A drift tube centering adjustment device
Patent Information
- Application Number
- CN202522085669.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-28
- Publication Date
- 2026-08-18
- Estimated Expiration
- 2035-09-28
AI Technical Summary
如果两端的偏差过大，会导致束流无法在正确的轴线上通过，影响束流能量和传输效率
本实用新型提供的漂移管对中调节装置在漂移管安装时可用于辅助定位，保证各个漂移管对中准确；对中调节装置整体体积小，结构简单；其安装方式灵活方便，既可以单独安装，也可以组合安装；通孔和定位孔与现有四极透镜的对应安装孔相同，共用安装孔位，具备互换性，此外可替换的对中销设置，满足不同长度漂移管的精度要求。
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Figure CN224652354U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of ion implantation equipment technology, and more specifically, to a drift tube centering adjustment device. Background Technology
[0002] The drift tube is an important component of the radio frequency acceleration section in the semiconductor ion implantation process. The core principle of radio frequency acceleration is that the LCR oscillation circuit accelerates the ions passing through the channel. The drift tube is this channel, which is hollow inside and allows the beam to pass through. Its overall shape is approximately a hollow cylinder.
[0003] For an RF accelerator cavity, the inductor coil of the RF barrel can be considered as an inductor L, the drift tube is mounted at the rod-shaped end of the RF barrel, and the distance between the drift tube and the quadrupole lens can be considered as a capacitance C. Currently, the commonly used arrangement of RF accelerator components is (...-quadrupole lens-drift tube-quadrupole lens-...), such as... Figure 1 and Figure 2 As shown, this arrangement ensures that each drift tube is spaced apart from the quadrupole lenses on both sides, i.e., two capacitors C.
[0004] When ions pass through the first interval, the drift tube exerts an attractive force on them; after passing through the drift tube, the ions exert a repulsive force, which is equivalent to a single drift tube accelerating the ions twice. Currently, the industrially permitted radio frequency band is 13.56MHz or its multiples. This means that ion acceleration must be based on this resonant frequency. Only when the sine wave reaches its peak does the Coulomb force reach its maximum value, and the ions are precisely located in the first capacitor C. When the sine wave reaches its trough, the ions pass through the drift tube and reach the second capacitor C, at which point the Coulomb force reaches its maximum value again. The overall acceleration effect of the LCR circuit on the ions is optimal. The initial velocity of the ions after excitation is related to their atomic mass, and since the radio frequency band is fixed, it is easy to see that the initial velocity of the ions is low, and they are continuously accelerated within the acceleration channel, with the distance traveled per unit time increasing. If a uniform acceleration effect is desired from each drift tube, the drift tube that acts on the ions first must be shorter, and the drift tube that acts on the ions last must be longer. Since the aforementioned drift tube is mounted on a rod-shaped structure within the RF barrel, its manufacturing and installation will introduce certain angular tolerances. The longer the drift tube, the greater the deviation at both ends. Appropriate tolerance values and alignment components need to be customized based on the different drift tube lengths. If the deviation at both ends is too large, the beam will not be able to pass along the correct axis, affecting beam energy and transmission efficiency.
[0005] Therefore, it is necessary to provide a drift tube alignment device. Utility Model Content
[0006] In view of this, the purpose of this utility model is to provide a drift tube centering adjustment device so that the drift tube can be accurately centered during installation, so as to avoid affecting the subsequent beam from not being able to pass on the correct axis, and to ensure beam energy and transmission efficiency.
[0007] To achieve the above objectives, the technical solution of this utility model is as follows: A drift tube centering adjustment device is provided for auxiliary positioning during drift tube installation. The centering adjustment device includes a support, a centering pin, multiple positioning components, and multiple connecting components. The four corners of the bottom of the support are respectively provided with through holes and positioning holes. The positioning components pass through the positioning holes and are used to achieve preliminary positioning with the inner wall of the RF barrel. The connecting components pass through the through holes and are used to connect with the inner wall of the RF barrel. The centering pin is cylindrical and is vertically connected to one side of the upper end of the support. The centering pin is used to fit into the inner hole of the drift tube, and the tolerance of the centering pin is slightly smaller than the tolerance of the inner hole of the drift tube.
[0008] Furthermore, the support has a triangular frame structure, including an I-beam at the bottom. The I-beam includes two parallel horizontal beams and a vertical beam connecting the two horizontal beams. A triangular portion is integrally formed on the vertical beam, and the centering pin is vertically connected to one side of the upper end of the triangular portion. The two horizontal beams are respectively provided with through holes and positioning holes on both sides.
[0009] Furthermore, the triangular portion is provided with weight-reducing holes.
[0010] Furthermore, the centering pin is detachably connected to the triangular portion.
[0011] Furthermore, the connector is a screw.
[0012] Furthermore, the positioning element is a stepped positioning pin, which includes a pin portion at the front end and a threaded portion at the rear end. The outer peripheral sidewall of the threaded portion is threaded, and an internal hexagonal hole is axially formed on the threaded portion.
[0013] The beneficial effects of this utility model are as follows: The drift tube centering adjustment device provided by this utility model can be used to assist in positioning during drift tube installation, ensuring accurate centering of each drift tube. The centering adjustment device has a small overall size and simple structure. Its installation method is flexible and convenient, and it can be installed individually or in combination. The through hole and positioning hole are the same as the corresponding mounting holes of the existing quadrupole lens, sharing the same mounting hole position and having interchangeability. In addition, the replaceable centering pin setting can meet the accuracy requirements of drift tubes of different lengths. Attached Figure Description
[0014] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other embodiments can be obtained based on these drawings.
[0015] Figure 1 This is a schematic diagram of the arrangement structure of the drift tube and quadrupole lens inside the radio frequency barrel in the prior art.
[0016] Figure 2 This is a schematic diagram of a partial structure in a radio frequency barrel in the prior art.
[0017] Figure 3 This is a schematic diagram of the drift tube centering adjustment device of this utility model.
[0018] Figure 4 This is a structural schematic diagram of the drift tube centering adjustment device of this utility model from another perspective.
[0019] Figure 5 This is a schematic diagram of the stepped positioning pin of this utility model.
[0020] Figure 6 This is a schematic diagram of the drift tube centering adjustment device of this utility model in use.
[0021] Explanation of reference numerals in the attached figures: 1. Support; 11. I-beam; 111. Horizontal beam; 112. Vertical beam; 12. Triangular part; 121. Weight reduction hole; 13. Through hole; 14. Positioning hole; 2. Centering pin; 3. Positioning component; 31. Pin part; 32. Threaded part; 33. Internal hexagonal hole; 10. RF barrel; 20. Drift tube; 30. Quadrupole lens. Detailed Implementation
[0022] The structure provided by this utility model will be explained and described in detail below with reference to the accompanying drawings.
[0023] refer to Figures 3 to 6 As shown, this embodiment specifically discloses a drift tube centering adjustment device for auxiliary positioning during the installation of the drift tube 20. The centering adjustment device includes a support 1, a centering pin 2, multiple positioning parts 3, and multiple connecting parts. In the illustrated embodiment, the support 1 has a triangular frame structure, which can ensure its structural stability. The support 1 includes an I-beam 11 at the bottom. The I-beam 11 includes two parallel horizontal beams 111 and a vertical beam 112 connected between the two horizontal beams 111. A triangular part 12 is integrally formed on the vertical beam 112, and a centering pin 2 is vertically connected to one side of the upper end of the triangular part 12. Through holes 13 and positioning holes 14 are respectively opened on both sides of the two horizontal beams 111.
[0024] In use, the positioning component 3 passes through the positioning hole 14 and is used to achieve initial positioning with the inner wall of the RF barrel 10. The connecting component passes through the through hole 13 and is used to connect with the inner wall of the RF barrel 10. The centering pin 2 is cylindrical and is vertically connected to one side of the upper end of the support 1. The centering pin 2 is used to fit into the inner hole of the drift tube 20, and the tolerance of the centering pin 2 is slightly smaller than the tolerance of the inner hole of the drift tube 20.
[0025] Understandably, assuming the inner diameter of the drift tube 20 is 10mm ± 0.02mm, its tolerance is 0.04mm; the actual inner diameter is between 9.98mm and 10.2mm. Since the centering pin 2 needs to fit within the inner diameter of the drift tube 20, its design size can be 9.8mm ± 0.01mm, meaning its tolerance is 0.02mm. The reagent size of the centering pin 2 is between 9.79mm and 9.81mm, with the maximum size of 9.81mm being slightly smaller than the minimum inner diameter of the drift tube (9.98mm). This ensures that the centering pin 2 can be smoothly installed into the drift tube, and during use, it will not cause jamming or a loose fit due to dimensional deviations, thus affecting normal operation and installation accuracy adjustment.
[0026] Of course, since the inner diameters of different drift tubes 20 vary, there are multiple specifications for the centering pin 2. When adjusting and installing different drift tubes 20, the corresponding centering pin 2 must be selected. The diameter of the centering pin 2 may vary slightly depending on the length of the drift tube 20. For shorter drift tubes 20, a centering pin 2 with a slightly higher tolerance is used; for longer drift tubes 20, a centering pin 2 with a relatively looser tolerance is used. Generally, a complete centering adjustment device will have several centering pins 2 with different tolerances.
[0027] In some other embodiments, the support 1 can also be directly set as a structure in which two rectangular blocks are vertically connected as a whole. Through holes 13 and positioning holes 14 are also opened at the four corners of the bottom rectangular block, and the centering pin 2 is connected to one side of the upper end of the other rectangular block.
[0028] In comparison, the support 1 in the illustrated embodiment can reduce the amount of processing materials and has a small volume, which means that the whole has the advantages of being lightweight, using less material, simple to manufacture and low in cost.
[0029] It should be noted that the inner wall of the RF barrel 10 has mounting holes corresponding to the through hole 13 and positioning hole 14 on the support 1. These mounting holes are used to install the original component, namely the quadrupole lens 30. In other words, when the support 1 is connected to the inner wall of the RF barrel 10 in this invention, the mounting hole corresponding to the quadrupole lens 30 is used. Therefore, when adjusting the drift tube using the adjustment device, the quadrupole lens 30 adjacent to the drift tube must be removed first.
[0030] In some preferred embodiments, a weight-reducing hole 121 is provided on the triangular portion 12 of the support 1, which can further reduce the overall weight of the support 1, making the entire support 1 lighter, stronger and easier to use.
[0031] In some embodiments, the centering pin 2 and the triangular portion 12 are detachably connected, specifically by bolts, screws, etc. The detachable connection method facilitates the replacement of different centering pins 2.
[0032] refer to Figure 5 As shown, in some embodiments, the positioning element 3 is a stepped positioning pin, which is modified from a screw. The stepped positioning pin includes a pin portion 31 at the front end and a threaded portion 32 at the rear end. The outer peripheral sidewall of the threaded portion 32 is threaded, and an internal hexagonal hole 33 is axially formed on the threaded portion 32. After the stepped positioning pins at the four corners of the support 1 are passed through the corresponding positioning holes 14, they are connected to the corresponding pin holes on the inner wall of the RF barrel 10, thereby achieving the initial fixation of the support 1 and the RF barrel 10. Specifically, the diameter of the pin portion 31 is smaller than the minor diameter of the thread. By turning the internal hexagonal hole 33 of the stepped positioning pin, its front end can enter the pin hole of the RF barrel 10 cavity.
[0033] In this embodiment, the connector is a screw. After the screws at the four corners of the support 1 pass through the through holes 13, they are connected to the corresponding mounting holes on the inner wall of the radio frequency barrel 10 to fix the support 1 to the radio frequency barrel 10.
[0034] The following describes the usage and principle of the drift tube centering adjustment device provided by this utility model: Explanation of the principle: In ion implantation, the beam needs to be accelerated to a certain energy level by the radio frequency band to successfully complete ion implantation. This is a crucial indicator of the maturity of ion implantation technology. To ensure the beam is accelerated to the required energy level, it must be correctly and continuously accelerated during its passage through the acceleration section. For example... Figure 1 and 2As shown, multiple drift tubes 20 and quadrupole lenses 30 are arranged sequentially in the beam channel and work together to continuously accelerate the beam. The core principle of the RF barrel 10 is an LCR oscillation circuit, where ions are accelerated as they pass through its channel. The drift tubes 20, as the end component of the RF barrel and the beam channel, directly determine whether the beam can be accelerated along the central axis and the beam transmission efficiency. If multiple drift tubes 20 deviate from the center position, it may result in the inability to form a beam. Therefore, this invention provides a drift tube centering adjustment device as described in any of the above embodiments for centering the drift tubes 20 mounted on the RF barrel 10. Figure 6 As shown, the specific adjustment steps are as follows: Step 1: Identify the drift tube 20 that needs to be centered and adjusted, and ensure that both ends of it are unoccupied. If the quadrupole lenses 30 are installed at both ends, the quadrupole lenses 30 need to be removed. Step 2: Based on the dimensions of the drift tube 20, select a centering pin 2 with appropriate tolerance, and connect and tighten the centering pin 2 to the support 1 using screws and pins. Step 3: Install the drift tube 20 onto the electrode rod of the RF barrel 10, without tightening the screws, allowing it some room to rotate. Step 4: Depending on the actual installation location, push the centering pin 2 into the inner hole of the drift tube 20 from the left or right side, straighten and adjust the device so that the plane of the I-beam 11 is parallel to the cavity wall of the RF barrel 10, and slowly rotate the stepped positioning pin, i.e. the positioning part 3, so that the stepped positioning pin enters the pin hole in the cavity. If step four can be performed smoothly, it means that the installation error of drift tube 20 is within an acceptable range. Then proceed to step five. Otherwise, skip steps five and six and proceed directly to step seven. Step 5: After confirming that the pin hole position is correct, tighten the connecting parts of the centering device, namely the screws and the stepped positioning pins, so that the centering adjustment device is tightly connected to the cavity. Step 6: Gently shake the drift tube 20 until it can rotate slightly at a very small angle. Then tighten the set screw of the drift tube 20 to make the drift tube 20 tightly connected to the electrode rod. Unscrew the stepped positioning pin of the centering adjustment device, remove the screw of the centering adjustment device, remove the centering adjustment device, and proceed to step 8. Step 7: If the centering adjustment device cannot be installed normally, it means that the drift tube 20 is out of tolerance and unqualified. Replace it with a drift tube 20 that meets the size requirements and repeat steps 2 to 4. Step 8: Confirm that the drift tube 20 is not loose, install the quadrupole lens 30, and measure the distance between the drift tube 20 and the quadrupole lens 30. If the requirements are met, the centering adjustment is complete. Alternatively, if higher centering accuracy is desired, centering adjustment devices can be installed simultaneously from both the left and right sides in step four.
[0035] In summary, the centering adjustment device provided by this utility model can assist in positioning during the installation of drift tubes, ensuring accurate centering of each drift tube; it is small in size, simple in structure, and easy to install; the installation method is flexible, and it can be installed individually or in combination; the interface is the same as existing equipment, sharing the same mounting holes, and is interchangeable; it has replaceable centering pins to meet the accuracy requirements of drift tubes of different lengths.
[0036] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.
[0037] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0038] In the description of this specification, the references to terms such as "this embodiment," "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any at least one embodiment or example. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.
[0039] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.
[0040] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and simple improvements made on the substantive content of the present utility model should be included within the protection scope of the present utility model.
Claims
1. A drift tube centering adjustment device, characterized in that, The centering adjustment device is used for auxiliary positioning during the installation of the drift tube (20). It includes a support (1), a centering pin (2), multiple positioning parts (3) and multiple connecting parts. The four corners of the bottom of the support (1) are respectively provided with through holes (13) and positioning holes (14). The positioning parts (3) pass through the positioning holes (14) and are used to achieve preliminary positioning with the inner wall of the radio frequency barrel (10). The connecting parts pass through the through holes (13) and are used to connect with the inner wall of the radio frequency barrel (10). The centering pin (2) is cylindrical and is vertically connected to one side of the upper end of the support (1). The centering pin (2) is used to be sleeved in the inner hole of the drift tube (20), and the tolerance of the centering pin (2) is slightly smaller than the tolerance of the inner hole of the drift tube (20).
2. The centering adjustment device according to claim 1, characterized in that, The support (1) has a triangular frame structure, including an I-beam (11) at the bottom. The I-beam (11) includes two parallel horizontal beams (111) and a vertical beam (112) connecting the two horizontal beams (111). A triangular part (12) is integrally formed on the vertical beam (112). The centering pin (2) is vertically connected to one side of the upper end of the triangular part (12). The two horizontal beams (111) are respectively provided with the through hole (13) and the positioning hole (14) on both sides.
3. The centering adjustment device according to claim 2, characterized in that, The triangular part (12) is provided with a weight reduction hole (121).
4. The centering adjustment device according to claim 2, characterized in that, The centering pin (2) is detachably connected to the triangular part (12).
5. The centering adjustment device according to claim 1, characterized in that, The connector is a screw.
6. The centering adjustment device according to claim 1, characterized in that, The positioning element (3) is a stepped positioning pin, which includes a pin part (31) at the front end and a threaded part (32) at the rear end. The outer peripheral sidewall of the threaded part (32) is threaded, and an internal hexagonal hole (33) is axially opened on the threaded part (32).