A device for checking the cutting of silicon wafers

Abstract

This utility model belongs to the technical field of photovoltaic industry and discloses a feeding device that also inspects silicon wafers. It includes a feeding frame, with a feeding robot and a vision camera group for inspecting silicon wafers mounted on the upper part of the feeding frame. The vision camera group is located at the front end of the feeding robot. A bottom support plate is mounted on the bottom of the feeding frame, and a waste removal conveyor roller, a positioning conveyor roller, and a gripping conveyor roller are sequentially arranged on the bottom support plate. A buffer box is located at the end of the gripping conveyor roller, and a sorting machine conveyor roller is located on the adjacent side of the gripping conveyor roller. A waste removal and lowering drive assembly is located below the waste removal conveyor roller to tilt the waste removal conveyor roller downwards, allowing unqualified silicon wafers to enter the waste box. The waste box is also equipped at the front end of the waste removal and lowering drive assembly.

Description

Technical Field

[0001] This utility model belongs to the technical field of the photovoltaic industry, and relates to a feeding device that also serves as an inspection device for silicon wafers. Background Technology

[0002] In the current silicon wafer unloading process, when cleaned silicon wafers need to be transferred to another process, the common unloading method is to use a combination of gantry and gripper for handling. This method has the following problems: the work cycle is slow, which cannot meet the needs of large-scale silicon wafer turnover. Furthermore, if fragments from the silicon wafers coming from the previous process are handled by gripper during transfer, it increases the normal work cycle and slows down the work efficiency. A separate fragment box needs to be set up on the side, increasing the footprint. The overall work line is also messy. If the fragments are not handled and allowed to flow on the roller conveyor, it will affect the flow of subsequent roller conveyors, and additional manual operation, maintenance, and sorting are required. This increases labor and maintenance costs. Utility Model Content

[0003] To overcome the shortcomings of existing technologies, this utility model provides a feeding device that also inspects silicon wafers. Through its simple structure, it achieves precise removal of fragments without the need for manual intervention, machine downtime, or manual picking, thereby increasing the work cycle and improving the degree of automated production.

[0004] The above-mentioned objective of this utility model is achieved through the following technical solution: A wafer unloading device that also inspects silicon wafers includes an unloading frame. An unloading robot and a vision camera assembly for inspecting silicon wafers are mounted on the upper part of the unloading frame. The vision camera assembly is located at the front end of the unloading robot. A bottom support plate is mounted on the bottom of the unloading frame. A waste removal conveyor roller, a positioning conveyor roller, and a gripping conveyor roller are sequentially mounted on the bottom support plate. A buffer box is located at the end of the gripping conveyor roller. A sorting machine conveyor roller is located adjacent to the gripping conveyor roller. A waste removal and lowering drive assembly is located below the waste removal conveyor roller to tilt the waste removal conveyor roller downwards, allowing defective silicon wafers to enter the waste box. The waste box is also located at the front end of the waste removal and lowering drive assembly.

[0005] The waste removal conveyor roller conveyor includes several feeding conveyor components and several waste removal conveyor components, with a waste removal and lowering drive component installed below each waste removal conveyor component.

[0006] Several material feeding and conveying components are set on the mounting base. The material feeding and conveying components are equidistant. Each material feeding and conveying component includes two roller support plates A. The two roller support plates A are connected by a connecting seat, which is set on the mounting base. Each roller support plate A has a pulley A at each end. The pulleys A located on the same roller support plate A are connected by a synchronous belt A.

[0007] A motor B is installed on the outer side of one of the several material conveying assemblies. The output end of motor B is connected to the several material conveying assemblies via a material conveying drive shaft to achieve transmission. Motor B is connected to the material conveying drive shaft via a coupling B. Motor B is fixed at its bottom by a motor mounting bracket.

[0008] Several waste removal conveying components are equidistantly arranged. Each unloading conveying component includes two roller support plates A, which are connected by a connecting seat. A roller support frame is provided on the outer side of one end of each roller support plate A to support the roller support plate A. A pulley A is provided at each end of each roller support plate A. The pulleys A located on the same roller support plate A are connected by a synchronous belt A.

[0009] A motor A is installed on the outer side of one of the several waste removal conveying assemblies. The output of motor A is connected to the several waste removal conveying assemblies via a waste removal conveying drive shaft to achieve transmission. Motor A and the waste removal conveying drive shaft are connected by a coupling A. The bottom of motor A is fixed by a motor A mounting bracket. The waste removal conveying drive shaft passes through the roller conveyor support frame and is connected to pulley A.

[0010] A switch bracket is installed on the connecting seat of the waste removal conveyor assembly. A proximity switch is installed on the switch bracket. The height of the proximity switch is lower than the height of the roller support plate A. The switch bracket is located between the two roller support plates A.

[0011] The removal and lowering drive assembly includes a waste removal cylinder, which is mounted on the bottom support plate via a cylinder support bracket. The front end of the cylinder rod of the waste removal cylinder is connected to the bottom of the connecting seat on the waste removal conveying assembly to drive the waste removal conveying assembly to move horizontally and downward.

[0012] Motor A is mounted on the roller conveyor support frame via a motor mounting bracket. The roller conveyor support frame and motor A are located at the same end.

[0013] Pulley A is mounted on roller support plate A via a transmission wheel support plate.

[0014] The exhaust cylinder is mounted on the cylinder support bracket via a movable rotating shaft.

[0015] The gripping conveyor roller conveyor includes several gripping conveyor belt groups, which are set on the bottom fixed frame and are equidistant from each other. A gripping conveyor motor is set on the outer side of the outer gripping conveyor belt group. The output end of the gripping conveyor motor is connected to the several gripping conveyor belt groups through the gripping conveyor drive shaft to achieve transmission.

[0016] The gripping conveyor belt assembly includes two gripping conveyor belt pulley support plates, which are connected by a support plate connecting seat. The support plate connecting seat is set on the bottom fixed frame. Each gripping conveyor belt pulley support plate has a gripping conveyor belt pulley at each end. The two gripping conveyor belt pulleys on the same gripping conveyor belt pulley support plate are connected by a gripping conveyor belt synchronous belt.

[0017] The output end of the gripping conveyor motor is connected to the gripping conveyor drive shaft, and the gripping conveyor drive shaft is connected to several gripping conveyor pulleys on the same end.

[0018] The bottom of the gripping conveyor motor is fixed by setting a gripping conveyor motor fixing frame.

[0019] The positioning conveyor roller conveyor includes several positioning conveyor belt groups, which are set on the bottom fixed frame and are equidistant from each other. A positioning conveyor motor is set on the outer side of the outer positioning conveyor belt group. The output end of the positioning conveyor motor is connected to the several positioning conveyor belt groups through the positioning conveyor drive shaft to achieve transmission.

[0020] The positioning conveyor belt assembly includes two positioning conveyor belt pulley support plates, which are connected by a support plate connecting seat. The support plate connecting seat is set on the bottom fixed frame. Each positioning conveyor belt pulley support plate has a positioning conveyor belt pulley at each end. The positioning conveyor belt pulleys located on the same positioning conveyor belt pulley support plate are connected by a positioning conveyor belt synchronous belt.

[0021] The output end of the positioning conveyor motor is connected to the positioning conveyor drive shaft, and the positioning conveyor drive shaft is connected to several positioning conveyor pulleys at the same end.

[0022] The bottom of the positioning conveyor motor is fixed by setting a positioning conveyor motor fixing frame.

[0023] The sorting machine conveyor rollers include several roller support plates B, with two roller support plates B forming a group. Each roller support plate B has pulleys B installed at both ends. The two pulleys B on the same roller support plate B are connected by a synchronous belt C. A motor C is installed on the outermost roller support plate B. The output end of the motor C is connected to the driving wheel. The driving wheel is connected to the driven wheel through the synchronous belt B to achieve transmission. The driven wheel is connected to the pulley B on the roller support plate B through a transmission shaft.

[0024] The driven wheel, drive shaft, and pulley B located at the same end have the same center. Two adjacent roller support plates B that do not belong to the same group are connected to two drive shafts by a coupling C.

[0025] The number of roller support plates B is selected according to the actual working conditions. Four roller support plates B are preferred, and two roller support plates B in a group are connected by a roller connecting plate B. The distance between two roller support plates B in a group is less than the width of the workpiece silicon wafer.

[0026] Support legs are installed at the bottom of roller support plate B to fix the conveyor rollers of the sorting machine.

[0027] Motor C is mounted on the adjacent roller support plate B via a motor mounting plate. The drive wheel is mounted on the motor mounting plate via a mounting bracket.

[0028] Pulley B is mounted on roller support plate B via a pulley mounting plate.

[0029] The vision camera assembly includes vision camera A and vision camera B; vision camera A is used to detect whether the silicon wafer is fragmented, and vision camera B is used to locate the position of the silicon wafer; vision camera A and vision camera B are respectively mounted on the unloading rack via vision camera mounting brackets, and light sources are set at adjacent positions of vision camera A and vision camera B.

[0030] The bottom of the unloading robot is connected to Bernoulli suction cups via a transition plate with suction cups. Each unloading robot has two Bernoulli suction cups on its bottom.

[0031] The unloading robot is a parallel spider robot; the preferred model is: Qiaoshou QS-D3-XL0.

[0032] The waste bin is tilted at an angle of 15-30 degrees. The buffer bin is also tilted at an angle of 15-30 degrees. The buffer bin is mounted on the bottom support plate via a buffer bracket.

[0033] The workpiece in this invention is a silicon wafer.

[0034] This utility model is also equipped with a PLC control system. The unloading robot, vision camera A, vision camera B, waste removal cylinder, sorting machine conveyor roller, waste removal conveyor roller, gripping conveyor roller, positioning conveyor roller, motor A, proximity switch, motor B, motor C, gripping conveyor motor, and positioning conveyor motor are all connected to the PLC control system. Furthermore, none of them are limited to any specific model; as long as their working functions are achieved, they are acceptable.

[0035] The advantages of this utility model compared with the prior art are: This utility model's feeding device features a structure designed to remove fragmented waste. Through its simple structure, it achieves precise fragment removal without manual intervention, machine downtime, or manual sorting, thus increasing the work cycle time and improving the level of automation. Furthermore, it boasts a high degree of overall automation, simple operation, and high work efficiency, solving the problem of inert transfer in existing silicon wafer feeding processes. Attached Figure Description

[0036] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0037] Figure 1 This is a three-dimensional view A of the feeding device.

[0038] Figure 2 This is a three-dimensional view of the feeding device, B.

[0039] Figure 3 This is a 3D view of the feeding roller conveyor assembly.

[0040] Figure 4 This is a three-dimensional view A showing the removal of the waste conveyor rollers and the waste discharge rollers.

[0041] Figure 5 This is a 3D view B showing the removal of the waste conveyor rollers and the waste discharge rollers.

[0042] Figure 6 This is a 3D view A of the sorting machine's conveyor roller conveyor.

[0043] Figure 7 This is a 3D view of the sorting machine's conveyor roller conveyor, diagram B.

[0044] In the diagram: 1. Unloading frame, 2. Unloading robot, 3. Bernoulli suction cup, 4. Vision camera mounting bracket, 5. Vision camera A, 6. Vision camera B, 7. Light source, 8. Waste removal cylinder, 9. Sorting machine conveyor roller, 10. Waste removal conveyor roller, 11. Gripping conveyor roller, 12. Positioning conveyor roller, 13. Waste bin, 14. Buffer bin, 15. Motor A, 16. Motor mount, 17. Coupling A, 18. Synchronous belt A, 19. Cylinder support bracket, 20. Movable rotating shaft, 21. Switch bracket, 22. Proximity switch, 23. Motor B, 24. Roller support frame, 25. Coupling B, 26. Mounting base, 27. Roller support plate A, 28. Connecting seat, 29. Transmission wheel support plate, 30. 901. Belt pulley A, 902. Motor C, 903. Motor mounting plate, 904. Support leg, 905. Roller support plate B, 906. Roller connecting plate, 907. Driven pulley, 908. Synchronous belt B, 909. Drive shaft, 910. Belt pulley mounting plate, 911. Synchronous belt C, 912. Belt pulley B, 913. Coupling C. Detailed Implementation

[0045] The present invention is described in detail below through specific embodiments, but this does not limit the scope of protection of the present invention. Unless otherwise specified, the experimental methods used in the present invention are all conventional methods, and the experimental equipment, materials, reagents, etc. used can all be obtained commercially.

[0046] Example 1 A wafer unloading device that also inspects silicon wafers includes an unloading frame 1. An unloading robot 2 and a vision camera group for inspecting silicon wafers are mounted on the upper part of the unloading frame 1. The vision camera group is located at the front end of the unloading robot 2. A bottom support plate is mounted on the bottom of the unloading frame 1. A waste removal conveyor roller 10, a positioning conveyor roller 12, and a gripping conveyor roller 11 are sequentially mounted on the bottom support plate. A buffer box 14 is located at the end of the gripping conveyor roller 11. A sorting machine conveyor roller 9 is also mounted on the adjacent side of the gripping conveyor roller 11. A waste removal and lowering drive assembly is also mounted below the waste removal conveyor roller 10 to tilt the waste removal conveyor roller 10 downwards, allowing unqualified silicon wafers to enter the waste box 13. The waste box 13 is also mounted at the front end of the waste removal and lowering drive assembly.

[0047] The waste removal conveyor 10 includes several feeding conveyor components and several waste removal conveyor components, with a waste removal and lowering drive component installed below each waste removal conveyor component.

[0048] Several material feeding conveyor components are mounted on the mounting base 26. The material feeding conveyor components are equidistantly arranged. Each material feeding conveyor component includes two roller support plates A27. The two roller support plates A27 are connected by a connecting seat 28, which is mounted on the mounting base 26. Each roller support plate A27 has a pulley A30 at each end. The pulleys A30 located on the same roller support plate A27 are connected by a synchronous belt A18.

[0049] A motor B23 is installed on the outer side of one of the several material conveying components. The output of motor B23 is connected to the several material conveying components via a material conveying drive shaft to achieve transmission. Motor B23 is connected to the material conveying drive shaft via a coupling B25. The bottom of motor B23 is fixed by a motor B fixing bracket.

[0050] Several waste removal conveying components are equidistantly arranged. Each unloading conveying component includes two roller support plates A27. The two roller support plates A27 are connected by a connecting seat 28. A roller support frame 24 is provided on the outer side of one end of each roller support plate A27 to support the roller support plate A27. A pulley A30 is provided at each end of each roller support plate A27. The pulleys A30 located on the same roller support plate A27 are connected by a synchronous belt A18.

[0051] A motor A15 is installed on the outer side of one of the several waste removal conveying assemblies. The output of motor A15 is connected to the several waste removal conveying assemblies via a waste removal conveying drive shaft to achieve transmission. Motor A15 and the waste removal conveying drive shaft are connected by a coupling A17. The bottom of motor A15 is fixed by a motor A fixing bracket. The waste removal conveying drive shaft passes through the roller support frame 24 and is connected to pulley A30.

[0052] A switch bracket 21 is provided on the connecting seat 28 of the waste removal conveying assembly. A proximity switch 22 is provided on the switch bracket 21. The height of the proximity switch 22 is lower than the height of the roller support plate A27. The switch bracket 21 is located between the two roller support plates A27.

[0053] The removal and lowering drive assembly includes a waste removal cylinder 8, which is mounted on the bottom support plate via a cylinder support bracket 19. The front end of the cylinder rod of the waste removal cylinder 8 is connected to the bottom of the connecting seat 28 on the waste removal conveying assembly to drive the waste removal conveying assembly to move horizontally and downward.

[0054] Motor A15 is mounted on roller support frame 24 via motor mounting bracket 16. Roller support frame 24 and motor A15 are located at the same end.

[0055] The pulley A30 is mounted on the roller support plate A27 via the transmission wheel support plate 29.

[0056] The exhaust cylinder 8 is mounted on the cylinder support bracket 19 via a movable rotating shaft 20.

[0057] The gripping conveyor roller conveyor 11 includes several gripping conveyor belt groups, which are set on the bottom fixed frame and are equidistant from each other. A gripping conveyor motor is set on the outer side of the outer gripping conveyor belt group. The output end of the gripping conveyor motor is connected to the several gripping conveyor belt groups through the gripping conveyor drive shaft to achieve transmission.

[0058] The gripping conveyor belt assembly includes two gripping conveyor belt pulley support plates, which are connected by a support plate connecting seat. The support plate connecting seat is set on the bottom fixed frame. Each gripping conveyor belt pulley support plate has a gripping conveyor belt pulley at each end. The two gripping conveyor belt pulleys on the same gripping conveyor belt pulley support plate are connected by a gripping conveyor belt synchronous belt.

[0059] The output end of the gripping conveyor motor is connected to the gripping conveyor drive shaft, and the gripping conveyor drive shaft is connected to several gripping conveyor pulleys on the same end.

[0060] The bottom of the gripping conveyor motor is fixed by setting a gripping conveyor motor fixing frame.

[0061] The positioning conveyor roller conveyor 12 includes several positioning conveyor belt groups, which are set on the bottom fixed frame and are equidistantly arranged. A positioning conveyor motor is set on the outer side of the outer positioning conveyor belt group. The output end of the positioning conveyor motor is connected to the several positioning conveyor belt groups through the positioning conveyor drive shaft to achieve transmission.

[0062] The positioning conveyor belt assembly includes two positioning conveyor belt pulley support plates, which are connected by a support plate connecting seat. The support plate connecting seat is set on the bottom fixed frame. Each positioning conveyor belt pulley support plate has a positioning conveyor belt pulley at each end. The positioning conveyor belt pulleys located on the same positioning conveyor belt pulley support plate are connected by a positioning conveyor belt synchronous belt.

[0063] The output end of the positioning conveyor motor is connected to the positioning conveyor drive shaft, and the positioning conveyor drive shaft is connected to several positioning conveyor pulleys at the same end.

[0064] The bottom of the positioning conveyor motor is fixed by setting a positioning conveyor motor fixing frame.

[0065] The sorting machine conveyor roller 9 includes several roller support plates B904, with two roller support plates B904 forming a group. Each roller support plate B904 has a pulley B912 installed at both ends. The two pulleys B912 on the same roller support plate B904 are connected by a synchronous belt C911. A motor C901 is installed on the outermost roller support plate B904. The output end of the motor C901 is connected to the drive wheel 906. The drive wheel 906 is connected to the driven wheel 907 via a synchronous belt B908 to achieve transmission. The driven wheel 907 is connected to the pulley B912 on the roller support plate B904 via a transmission shaft 909.

[0066] Driven wheel 907, drive shaft 909, and pulley B912 located at the same end have the same center. Two adjacent roller support plates B904 that do not belong to the same group are connected to two drive shafts 909 by coupling C913.

[0067] The number of roller support plates B904 is selected according to the actual working conditions. Four roller support plates B904 are preferably set, and two roller support plates B904 in a group are connected by a roller connecting plate B905. The distance between two roller support plates B904 in a group is less than the width of the workpiece silicon wafer.

[0068] The bottom of the roller support plate B904 is equipped with support legs 903 to fix the sorting machine conveyor roller 9.

[0069] Motor C901 is mounted on the adjacent roller support plate B904 via motor mounting plate 902. Drive wheel 906 is mounted on motor mounting plate 902 via mounting bracket.

[0070] The pulley B912 is mounted on the roller support plate B904 via the pulley mounting plate 910.

[0071] The vision camera group includes vision camera A5 and vision camera B6; vision camera A5 is used to detect whether the silicon wafer is fragmented, and vision camera B6 is used to locate the position of the silicon wafer; vision camera A5 and vision camera B6 are respectively mounted on the unloading rack 1 through vision camera mounting bracket 4, and light source 7 is set at the adjacent positions of vision camera A5 and vision camera B6.

[0072] The bottom of the unloading robot 2 is connected to the Bernoulli suction cup 3 via a suction cup connecting transition plate, and two Bernoulli suction cups 3 are set at the bottom of each unloading robot 2.

[0073] The unloading robot 2 is a parallel spider robot; the preferred model is: Qiaoshou QS-D3-XL0.

[0074] The waste bin 613 is tilted at an angle of 15-30 degrees. The buffer bin 614 is also tilted at an angle of 15-30 degrees. The buffer bin 614 is mounted on the bottom support plate via a buffer bracket.

[0075] This utility model is also equipped with a PLC control system. The unloading robot 2, vision camera A5, vision camera B6, waste removal cylinder 8, sorting machine conveyor roller 9, waste removal conveyor roller 10, gripping conveyor roller 11, positioning conveyor roller 12, motor A15, proximity switch 22, motor B23, motor C901, gripping conveyor motor, and positioning conveyor motor are all connected to the PLC control system. None of them are limited to a specific model; as long as their working functions are achieved, they are all acceptable.

[0076] In practice: After the silicon wafers are cleaned in the previous process and arrive, the vision camera group on the unloading device takes pictures for inspection. When fragmented silicon wafers pass through the waste removal conveyor component in the waste removal conveyor roller 10, the proximity switch 22 on the waste removal conveyor component detects the workpiece silicon wafer. The waste removal cylinder 8 in the waste removal lowering drive component retracts its cylinder rod, and the waste removal conveyor component lowers and tilts to transfer the fragments to the waste box 13. The waste removal cylinder 8 extends its cylinder rod without affecting the subsequent silicon wafer conveying. The vision camera group on the unloading device takes pictures for inspection. Qualified silicon wafers are transferred by the unloading robot 2 to the sorting machine conveyor roller 9 for the next process. Some qualified silicon wafers that the unloading robot 2 cannot transfer in time are sent to the buffer box 14 via the gripping conveyor roller 11.

[0077] The embodiments described above are merely preferred embodiments of this utility model, and not all feasible embodiments of this utility model. For those skilled in the art, any obvious modifications made without departing from the principles and spirit of this utility model should be considered to be included within the scope of protection of the claims of this utility model.

Claims

1. A feeding device that also functions as an inspection device for silicon wafers, characterized in that, The system includes a feeding frame (1), a feeding robot (2) for feeding and a vision camera group for inspecting silicon wafers are set on the upper part of the feeding frame (1). The vision camera group is set at the front end of the feeding robot (2). A bottom support plate is set on the bottom of the feeding frame (1). A waste removal conveyor roller (10), a positioning conveyor roller (12), and a gripping conveyor roller (11) are set sequentially on the bottom support plate. A buffer box (14) is set at the end of the gripping conveyor roller (11). A sorting machine conveyor roller (9) is set on the side adjacent to the gripping conveyor roller (11). A waste removal and lowering drive assembly is set below the waste removal conveyor roller (10) to tilt the waste removal conveyor roller (10) downward so that unqualified silicon wafers enter the waste box (13). A waste box (13) is also provided at the front end of the waste removal and lowering drive assembly.

2. The unloading device that also serves as a silicon wafer inspection unit as described in claim 1, characterized in that, The waste removal conveyor (10) includes several feeding conveyor components and several waste removal conveyor components. Each waste removal conveyor component is provided with a waste removal and lowering drive component below it.

3. The unloading device for inspecting silicon wafers as described in claim 2, characterized in that, Several material conveying components are set on the mounting base (26). The material conveying components are set at equal intervals. Each material conveying component includes two roller support plates A (27). The two roller support plates A (27) are connected by a connecting seat (28). The connecting seat (28) is set on the mounting base (26). Each roller support plate A (27) has a pulley A (30) at each end. The pulleys A (30) on the same roller support plate A (27) are connected by a synchronous belt A (18).

4. The unloading device for inspecting silicon wafers as described in claim 2, characterized in that, A motor B (23) is installed on the outside of the outermost material conveying assembly among several material conveying components. The output end of the motor B (23) is connected to several material conveying components through the material conveying transmission shaft to achieve transmission.

5. The unloading device for inspecting silicon wafers as described in claim 2, characterized in that, Several waste removal conveying components are equidistantly arranged. Each unloading conveying component includes two roller support plates A (27). The two roller support plates A (27) are connected by a connecting seat (28). A roller support frame (24) is provided on the outer side of one end of each roller support plate A (27) to support the roller support plate A (27). A pulley A (30) is provided at each end of each roller support plate A (27). The pulleys A (30) located on the same roller support plate A (27) are connected by a synchronous belt A (18).

6. The unloading device for inspecting silicon wafers as described in claim 2, characterized in that, A motor A (15) is installed on the outside of the outer waste removal conveyor component among several waste removal conveyor components. The output end of the motor A (15) is connected to several waste removal conveyor components through the waste removal conveyor drive shaft to realize transmission. The waste removal conveyor drive shaft passes through the roller support frame (24) and is connected to the pulley A (30).

7. The unloading device for inspecting silicon wafers as described in claim 2, characterized in that, The removal and lowering drive assembly includes a waste removal cylinder (8), which is mounted on the bottom support plate via a cylinder support bracket (19). The front end of the cylinder rod of the waste removal cylinder (8) is connected to the bottom of the connecting seat (28) on the waste removal conveying assembly to drive the waste removal conveying assembly to move horizontally and downward.

8. The unloading device for inspecting silicon wafers as described in claim 2, characterized in that, A switch bracket (21) is provided on the connecting seat (28) of the waste conveying assembly. A proximity switch (22) is provided on the switch bracket (21). The height of the proximity switch (22) is lower than the height of the roller support plate A (27). The switch bracket (21) is located between the two roller support plates A (27).

9. The unloading device for inspecting silicon wafers as described in claim 2, characterized in that, The sorting machine conveyor roller (9) includes several roller support plates B (904). Two roller support plates B (904) form a group. Each roller support plate B (904) has pulleys B (912) installed at both ends. The two pulleys B (912) on the same roller support plate B (904) are connected by a synchronous belt C (911). A motor C (901) is installed on the outermost roller support plate B (904). The output end of the motor C (901) is connected to the drive wheel (906). The drive wheel (906) is connected to the driven wheel (907) through a synchronous belt B (908) to achieve transmission. The driven wheel (907) is connected to the pulley B (912) on the roller support plate B (904) through a transmission shaft (909).

10. The unloading device for inspecting silicon wafers as described in claim 2, characterized in that, The vision camera group includes vision camera A (5) and vision camera B (6); vision camera A (5) is used to detect whether the silicon wafer is fragmented, and vision camera B (6) is used to locate the position of the silicon wafer; vision camera A (5) and vision camera B (6) are respectively set on the unloading rack (1) through vision camera mounting bracket (4), and light sources (7) are set at adjacent positions of vision camera A (5) and vision camera B (6).

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