an embodiment of this application;

[0028] Figure 2 This is a schematic diagram of the bottom surface structure of a puncture structure provided in an embodiment of this application;

[0029] Figure 3 This is a schematic diagram of a puncture structure after a partial explosion, provided in an embodiment of this application.

[0030] Figure 4 This is a cross-sectional view of a puncture structure provided in an embodiment of this application.

[0031] The following are the labeling elements in the figure:

[0032] 110-Needle cap; 120-Ejector pin; 130-First drive mechanism; 140-Second drive mechanism; 150-Fixed base; 160-Limiting device; 170-Sliding device; 180-Busset; 190-Guide component;

[0033] 101-First mounting base; 102-First connecting block; 103-Second connecting block; 104-Second mounting base; 105-Third connecting block; 106-Reading head; 107-Grate; 108-Elastic element; 109-Limiting block;

[0034] 111 - Through hole;

[0035] 161 - Linear bearing; 162 - Limiting plate. Detailed Implementation

[0036] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0037] In the embodiments of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0038] It should be understood that the terminology used in the description of the various examples herein is for the purpose of describing the particular examples only and is not intended to be restrictive. As used in the description of the various examples, the singular forms “a” and “the” are intended to include the plural forms as well, unless the context explicitly indicates otherwise.

[0039] In the embodiments of this application, "at least one" means one or more, and "more than one" means two or more. "At least one of the following" or similar expressions refer to any combination of these items, including any combination of a single item or a plurality of items. For example, at least one of a, b, or c can represent: a, b, c, ab, ac, bc, or abc, where a, b, and c can be a single item or multiple items.

[0040] It should also be understood that, in this application, unless otherwise expressly specified and limited, the term "connection" should be interpreted broadly. For example, "connection" can be a fixed connection, a sliding connection, a detachable connection, or an integral part; it can be a direct connection or an indirect connection through an intermediate medium.

[0041] It should also be understood that the term “comprising” (also referred to as “includes”, “including”, “comprises” and / or “comprising”) as used in this specification specifies the presence of the stated features, integers, steps, operations, elements, and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0042] It should be understood that the terms "an embodiment," "another embodiment," and "a possible design" used throughout the specification mean that a specific feature, structure, or characteristic related to an embodiment or implementation is included in at least one embodiment of this application. Therefore, phrases such as "in one embodiment of this application," "in another embodiment of this application," and "a possible design" appearing throughout the specification do not necessarily refer to the same embodiment. Furthermore, these specific features, structures, or characteristics can be combined in any suitable manner in one or more embodiments.

[0043] To address the aforementioned technical problems, embodiments of this application provide a puncture structure. (See reference...) Figure 1 , Figure 2 , Figure 3 and Figure 4 . Figure 1 This is a front view of a puncture structure provided in an embodiment of this application. Figure 2 This is a schematic diagram of the bottom surface structure of a puncture structure provided in an embodiment of this application. Figure 3 This is a schematic diagram of a partial structure after an explosion in a puncture structure provided in an embodiment of this application. Figure 4 This is a cross-sectional view of a puncture structure provided in an embodiment of this application.

[0044] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown in the figure, this application embodiment provides a puncture structure, which includes a needle cap 110, a push pin 120, a first driving mechanism 130, and a second driving mechanism 140. The needle cap 110 is used to abut against the blue film, and has a hollow structure with a through hole 111 at its bottom. The push pin 120 is movably disposed within the hollow structure of the needle cap 110 and can extend through the through hole 111 to puncture the blue film and eject the wafer from it. The first driving mechanism 130 is connected to the needle cap 110 and drives the needle cap 110 to reciprocate. The second driving mechanism 140 is connected to the push pin 120 and drives the push pin 120 to reciprocate.

[0045] The piercing structure of this embodiment is mainly used in the process of transferring wafers from the blue film to the turret swing arm nozzle. The core structure includes a needle cap 110, a ejector pin 120, a first driving mechanism 130, and a second driving mechanism 140. The needle cap 110 can be a cap-shaped component made of metal, with a hollow structure inside and a through hole 111 machined at the center of its bottom. The inner diameter of the hollow structure must match the outer diameter of the ejector pin 120 to ensure smooth movement of the ejector pin 120 within it. The through hole 111 provides a channel for the ejector pin 120 to pass through. In actual production, the wafer ring is generally in an inverted state (blue film facing down), and the blue film will naturally droop, creating a gap. If the ejector pin 120 is used to pierce directly, the wafer position may shift due to the blue film's movement. In this embodiment, the needle cap 110 can be driven to move by the first driving mechanism 130, causing the needle cap 110 to abut against the blue film. The needle cap 110 first contacts the blue film and applies appropriate pressure, completely eliminating the gap and laying the foundation for precise operation of the ejector pin 120.

[0046] The ejector pin 120 is a high-strength metal needle, movably housed within the hollow structure of the needle cap 110. The end furthest from the through-hole 111 is connected to the second drive mechanism 140, while the end closest to the through-hole 111 is a sharp point. This sharp point design reduces resistance during blue film piercing and prevents damage to the wafer. The ejector pin 120's function is to pierce the blue film through the through-hole 111 after the needle cap 110 presses against it, ejecting a single wafer from the blue film and transferring it to the turret swing arm nozzle, thus completing the precise wafer transfer.

[0047] The first drive mechanism 130 is fixedly connected to the needle cap 110, and the second drive mechanism 140 is fixedly connected to the end of the ejector pin 120 away from the sharp end. Both mechanisms use voice coil motors. Voice coil motors have the advantages of small installation space and fast response speed, and can accurately control the stroke and force of reciprocating motion, making them suitable for compact equipment installation environments. The first drive mechanism 130 drives the needle cap 110 to reciprocate in the vertical direction, realizing the action of "approaching the blue membrane - pressing against the blue membrane - moving away from the blue membrane". The second drive mechanism 140 drives the ejector pin 120 to reciprocate in the same vertical direction, realizing the action of "retracting the hollow structure - passing through the through hole 111 - retracting".

[0048] The connection of each structure can satisfy the following action sequence: the first drive mechanism 130 first drives the needle cap 110 to descend and press against the blue film, eliminating the gap. Then, the second drive mechanism 140 drives the ejector pin 120 to descend, pierce the blue film, and eject the wafer. After the wafer transfer is completed, the ejector pin 120 retracts first, and then the needle cap 110 rises to reset. This independently driven connection method can avoid action interference and ensure that each step of the operation is precise and controllable.

[0049] In this embodiment, the hollow structure of the needle cap 110 and the through hole 111 provide initial guidance for the ejector pin 120, ensuring that the puncture direction is perpendicular to the blue diaphragm. The fast response characteristics of the voice coil motor can shorten the time interval between "needle cap 110 pressing against - ejector pin 120 puncturing", improving transfer efficiency. The design of eliminating gaps in the needle cap 110 allows the puncture force of the ejector pin 120 to be fully applied to the wafer, avoiding "empty punctures" or insufficient puncture depth, and significantly improving the wafer transfer success rate.

[0050] In this embodiment, the needle cap can also have an adsorption function. When the needle cap comes into contact with the blue film, it can hold the blue film in place, and then the needle can puncture the blue film. For example, an air hole can be provided on the needle cap, and a solenoid valve can be connected to the air hole through a pipe to adsorb the blue film onto the needle cap by vacuuming.

[0051] like Figure 2 and Figure 3 As shown, in one embodiment of this application, the puncture structure further includes a fixing seat 150, a first mounting seat 101, a first connecting block 102, and a second connecting block 103. The first mounting seat 101 is fixedly connected to the fixing seat 150, and the first driving mechanism 130 is disposed within the first mounting seat 101. The first connecting block 102 is connected to the driving end of the first driving mechanism 130, the second connecting block 103 is fixedly connected to the first connecting block 102, and the needle cap 110 is fixedly connected to the second connecting block 103. The needle cap 110 can be directly connected to or indirectly fixed to the second connecting block 103.

[0052] This application embodiment includes a fixed base 150, a first mounting base 101, a first connecting block 102, and a second connecting block 103. The installation and power transmission of the needle cap 110 are optimized through structural design, thereby improving motion stability and accuracy.

[0053] The fixing base 150 can be a metal base, serving as the mounting foundation for the entire puncture structure. All subsequent components are directly or indirectly connected to the fixing base 150. Its function is to provide a stable support reference, preventing displacement or deformation of the structure during high-frequency reciprocating motion, and ensuring that the movement trajectory of the needle cap 110 and the ejector needle 120 is always aligned with the preset positions of the blue membrane and the turret swing arm nozzle, laying the foundation for the accuracy of the overall operation. The fixing base 150 can also be moved to adjust the position of the entire puncture structure.

[0054] The first mounting base 101 is a metal frame structure that can be bolted to the top surface of the fixed base 150. During installation, the perpendicularity of the first mounting base 101 to the fixed base 150 must be ensured to prevent the pin cap 110 from shifting due to tilting. The internal space of the first mounting base 101 is adapted to the first drive mechanism 130 (voice coil motor). The first drive mechanism 130 is bolted to the inside of the mounting base. This "embedded" installation completely limits the drive mechanism, preventing radial vibration during operation and ensuring stable driving force direction (always along the vertical direction), thus fully utilizing the performance advantages of the voice coil motor.

[0055] The first connecting block 102 is a metal transition component. One side is fixedly connected to the drive end (output shaft) of the first drive mechanism 130 by bolts, and the other side is fixedly connected to the second connecting block 103 by bolts. Its function is to solve the connection and adaptation problem between the output shaft of the drive mechanism and the needle cap 110. Generally, the output shaft of the drive mechanism is usually cylindrical, and it is difficult to ensure perpendicularity when directly connected to the needle cap 110. However, the first connecting block 102 can be machined to adjust the angle of the mounting surface to ensure that the subsequent connection direction between the second connecting block 103 and the needle cap 110 is perpendicular to the blue film, thus preventing the needle cap 110 from tilting.

[0056] The second connecting block 103 can be a metal component, and its shape can be L-shaped. One side is fixed to the first connecting block 102, and the other side is fixedly connected to the top of the needle cap 110. Its function is to optimize the installation position of the needle cap 110: by adjusting the shape of the second connecting block 103, the position of the needle cap 110 in the entire puncture structure can be ensured so as to abut against the blue membrane. At the same time, it enhances the connection rigidity between the needle cap 110 and the first connecting block 102, preventing the needle cap 110 from loosening when abutting against the blue membrane, and ensuring a stable gap elimination effect.

[0057] The various structures form a stable power transmission chain: fixed base 150 - first mounting base 101 - first drive mechanism 130 - first connecting block 102 - second connecting block 103 - needle cap 110. Each stage is a rigid connection, minimizing power transmission loss and offset, ensuring that when the first drive mechanism 130 drives the output shaft, the power can be smoothly transmitted to the needle cap 110, allowing the needle cap 110 to move smoothly in the vertical direction and avoiding "jamming" or "skewness".

[0058] The rigid support of the fixed base 150 can counteract the reaction force of the drive mechanism and prevent overall vibration. The "embedded" installation of the first mounting base 101 controls the radial runout of the drive mechanism and ensures precise driving force direction. The first connecting block 102 and the second connecting block 103 can adjust the installation position of the needle cap 110, reduce the positional error of the needle cap 110, and improve the stability of gap elimination. At the same time, the modular structure facilitates maintenance, and there is no need to replace the whole unit when a component is damaged, reducing maintenance costs.

[0059] like Figure 1 , Figure 2 and Figure 3 As shown, in one embodiment of this application, the puncture structure further includes a second mounting base 104, which is fixedly connected to the fixed base 150. The second driving mechanism 140 is fixedly connected to the second mounting base 104, and the ejector pin 120 is connected to the driving end of the second driving mechanism 140.

[0060] In this embodiment, the second mounting base 104 provides an independent mounting reference for the second drive mechanism 140 (the voice coil motor that drives the ejector pin 120), avoiding mutual interference between the two drive mechanisms and ensuring precise movement of the ejector pin 120. The second mounting base 104 can be a metal bracket, made of the same material as the first mounting base 101, and is fixed to the fixing base 150 by bolts. The direction of movement of the ejector pin 120 driven by the second drive mechanism 140 is completely parallel to the direction of movement of the needle cap 110 driven by the first drive mechanism 130. The ejector pin 120 and the through hole 111 of the needle cap 110 are coaxial, so that the ejector pin 120 can accurately pass through the through hole 111 of the needle cap 110.

[0061] The second mounting base 104 is machined with mounting holes that are compatible with the second drive mechanism 140. The second drive mechanism 140 can be fixed to the second mounting base 104 with bolts. This securely fixes the second drive mechanism 140 to prevent radial offset when driving the ejector pin 120 in reciprocating motion, ensuring that the driving force is transmitted to the ejector pin 120 in the vertical direction. This fully utilizes the fast response speed of the voice coil motor, ensuring that the ejector pin 120 can respond to the puncture action promptly.

[0062] The ejector pin 120 is fixedly connected to the drive end (output shaft) of the second drive mechanism 140. It should be noted that this fixed connection includes both direct and indirect fixed connections. By adopting a fixed connection, the power of the second drive mechanism 140 can be stably transmitted to the ejector pin 120, ensuring that the ejector pin 120 can pierce the blue membrane after the needle cap 110 is pressed against it.

[0063] The fixed base 150 provides a stable reference for both the first mounting base 101 and the second mounting base 104. The second mounting base 104 independently fixes the second drive mechanism 140, preventing the vibration of the drive mechanism from being transmitted to the first mounting base 101. Conversely, this avoids motion errors caused by mutual interference of vibrations between the two drive mechanisms, ensuring that the movement trajectory of the needle cap 110 and the ejector pin 120 is precise and controllable.

[0064] In this embodiment, the independent first mounting base 101 and second mounting base 104 can solve the problem of interference between the two drive mechanisms, ensuring stable movement of both. The ejector pin 120 is fixedly connected to the second drive mechanism 140, improving the stability of the drive force transmission. The independent design of the ejector pin 120 and the second drive mechanism 140 also facilitates maintenance. When replacing the ejector pin 120 or the second drive mechanism 140, it is not necessary to disassemble the components on the first mounting base 101, improving maintenance efficiency and ensuring consistent and precise overall operation.

[0065] like Figure 1 and Figure 2 As shown, in one embodiment of this application, the puncture structure further includes a third connecting block 105 and a reading head 106. The third connecting block 105 is fixedly connected to the driving end of the second driving mechanism 140. One end of the ejector pin 120 is fixedly connected to the third connecting block 105. A grating 107 is provided on the side of the third connecting block 105. The grating 107 and the reading head 106 are arranged opposite each other. The reading head 106 detects the displacement distance of the grating 107.

[0066] The third connecting block 105 and the reading head 106 in this embodiment can detect the displacement distance of the ejector pin 120 and control the puncture depth of the ejector pin 120 through displacement detection feedback, so as to avoid the ejector pin 120 being too deep and hitting the suction nozzle or too shallow and failing to eject the wafer.

[0067] The third connecting block 105 can be a metal component, with one side fixedly connected to the drive end of the second drive mechanism 140 by bolts, and the other side fixedly connected to the end of the ejector pin 120 away from the sharp end. Since the ejector pin 120 has a small diameter, it is difficult to directly fix the grating 107. The third connecting block 105 can provide a mounting carrier for the grating 107. The third connecting block 105 can be pre-machined with a reserved mounting position to ensure the stable fixing of the grating 107. The third connecting block 105 can ensure that the ejector pin 120 and the grating 107 move synchronously, making the displacement of the grating 107 completely equal to the displacement of the ejector pin 120, avoiding detection errors, and ensuring that the displacement data acquired by the reading head 106 accurately reflects the position of the ejector pin 120.

[0068] The grating 107 is a high-precision displacement detection component, which is fixed on the side of the third connecting block 105 by bolts or bonding, and its length covers the maximum piercing stroke of the thimble 120. Its function is to convert the mechanical displacement of the thimble 120 into an identifiable scale signal, provide a detection reference for the reading head 106, and ensure that the reading head 106 can continuously obtain the movement information of the thimble 120 without detection blind spots. The reading head 106 is a detection device matching the grating 107, which is fixed on the fixed seat 150 or the second mounting seat 104 through a bracket, and the detection end is facing the surface of the grating 107, and a reasonable gap is maintained between the two (to avoid signal loss or friction). Its function is to read the scale information of the grating 107 in real time, convert the mechanical displacement into an electrical signal and transmit it to the control system. The control system calculates the real-time position of the thimble 120 according to the signal, and then controls the start and stop of the second driving mechanism 140 to achieve precise control of the piercing depth. For example, when the thimble 120 approaches the suction nozzle, it decelerates in advance to avoid impact.

[0069] The connection of each structure needs to ensure synchronous movement and precise detection. Among them, the second driving mechanism 140, the third connecting block 105 and the thimble 120 reciprocate synchronously, and the grating 107 moves synchronously with the third connecting block 105. The reading head 106 is fixed and continuously detects the displacement of the grating 107. This connection can eliminate detection lag. The grating 107 and the thimble 120 move synchronously, and the data of the reading head 106 is the actual displacement of the thimble 120. The control system can adjust the output of the driving mechanism in real time to ensure precise piercing depth.

[0070] In this embodiment, the grating 107 and the reading head 106 can achieve "closed-loop control" of the displacement of the thimble 120, greatly reducing the piercing depth error and meeting the wafer transfer accuracy requirements. The third connecting block 105 ensures synchronous movement, avoids detection errors, and prevents impact or ejection failure. The reading head 106 can also identify abnormalities by real-time feedback of the displacement of the thimble 120. When the thimble 120 encounters resistance and its displacement stagnates, the control system can immediately stop the machine and alarm, avoiding bending of the thimble 120 or overload of the driving mechanism, and improving the safety of the equipment.

[0071] As Figures 1 to 4 shown, in an embodiment of the present application, an elastic member 108 is provided on the third connecting block 105. One end of the elastic member 108 is connected to the third connecting block 105, and the other end of the elastic member 108 is connected to the fixed seat 150.

[0072] [[ID=~14]]In the embodiment of the present application, by providing the elastic member 108 to connect the third connecting block 105 and the fixed seat 150, it provides buffering and reset assistance for the movement of the thimble 120 and adapts to the requirements of high-frequency operations.

[0073] The elastic element 108 can be a compression spring, which has good elastic restoring force and fatigue resistance. Its axis is consistent with the movement direction of the ejector pin 120 to avoid lateral force causing the ejector pin 120 to deviate. One end of the elastic element 108 is fixed to the third connecting block 105 through a connector (such as a spring seat), and the other end is fixed to the fixed base 150 through a connector. It is in a slightly pre-tightened state during installation to ensure that it can provide continuous auxiliary force during movement.

[0074] The working mechanism of the elastic element 108 is matched with the movement sequence of the ejector pin 120: when the ejector pin 120 descends for puncture, the third connecting block 105 descends synchronously, and the elastic element 108 is stretched, generating a buffering force opposite to the movement direction of the ejector pin 120, offsetting part of the puncture impact force and preventing the ejector pin 120 from bending or breaking due to excessive instantaneous force (such as increased toughness of the blue membrane). When the ejector pin 120 rises to reset, the elastic element 108 releases its tension, generating a tensile force to assist the ejector pin 120 in rising, reducing the load on the second drive mechanism 140 and shortening the reset time. When the drive mechanism is powered off or malfunctions, the reset spring force of the elastic element 108 drives the ejector pin 120 back to its initial position, preventing the ejector pin 120 from remaining below the blue membrane and obstructing subsequent operations.

[0075] The elastic element 108 connects only the third connecting block 105 and the fixed seat 150, and does not contact the second mounting seat 104, the ejector pin 120, etc., to avoid friction or vibration transmission. The connection position of the elastic element 108 on the third connecting block 105 is staggered from the connection positions of the ejector pin 120 and the drive mechanism to ensure that the bolt fixing does not interfere and to ensure the stable connection of each component.

[0076] In addition, the elastic element 108 can be a disc spring, which has a small axial dimension, making it suitable for space-constrained scenarios, and provides greater cushioning force, adapting to thick blue film puncture, and offering a longer fatigue life. The connection between the elastic element 108 and the connecting block and fixing base 150 can be hook-type, with hook holes machined on both. The hooks at both ends of the elastic element 108 can be directly hooked in, eliminating the need for connecting parts, making installation convenient, and facilitating the replacement of elastic elements 108 with different elastic forces to adapt to different blue film thicknesses.

[0077] The buffering effect of the elastic element 108 helps reduce the risk of impact damage to the ejector pin 120 and extends its service life. Assisted reset improves equipment efficiency, reduces power consumption of the drive mechanism, shortens reset time, and increases production capacity in high-frequency scenarios. When the second drive mechanism is de-energized, the elastic element prevents the moving parts, including the third connecting block and the ejector pin, from falling, keeping them near their origin during power failure. The fault reset function enhances safety, preventing malfunctions caused by the ejector pin 120 falling. Furthermore, the preload eliminates gaps between the ejector pin 120 and the connecting block and drive mechanism, ensuring "no backlash" and further improving puncture accuracy.

[0078] like Figure 1 and Figure 3As shown in one embodiment of this application, a limiting device 160 is also provided on the ejector pin 120. The limiting device 160 includes a linear bearing 161 and a limiting plate 162. The linear bearing 161 is fixedly connected to the second connecting block 103. One end of the limiting plate 162 is connected to the shaft of the linear bearing 161, and the other end of the limiting plate 162 is fixedly connected to the ejector pin 120. The third connecting block 105 is fixedly connected to the limiting plate 162.

[0079] In this embodiment, a limiting device 160 (including a linear bearing 161 and a limiting plate 162) is provided. Through multi-directional limiting and guiding, the radial offset problem of the ejector pin 120 is solved, ensuring that the ejector pin 120 moves along the axis of the through hole 111 of the needle cap 110.

[0080] Linear bearing 161 is a compact linear bearing, fixed to the side of the second connecting block 103 by bolts. The second connecting block 103 needs to be machined with a flat mounting surface to ensure that the axis of linear bearing 161 is parallel to the direction of movement (vertical direction) of ejector pin 120. The main function of linear bearing 161 is to provide guidance for the limiting plate 162, restricting the limiting plate 162 to move only in the vertical direction to avoid horizontal deviation, and providing a stable reference for the movement of ejector pin 120 to prevent ejector pin 120 from deviating from the preset trajectory.

[0081] The limiting plate 162 can be made of metal, balancing lightweight and rigidity. One end is machined with a hole that matches the shaft of the linear bearing 161, allowing it to be fixed to the bearing shaft via an interference fit, ensuring synchronous movement without relative slippage. The other end can also be fixedly connected to the middle of the ejector pin 120 via an interference fit, ensuring a tight and rigid connection. Its function is to provide "central support" for the ejector pin 120, preventing it from sagging or bending due to its length. At the same time, the third connecting block 105 (connecting the second drive mechanism 140 and the ejector pin 120) is also fixed to the side of the limiting plate 162 with bolts, forming a "rigid whole" that moves synchronously along the guide of the linear bearing 161.

[0082] The working mechanism of the limiting device 160 is coordinated with the movement of the ejector pin 120: When the second drive mechanism 140 drives the third connecting block 105, the third connecting block 105 drives the limiting plate 162. The limiting plate 162 slides vertically under the guidance of the linear bearing 161, simultaneously driving the ejector pin 120 to move synchronously. The linear bearing 161 restricts the horizontal degree of freedom of the limiting plate 162, so that the ejector pin 120 only moves in the vertical direction without left-right or front-back offset. The central support offsets part of the weight of the ejector pin 120, preventing sagging and trajectory deviation, and ensuring that the ejector pin 120 is always aligned with the through hole 111 of the needle cap 110.

[0083] It should be noted that the linear bearing 161 in this embodiment can be replaced with other components with similar functions. For example, a crossed roller linear bearing 161 can be used, which has higher rigidity and stronger resistance to overturning moment. When the ejector pin 120 is subjected to lateral force during puncture, it can better limit the displacement of the limiting plate 162 and ensure stable movement. The connection between the limiting plate 162 and the ejector pin 120 can be a clamp type. Two semi-circular clamps clamp the ejector pin 120 and then fix it with bolts. One side of the clamp is connected to the limiting plate 162, which can be adapted to standardized ejector pins 120. Moreover, the elasticity of the clamp can absorb the small deformation of the ejector pin 120 and avoid damage from hard connection.

[0084] In this embodiment, the guiding function of the limiting device 160 controls the radial offset error of the ejector pin 120 to a very small range, ensuring that the ejector pin 120 is coaxial with the through hole 111, and avoiding friction-induced debris contamination of the wafer or jamming of the ejector pin 120. The central support formed by the limiting device 160 can solve the problem of ejector pin 120 sagging and ensure consistent movement trajectory. The synchronous connection between the limiting device 160 and the third connecting block 105 avoids "motion lag" and ensures displacement detection accuracy. In addition, the limiting device 160 disperses the force on the ejector pin 120 and transmits the lateral force to the bearing and the fixed seat 150, avoiding force concentration at the connection part of the drive mechanism and extending the life of the drive mechanism.

[0085] like Figure 1 and Figure 3 As shown, in one embodiment of this application, a sliding device 170 is provided between the first connecting block 102 and the first mounting base 101. The fixed side of the sliding device 170 is fixedly connected to the first mounting base 101, and the sliding side of the sliding device 170 is fixedly connected to the first connecting block 102.

[0086] In this embodiment, the sliding device 170 is disposed between the first connecting block 102 and the first mounting base 101 to provide precise guidance for the first connecting block 102 (which drives the needle cap 110 to move) and prevent the needle cap 110 from deviating from its trajectory.

[0087] The sliding device 170 consists of a fixed side and a sliding side. The fixed side is bolted to the inner wall of the first mounting base 101. The first mounting base 101 is a U-shaped frame, and its inner wall needs to be precision machined to ensure accurate mounting reference for the fixed side. The fixed side provides a stable movement track for the sliding side. The sliding side is bolted to the side of the first connecting block 102. The side of the first connecting block 102 needs to be machined flat to ensure a high degree of fit with the sliding side and prevent sliding jamming. The sliding side drives the first connecting block 102 to move along the track on the fixed side.

[0088] The sliding device 170 restricts the movement trajectory of the first connecting block 102: it only allows reciprocating motion in the vertical direction (up and down direction of the needle cap 110), and prohibits horizontal offset or rotation. The driving force of the first drive mechanism 130 (voice coil motor) is mainly in the vertical direction, but due to processing errors, there may be a small radial component force. Without the sliding device 170, the radial component force would cause the first connecting block 102 to drive the needle cap 110 to offset, failing to accurately abut against the blue film. The sliding device 170 has a very small clearance, which can completely cancel out the radial component force, ensuring that the first connecting block 102 moves along a fixed trajectory.

[0089] The first drive mechanism 130 provides power, and the sliding device 170 provides guidance. The two work together to ensure the movement accuracy of the needle cap 110. At the same time, the sliding device 170 needs to be symmetrically arranged on the two inner side walls of the first mounting base 101, corresponding to both sides of the first connecting block 102, so that the connecting block is subjected to uniform force and to avoid excessive wear of the sliding device 170 on one side.

[0090] The guiding function of the sliding device 170 controls the trajectory error of the needle cap 110 to a minimum, ensuring that the position deviation of each contact with the blue film meets the requirements and the gap elimination effect is stable. The trajectory limiting function protects the first drive mechanism 130, preventing radial force from causing output shaft bending or coil wear, thus extending the life of the first drive mechanism 130. The symmetrical arrangement improves the smoothness of movement, prevents the connecting block from tilting, and ensures uniform contact pressure of the needle cap 110, preventing blue film breakage or chip damage. In addition, the low friction characteristics ensure smooth movement of the first connecting block 102 without jamming, and even if the needle cap 110 descends slowly, the speed can be precisely controlled to avoid impacting the blue film.

[0091] like Figures 2 to 4 As shown, in one embodiment of this application, a limiting block 109 is provided at the end of the first mounting base 101 away from the fixed base 150, and part of the structure of the limiting block 109 is located on the displacement path of the first connecting block 102.

[0092] The limiting block 109 is located at the end of the first mounting base 101 away from the fixed base 150. It limits the first connecting block 102 from falling by mechanical means, so as to prevent the needle cap 110 from falling too far and damaging the blue film or the chip.

[0093] The limiting block 109 can be made of metal and fixed to the end of the first mounting base 101 away from the fixed base 150 (e.g., the bottom of the mounting base) by bolts. The first connecting block 102 does not contact the limiting block 109 when sliding upwards during its normal working stroke (needle cap 110 moving away from the blue film), nor does it contact the limiting block 109 when sliding downwards during its normal working stroke (needle cap 110 moving closer to the blue film) to its maximum distance. When the puncture structure is in a power-off state or in a debugging state, if the first connecting block 102 falls and its displacement distance exceeds the maximum value of its normal working stroke, the first connecting block 102 falls and abuts against the limiting block 109, preventing the first connecting block 102 from continuing to descend.

[0094] In this embodiment, the limiting block is located on the movement path of the first connecting block, preventing it from falling when the power is off or during manual adjustment. When the puncture structure is in a power-off state or in a debugging state, it may be necessary to manually adjust the position of the first connecting block. Setting the limiting block on the movement path of the first connecting block limits its fall position, preventing the first connecting block and other components such as the needle cap from falling and damaging the blue film or wafer. Driving mechanism

[0095] In one embodiment of this application, the sliding device 170 employs a cross guide rail.

[0096] The cross-rail is a miniature cross-roller guide rail, comprising a guide rail track (fixed side), a slider (sliding side), cross-arranged rollers, and a cage. The guide rail track (fixed side) is bolted to the inner wall of the first mounting base 101, and the slider (sliding side) is bolted to the side of the first connecting block 102. The rollers are arranged at 90° angles, forming line contact with the V-shaped raceways of the guide rail track and slider. This structure gives the guide rail extremely high rigidity and can withstand multi-directional loads such as radial, axial, and overturning moments, making it suitable for complex stress scenarios when the needle cap 110 abuts against the blue film.

[0097] The core function of the cross guide rail is to provide high-precision, high-rigidity guidance for the first connecting block 102. On one hand, the clearance between the roller and the V-shaped raceway is extremely small, ensuring the accuracy of the slider's linear movement along the track, limiting the radial offset error of the connecting block, and ensuring that the needle cap 110 abuts against the blue film in the vertical direction. On the other hand, the line contact bearing method can withstand the overturning moment when the connecting block moves (such as the moment generated by the reaction force of the blue film when the needle cap 110 abuts against the blue film), preventing the connecting block from tilting and ensuring that the abutting pressure of the needle cap 110 is evenly distributed.

[0098] The high rigidity of the cross guide rail enhances the contact stability of the needle cap 110, resists overturning moments, minimizes the tilt angle of the connecting block, ensures uniform pressure distribution, and prevents localized deformation of the blue diaphragm. High-precision guidance ensures consistent needle cap 110 trajectory, maintaining minimal positional deviation even after multiple movements, and providing stable gap elimination. Multi-directional load resistance protects the first drive mechanism 130, preventing radial force and torque from being transmitted to the output shaft, thus reducing the drive mechanism's failure rate. Furthermore, the modular design of the cross guide rail facilitates maintenance; it can be directly replaced when worn, and its length is customizable to adapt to different puncture structure specifications.

[0099] like Figures 1 to 4 As shown, in one embodiment of this application, a bushing 180 is provided between the needle cap 110 and the second connecting block 103, the ejector pin 120 passes through the bearing sleeve, a guide 190 is provided inside the bushing 180, and the ejector pin 120 is slidably connected to the guide 190.

[0100] The bushing 180 is positioned between the needle cap 110 and the second connecting block 103. A guide 190 is provided inside the bushing 180. Through double guidance and rigid connection, the coaxiality of the needle cap 110 and the ejector pin 120 is improved, ensuring that the ejector pin 120 can accurately puncture.

[0101] The bushing 180 can be made of metal, with its outer diameter having an interference fit with the mounting hole (bottom circular hole) of the second connecting block 103, and its inner diameter having a transition fit with the top outer diameter of the needle cap 110. The interference fit ensures that there is no relative movement between the bushing 180 and the second connecting block 103, preventing the needle cap 110 from shifting due to loosening of the bushing 180. The transition fit facilitates the installation and removal of the needle cap 110, allowing for quick replacement when the needle cap 110 wears out. The bushing 180 primarily connects the needle cap 110 and the second connecting block 103, improving the coaxiality and rigidity of their connection.

[0102] The inner diameter of the guide 190 is clearance-fitted with the outer diameter of the ejector pin 120, while its outer diameter is interference-fitted with the inner diameter of the bushing 180, ensuring no relative movement between the guide 190 and the bushing 180. The length of the guide 190 can be the same as that of the bushing 180, and the ejector pin 120 passes through the central hole to form a sliding connection. Its function is to provide "secondary guidance" for the ejector pin 120: the ejector pin 120 has already been guided once by the needle cap 110 within the hollow structure of the needle cap 110, and the guide 190 can further limit the radial displacement of the ejector pin 120, ensuring that the ejector pin 120 is always coaxial with the through hole 111 of the needle cap 110, avoiding friction with the inner wall of the through hole 111 during puncture.

[0103] In this embodiment, the bushing 180 improves the connection stability between the needle cap 110 and the connecting block, preventing positional deviations caused by loosening and ensuring gap elimination. The secondary guiding function of the guide member 190 controls the coaxiality error of the ejector pin 120, reducing puncture friction resistance, preventing wear between the ejector pin 120 and the through hole 111, and extending the lifespan of the ejector pin 120. Furthermore, the transition fit of the bushing 180 facilitates needle cap 110 replacement, reducing maintenance time. The modular design allows for replacement of parts according to the diameter of the ejector pin 120, improving equipment versatility.

[0104] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application.

[0105] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0106] Although preferred embodiments of the present application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the scope of protection of this application includes the preferred embodiments as well as all changes and modifications falling within the scope of the embodiments of this application.

[0107] This document uses specific examples to illustrate the working principle and implementation method of the puncture structure of this application. The description of the above embodiments is only for the purpose of helping to understand the specific settings and core ideas of this application. At the same time, for those skilled in the art, there will be changes in the specific implementation method and application scope based on the ideas of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

[0108] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A puncture structure, characterized in that, include: A needle cap is used to abut against the blue film. The needle cap has a hollow structure and a through hole is provided at the bottom of the needle cap. The ejector pin is movably disposed within the hollow structure of the needle cap and can pass through the through hole to pierce the blue film and eject the wafer on the blue film. The first driving mechanism is connected to the needle cap and drives the needle cap to reciprocate. The second drive mechanism is connected to the ejector pin and drives the ejector pin to reciprocate.

2. The puncture structure as described in claim 1, characterized in that, It also includes a fixed base, a first mounting base, a first connecting block, and a second connecting block; The first mounting base is fixedly connected to the fixed base, the first driving mechanism is disposed in the first mounting base, the first connecting block is connected to the driving end of the first driving mechanism, the second connecting block is fixedly connected to the first connecting block, and the needle cap is fixedly connected to the second connecting block.

3. The puncture structure as described in claim 2, characterized in that, It also includes a second mounting base, which is fixedly connected to the fixed base, and a second drive mechanism is fixedly connected to the second mounting base. The ejector pin is connected to the drive end of the second drive mechanism.

4. The puncture structure as described in claim 3, characterized in that, It also includes a third connecting block and a reading head. The third connecting block is fixedly connected to the driving end of the second driving mechanism. One end of the pin is fixedly connected to the third connecting block. A grating is provided on the side of the third connecting block. The grating is positioned opposite the reading head. The reading head detects the displacement distance of the grating.

5. The puncture structure as described in claim 4, characterized in that, An elastic element is provided on the third connecting block. One end of the elastic element is connected to the third connecting block, and the other end of the elastic element is connected to the fixed base.

6. The puncture structure as described in claim 4 or 5, characterized in that, The ejector pin is also provided with a limiting device, which includes a linear bearing and a limiting plate. The linear bearing is fixedly connected to the second connecting block. One end of the limiting plate is connected to the shaft of the linear bearing, and the other end of the limiting plate is fixedly connected to the ejector pin. The third connecting block is fixedly connected to the limiting plate.

7. The puncture structure as described in claim 2, characterized in that, A sliding device is provided between the first connecting block and the first mounting base. The fixed side of the sliding device is fixedly connected to the first mounting base, and the sliding side of the sliding device is fixedly connected to the first connecting block.

8. The puncture structure as described in claim 7, characterized in that, A limiting block is provided at the end of the first mounting base away from the fixed base, and part of the structure of the limiting block is located on the displacement path of the first connecting block.

9. The puncture structure as described in claim 7 or 8, characterized in that, The sliding device uses cross rails.

10. The puncture structure as described in claim 2, characterized in that, A bushing is provided between the needle cap and the second connecting block. The ejector pin passes through the bearing sleeve. A guide is provided inside the bushing. The ejector pin is slidably connected to the guide.

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