A clamp for clamping a uniform air plate

Abstract

This utility model relates to the field of semiconductor fabrication technology and discloses a clamp for holding a gas equalization plate. The clamp includes a first clamping plate, a second clamping plate, and a hanging rod. The first and second clamping plates are connected by a clamping member. The first clamping plate has a first groove, and the second clamping plate has a second groove. The first and second grooves are opposite to each other. When the first and second clamping plates are clamped, the first and second grooves form a locking groove, and the gas equalization plate can be at least partially locked within the locking groove. The hanging rod is connected to either the first or second clamping plate. This utility model provides a clamp for holding a gas equalization plate. During use, the gas equalization plate can be vertically placed in a liquid containing ions for coating. The hanging rod is fixed to the outside of the ionic liquid. After coating is completed, the operator can directly remove the gas equalization plate using the hanging rod, facilitating operation.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor fabrication technology, and in particular to a clamp for holding a gas equalization plate. Background Technology

[0002] A gas equalization plate, used in semiconductor processing, is designed to uniformly deliver high-purity inert gas into the processing chamber, ensuring a stable gas environment and product quality during processing. During production, the equalization plate needs to be vertically placed in an ion-containing liquid for treatment to form a protective film on its surface. Currently, there are no suitable fixtures in production that allow the equalization plate to be placed vertically in the ion-containing liquid and easily removed, making it inconvenient for operators.

[0003] Therefore, there is an urgent need for a clamp for holding the gas equalization disc to solve the above-mentioned technical problems. Utility Model Content

[0004] The purpose of this invention is to provide a clamp for holding a gas equalization plate, which can solve the problem in current production where there is no suitable clamp that can vertically place the gas equalization plate in a liquid containing ions and facilitate the removal of the gas equalization plate from the liquid containing ions, making it inconvenient for operators to operate.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A clamp for holding an air distribution plate includes a first clamping plate, a second clamping plate, and a hanging rod. The first clamping plate and the second clamping plate are connected by a clamping member. The first clamping plate has a first groove, and the second clamping plate has a second groove. The first groove and the second groove are arranged opposite to each other. When the first clamping plate and the second clamping plate are in a clamped state, the first groove and the second groove form a locking groove, and the air distribution plate can be at least partially locked in the locking groove. The hanging rod is connected to the first clamping plate or the second clamping plate.

[0007] As an alternative, the first groove is adjacent to the side of the first clamping plate, and the second groove is adjacent to the side of the second clamping plate.

[0008] As an alternative, the sidewall of the first groove is arc-shaped, and / or the sidewall of the second groove is arc-shaped.

[0009] As an alternative, the first clamping plate is provided with a first threaded hole, the second clamping plate is provided with a second threaded hole, the first threaded hole and the second threaded hole correspond to each other, and the clamping member is a bolt, the bolt being at least partially inserted into the first threaded hole and the second thread.

[0010] As an alternative, the hanging rod includes a plating tube and a plating rod connected to the plating tube. The plating tube is provided with a connecting part, which is at least partially flat. The lower end of the plating rod is connected to the connecting part.

[0011] As an optional solution, the upper end of the plating rod is provided with a U-shaped hook.

[0012] As an alternative, the first clamping plate has a connecting pipe on the surface opposite to the first groove, or the second clamping plate has a connecting pipe on the surface opposite to the second groove, and the plating tube is connected to the connecting pipe.

[0013] As an alternative, the inner diameter of the connecting pipe is equal to the outer diameter of the plating tube, and the lower end of the plating tube passes through the connecting pipe.

[0014] As an optional solution, the first clamping plate, the second clamping plate, the hanging rod, the clamping component, and the connecting pipe are all made of titanium.

[0015] This utility model has at least the following beneficial effects:

[0016] This utility model provides a clamp for holding a gas equalization plate. During use, the gas equalization plate can be placed vertically in a liquid containing ions for coating. The hanging rod is fixed to the outside of the ionic liquid. After the coating is completed, the operator can directly remove the gas equalization plate through the hanging rod, which is convenient for the operator. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model, the accompanying drawings used in the description of the embodiments of this utility model will be briefly introduced below.

[0018] Figure 1 A schematic diagram of the first angle structure of a clamp for holding a gas equalization disk provided in an embodiment of this utility model;

[0019] Figure 2 A schematic diagram of the second angle structure of a clamp for holding a gas equalization disk provided in an embodiment of this utility model;

[0020] Figure 3 A schematic diagram of the structure of the first clamping plate provided in this embodiment of the utility model;

[0021] Figure 4 This is a schematic diagram of a clamp for holding an air distribution plate, provided as an embodiment of the present invention, in the state of holding the air distribution plate.

[0022] Figure label:

[0023] 1. First clamping plate; 11. First groove; 12. First threaded hole; 2. Second clamping plate; 21. Second groove; 3. Hanging rod; 31. Plating tube; 311. Connecting part; 32. Plating rod; 321. U-shaped hook; 4. Fastening part; 5. Connecting pipe; 6. Air distribution plate. Detailed Implementation

[0024] In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit the scope of this utility model.

[0025] In the existing technology, during the production of the gas equalization plate, it is necessary to place the gas equalization plate vertically in a liquid containing ions for treatment so that a protective film is formed on the surface of the gas equalization plate. However, there is no suitable clamp that can place the gas equalization plate vertically in the liquid containing ions and make it easy to remove the gas equalization plate from the liquid containing ions, which is inconvenient for operators.

[0026] Therefore, such as Figures 1 to 4 As shown in the figure, an embodiment of the present invention provides a clamp for holding an air distribution plate to solve the above-mentioned technical problems.

[0027] Specifically, a clamp for holding a gas equalization disc includes a first clamping plate 1, a second clamping plate 2, and a hanging rod 3. The first clamping plate 1 and the second clamping plate 2 are connected by a clamping member 4. The first clamping plate 1 has a first groove 11, and the second clamping plate 2 has a second groove 21. The first groove 11 and the second groove 21 are arranged opposite to each other. When the first clamping plate 1 and the second clamping plate 2 are in a clamped state, the first groove 11 and the second groove 21 form a snap-fit ​​groove, and the gas equalization disc 6 can be at least partially snapped into the snap-fit ​​groove. The hanging rod 3 is connected to the first clamping plate 1 or the second clamping plate 2. In this way, when producing the gas equalization disc 6, the clamp for holding the gas equalization disc of this application can be used to vertically place the gas equalization disc 6 in a liquid containing ions for coating. The hanging rod 3 is fixed to the outside of the ionic liquid. After the coating is completed, the operator can directly remove the gas equalization disc 6 through the hanging rod 3, which facilitates the operation of the operator.

[0028] In some embodiments, to facilitate the operator's gripping of the air distribution plate 6, the first groove 11 is adjacent to the side of the first clamping plate 1, and the second groove 21 is adjacent to the side of the second clamping plate 2.

[0029] In some embodiments, the sidewall of the first groove 11 is arc-shaped, or the sidewall of the first groove 11 is arc-shaped. Of course, both the sidewall of the first groove 11 and the sidewall of the second groove 21 can be arc-shaped. Generally, the air distribution plate 6 is circular. Setting the sidewall of the first groove 11 and the sidewall of the second groove 21 to be arc-shaped can match the air distribution plate 6, making it convenient to snap the air distribution plate 6 into the slot.

[0030] In some embodiments, in order to reduce the manufacturing cost of the fixture for holding the air distribution plate of this application, the clamping member 4 is preferably a bolt. The first clamping plate 1 is provided with a first threaded hole 12, and the second clamping plate 2 is provided with a second threaded hole. The first threaded hole 12 and the second threaded hole correspond to each other. The bolt is at least partially inserted into the first threaded hole 12 and the second thread. This allows the distance between the first clamping plate 1 and the second clamping plate 2 to be adjusted by the bolt, thereby facilitating the air distribution plate 6 to be engaged in the engagement groove or to be removed from the engagement groove.

[0031] In some embodiments, to facilitate the manufacture of the hanging rod 3, the hanging rod 3 includes a plating tube 31 and a plating rod 32 connected to the plating tube 31. The plating tube 31 is provided with a connecting part 311, which is at least partially flat. The lower end of the plating rod 32 is fixed to the connecting part 311.

[0032] In some embodiments, in order to facilitate fixing the hanging rod 3 to the outside of the ionic liquid, the upper end of the plating rod 32 is provided with a U-shaped hook 321.

[0033] In some embodiments, the first clamping plate 1 is provided with a connecting pipe 5 on the surface opposite to the first groove 11, or the second clamping plate 2 is provided with a connecting pipe 5 on the surface opposite to the second groove 21. The plating tube 31 is welded together with the connecting pipe 5. The inner diameter of the connecting pipe 5 is equal to the outer diameter of the plating tube 31. The lower end of the plating tube 31 is inserted into the connecting pipe 5, which facilitates the connection between the plating tube 31 and the first clamping plate 1 and the second clamping plate 2.

[0034] In some embodiments, to prevent the clamp for holding the gas equalization plate from contaminating the ionic liquid during use, the first clamping plate 1, the second clamping plate 2, the hanging rod 3, the clamping member 4, and the connecting pipe 5 are all made of titanium.

[0035] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A clamp for holding a gas equalization disc, characterized in that, It includes a first clamping plate (1), a second clamping plate (2), and a hanging rod (3); the first clamping plate (1) and the second clamping plate (2) are connected by a clamping member (4), the first clamping plate (1) is provided with a first groove (11), the second clamping plate (2) is provided with a second groove (21), the first groove (11) and the second groove (21) are arranged opposite to each other, when the first clamping plate (1) and the second clamping plate (2) are in a clamping state, the first groove (11) and the second groove (21) form a snap-fit ​​groove, and the air distribution plate (6) can at least partially snap into the snap-fit ​​groove; the hanging rod (3) is connected to the first clamping plate (1) or the second clamping plate (2).

2. The clamp for holding a gas equalization disc according to claim 1, characterized in that, The first groove (11) is adjacent to the side of the first clamping plate (1), and the second groove (21) is adjacent to the side of the second clamping plate (2).

3. A clamp for holding a gas equalization disc according to claim 2, characterized in that, The sidewall of the first groove (11) is arc-shaped, and / or the sidewall of the second groove (21) is arc-shaped.

4. A clamp for holding a gas equalization disc according to claim 1, characterized in that, The first clamping plate (1) is provided with a first threaded hole (12), and the second clamping plate (2) is provided with a second threaded hole. The first threaded hole (12) corresponds to the second threaded hole. The clamping member (4) is a bolt, and the bolt is at least partially inserted into the first threaded hole (12) and the second thread.

5. A clamp for holding a gas equalization disc according to any one of claims 1 to 4, characterized in that, The hanging rod (3) includes a plating tube (31) and a plating rod (32) connected to the plating tube (31). The plating tube (31) is provided with a connecting part (311), which is at least partially flat. The lower end of the plating rod (32) is connected to the connecting part (311).

6. A clamp for holding a gas equalization disc according to claim 5, characterized in that, The upper end of the plating rod (32) is provided with a U-shaped hook (321).

7. A clamp for holding a gas equalization disc according to claim 5, characterized in that, The first clamping plate (1) has a connecting pipe (5) on the surface opposite to the first groove (11), or the second clamping plate (2) has a connecting pipe (5) on the surface opposite to the second groove (21), and the plating tube (31) is connected to the connecting pipe (5).

8. A clamp for holding a gas equalization disc according to claim 7, characterized in that, The inner diameter of the connector (5) is equal to the outer diameter of the plating tube (31), and the lower end of the plating tube (31) passes through the connector (5).

9. A clamp for holding a gas equalization disc according to claim 5, characterized in that, The first clamping plate (1), the second clamping plate (2), the hanging rod (3), the clamping part (4) and the connecting pipe (5) are all made of titanium.

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