A wafer dark field xenon lamp light source filter rotor device

Abstract

This utility model discloses a wafer dark-field xenon lamp light source filter wheel device, relating to the field of wafer inspection technology. It includes a housing with an outer shell on its surface. The outer shell has a VDC power interface, and a computer interface is located below the VDC power interface. A lamp holder is mounted on one side of the housing, and a xenon lamp is installed inside the lamp holder. A xenon lamp holder with an output lamp is mounted on the other side of the housing. A filter switching mechanism is located inside the housing, including a filter wheel rotatably connected to the inner wall of the housing. By installing various filters of different specifications into the filter mounting positions, the rotation of the filter wheel enables rapid filter switching, improving inspection efficiency. The meshing transmission of gears and gear blocks drives the filter wheel to rotate, accurately positioning the filter and avoiding deviations caused by manual replacement.

Description

Technical Field

[0001] This utility model relates to the field of wafer inspection technology, specifically a wafer dark field xenon lamp light source filter wheel device. Background Technology

[0002] In semiconductor manufacturing, wafer inspection is a crucial step. Dark-field xenon lamps are widely used in wafer inspection, providing illumination within a specific spectral range to help detect minute defects on the wafer surface.

[0003] For example, a patent with authorization announcement number CN223066149U describes an adsorption component and wafer inspection equipment, including a first adapter, a suction nozzle, and at least one second adapter; any two of the first adapter, the suction nozzle, and at least one second adapter can be detachably connected; the first adapter is selectively connected to the suction nozzle or connected to the suction nozzle through at least one second adapter. By connecting the first adapter directly to the suction nozzle, or connecting the first adapter to the suction nozzle through a suitable number of second adapters, the wafer inspection equipment can be adapted to wafers of various sizes, improving the versatility of the wafer inspection equipment.

[0004] The existing technology has the following problems:

[0005] 1. Inconvenient filter switching: Traditional filter replacement usually requires manual operation, which is cumbersome and time-consuming, making it difficult to meet the needs of large-scale production testing.

[0006] 2. Difficulty in guaranteeing accuracy: Manual operation is prone to deviations when positioning the filter, resulting in inaccurate light source spectrum, which affects the accuracy and reliability of wafer inspection.

[0007] 3. Low integration: Existing filter devices have poor integration with xenon lamp light sources and detection systems, occupy a large space, and are not conducive to the compact design of equipment.

[0008] Based on this, a wafer dark field xenon lamp light source filter wheel device is now provided, which can eliminate the drawbacks of existing devices. Utility Model Content

[0009] The purpose of this invention is to provide a wafer dark field xenon lamp light source filter wheel device to solve the problems in the background art.

[0010] To achieve the above objectives, this utility model provides the following technical solution:

[0011] A wafer dark field xenon lamp light source filter wheel device includes a housing, a shell on the surface of the housing, a VDC power interface on the shell, a computer interface below the VDC power interface, a bulb holder mounted on one side of the housing, a xenon bulb installed inside the bulb holder, a xenon lamp holder mounted on the other side of the housing, an output lamp mounted on the xenon lamp holder, and a filter switching mechanism inside the housing, the filter switching mechanism including a filter wheel rotatably connected to the inner wall of the housing.

[0012] Based on the above technical solutions, this utility model also provides the following optional technical solutions:

[0013] In one alternative: the surface of the filter wheel is evenly distributed with several filter mounting positions, each filter mounting position is provided with a slot, and bolt seats are provided on both sides of the slot.

[0014] In one alternative: a rotating motor is provided on the side of the filter wheel, the rotating motor is mounted on the surface of the housing, and a drive shaft is provided on the rotating motor.

[0015] In one alternative: the drive shaft is fixedly connected to a gear, and the side of the filter wheel is evenly provided with a plurality of tooth blocks, which mesh with the gear.

[0016] In one alternative: a maintenance cover is rotatably connected to the upper end of the housing, and the maintenance cover is provided with a finger screw.

[0017] In one alternative: the side wall of the enclosure is provided with a protective cover, and the protective cover is provided with a release button.

[0018] In one alternative: a position sensor is installed inside the housing.

[0019] In one alternative: the filter mounting position is provided with an elastic pressure plate.

[0020] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0021] 1. This utility model improves detection efficiency by setting up a filter wheel and installing various filters of different specifications into the filter mounting position, thereby enabling rapid filter switching by rotating the filter wheel.

[0022] 2. This utility model uses the meshing transmission of gears and gear blocks to drive the filter wheel to rotate, accurately positioning the filter and avoiding deviations caused by manual replacement.

[0023] 2. This utility model optimizes and integrates the filter wheel device with the xenon lamp light source, output lamp, and related interfaces, reducing the size of the equipment and making it easier to install and use.

[0024] 3. This utility model, through the design of finger screws and release knobs, facilitates the installation, debugging and maintenance of the equipment, and improves the overall usability. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of this utility model.

[0026] Figure 2 This is a schematic diagram of the structure of the box body of this utility model.

[0027] Figure 3 This is a schematic diagram of the release button of this utility model.

[0028] Figure 4 This is a schematic diagram of the filter wheel of this utility model.

[0029] Figure 5 In this utility model Figure 4 A magnified view of a portion at point A shown.

[0030] Figure reference numerals: 101, housing; 102, 12VDC power interface; 103, computer interface; 104, xenon bulb; 105, output lamp; 106, xenon lamp mounting bracket; 201, filter wheel; 202, filter mounting position; 301, rotating motor; 302, drive shaft; 303, gear; 304, gear block; 401, finger screw; 402, maintenance cover; 501, release button; 502, protective cover. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments.

[0032] In one embodiment, such as Figures 1-3As shown, a wafer dark-field xenon lamp light source filter rotary device includes a housing 101. The housing 101 has a shell on its surface, and a 12VDC power interface 102 is provided on the shell. A computer interface 103 is provided below the 12VDC power interface 102. A lamp holder is mounted on one side of the housing 101, and a xenon lamp 104 is installed inside the lamp holder. A xenon lamp mounting base 106 is provided on the other side of the housing 101, and an output lamp 105 is mounted on the xenon lamp mounting base 106. The housing 101 is equipped with a filter switching mechanism, which includes a filter wheel 201. The filter wheel 201 is rotatably connected to the inner wall of the housing 101. Broadband light emitted by the xenon lamp 104 passes through the housing 101 and is incident on the filter wheel 201. The light passes through the filter installed on the filter wheel 201, and the filter performs filtering. The filtered monochromatic light is projected onto the wafer surface through the output lamp 105, which excites a dark field scattering signal for the detection device to collect, thus completing the wafer detection work.

[0033] In one embodiment, such as Figure 2 and Figure 3 As shown, the filter wheel 201 has a plurality of filter mounting positions 202 evenly distributed on its surface. Each filter mounting position 202 is provided with a slot and bolt seats on both sides of the slot. By rotating the filter wheel 201, different types of filters installed in the filter mounting positions 202 can filter light to correspond to different wavelengths of light required for different detections, thereby achieving a rapid switching effect and increasing convenience.

[0034] In one embodiment, such as Figure 4 and Figure 5 As shown, the filter wheel 201 is provided with a rotating motor 301 on its side. The rotating motor 301 is mounted on the surface of the housing 101. The rotating motor 301 is provided with a transmission shaft 302. The rotating motor 301 provides power for the rotation of the transmission shaft 302, and the transmission is carried out through the transmission shaft 302.

[0035] In one embodiment, such as Figure 4 and Figure 5 As shown, the transmission shaft 302 is fixedly connected to the gear 303, and the filter wheel 201 is evenly provided with a plurality of tooth blocks 304 on its side. The tooth blocks 304 mesh with the gear 303, and the transmission shaft 302 drives the gear 303 to rotate. The gear 303 drives the tooth blocks 304 to rotate through meshing transmission, and the tooth blocks 304 drive the filter wheel 201 to rotate, providing power for switching detection light.

[0036] In one embodiment, such as Figure 2 and Figure 3As shown, the upper end of the housing 101 is rotatably connected to the maintenance cover 402. The maintenance cover 402 is provided with a finger screw 401. The maintenance cover 402 can be unlocked by the finger screw 401. Opening the maintenance cover 402 makes it convenient for staff to disassemble, install and repair the filter wheel 201.

[0037] In one embodiment, such as Figure 2 and Figure 3 As shown, the side wall of the housing 101 is provided with a protective cover 502, and the protective cover 502 is provided with a release button 501. When it is necessary to manually adjust the position of the filter wheel, the protective cover 502 can be opened by rotating the release button 501, so as to manually rotate the filter wheel 201.

[0038] In one embodiment, such as Figure 2 and Figure 3 As shown, a position sensor is installed inside the housing 101 to detect the rotation position of the filter wheel 201 in real time and feed it back to the computer.

[0039] In one embodiment, such as Figure 2 and Figure 3 As shown, the filter mounting position 202 is provided with an elastic pressure plate to ensure that the filter can maintain flatness when it is installed inside the filter wheel 201.

[0040] The above embodiment discloses a wafer dark-field xenon lamp light source filter wheel device. The maintenance cover 402 is unlocked by a thumbscrew 401, allowing for easy disassembly and assembly of the filter wheel 201. A rotating motor 301 provides power to the rotation of the drive shaft 302, which in turn drives a gear 303. The gear 303, through meshing, drives a gear block 304, which in turn drives the filter wheel 201, providing power for switching the detection light. Broadband light emitted by the xenon lamp 104 is incident on the filter wheel 201 through the housing 101. The light passes through the filters installed on the filter wheel 201, and the filters filter the light. The filtered monochromatic light is projected onto the wafer surface through the output lamp 105, exciting a dark field scattering signal for the detection device to collect, thus completing the wafer detection work. By rotating the filter wheel 201, different types of filters installed in the filter mounting position 202 can filter the light, corresponding to different light wavelengths required for different detections, achieving a rapid switching effect and increasing convenience.

[0041] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A wafer dark-field xenon lamp light source filter rotary device, comprising a housing (101), wherein the surface of the housing (101) is provided with a shell, the shell is provided with a 12VDC power interface (102), a computer interface (103) is provided below the 12VDC power interface (102), a lamp holder is installed on one side of the housing (101), a xenon lamp (104) is installed inside the lamp holder, and a xenon lamp holder (106) is provided on the other side of the housing (101), an output lamp (105) is installed on the xenon lamp holder (106), characterized in that, The housing (101) is equipped with a filter switching mechanism, which includes a filter wheel (201) that is rotatably connected to the inner wall of the housing (101).

2. The wafer dark field xenon lamp light source filter rotary device according to claim 1, characterized in that, The filter wheel (201) has several filter mounting positions (202) evenly distributed on its surface. Each filter mounting position (202) has a slot and bolt seats on both sides of the slot.

3. The wafer dark-field xenon lamp light source filter rotary device according to claim 1, characterized in that, The filter wheel (201) is provided with a rotating motor (301) on its side. The rotating motor (301) is mounted on the surface of the housing (101). The rotating motor (301) is provided with a drive shaft (302).

4. The wafer dark-field xenon lamp light source filter rotary device according to claim 3, characterized in that, The drive shaft (302) is fixedly connected to the gear (303), and the filter wheel (201) has a plurality of tooth blocks (304) evenly arranged on its side, and the tooth blocks (304) mesh with the gear (303).

5. The wafer dark-field xenon lamp light source filter rotary device according to claim 1, characterized in that, The upper end of the housing (101) is rotatably connected to a maintenance cover (402), and the maintenance cover (402) is provided with a finger screw (401).

6. The wafer dark-field xenon lamp light source filter rotary device according to claim 1, characterized in that, The side wall of the housing (101) is provided with a protective cover (502), and the protective cover (502) is provided with a release button (501).

7. The wafer dark-field xenon lamp light source filter rotary device according to claim 1, characterized in that, The housing (101) is equipped with a position sensor.

8. The wafer dark-field xenon lamp light source filter rotary device according to claim 1, characterized in that, The filter mounting position (202) is equipped with an elastic pressure plate.

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