Four-station carousel mechanism for an inspection machine

By using an integrated four-station turntable mechanism and synchronous belt drive, the problems of complex turntable structure and unstable rotation in existing testing equipment have been solved, achieving lightweight and stable silicon wafer transfer, and improving testing efficiency and production capacity.

CN224677090UActive Publication Date: 2026-08-25FOLUNGWIN AUTOMATIC EQUIP CO LTD
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Patent Information

Application Number
CN202521702983.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-08-11
Publication Date
2026-08-25
Estimated Expiration
2035-08-11

AI Technical Summary

Technical Problem

In existing testing equipment, the turntable structure for silicon wafer transfer is complex and heavy, and the turning quality is unstable.

Method used

It adopts an integrated four-position turntable mechanism, combined with a rotating arm adsorption component and synchronous belt drive, to achieve lightweight design. The adsorption position can be adjusted by the vertical movement adjustment groove of the rotating arm. It is equipped with a backlit dust removal air knife and an anti-adhesion blowing pipe to improve steering stability and detection efficiency.

Benefits of technology

This design achieves lightweighting and improved steering stability of the turntable structure, meets the transfer requirements of dual half-wafers, and improves production capacity and quality.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a four station carousel mechanism of detection machine, including four station carousel, backlight detection position and bad material discharge position, and backlight detection position is located four station carousel's front, and bad material discharge position is located four station carousel's rear, and the both sides of four station carousel are connected with carousel connection guide rail, and four station carousel's four all around distribution has four groups of rotary arm, and four station carousel and rotary arm integrative forming, and the outer end of rotary arm is provided with rotary arm suction accessory, and the middle part of rotary arm suction accessory is provided with rotary arm vertical shift adjusting groove along the vertical direction, and the screw on rotary arm vertical shift adjusting groove is connected with rotary arm thread. This four station carousel mechanism of detection machine is through integrative forming's structure, realizes lightweight to four station carousel, and the space that occupies of rotary arm is little, can realize the vertical direction position adjustment of suction accessory through adjusting groove, satisfies the transfer requirement of double half piece silicon wafer, and can discharge bad material in time, improves the production capacity and quality in the production process.
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Description

Technical Field

[0001] This utility model relates to the technical field of testing equipment, and in particular to a four-station turntable mechanism for a testing machine. Background Technology

[0002] After printing, crystalline silicon photovoltaic solar wafers require AOI (Automated Optical Inspection) and IV (Inductively Coupled Inspection) testing. AOI, based on optical principles, detects common defects encountered during printing production. IV testing involves measuring the current and voltage characteristics (IV curve) of the photovoltaic module. Only wafers that pass this test will proceed to the next stage of the production process. Existing testing equipment often features complex turntable structures for wafer transfer, resulting in a heavy overall structure and inconsistent transfer quality. Utility Model Content

[0003] One objective of this invention is to provide a four-station turntable mechanism for an inspection machine. The steering part adopts an integrated molding structure, which makes the whole machine lightweight, the steering more stable, and has the function of adjusting the adsorption position up and down.

[0004] To achieve this objective, the present invention adopts the following technical solution:

[0005] A four-station turntable mechanism for an inspection machine includes a four-station turntable, a backlight detection station, and a defective material discharge station. The backlight detection station is located in front of the four-station turntable, and the defective material discharge station is located behind the four-station turntable. Turntable connecting guide rails are connected to both sides of the four-station turntable. Four sets of rotating arms are distributed around the four-station turntable. The four-station turntable and the rotating arms are integrally formed. A rotating arm suction component is provided at the outer end of the rotating arm. A rotating arm vertical movement adjustment groove is provided in the middle of the rotating arm suction component along the vertical direction. A screw on the rotating arm vertical movement adjustment groove is threadedly connected to the rotating arm.

[0006] As a preferred technical solution, a turntable motor is provided below the center of the four-position turntable, and the turntable motor drives the rotation of the four-position turntable through a synchronous belt and a synchronous pulley.

[0007] As a preferred technical solution, both sides of the rotating arm adsorption component are fixed with rotating adsorption plates, and a rotating air pipe connector is installed in the middle of the rotating adsorption plate.

[0008] As a preferred technical solution, a pneumatic assembly for the turntable is installed in the middle of the four-station turntable.

[0009] As a preferred technical solution, a backlight dust removal air knife is installed at the front end of the backlight detection position.

[0010] As a preferred technical solution, a defective material drawer is provided on the defective material discharge position. The defective material drawer moves horizontally, and a defective material handle is fixed to the outside of the defective material drawer.

[0011] As a preferred technical solution, anti-adhesion air blowing pipes are installed at both the input end of the turntable connecting guide rail and above the defective material discharge position.

[0012] The beneficial effects of this utility model are as follows: It provides a four-station turntable mechanism for an inspection machine. The four-station turntable mechanism of the inspection machine achieves lightweight design through an integrated molding structure. The rotating arm occupies little space. The vertical position of the adsorption component can be adjusted through the adjustment groove to meet the transfer requirements of double half-wafers of silicon and to discharge defective materials in a timely manner, thereby improving the production capacity and quality in the production process. Attached Figure Description

[0013] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0014] Figure 1 This is a schematic diagram of the overall structure of the four-station turntable mechanism of an inspection machine as described in the embodiment;

[0015] Figure 2 This is a partial structural diagram of the rotating arm described in the embodiment.

[0016] Figures 1 to 2 middle:

[0017] 1. Four-station turntable; 2. Backlit detection station; 3. Defective material discharge station; 4. Turntable connecting guide rail; 5. Rotary arm adsorption component; 6. Rotary arm vertical movement adjustment groove; 7. Turntable motor; 8. Turntable adsorption plate; 9. Turntable air pipe connector; 10. Turntable pneumatic assembly; 11. Backlit dust removal air knife; 12. Defective material drawer; 13. Defective material handle; 14. Anti-adhesion air blowing pipe. Detailed Implementation

[0018] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0019] like Figures 1 to 2 As shown in this embodiment, a four-station turntable mechanism for an inspection machine includes a four-station turntable 1, a backlight detection position 2, and a defective material discharge position 3. The backlight detection position 2 is located in front of the four-station turntable 1, and the defective material discharge position 3 is located behind the four-station turntable 1. Turntable connecting guide rails 4 are connected to both sides of the four-station turntable 1. Four sets of rotating arms are distributed around the four-station turntable 1. The four-station turntable 1 and the rotating arms are integrally formed. A rotating arm adsorption component 5 is provided at the outer end of the rotating arm. A rotating arm vertical movement adjustment groove 6 is provided in the middle of the rotating arm adsorption component 5 along the vertical direction. The screw on the rotating arm vertical movement adjustment groove 6 is threadedly connected to the rotating arm.

[0020] Based on the position of the front and rear turntable connecting guide rails 4, the vertical position of the rotating arm adsorption component 5 is adjusted by the vertical adjustment groove 6 of the rotating arm. After determining the height of the adsorbed silicon wafer, it is locked with screws. After the silicon wafer is transported by the front turntable connecting guide rail 4, the rotating arm adsorption component 5 on the rotating arm controls the adsorption of the silicon wafer and turns to the backlight detection position 2 for AOI detection of the back of the silicon wafer. If it is a defective product, it continues to turn to the defective material discharge position 3 at the rear for collection. If it is a good product, the four-station turntable 1 transfers the silicon wafer to the turntable connecting guide rail 4 on the other side for output.

[0021] A turntable motor 7 is installed at the lower center of the four-position turntable 1. The turntable motor 7 drives the rotation of the four-position turntable 1 through a synchronous belt and a synchronous pulley. When controlling the direction of the four-position turntable 1, the turntable motor 7 is located below to provide power, and the horizontal direction is achieved by driving the synchronous pulley and the synchronous belt.

[0022] Both sides of the rotating arm adsorption component 5 are fixed with rotating adsorption plates 8. A rotating air pipe connector 9 is installed in the middle of the rotating adsorption plate 8. In addition, a rotating pneumatic assembly 10 is installed in the middle of the four-position rotating plate 1. The rotating pneumatic assembly 10 is concentrated in the middle of the four-position rotating plate 1 to save space. It is connected to the rotating air pipe connector 9 and the silicon wafer is adsorbed and transferred through the rotating adsorption plates 8 on the rotating arm adsorption component 5.

[0023] A backlight dust removal air knife 11 is installed at the front end of the backlight detection position 2. The backlight dust removal air knife 11 removes dust from the silicon wafer, which helps to improve the accuracy of AOI detection.

[0024] The defective material discharge position 3 is equipped with a defective material drawer 12. The defective material drawer 12 moves horizontally. A defective material handle 13 is fixed on the outside of the defective material drawer 12. After being identified as defective in AOI inspection, the defective material will be placed in the defective material drawer 12 for storage. The defective material drawer 12 can be pulled out manually through the defective material handle 13 to remove the defective silicon wafer.

[0025] An anti-adhesion air pipe 14 is installed above the input end of the turntable connecting guide rail 4 and the defective material discharge position 3. During the silicon wafer transfer process, the downward air blowing through the anti-adhesion air pipe 14 prevents the silicon wafer from continuing to adhere to the original structure.

[0026] It should be stated that the above-described specific embodiments are merely preferred embodiments of this utility model and the technical principles applied thereto. Within the scope of the technology disclosed in this utility model, any variations or substitutions that are easily conceived by those skilled in the art should be covered within the protection scope of this utility model.

Claims

1. A four-station rotary table mechanism for an inspection machine, characterized in that, It includes a four-station turntable, a backlight detection station, and a defective material discharge station. The backlight detection station is located in front of the four-station turntable, and the defective material discharge station is located behind the four-station turntable. Turntable connecting guide rails are connected to both sides of the four-station turntable. Four sets of rotating arms are distributed around the four-station turntable. The four-station turntable and the rotating arms are integrally formed. The outer end of the rotating arm is provided with a rotating arm suction component. The middle part of the rotating arm suction component is provided with a rotating arm vertical movement adjustment groove along the vertical direction. The screw on the rotating arm vertical movement adjustment groove is threadedly connected to the rotating arm.

2. The four-station rotary table mechanism of the testing machine according to claim 1, characterized in that, A turntable motor is installed at the lower center of the four-position turntable, and the turntable motor drives the rotation of the four-position turntable through a synchronous belt and a synchronous pulley.

3. The four-station rotary table mechanism of the testing machine according to claim 1, characterized in that, Both sides of the rotating arm adsorption component are fixed with rotating adsorption plates, and a rotating air pipe connector is installed in the middle of the rotating adsorption plate.

4. The four-station rotary table mechanism of the testing machine according to claim 1, characterized in that, A pneumatic assembly for the turntable is installed in the middle of the four-station turntable.

5. The four-station rotary table mechanism of the testing machine according to claim 1, characterized in that, A backlight dust removal air knife is installed at the front end of the backlight detection position.

6. The four-station rotary table mechanism of the testing machine according to claim 1, characterized in that, The defective material discharge position is equipped with a defective material drawer, which moves horizontally, and a defective material handle is fixed to the outside of the defective material drawer.

7. The four-station rotary table mechanism of the testing machine according to claim 1, characterized in that, Anti-adhesion air blowing pipes are installed above both the input end of the turntable connecting guide rail and the top of the defective material discharge position.