An automatic charging device for a single crystal furnace

Abstract

This utility model discloses an automatic loading device for a single crystal furnace, specifically relating to the technical field of single crystal furnaces. It includes a first connecting frame and a second connecting frame positioned below the first connecting frame. A top column is fixedly connected to the upper surface of the first connecting frame, and an insert block is fixedly connected to the bottom of the second connecting frame. A cavity is provided inside the second connecting frame, and multiple positioning shafts are fixedly connected to its inner side. A multi-point locking mechanism is provided between the first and second connecting frames. This utility model utilizes the synchronous transmission and deflection of the support arm, support plate, and support rod by the pressure plate to achieve automatic, stable, and reliable clamping of the first and second connecting frames. This avoids jamming, tilting, or stress concentration caused by uneven force at a single point during seed crystal lifting. The device utilizes the splicing of the insert block and the bottom sleeve, along with the double positioning via two pins, to simplify the loading and unloading operations of single crystal silicon rods, improving the convenience of seed crystal installation and single crystal silicon rod unloading.

Description

Technical Field

[0001] This utility model relates to the technical field of single crystal furnaces, and more specifically, to an automatic material loading device for a single crystal furnace. Background Technology

[0002] An automatic crystal furnace loading device is used in the single crystal growth process. Its main function is to suspend the crystal seed or bulk crystal material in the furnace into the melt and control the growth speed and direction of the crystal to achieve the single crystal growth process. This device usually includes a robotic arm system and an automatic control system, which can automatically adjust the position, angle and speed of the crystal to ensure the stability and quality of single crystal growth. Through the automatic crystal furnace loading device, a highly efficient single crystal growth process can be achieved, improving production efficiency and product quality.

[0003] In the current process of producing Czochralski monocrystalline silicon, the existing secondary feeding process uses threaded connections for the material hanging cylinder, which poses a risk of the cylinder falling off due to loose threads. The material hanging personnel have to climb up and down three ladders frequently, resulting in high physical exertion, low efficiency, and high labor costs. Furthermore, there is a safety risk of falling from heights for the material hanging personnel.

[0004] A search revealed that Chinese Patent CN223422817U discloses an automatic material hanging device for a single crystal furnace. This device uses a self-locking hook structure to connect the material cylinder and the graphite chuck, improving the reliability of the connector, reducing labor intensity and labor costs, and achieving automatic connection. The connector adopts a guiding structure, which reduces the concentricity level of the material cylinder and the chuck during connection, improving efficiency and feasibility of the solution. It avoids the risk of bolt loosening and falling off in the current bolt connection solution, and uses a self-detaching slider to achieve automatic separation of the material cylinder and the graphite chuck, providing a feasible solution for AGV automatic material hanging. The upper connector uses a sliding rod of a reasonable length to reserve space for the material cylinder to handle abnormal situations such as jamming in the furnace.

[0005] However, in actual use, the connection of the above-mentioned hanging device is actually made by a single rod. After the connection is made, the connection point is only subjected to force at a single point. During the continuous growth of the monocrystalline silicon seed crystal, the force at a single point can easily lead to stress concentration in the connection area, which will cause the growth to tilt and affect the growth effect of the monocrystalline silicon rod. Utility Model Content

[0006] In order to overcome the above-mentioned defects of the prior art, the present invention provides an automatic material loading device for a single crystal furnace to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, this utility model provides the following technical solution: An automatic material loading device for a single crystal furnace includes a first connecting frame and a second connecting frame disposed below the first connecting frame. A top column is fixedly connected to the upper surface of the first connecting frame, and an insert block is fixedly connected to the bottom of the second connecting frame. A cavity is provided inside the second connecting frame, and multiple positioning shafts are fixedly connected to the inner side of the second connecting frame. A multi-point locking mechanism is provided between the first and second connecting frames. The multi-point locking mechanism includes support rods rotatably connected to the outer sides of the multiple positioning shafts. Support plates are fixedly connected to the surfaces of the multiple support rods, and the multiple support plates are arranged in a circular array around the center point of the second connecting frame. Support arms are hinged to one side of each of the multiple support plates, and pressure plates are hinged to the bottom ends of the multiple support arms, which are arranged in a circular array around the center point of the pressure plates. The bottom of the cavity of the second connecting frame... A telescopic rod is provided, and a spring is sleeved on the outside of the telescopic rod. The bottom end of the spring is fixedly connected to the bottom of the cavity of the second connecting frame. The top ends of the telescopic rod and the spring are both fixedly connected to the lower surface of the pressure plate. Multiple conical seats are fixedly connected to the outside of the first connecting frame, and a slot is opened on one side of each conical seat. A groove is opened on the surface of each conical seat. A positioning sleeve is fixedly connected to the top end of each of the multiple support rods. A groove matching the surface of the conical seat is provided on the inner side of each positioning sleeve, and an anti-slip ring is provided on the surface of the groove. A cavity is provided on the inner side of the top column, and an electric cylinder is provided inside the cavity. A through hole is opened on the surface of the first connecting frame. The output end of the electric cylinder passes through the inner through hole of the first connecting frame and extends to the bottom of the first connecting frame. A pad is fixedly connected to the output end of the electric cylinder. A connecting mechanism is provided at the bottom of the second connecting frame.

[0008] By adopting the above technical solution: by using the expansion of multiple support rods and anti-slip rings, and with the push of the top column, the automatic positioning of connecting frame one and connecting frame two is achieved. In addition, by combining the mutual interlocking of the conical seat and the inner groove of the anti-slip ring, multi-point limiting of connecting frame one and connecting frame two is achieved, avoiding uneven force at a single point at the connection.

[0009] As a further description of the above technical solution: the connecting mechanism includes an insert block fixedly connected to the bottom of the connecting frame two. Two guide strips are fixedly connected to the outside of the insert block. A bottom sleeve is sleeved on the outside of the insert block. Two sliding grooves for guiding the guide strips are opened on the inside of the bottom sleeve. Two connecting holes are opened on the surfaces of the insert block and the bottom sleeve. A pin is inserted between the two connecting holes on the inside of the bottom sleeve and the insert block. One end of the two pins is engaged with a card plate. Two elastic hooks are fixedly connected to one side of the card plate.

[0010] By adopting the above technical solution, the seed crystal and the connecting frame 2 can be quickly connected by plugging the bottom sleeve and the plug block, simplifying the installation steps of the seed crystal.

[0011] The technical effects and advantages of this utility model are as follows: 1. By setting up a multi-point locking mechanism, compared with the existing technology, the pressure plate is used to synchronously drive the deflection of the support arm, support plate and support rod to realize the automatic clamping of the connecting frame one and the connecting frame two. This effectively avoids jamming, tilting or stress concentration caused by uneven force at a single point during the seed crystal lifting process, making the hanging process more stable and reliable. 2. By setting up a connection mechanism, compared with the existing technology, the splicing of the plug and the bottom sleeve, combined with the double positioning of the two pins, simplifies the operation steps of loading and unloading monocrystalline silicon rods and improves the convenience of seed crystal installation and monocrystalline silicon rod unloading. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0013] Figure 2 This is a schematic diagram of the front structure of this utility model.

[0014] Figure 3 This is a partial schematic diagram of the connection between the connecting frame 2 and the support rod of this utility model.

[0015] Figure 4 This is a partial schematic diagram of the connection between the support rod and the positioning sleeve of this utility model.

[0016] Figure 5 This is a partial schematic diagram of the connection between the connecting frame and the conical seat of this utility model.

[0017] Figure 6 This is a partial schematic diagram of the connection between the connecting frame 2 and the insert block of this utility model.

[0018] Figure 7 This is a partial schematic diagram of the connection between the base sleeve and the pin of this utility model.

[0019] The attached diagram is labeled as follows: 1. Connecting frame one; 2. Connecting frame two; 3. Positioning shaft; 4. Support rod; 5. Support plate; 6. Support arm; 7. Pressure plate; 8. Telescopic rod; 9. Spring; 10. Positioning sleeve; 11. Anti-slip ring; 12. Conical seat; 13. Groove; 14. Top column; 15. Electric cylinder; 16. Pad block; 17. Insert block; 18. Guide strip; 19. Bottom sleeve; 20. Pin; 21. Clamping plate; 22. Elastic hook. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] The embodiments disclosed in this application are as follows: Figures 1-7 An automatic material loading device for a single crystal furnace is shown, comprising a connecting frame 1 and a connecting frame 2 located below the connecting frame 1. A top column 14 is fixedly connected to the upper surface of the connecting frame 1, and an insert block 17 is fixedly connected to the bottom of the connecting frame 2. A cavity is provided inside the connecting frame 2, and multiple positioning shafts 3 are fixedly connected to the inner side of the connecting frame 2. A multi-point locking mechanism is provided between the connecting frame 1 and the connecting frame 2. The multi-point locking mechanism includes support rods 4 rotatably connected to the outside of the multiple positioning shafts 3, and support plates 5 are fixedly connected to the surfaces of the multiple support rods 4. The multiple support plates 5 are arranged in a circular array around the center point of the connecting frame 2. Support arms 6 are hinged to one side of the multiple support plates 5, and pressure plates 7 are hinged to the bottom of the multiple support arms 6. The multiple support arms 6 are arranged in a circular array around the center point of the pressure plates 7. An extension is provided at the bottom of the cavity of the connecting frame 2. The telescopic rod 8 has a spring 9 sleeved on its outer side. The bottom end of the spring 9 is fixedly connected to the bottom of the cavity of the connecting frame 2. The top ends of the telescopic rod 8 and the spring 9 are fixedly connected to the lower surface of the pressure plate 7. Multiple conical seats 12 are fixedly connected to the outer side of the connecting frame 1. Each conical seat 12 has a slot on one side and a groove 13 on its surface. The top ends of multiple support rods 4 are fixedly connected to positioning sleeves 10. The inner side of each positioning sleeve 10 has a groove that matches the surface of the conical seat 12, and the surface of the groove has an anti-slip ring 11. The inner side of the top column 14 has a hole, and an electric cylinder 15 is installed inside the hole. The surface of the connecting frame 1 has a through hole. The output end of the electric cylinder 15 passes through the through hole of the connecting frame 1 and extends to the bottom of the connecting frame 1. A pad 16 is fixedly connected to the output end of the electric cylinder 15. A connecting mechanism is installed at the bottom of the connecting frame 2. The spring 9 pushes the pressure plate 7 to sequentially drive multiple support arms 6 and connected support plates 5 and support rods 4 to expand outward around multiple positioning shafts 3 on the inner side of the connecting frame 2, so that multiple anti-slip rings 11 separate from the conical seat 12, thereby realizing the rapid separation of the connecting frame 2 and the connecting frame 1. At the same time, multiple support rods 4 are used to perform multi-point positioning of the connecting frame 1 and the connecting frame 2, so that the monocrystalline silicon seed crystal can be automatically hung.

[0022] Reference Figure 1 , Figure 3 , Figure 6 and Figure 7As shown, the connection mechanism includes an insert block 17 fixedly connected to the bottom of the second connector 2. Two guide strips 18 are fixedly connected to the outside of the insert block 17. A bottom sleeve 19 is sleeved on the outside of the insert block 17. Two sliding grooves for guiding the guide strips 18 are opened on the inside of the bottom sleeve 19. Two connection holes are opened on the surfaces of both the insert block 17 and the bottom sleeve 19. Pins 20 are inserted between the two connection holes on the inside of the bottom sleeve 19 and the insert block 17. One end of the two pins 20 is engaged with a card plate 21. Two elastic hooks 22 are fixedly connected to one side of the card plate 21. The two sliding grooves on the inside of the bottom sleeve 19 are used to slide and guide the two guide strips 18 on the outside of the insert block 17, and the connection holes of the insert block 17 and the bottom sleeve 19 are quickly aligned. Combined with the insertion and positioning of the two pins 20, the seed crystal and the second connector 2 are quickly connected.

[0023] The working principle of this utility model is as follows: When hanging a single crystal silicon seed crystal, the bottom end of the bottom sleeve 19 is first connected to the seed crystal, and then the bottom sleeve 19 is inserted into the insert block 17 at the bottom of the connecting frame 2. The two sliding grooves inside the bottom sleeve 19 will position and guide the two guide strips 18 on the outside of the insert block 17, so that the two connecting holes on the inside of the insert block 17 can be directly aligned with the two connecting holes on the surface of the bottom sleeve 19. Then, the two pins 20 are inserted into the two connecting holes on the surface of the bottom sleeve 19 and the insert block 17 in sequence. Then, the ends of the two pins 20 extend from the other side of the bottom sleeve 19. Then, the clamping plate 21 and the two elastic hooks 22 are inserted into the ends of the two pins 20, so that the two pins 20 can position the insert block 17 and the bottom sleeve 19 to form a stable connection. Afterwards, the staff moved the connecting frame 2 and the bottom sleeve 19 to the bottom of the connecting frame 1. The staff then moved the connecting frame 1 and the connecting frame 2 closer together and aligned the multiple support rods 4 on the outside of the connecting frame 2 with the slots of the multiple conical seats 12 on the outside of the connecting frame 1. Then, the electric cylinder 15 was started to drive the output end to push the pad block 16 to push the pressure plate 7 above the connecting frame 2. The pressure plate 7 then pulled the multiple support arms 6 to pull the hinged support plates 5. The multiple support plates 5 deflected around the corresponding positioning shaft 3 as the center, causing the multiple support rods 4 to gradually tilt upward. Then, the multiple support rods 4 were respectively inserted into the slots on the inside of the multiple conical seats 12. Align the positioning sleeves 10 at the top of the multiple support rods 4 with the tops of the multiple conical seats 12 on the outside of the connecting frame 1. Then, the operator releases the support for the connecting frame 2, allowing the connecting frame 2 and the bottom sleeve 19 to slide down along the multiple conical seats 12 under their own weight. Then, the grooves on the inner side of the multiple positioning sleeves 10 coincide with the surface of the conical seats 12, and at the same time, the anti-slip rings 11 on the inner wall of the grooves of the positioning sleeves 10 coincide with the grooves 13 on the surface of the conical seats 12. This allows the multiple support rods 4 and the anti-slip rings 11 to achieve multi-point positioning of the connecting frame 1 and the connecting frame 2. Then, the output end of the lifting head is driven to bring the connecting frame 1, the connecting frame 2, the bottom sleeve 19 and the seed crystal closer to the silicon solution in the crucible, thus completing the growth of the single crystal silicon rod. After the monocrystalline silicon rod has completed its growth, the staff lifts the connecting frame 2, the bottom sleeve 19, and the monocrystalline silicon rod upwards. The spring 9 inside the connecting frame 2 returns to its original shape, causing the pressure plate 7 to push multiple support arms 6, support plates 5, and support rods 4 outwards with the connecting frame 2 as the center. This causes multiple support rods 4 and anti-slip rings 11 to separate from the multiple conical seats 12 on the top of the connecting frame 1, thus completing the separation of the connecting frame 2 and the connecting frame 1.

[0024] All contents not described in detail in the specification are existing technologies known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited; conventional equipment can be used. Electrical control components not mentioned in this technical solution are not shown in the figures because they are existing technologies, and will not be described here.

[0025] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. An automatic material loading device for a single crystal furnace, comprising a connecting frame one (1) and a connecting frame two (2) disposed below the connecting frame one (1), characterized in that: A top column (14) is fixedly connected to the upper surface of the first connecting frame (1), and a plug (17) is fixedly connected to the bottom of the second connecting frame (2). A cavity is provided inside the second connecting frame (2), and multiple positioning shafts (3) are fixedly connected inside the second connecting frame (2). A multi-point locking mechanism is provided between the first connecting frame (1) and the second connecting frame (2). The multi-point locking mechanism includes support rods (4) that are rotatably connected to the outside of multiple positioning shafts (3), and support plates (5) are fixedly connected to the surfaces of the multiple support rods (4). The multiple support plates (5) are arranged in a ring array with the center point of the connecting frame (2) as the center on the surfaces of the multiple support rods (4). Each of the multiple support plates (5) has a support arm (6) hinged to one side, and a pressure plate (7) is hinged to the bottom end of each of the multiple support arms (6). The multiple support arms (6) are arranged in a ring array with the center point of the pressure plate (7) as the center. The bottom of the cavity of the connecting frame 2 (2) is provided with a telescopic rod (8), and a spring (9) is sleeved on the outside of the telescopic rod (8). The bottom end of the spring (9) is fixedly connected to the bottom of the cavity of the connecting frame 2 (2), and the top ends of the telescopic rod (8) and the spring (9) are fixedly connected to the lower surface of the pressure plate (7). The bottom of the connecting frame 2 (2) is provided with a connecting mechanism.

2. The automatic material loading device for a single crystal furnace according to claim 1, characterized in that: Multiple conical seats (12) are fixedly connected to the outside of the connecting frame (1), and a slot is provided on one side of each of the multiple conical seats (12), and a groove (13) is provided on the surface of the conical seat (12).

3. The automatic material loading device for a single crystal furnace according to claim 1, characterized in that: Each of the multiple support rods (4) has a positioning sleeve (10) fixedly connected to its top end. Each of the multiple positioning sleeves (10) has a groove on its inner side that matches the surface of the conical seat (12), and an anti-slip ring (11) is provided on the surface of the groove.

4. The automatic material loading device for a single crystal furnace according to claim 1, characterized in that: The top column (14) has a cavity inside, and an electric cylinder (15) is provided inside the cavity. The surface of the connecting frame (1) has a through hole. The output end of the electric cylinder (15) passes through the through hole inside the connecting frame (1) and extends to the bottom of the connecting frame (1). The output end of the electric cylinder (15) is fixedly connected to a pad (16).

5. The automatic material loading device for a single crystal furnace according to claim 1, characterized in that: The connecting mechanism includes a plug (17) fixedly connected to the bottom of the connecting frame (2), and two guide strips (18) are fixedly connected to the outside of the plug (17).

6. The automatic material loading device for a single crystal furnace according to claim 5, characterized in that: The insert (17) is fitted with a bottom sleeve (19) on its outer side. The bottom sleeve (19) has two grooves on its inner side for guiding the guide strip (18). Both the insert (17) and the bottom sleeve (19) have two connecting holes on their surfaces.

7. The automatic material loading device for a single crystal furnace according to claim 6, characterized in that: Pins (20) are inserted between the two connecting holes on the inner side of the bottom sleeve (19) and the insert block (17). One end of each pin (20) is engaged with a card plate (21), and two elastic hooks (22) are fixedly connected to one side of the card plate (21).

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