Leak-proof and heat recovery device for high-temperature exhaust gas treatment equipment

Abstract

The utility model discloses a high -temperature waste gas treatment equipment's anti -leakage and heat recovery unit, specifically related to high -temperature waste gas treatment technical field, including water tank, inlet pipe and outlet pipe, and the water tank fixed communication of inlet pipe and outlet pipe opposite one end all, inlet pipe and outlet pipe all fixed mounting have first valve, the front side fixed mounting of water tank has thermometer, and the both ends fixed communication of water tank have first gas pipe and second gas pipe, and first gas pipe and second gas pipe all fixed mounting have second valve. The utility model discloses through opening two second valves, and high -temperature waste gas passes through first gas pipe and enters the connecting pipe, and the suspension block floats in the top of hot water, when hot water gradually reduces, and the waterproof switch opens the first valve on inlet pipe when the waterproof switch of the sliding block extrusion to the inside bottom of water tank, and the external water source passes through inlet pipe and enters the water tank, and the operation is simple, and it is convenient to add cold water automatically.

Description

Technical Field

[0001] This utility model relates to the field of high-temperature waste gas treatment technology, and more specifically, to a leak prevention and heat recovery device for high-temperature waste gas treatment equipment. Background Technology

[0002] In semiconductor manufacturing processes, such as thin film deposition (CVD), etching, and ion implantation, a large amount of waste gas is generated, containing volatile organic compounds (VOCs), corrosive gases (such as HCl and Cl2), toxic substances (such as PH3 and AsH3), and high-temperature gases (temperatures can reach 100-500℃). High-temperature waste gas treatment equipment is a treatment system designed for this type of high-temperature, high-pollution waste gas. It removes pollutants through physical, chemical, or biological methods to ensure that the emissions meet the emission standards before being discharged.

[0003] A search revealed that Chinese patent CN216537659U discloses a high-temperature waste gas treatment device. This device incorporates a high-temperature resistant, high-efficiency dust removal filter, a waste heat recovery mechanism, a photocatalytic filter, and a plasma purification filter within its casing. The high-temperature waste gas undergoes its first stage of filtration through the high-temperature resistant, high-efficiency dust removal filter, physically removing larger particles. Cold water is pre-circulated into the waste heat recovery mechanism, and after heat exchange between the high-temperature waste gas and the mechanism, the cold water is heated and can be used to supply hot water to factories, etc.

[0004] When the above-mentioned waste gas treatment equipment is in use, when high-temperature waste gas is introduced into the box, the high-temperature waste gas exchanges heat with the heat exchange plates and waste heat recovery pipes, thereby heating the cold water. However, after the hot water is discharged, it is inconvenient to detect the water volume in the box. When the water volume is seriously insufficient, the equipment is prone to dry burning in the high-temperature environment. Utility Model Content

[0005] In order to overcome the above-mentioned defects of the prior art, the present invention provides a leakage prevention and heat recovery device for high-temperature waste gas treatment equipment, which aims to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a leak-proof and heat recovery device for high-temperature waste gas treatment equipment, comprising a water tank, an inlet pipe, and an outlet pipe, wherein the opposite ends of the inlet pipe and the outlet pipe are fixedly connected to the water tank, a first valve is fixedly installed on both the inlet pipe and the outlet pipe, a thermometer is fixedly installed on the front side of the water tank, a first gas pipe and a second gas pipe are fixedly connected to both ends of the water tank respectively, and a second valve is fixedly installed on both the first gas pipe and the second gas pipe, a connecting pipe is fixedly connected between the first gas pipe and the second gas pipe, and a control component is provided inside the water tank, the control component comprising a slider, two sliding rods, a suspension block and two waterproof switches, the bottom ends of the two sliding rods penetrate the slider, and the two sliding rods are fixedly connected to the water tank, the bottom end of the suspension block is fixedly connected to the slider, and the two waterproof switches are fixedly installed at the top and bottom of the inside of the water tank respectively.

[0007] Furthermore, multiple heat-conducting columns are fixedly connected to the outer side of each connecting pipe.

[0008] As can be seen, in the above technical solution, multiple heat-conducting columns can ensure that heat is fully in contact with the water in the tank, thereby rapidly heating the water.

[0009] Furthermore, two fixing plates are fixedly connected to the top and bottom of the water tank, near the rear side.

[0010] As can be seen, in the above technical solution, the four fixing plates can be fixed by multiple bolts, thereby fixing the water tank.

[0011] Furthermore, a first gasket is fixedly bonded to one end of each of the water inlet pipe, water outlet pipe, first air pipe, and second air pipe.

[0012] Furthermore, a filter box is provided on one side of the first air pipe, and a third air pipe is fixedly connected to both the top and bottom of the filter box, and a third valve is fixedly installed on one of the third air pipes.

[0013] As can be seen, in the above technical solution, when the third valve is opened, the high-temperature exhaust gas is discharged through the third air pipe at the bottom of the filter box.

[0014] Furthermore, a second gasket is fixedly bonded to the opposite side of each of the two third tracheas.

[0015] Furthermore, the filter box is equipped with multiple activated carbon plates, and each activated carbon plate has a locking block on both sides, with one side of each locking block being fixedly connected to the filter box.

[0016] It can be seen that the above technical solutions are designed to facilitate the purification of high-temperature exhaust gases.

[0017] The technical effects and advantages of this utility model are as follows:

[0018] 1. This utility model allows high-temperature exhaust gas to enter the connecting pipe through the first gas pipe by opening two second valves. The suspended block floats on top of the hot water. When the hot water gradually decreases, the slider squeezes the waterproof switch at the bottom of the water tank. The waterproof switch opens the first valve on the water inlet pipe, and external water enters the water tank through the water inlet pipe. The operation is simple and convenient for automatic addition of cold water.

[0019] 2. This utility model improves the sealing between the inlet pipe, outlet pipe, second air pipe, two third air pipes and multiple external pipes by using three first gaskets and two second gaskets, thereby preventing leakage of high-temperature waste gas and water. Three activated carbon plates purify the high-temperature waste gas. When the high-temperature waste gas needs to be reused, the third valve is opened and the high-temperature waste gas is discharged through the third air pipe at the bottom of the filter box. The structure is simple, the leakage prevention effect is good, and it is easy to use. Attached Figure Description

[0020] The structures, proportions, sizes, etc. illustrated in this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed herein, and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that this utility model can produce, should still fall within the scope of the technical content disclosed in this utility model.

[0021] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0022] Figure 2 This is a rear view of the overall structure of this utility model;

[0023] Figure 3 This is a cross-sectional view of the water tank and a schematic diagram of the connecting pipe assembly structure of this utility model;

[0024] Figure 4 This is a schematic diagram of the assembly structure of the filter box and activated carbon plate of this utility model;

[0025] Figure 5 This is a schematic diagram of the control component structure of this utility model.

[0026] In the diagram: 1. Water tank; 2. Inlet pipe; 3. Outlet pipe; 4. First valve; 5. First gasket; 6. Thermometer; 7. Fixing plate; 8. First air pipe; 9. Second air pipe; 10. Second valve; 11. Third air pipe; 12. Filter box; 13. Second gasket; 14. Third valve; 15. Connecting pipe; 16. Heat-conducting column; 17. Control component; 18. Locking block; 19. Activated carbon plate; 171. Slider; 172. Sliding rod; 173. Suspension block; 174. Waterproof switch. Detailed Implementation

[0027] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0028] Refer to the instruction manual appendix Figure 1-5 The leakage prevention and heat recovery device of the high-temperature waste gas treatment equipment in this embodiment includes a water tank 1, an inlet pipe 2 and an outlet pipe 3. The opposite ends of the inlet pipe 2 and the outlet pipe 3 are fixedly connected to the water tank 1. A first valve 4 is fixedly installed on both the inlet pipe 2 and the outlet pipe 3. A thermometer 6 is fixedly installed on the front side of the water tank 1. A first air pipe 8 and a second air pipe 9 are fixedly connected to both ends of the water tank 1, and a second valve 10 is fixedly installed on both the first air pipe 8 and the second air pipe 9. A connecting pipe 15 is fixedly connected between the first air pipe 8 and the second air pipe 9. A control component 17 is provided inside the water tank 1. The control component 17 includes a slider 171, two sliding rods 172, a suspension block 173 and two waterproof switches 174. The bottom ends of the two sliding rods 172 pass through the slider 171 and are fixedly connected to the water tank 1. The bottom end of the suspension block 173 is fixedly connected to the slider 171. The two waterproof switches 174 are fixedly installed at the top and bottom of the inside of the water tank 1, respectively.

[0029] Furthermore, multiple heat-conducting columns 16 are fixedly connected to the outside of the connecting pipe 15, and two fixing plates 7 are fixedly connected to the top and bottom of the water tank 1 near the rear.

[0030] Furthermore, a first gasket 5 is fixedly bonded to one end of the inlet pipe 2, the outlet pipe 3, the first air pipe 8, and the second air pipe 9. A filter box 12 is provided on one side of the first air pipe 8. A third air pipe 11 is fixedly connected to the top and bottom of the filter box 12. A third valve 14 is fixedly installed on one of the third air pipes 11. A second gasket 13 is fixedly bonded to the opposite sides of the two third air pipes 11. Multiple activated carbon plates 19 are movably arranged inside the filter box 12. A locking block 18 is movably arranged on both sides of the multiple activated carbon plates 19. One side of the multiple locking blocks 18 is fixedly connected to the filter box 12.

[0031] Multiple external pipes are connected to the inlet pipe 2, outlet pipe 3, second air pipe 9, and two third air pipes 11, respectively. The three first gaskets 5 and the two second gaskets 13 can improve the sealing between the inlet pipe 2, outlet pipe 3, second air pipe 9, two third air pipes 11 and the multiple external pipes, thereby preventing the leakage of high-temperature waste gas and water. At the same time, the first gasket 5 on the first air pipe 8 can improve the sealing between the filter box 12 and the first air pipe 8. High-temperature waste gas enters the filter box 12 through the third air pipe 11 at the top of the filter box 12. The three activated carbon plates 19 purify the high-temperature waste gas. When the high-temperature waste gas needs to be reused, the third valve 14 is opened, and the high-temperature waste gas is discharged through the third air pipe 11 at the bottom of the filter box 12. The structure is simple, has a good anti-leakage effect, and is easy to use. Finally, the sealing plate on the front side of the filter box 12 is opened to disassemble and replace the activated carbon plates 19.

[0032] The usage method of this embodiment is as follows:

[0033] In use, open both second valves 10, and the high-temperature exhaust gas enters the connecting pipe 15 through the first air pipe 8. Multiple heat-conducting columns 16 ensure sufficient heat contact with the water in the water tank 1, rapidly heating the water. Finally, the high-temperature exhaust gas is discharged through the second air pipe 9, forming a complete air duct. The water temperature in the water tank 1 is detected by the thermometer 6. When the water temperature reaches a suitable level, open the first valve 4 on the outlet pipe 3, and the hot water in the water tank 1 is discharged through the outlet pipe 3. The suspended block 173 floats on top of the hot water. As the hot water gradually decreases, the slider 17... 1 and the suspension block 173 will move downward along the slide bar 172. When the slider 171 squeezes the waterproof switch 174 at the bottom of the water tank 1, the waterproof switch 174 opens the first valve 4 on the water inlet pipe 2, and the external water source enters the water tank 1 through the water inlet pipe 2. Similarly, when the waterproof switch 174 squeezes the waterproof switch 174 at the top of the water tank 1, the waterproof switch 174 closes the first valve 4 on the water inlet pipe 2. The operation is simple and convenient for automatic addition of cold water. The four fixing plates 7 can be fixed by multiple bolts, thereby fixing the water tank 1.

[0034] All contents not described in detail in the specification are existing technologies known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited; conventional equipment can be used. Electrical control components not mentioned in this technical solution are existing technologies and are therefore not shown in the figures, nor will they be described here.

[0035] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A leak prevention and heat recovery device for high-temperature waste gas treatment equipment, comprising a water tank (1), an inlet pipe (2), and an outlet pipe (3), wherein the opposite ends of the inlet pipe (2) and the outlet pipe (3) are fixedly connected to the water tank (1), and a first valve (4) is fixedly installed on both the inlet pipe (2) and the outlet pipe (3), characterized in that: A thermometer (6) is fixedly installed on the front side of the water tank (1). The two ends of the water tank (1) are respectively fixedly connected to a first air pipe (8) and a second air pipe (9). A second valve (10) is fixedly installed on both the first air pipe (8) and the second air pipe (9). A connecting pipe (15) is fixedly connected between the first air pipe (8) and the second air pipe (9). A control component (17) is provided inside the water tank (1). The control component (17) includes a slider (171), two sliding rods (172), a suspension block (173), and two waterproof switches (174). The bottom ends of the two sliding rods (172) pass through the slider (171), and the two sliding rods (172) are fixedly connected to the water tank (1). The bottom end of the suspension block (173) is fixedly connected to the slider (171). The two waterproof switches (174) are respectively fixedly installed at the top and bottom of the inside of the water tank (1).

2. The leakage prevention and heat recovery device for high-temperature exhaust gas treatment apparatus according to claim 1, characterized by: Multiple heat-conducting columns (16) are fixedly connected to the outside of the connecting pipe (15).

3. The leak prevention and heat recovery device for high-temperature waste gas treatment equipment according to claim 1, characterized in that: Two fixing plates (7) are fixedly connected to the top and bottom of the water tank (1) and near the rear side.

4. The leakage prevention and heat recovery apparatus for high-temperature exhaust gas treatment equipment according to claim 1, characterized by: The first gasket (5) is fixedly bonded to one end of the water inlet pipe (2), water outlet pipe (3), first air pipe (8), and second air pipe (9).

5. The leakage prevention and heat recovery device of the high-temperature exhaust gas treatment apparatus according to claim 1, characterized by: A filter box (12) is provided on one side of the first air pipe (8). The top and bottom ends of the filter box (12) are fixedly connected to a third air pipe (11), and a third valve (14) is fixedly installed on one of the third air pipes (11).

6. The leak prevention and heat recovery device for high-temperature waste gas treatment equipment according to claim 5, characterized in that: A second gasket (13) is fixedly bonded to the opposite side of each of the two third tracheas (11).

7. The leakage prevention and heat recovery device of the high-temperature exhaust gas treatment apparatus according to claim 5, characterized by: The filter box (12) is equipped with multiple activated carbon plates (19) inside, and each of the multiple activated carbon plates (19) is equipped with a locking block (18) on both sides, and one side of each locking block (18) is fixedly connected to the filter box (12).

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