Molding die for quartz crucible
Patent Information
- Application Number
- CN202521219642.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-06-16
- Publication Date
- 2026-08-18
- Estimated Expiration
- 2035-06-16
AI Technical Summary
[0005]为改善因现有模具的抽空效果不佳而导致制备的石英坩埚的开口以及侧壁处透明层的致密度较差的问题,本实用新型提供了一种石英坩埚的成型模具
[0017] The technical solution of this utility model involves dividing the cavity between the mold body and the water jacket into a first cavity and a second cavity using a separator. The first and second cavities are connected only at the top, with the mold body located in the first cavity and the evacuation port located at the bottom of the second cavity. During the evacuation process of the molding mold, the airflow first flows from the inside of the mold body to the first cavity near the outside of the mold body, then flows from the top of the first cavity into the second cavity, and finally flows from the top of the second cavity to the evacuation port at the bottom of the second cavity for discharge. In the direction of airflow, the opening and sidewalls of the mold body are closer to the evacuation port than the bottom of the mold body, resulting in better evacuation at the opening and sidewalls. This makes the gaps between the quartz sand grains at the corresponding positions of the quartz crucible more compact, ensuring that the transparent layer at the opening and sidewalls of the prepared quartz crucible has a high density.
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Figure CN224646851U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of quartz crucible production technology, and in particular to a quartz crucible forming mold. Background Technology
[0002] Quartz crucibles are consumable vessels used in pulling single-crystal silicon, especially translucent quartz crucibles that include a transparent layer and a bubble layer. The transparent layer is formed uniformly, densely, and smoothly on the inside of the quartz crucible by evacuation, which increases the crucible's strength. The bubble layer is formed on the outside of the quartz crucible, and contains a large number of bubbles, which ensures uniform heating and improves the crucible's heat retention.
[0003] The lifespan of a quartz crucible is related to the growth and migration of bubbles. As the crystal pulling time increases, bubbles in the bubble layer will gradually grow and migrate to the transparent layer. The bubbles in the transparent layer will then diffuse into the molten silicon contained in the crucible, affecting the crystal quality and the lifespan of the crucible.
[0004] During the melting of quartz crucibles, the effectiveness of evacuation directly affects the density of the transparent layer. Poor density of the transparent layer leads to faster bubble diffusion, affecting the lifespan of the quartz crucible. In existing quartz crucible forming molds, the evacuation port is far from the opening and sidewalls of the quartz crucible, resulting in poor density of the transparent layer at the opening and sidewalls, thus impacting the crucible's lifespan. Utility Model Content
[0005] To improve the problem of poor density of the opening and transparent layer at the sidewall of the prepared quartz crucible due to the poor vacuuming effect of the existing mold, this utility model provides a quartz crucible forming mold.
[0006] A molding die for a quartz crucible, according to an embodiment of the present invention, includes a die body and a water jacket, wherein a top-sealed cavity is formed between the die body and the water jacket; the molding die further includes:
[0007] A separator is disposed between the mold body and the water jacket, dividing the clamping cavity into a first cavity and a second cavity. The inner side of the separator and the outer side of the mold body form the first cavity, and the outer side of the separator and the inner side of the water jacket form the second cavity. The top of the first cavity and the top of the second cavity are connected, and the bottom of the second cavity is connected to a vacuum device outside the clamping cavity.
[0008] In some embodiments, the sidewalls and bottomwalls of the mold body are provided with a plurality of through holes that penetrate the inner and outer sides and communicate with the first cavity, and the bottom wall of the water jacket is provided with through holes that penetrate the inner and outer sides to communicate with the second cavity and the evacuation port of the evacuation device.
[0009] In some embodiments, a flange is provided on the outer side wall of the mold body near the opening, the flange extending outward from the outer side wall of the mold body to abut against the top of the water jacket and seal the top of the clamping cavity.
[0010] In some embodiments, a gap is left between the top of the separator and the bottom of the flange to allow communication between the top of the first cavity and the top of the second cavity.
[0011] In some embodiments, the separator has a shape adapted to the mold body.
[0012] In some embodiments, the distance between the inner sidewall of the separator and the outer sidewall of the mold body is equal to the distance between the outer sidewall of the separator and the inner sidewall of the water jacket.
[0013] In some embodiments, the outer sidewall of the separator is provided with a lug near the opening, and the lug is fixed to the inner sidewall of the water jacket.
[0014] In some embodiments, a rounded corner structure is provided at the connection between the inner sidewall and the inner bottom wall of the water jacket.
[0015] In some embodiments, the rounded corner structure is integrally formed with the sidewall and bottom wall of the water jacket.
[0016] In some embodiments, the rounded corner structure is filled and molded with a high-temperature resistant material.
[0017] The technical solution of this utility model involves dividing the cavity between the mold body and the water jacket into a first cavity and a second cavity using a separator. The first and second cavities are connected only at the top, with the mold body located in the first cavity and the evacuation port located at the bottom of the second cavity. During the evacuation process of the molding mold, the airflow first flows from the inside of the mold body to the first cavity near the outside of the mold body, then flows from the top of the first cavity into the second cavity, and finally flows from the top of the second cavity to the evacuation port at the bottom of the second cavity for discharge. In the direction of airflow, the opening and sidewalls of the mold body are closer to the evacuation port than the bottom of the mold body, resulting in better evacuation at the opening and sidewalls. This makes the gaps between the quartz sand grains at the corresponding positions of the quartz crucible more compact, ensuring that the transparent layer at the opening and sidewalls of the prepared quartz crucible has a high density.
[0018] During the crystal pulling process using a quartz crucible, the high density of the transparent layer at the opening and sidewalls of the quartz crucible effectively slows down the rate at which bubbles diffuse from the bubble layer toward the transparent layer, thereby extending the service life of the quartz crucible. Attached Figure Description
[0019] Figure 1 This is a schematic diagram of the structure of an existing crucible alloy mold;
[0020] Figure 2 This is a schematic diagram of the structure of a quartz molding die in one embodiment of this application;
[0021] Figure 3 This is a schematic diagram of the structure of the mold body in one embodiment of this application;
[0022] Figure 4 This is a schematic diagram of the structure of the separator in one embodiment of this application;
[0023] Figure 5 This is a schematic diagram of the structure of the water jacket in one embodiment of this application.
[0024] In the figure: mold body 10; through hole 11; flange 12; separator 20; support lug 21; water jacket 30; evacuation port 31; rounded corner structure 32; clamping cavity 40; first cavity 41; second cavity 42; gap 50. Detailed Implementation
[0025] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.
[0026] The orientations or positional relationships indicated by terms such as "upper," "lower," "left," "right," "middle," "longitudinal," "transverse," "horizontal," "inner," "outer," "radial," and "circumferential" used in this specification are based on the orientations or positional relationships shown in the accompanying drawings and are only for the purpose of simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0027] like Figure 1 As shown, the existing crucible alloy mold only includes a mold body 10 located on the inner side and a water jacket 30 located on the outer side. The mold body 10 has a through hole 11, and the bottom of the water jacket 30 has a evacuation port 31. A cavity 40 is formed between the mold body 10 and the water jacket 30. During the evacuation process, because the evacuation port 31 is close to the bottom of the mold body 10 and far from the opening and sidewall of the mold body 10, the gas at the opening and sidewall cannot be quickly removed, resulting in a lower density at the opening and sidewall of the formed quartz crucible.
[0028] This technical solution changes the airflow direction by using the separator 20, so that the opening and sidewall of the mold body 10 are closer to the evacuation port 31 than the bottom, thus improving the evacuation effect at the opening and sidewall.
[0029] See details Figure 2 The quartz crucible forming mold includes a mold body 10, a separator 20, and a water jacket 30. In this embodiment, a top-sealed cavity 40 is formed between the mold body 10 and the water jacket 30. The separator 20 is disposed between the mold body 10 and the water jacket 30, dividing the cavity 40 into a first cavity 41 and a second cavity 42. The inner side of the separator 20 and the outer side of the mold body 10 form the first cavity, and the outer side of the separator 20 and the inner side of the water jacket form the second cavity. The top of the first cavity 41 and the top of the second cavity 42 are connected, and the bottom of the second cavity 42 is connected to a vacuum device outside the cavity 40.
[0030] In this embodiment, the quartz crucible forming mold is equipped with a separator 20 that divides the cavity 40 between the mold body 10 and the water jacket 30 into a first cavity 41 and a second cavity 42. The mold body 10 is located in the first cavity 41, so that during the preparation process, the gas in the quartz crucible passes through the mold body 10 and first enters the first cavity 41. The first cavity 41 and the second cavity 42 are connected at the top. After the airflow enters the first cavity 41, it enters the second cavity 42 through the top. An evacuation port 31 is provided at the bottom 42 of the second cavity, so that the airflow flows from the top to the bottom of the second cavity 42 and is discharged from the evacuation port 31. During the evacuation process of the forming mold, the airflow from the inside of the mold body 10 first flows to the first cavity 41 near the outside of the mold body 10, then flows from the top of the first cavity 41 into the second cavity 42, and finally flows from the top of the second cavity 42 to the evacuation port 31 at the bottom of the second cavity 42 and is discharged. In the direction of airflow, the opening and sidewall of the mold body 10 are closer to the evacuation port 31 than the bottom of the mold body 10. The opening and sidewall of the mold body 10 have a better evacuation effect, which makes the gaps between the quartz sand grains at the corresponding positions of the quartz crucible more compact, ensuring that the transparent layer at the opening and sidewall of the prepared quartz crucible has a high density.
[0031] During the crystal pulling process using a quartz crucible, the high density of the transparent layer at the opening and sidewalls of the quartz crucible effectively slows down the rate at which bubbles diffuse from the bubble layer toward the transparent layer, thereby extending the service life of the quartz crucible.
[0032] It should be noted that during the crystal pulling process, due to various factors such as the heating elements of the quartz crucible and the fluctuations in the liquid level within the crucible, the diffusion of bubbles in the bubble layer mainly occurs on the sidewalls and openings of the quartz crucible. The molding die in this embodiment extends the service life of the quartz crucible by increasing the density of the transparent layer on the sidewalls and openings.
[0033] See details Figure 2 In this embodiment, the mold body 10, the separator 20, and the water jacket 30 are all vertically arranged hollow cylinders with open tops. Multiple through holes 11 are formed on the side and bottom walls of the mold body 10, penetrating both the inner and outer sides and communicating with the first cavity 41. These through holes 11 allow for evacuation of the raw material inside the mold body 10, enabling airflow from the inside of the mold body 10 to the first cavity 41 outside the mold body 10. The water jacket 30 is spaced and fitted onto the outside of the mold body 10, forming a top-sealed clamping cavity 40 between the mold body 10 and the water jacket 30. An evacuation port is formed on the bottom wall of the water jacket 30 for connecting to an evacuation device such as a vacuum pump. The separator 20 is disposed between the mold body 10 and the water jacket 30. The inner side wall and the inner bottom wall of the separator 20 form a first cavity 41 between the outer side wall and the outer bottom wall of the mold body 10, and the outer side wall and the outer bottom wall of the separator 20 form a second cavity 42 between the outer side wall and the outer bottom wall of the separator 20 and the inner side wall and the inner bottom wall of the water jacket 30.
[0034] See details Figure 2 and Figure 3 In this embodiment, the mold body 10 is located on the innermost side. A flange 12 is provided on the outer side wall of the mold body 10 near the opening of the mold body 10. The flange 12 extends outward from the side wall of the mold body 10 to abut against the top of the water jacket 30 and seal the top of the cavity 40. The flange 12 can not only be used to pass bolts to connect the mold body 10 and the water jacket 30, but also to seal the top of the cavity 40 formed between the mold body 10 and the water jacket 30, ensuring the airtightness of the cavity 40.
[0035] See details Figure 2 and Figure 4 In this embodiment, the separator 20 is disposed between the mold body 10 and the water jacket 30. The separator 20 has a shape adapted to the mold body 10, and the mold body 10 has a shape adapted to the quartz crucible. A gap 50 is left between the top of the separator 20 and the bottom of the flange 12, so that the first clamping cavity 40 and the second clamping cavity 40 can communicate through the gap 50. The distance between the inner side of the sidewall of the separator 20 and the outer sidewall of the mold body 10 is preferably equal to the distance between the outer sidewall of the separator 20 and the inner sidewall of the water jacket 30, so that the separator 20 is located in the middle of the clamping cavity, ensuring that the volumetric flow rate of the first cavity 41 and the second cavity 42 is equal at this location, and ensuring smooth airflow. A lug 21 is provided on the outer sidewall of the separator 20 near the opening, and the lug 21 is fixed to the inner sidewall of the water jacket 30. The preferred number of the support ears 21 is 4. The 4 support ears 21 are evenly arranged around the circumference of the separator 20. The 4 support ears 21 are fixed to the inner side wall of the water jacket 30 by welding, which is convenient to connect. The separator 20 can be fixed to the water jacket 30 through the support ears 21.
[0036] See details Figure 2 and Figure 5 In this embodiment, the water jacket 30 is located on the outermost side, and the evacuation port 31 opened on the bottom wall of the water jacket 30 is arranged coaxially with the water jacket 30, so that the evacuation port 31 is located at the center of the bottom wall of the water jacket 30, ensuring that the air in the molding mold can be discharged evenly.
[0037] In this embodiment, a rounded corner structure 32 is provided at the connection between the inner side wall and the inner bottom wall of the water jacket 30. This rounded corner structure 32 can not only form a smooth transition surface between the inner side wall and the inner bottom wall of the water jacket 30, but also fill the blank at the traditional right-angle corner to reduce the air volume, which helps to ensure smooth gas flow, reduce the probability of airflow vortex generation, improve the evacuation effect, and shorten the sealing time of the molten quartz crucible.
[0038] In this embodiment, the rounded corner structure 32 can be integrally formed with the side wall and bottom wall of the water jacket 30. The material of the rounded corner structure 32 is the same as that of the water jacket 30 to facilitate the production and processing of the water jacket 30. In some embodiments, the rounded corner structure 32 can also be filled with a high-temperature resistant material to improve the heat preservation effect. It should be noted that the high-temperature resistant material in this embodiment specifically refers to a material that can adapt to the melting temperature of the quartz crucible, such as quartz wool.
[0039] It should be noted that the mold body 10 and the separator 20 in this embodiment are both made of conventional alloy materials to ensure high temperature resistance, corrosion resistance and high strength requirements. The water jacket 30 is usually made of stainless steel to meet the requirements of high strength and heat conduction.
[0040] When melting a quartz crucible using the molding die of this embodiment, firstly, high-purity quartz sand is poured into the die body 10, and the quartz sand is initially shaped using centrifugal force and a molding rod. Next, the molding die is transferred to the melting chamber. Then, a vacuum pump is used to evacuate the molding die. During evacuation, the airflow flows from the inside of the die body 10 through the through-hole 11 to the first cavity 41 on the outside of the die body 10, then flows from the top of the first cavity 41 into the second cavity 42, and finally flows from the top of the second cavity 42 to the evacuation port 31 at the bottom of the second cavity 42. Because the opening and sidewalls of the mold body 10 are closer to the evacuation port 31 than the bottom of the mold body 10, the opening and sidewalls of the mold body 10 have a better evacuation effect, making the gaps between the quartz sand grains at the corresponding positions of the opening and sidewalls of the prepared quartz crucible more compact; then the electrode is arc-shaped and inserted into the shaped quartz sand, so that the quartz sand becomes molten; next, it is cooled to form a quartz crucible blank; finally, the blank is processed into a finished quartz crucible, ensuring that the transparent layer of the quartz crucible at the opening and sidewalls has a high density, and the service life of the quartz crucible is long during the crystal pulling process.
[0041] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0042] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.
Claims
1. A molding die for a quartz crucible, characterized in that, The mold includes a mold body (10) and a water jacket (30), with a top-sealed cavity (40) formed between the mold body (10) and the water jacket (30). The molding mold also includes: A separator (20) is disposed between the mold body (10) and the water jacket (30) to divide the clamping cavity (40) into a first cavity (41) and a second cavity (42). The inner side of the separator (20) and the outer side of the mold body (10) form the first cavity (41), and the outer side of the separator (20) and the inner side of the water jacket (30) form the second cavity (42). The top of the first cavity (41) and the top of the second cavity (42) are connected, and the bottom of the second cavity (42) is connected to the vacuum device outside the clamping cavity (40).
2. The forming mold for the quartz crucible according to claim 1, characterized in that: The mold body (10) has multiple through holes (11) on its side walls and bottom walls that connect to the first cavity (41) through the inner and outer sides. The bottom wall of the water jacket (30) has through holes (11) that connect to the second cavity (42) and the evacuation port (31) of the evacuation device.
3. The forming mold for the quartz crucible according to claim 2, characterized in that: A flange (12) is provided on the outer side wall of the mold body (10) near the opening. The flange (12) extends outward from the side wall of the mold body (10) to abut against the top of the water jacket (30) and seal the top of the clamping cavity (40).
4. The forming mold for the quartz crucible according to claim 3, characterized in that: A gap (50) is left between the top of the separator (20) and the bottom of the flange (12) so that the top of the first cavity (41) and the top of the second cavity (42) are connected.
5. The forming mold for the quartz crucible according to claim 4, characterized in that, The separator (10) has a shape that is adapted to the mold body (10).
6. The forming mold for the quartz crucible according to claim 5, characterized in that: The distance between the inner side of the partition (20) and the outer side of the mold body (10) is equal to the distance between the outer side of the partition (20) and the inner side of the water jacket (30).
7. The forming mold for the quartz crucible according to claim 2, characterized in that: The partition (20) has a lug (21) on the outer side of its sidewall near the opening, and the lug (21) is fixed to the inner side of the sidewall of the water jacket (30).
8. The forming mold for the quartz crucible according to claim 2, characterized in that: The water jacket (30) has a rounded corner structure (32) at the connection between the inner side wall and the inner bottom wall.
9. The forming mold for the quartz crucible according to claim 8, characterized in that: The rounded corner structure (32) is integrally formed with the side wall and bottom wall of the water jacket (30).
10. The forming mold for the quartz crucible according to claim 8, characterized in that: The rounded corner structure (32) is filled with a high-temperature resistant material.