Microscopy system

Abstract

The utility model provides a kind of microscopic imaging system, wherein, microscopic imaging system includes two groups of imaging channels, each group of imaging channel has first light source, relay assembly, objective and first imaging module;First light source is used to generate first optical signal;Relay assembly is used to project first optical signal to objective;Objective is arranged between relay assembly and sample, for converging first optical signal to sample, and the first optical signal after sample reflection is projected to first imaging module along relay assembly;First imaging module is used for the imaging of first optical signal;In two groups of imaging channels, one group of objective converges first optical signal on the front of sample, and another group of objective converges first optical signal on the back of sample;The microscopic imaging system of the utility model satisfies the acquisition of different surface image signals of sample, and simultaneously using bidirectional focusing module can conveniently realize the focusing operation of objective and sample in microscopic imaging system.

Description

Technical Field

[0001] This utility model relates to the field of imaging technology, and more specifically, to a microscopic imaging system. Background Technology

[0002] Most current microscopic imaging systems perform single-channel imaging, while complex multi-channel imaging microscopic systems often use a combination of normal and oblique incidence to perform single-image detection on a single surface of the sample.

[0003] Some samples have different effective information on their upper and lower surfaces, and both need to be detected. In this case, existing microscopic imaging systems need to manually flip the sample to expose different surfaces of the sample into the imaging channel. In addition, due to the differences in the concavity or shape of the two surfaces of the sample, it may sometimes be necessary to refocus the sample surface and the objective lens. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings mentioned in the background art and provide a microscopic imaging system.

[0005] The objective of this utility model is achieved through the following solution: A microscopic imaging system includes two imaging channels, each imaging channel having a first light source, a relay component, an objective lens, and a first imaging module; The first light source is used to generate the first light signal; The relay component is used to project the first optical signal onto the objective lens; The objective lens is positioned between the relay component and the sample to focus the first light signal onto the sample and project the first light signal reflected from the sample onto the first imaging module along the relay component. The first imaging module is used for imaging the first optical signal; In the two imaging channels, one objective lens focuses the first light signal onto the front of the sample, while the other objective lens focuses the first light signal onto the back of the sample.

[0006] The microscopic imaging system of this invention is equipped with two imaging channels. The objective lenses in the two imaging channels can acquire image signals from both sides of the sample and image them onto the first imaging module respectively, thus satisfying the acquisition of image signals from different surfaces of the sample. Moreover, there is no need to flip and adjust the sample or refocus during the process, making the operation convenient and quick.

[0007] Furthermore, for some semi-transparent samples, it is difficult to distinguish between the upper and lower surface images during unidirectional detection. To solve this problem, the first light signal is transmitted through the sample to form a transmission signal. The objective lens, relay component, and first imaging module in any one imaging channel are all located on the outgoing light path of the transmission signal in another imaging channel, so that the transmission signal in any one imaging channel can be imaged onto the first imaging module in another imaging channel, and the transmission image of the sample can be obtained.

[0008] Furthermore, the relay component includes a first beam splitter, which is used to reflect the first optical signal to the objective lens and transmit the first optical signal, which has been reflected by the sample and passed through the objective lens, to the first imaging module to acquire the sample image.

[0009] Furthermore, the relay assembly also includes one or more of the following: relay mirror, tube mirror, light-collecting mirror, filter, and prism. The selection and configuration can be made according to the relay requirements.

[0010] Furthermore, each objective lens is also connected to a displacement module, which is used to adjust the distance between the objective lens and the sample so that the objective lens can be focused onto the sample.

[0011] Furthermore, each imaging channel is also equipped with a focusing assembly, which includes a second light source, a second beam splitter, a second imaging module, a focusing optical path, and a reference optical path; The second light source is used to generate the second light signal; The second beam splitter is used to split the second optical signal into a focusing optical signal and a reference optical signal; The focusing optical path is used to converge the focusing light signal onto the sample surface through the objective lens, and project the focusing light signal reflected from the sample and passing through the objective lens onto the second imaging module; The reference optical path is used to project the reference optical signal onto a set of first reflection modules, and to project the reference optical signal reflected by the first reflection modules onto the second imaging module; The second imaging module is used to image the focusing light signal and the reference light signal, and combines the focusing light signal and the reference light signal to achieve focusing between the objective lens and the sample.

[0012] Furthermore, the focusing optical path includes a second reflection module and a third reflection module, which are used to connect the focusing optical path between the second beam splitter and the objective lens.

[0013] Furthermore, the second and third reflection modules are mounted on the displacement module and can move with the displacement module.

[0014] Furthermore, the first reflection module is a double-sided mirror, and each of the two sets of reflective surfaces of the double-sided mirror is used to reflect a set of reference light signals in the focusing assembly.

[0015] Furthermore, the focusing assembly also includes a fourth reflection module, which is used to connect the reference optical path between the second beam splitter and the first reflection module. Attached Figure Description

[0016] Figure 1 A structural block diagram of the microscopic imaging system provided in the embodiments of this utility model; Figure 2 The optical path diagram of the microscopic imaging system provided in this embodiment of the utility model; Figure 3 This is a waveform diagram of the superposition of the reference light signal and the focusing light signal in the embodiment of this utility model; The icons have the following meanings: 1-First light source, 2-Relay component, 201-First beam splitter, 202-Tube lens, 3-Objective lens, 4-Displacement module, 5-Sample, 6-First imaging module, 7-Bidirectional focusing module, 701-Second light source, 702-Second beam splitter, 703-First reflection module, 704-Fourth reflection module, 705-Second imaging module, 8-Focusing optical path, 801-Second reflection module, 802-Third reflection module. Detailed Implementation

[0017] The principles and features of this utility model are described below. The examples given are only for explaining this utility model and are not intended to limit the scope of this utility model.

[0018] Example 1: Reference Figure 1 and Figure 2 This embodiment provides a microscopic imaging system, including two imaging channels, each imaging channel having a first light source 1, a relay component 2, an objective lens 3 and a first imaging module 6.

[0019] The first light source 1 is used to generate the first light signal; Relay component 2 is used to project the first optical signal to objective lens 3; Objective lens 3 is located between the relay component 2 and the sample 5 in the optical path. It is used to focus the first optical signal onto the sample 5. The first optical signal reflected by the sample 5 passes through objective lens 3 and relay component 2 and is projected onto the first imaging module 6. The first imaging module 6 is used for imaging the first optical signal; In the two imaging channels, one objective lens 3 focuses the first light signal onto the front of the sample 5, and the other objective lens 3 focuses the first light signal onto the back of the sample 5.

[0020] Therefore, the objective lenses 3 in the two imaging channels each focus on one side of the sample 5, which can acquire image signals from both sides of the sample 5 and image them onto the first imaging module 6 respectively, thus satisfying the acquisition of image signals from different surfaces of the sample 5. There is no need to flip and adjust the sample 5 or refocus during the process, making the operation convenient and quick.

[0021] The first light source 1 can be one or more light-emitting elements, which can be incoherent light sources such as argon arc lamps, halogen lamps, and LEDs, or coherent light sources such as lasers. In addition, the first light source 1 can also be an illumination system that completes beam shaping. For example, the illumination system includes one or more light-emitting elements and an optical component for shaping the beam generated by the one or more light-emitting elements. As needed, those skilled in the art may use one or more lenses and / or mirrors in the optical component, which will not be elaborated here.

[0022] In addition, the two imaging channels can each be independently equipped with a first light source 1 as described above, or the first light source 1 in the two imaging channels can be formed by beam splitting of one or more light-emitting elements, or the first light source 1 in the two imaging channels can also be formed by beam splitting of a light beam generated by a lighting system.

[0023] The relay component 2 is used to relay the first light signal generated by the first light source 1 to the objective lens 3, and to relay the first light signal reflected by the sample 5 to the first imaging module 6. As needed, those skilled in the art may use one or more of the following: relay mirror, tube mirror 202, light-collecting mirror, filter and prism.

[0024] The first imaging module 6 can be an imaging system or a screen with sensors such as CCD, TDI, and CMOS, and the two imaging channels can each be equipped with a first imaging module 6.

[0025] Alternatively, the two imaging channels can share a set of first imaging modules 6. In this case, the first light signals reflected from both sides of the sample 5 only need to pass through the relay component 2 and then be guided to the same set of first imaging modules 6 through the corresponding optical path structure.

[0026] For example, in this embodiment, taking any one set of imaging channels as an example, the relay component 2 includes a first beam splitter 201 and a set of tube mirrors 202. The first light signal emitted by the first light source 1 is reflected by the first beam splitter 201 and then passes through a set of tube mirrors 202 and a set of objective lenses 3, and then converges on the surface of the sample 5. The first light signal reflected by the sample 5 passes through the objective lens 3 and tube mirror 202 and is transmitted through the first beam splitter 201. The first light signal transmitted through the first beam splitter 201 is then imaged on the first imaging module 6.

[0027] Example 2: For some semi-transparent samples 5, it is difficult to distinguish the images of the upper and lower surfaces during unidirectional detection. To solve this problem, based on the microscopic imaging system in Example 1, the first light signal in any set of imaging channels can be transmitted through the sample 5 to form a transmission signal. In any one of the imaging channels, the objective lens 3, the relay component 2, and the first imaging module 6 are all located on the outgoing light path of the transmission signal in another imaging channel, so that the transmission signal in any one of the imaging channels can be imaged onto the first imaging module 6 in another imaging channel, and the transmission image of sample 5 can be obtained.

[0028] Therefore, the microscopic imaging system in this embodiment can obtain the front reflection image, the back reflection image, and the transmission image along any direction of the front and back surfaces of sample 5.

[0029] In Embodiment 1 or Embodiment 2, when the objective lens 3 is focused on the surface of the sample 5 and the distance between the objective lens 3 and the sample 5 is not adjustable, this situation can be used to acquire images of a type of sample 5 with good thickness consistency; or, when the distance between the objective lens 3 and the sample 5 is adjustable, this situation can be used to acquire images of samples 5 with different thicknesses using the objective lens 3.

[0030] When the distance between objective lens 3 and sample 5 is adjustable, it can be set so that the position of sample 5 is fixed and the distance between objective lens 3 and sample 5 in the two imaging channels is adjustable.

[0031] Alternatively, both the sample 5 and the two objective lenses 3 in the imaging channels can be adjusted and moved along the optical axis of the first optical signal, which can also enable the two objective lenses 3 to focus on the front and back of the sample 5. However, this would make the focusing operation of the sample 5 and the objective lenses 3 more complicated.

[0032] Example 3: Based on Embodiment 2, in this embodiment, the position of the sample 5 is relatively fixed, and each objective lens 3 is also connected to a displacement module 4. The displacement module 4 is mainly used to adjust the displacement of the objective lens 3, that is, to adjust the distance between the objective lens 3 and the sample 5 so that the objective lens 3 can focus on the sample 5. Therefore, the displacement module 4 can be a manual or electric displacement platform such as a focusing knob or a six-axis fine adjustment frame.

[0033] By adjusting the distance between objective lens 3 and sample 5, the focusing and defocusing of objective lens 3 on the surface of sample 5 can be achieved.

[0034] Example 4: Based on Embodiment 3, in the microscopic imaging system provided by this utility model, each imaging channel is also equipped with a focusing component, and two focusing components are integrated into a bidirectional focusing module 7. Each focusing component includes a second light source 701, a second beam splitter 702, a second imaging module 705, a focusing optical path 8, and a reference optical path.

[0035] The second light source 701 is used to generate the second light signal.

[0036] The second beam splitter 702 is used to split the second optical signal into a focusing optical signal and a reference optical signal. One of the focusing optical signal and the reference optical signal is formed by reflection through the second beam splitter 702, and the other is formed by transmission through the second beam splitter 702.

[0037] The focusing optical path 8 is used to converge the focusing light signal onto the surface of the sample 5 via the objective lens 3, and project the focusing light signal reflected from the sample 5 and passed through the objective lens 3 onto the second imaging module 705; The reference optical path is used to project the reference optical signal onto a set of first reflection modules 703, and to project the reference optical signal reflected by the first reflection modules 703 onto the second imaging module 705; The second imaging module 705 is used to image the focusing light signal and the reference light signal, and combines the focusing light signal and the reference light signal to achieve focusing between the objective lens 3 and the sample 5.

[0038] Specifically, refer to Figure 2 The second light source 701 is used to generate the second light signal. The second light source 701 can be an independent coherent light source, or the second light source 701 can be a coherent light source formed by another beam splitter before or after the first light source 1 is split by the first beam splitter 201.

[0039] It is easy to understand that when the second light source 701 and the first light source 1 are beam split by a beam splitter, during the focusing process, in order to avoid interference from the first light source 1, the first light signal can be blocked by a corresponding light-blocking structure to prevent the first light signal from entering or leaving the objective lens 3.

[0040] Reference Figure 2 In this embodiment, the second light signal emitted by the second light source 701 is transmitted through the second beam splitter 702 to transmit a reference light signal and reflect a focusing light signal.

[0041] It is easy to understand that each of the two imaging channels can be equipped with a first reflection module 703 in its focusing assembly; see reference. Figure 2 In this embodiment, the first reflection module 703 is a double-sided reflector. Therefore, the reference light signals in the two sets of focusing components can be projected onto one side of the double-sided reflector. The reference light paths in the two sets of focusing components are arranged symmetrically on the outer sides of the two sides of the double-sided reflector.

[0042] In this embodiment, the focusing optical path 8 has a second reflection module 801 and a third reflection module 802. The second reflection module 801 and the third reflection module 802 are used to connect the focusing optical path 8 between the second beam splitter 702 and the objective lens 3. That is, in each group of focusing optical paths 8, the focusing light signal reflected by the second beam splitter 702 passes through the second reflection module 801 and the third reflection module 802 in sequence and reaches the objective lens 3, and is then projected onto the surface of the sample 5 by the objective lens 3. The focusing light signal reflected from the surface of the sample 5 then travels along the objective lens 3, the third reflection module 802 and the second reflection module 801 to the second beam splitter 702. Then, the focusing light signal is transmitted through the second beam splitter 702 to reach the second imaging module 705.

[0043] The second reflection module 801 can be a reflector or a total reflection lens. In this embodiment, since the third reflection module 802 participates in the imaging optical path of the imaging channel, the third reflection module 802 adopts a beam splitter structure so that the first optical signal in the imaging channel can be transmitted through the third reflection module 802.

[0044] In some embodiments, when the wavelengths of the first light source 1 and the second light source 701 are different, the third reflection module 802 may also be a dichroic mirror, transmitting the first light signal and reflecting the focusing light signal.

[0045] In this embodiment, the third reflection module 82 is located between the objective lens 3 and the tube lens 202.

[0046] In this embodiment, since the two sets of focusing components share a single double-sided mirror, in order for the reference light signal transmitted by the second beam splitter 702 to be projected onto one side of the double-sided mirror, the reference... Figure 2 A fourth reflection module 704 is provided in the reference optical path of the second beam splitter 702 and the double-sided mirror. The reference light signal reflected by the first reflection module 703 passes through the fourth reflection module 704 and the second beam splitter 702 in sequence before reaching the second imaging module 705.

[0047] The fourth reflection module 704 can be a reflector or a total reflection lens, and the second imaging module 705 can be an imaging system or a screen with sensors such as CCD, TDI, and CMOS.

[0048] Reference Figure 2 In this embodiment, the second reflection module 801, the third reflection module 802, and the objective lens 3 are integrated on a set of displacement modules 4.

[0049] Example 5: This embodiment provides a focusing method for a microscopic imaging system, which uses the microscopic imaging system provided in Embodiment 4.

[0050] The focusing methods include: In each imaging channel, the distance between the objective lens 3 and the sample 5 is adjusted by the displacement module 4, which changes the optical path of the focusing light signal. The change in the optical path difference between the focusing light signal and the reference light signal will change the amplitude of the interference signal formed by the superposition of the focusing light signal and the reference light signal. When the optical path difference between the reference light signal and the focusing light signal approaches zero, the amplitude of the interference image on the second imaging module 705 is at its maximum, and the objective lens 3 focuses on the sample 5.

[0051] When the second imaging module 705 uses a detector, refer to Figure 3 When the amplitude of the superimposed waveforms of the focusing light signal and the reference light signal is at its maximum, the objective lens 3 focuses on the sample 5.

[0052] When the second imaging module 705 uses a screen, the objective lens 3 focuses on the sample 5 when the contrast between the bright and dark fringes in the interference fringes of the reference light signal and the focusing light signal on the screen is strongest.

[0053] In the microscopic imaging system provided by this utility model, two sets of focusing components are integrated on a set of bidirectional focusing modules 7. By using a set of bidirectional focusing modules 7, the focusing of the two imaging channels of the objective lens 3 can be completed, which has the advantages of high precision, fast speed, small space and low cost.

[0054] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0055] Furthermore, the terms "first," "second," "third," and "fourth," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," "third," and "fourth," etc., may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0056] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0057] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0058] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0059] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A microscopic imaging system, characterized in that, It includes two imaging channels, each of which has a first light source, a relay component, an objective lens, and a first imaging module; The first light source is used to generate the first light signal; The relay component is used to project the first optical signal onto the objective lens; The objective lens is positioned between the relay component and the sample, and is used to converge the first light signal onto the sample, and project the first light signal reflected from the sample along the relay component onto the first imaging module; The first imaging module is used for imaging the first optical signal; In the two sets of imaging channels, one set of objectives focuses the first light signal onto the front of the sample, and the other set of objectives focuses the first light signal onto the back of the sample.

2. The microscopic imaging system according to claim 1, characterized in that, The first optical signal is transmitted through the sample to form a transmission signal; The objective lens, relay component, and first imaging module in any one set of imaging channels are all located on the outgoing light path of the transmitted signal in another set of imaging channels, so that the transmitted signal in any one set of imaging channels can be imaged onto the first imaging module in another set of imaging channels.

3. The microscopic imaging system according to claim 2, characterized in that, The relay component includes a first beam splitter, which is used to reflect the first optical signal to the objective lens and transmit the first optical signal, after being reflected by the sample and passing through the objective lens, to the first imaging module.

4. The microscopic imaging system according to claim 3, characterized in that, The relay assembly also includes one or more of the following: relay mirror, tube mirror, light-collecting mirror, filter, and prism.

5. The microscopic imaging system according to claim 1, 2, 3 or 4, characterized in that, Each objective lens is also connected to a displacement module, which is used to adjust the distance between the objective lens and the sample.

6. The microscopic imaging system according to claim 5, characterized in that, Each of the imaging channels is also equipped with a focusing component, which includes a second light source, a second beam splitter, a second imaging module, a focusing optical path, and a reference optical path. The second light source is used to generate the second light signal; The second beam splitter is used to split the second optical signal into a focusing optical signal and a reference optical signal; The focusing optical path is used to converge the focusing light signal onto the sample surface via the objective lens, and project the focusing light signal reflected from the sample and passed through the objective lens onto the second imaging module; The reference optical path is used to project the reference optical signal onto a set of first reflection modules, and to project the reference optical signal reflected by the first reflection modules onto the second imaging module; The second imaging module is used for imaging the focusing light signal and the reference light signal.

7. The microscopic imaging system according to claim 6, characterized in that, The focusing optical path has a second reflection module and a third reflection module, which are used to connect the focusing optical path between the second beam splitter and the objective lens.

8. The microscopic imaging system according to claim 7, characterized in that, The second reflection module and the third reflection module are mounted on the displacement module.

9. The microscopic imaging system according to claim 6, characterized in that, The first reflection module is a double-sided reflector, and each of the two sets of reflective surfaces of the double-sided reflector is used to reflect a set of reference light signals in the focusing assembly.

10. The microscopic imaging system according to claim 9, characterized in that, The focusing assembly further includes a fourth reflection module, which is used to connect the reference optical path between the second beam splitter and the first reflection module.

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