Mechanically coupled qplus atomic force sensor

Abstract

The utility model relates to high resolution surface imaging field, more specifically, relate to a kind of mechanical coupling type qPlus atomic force sensor, comprising: piezoelectric ceramic tube, base, front circuit board, backplate, metal elastic component and the sensor structure consisting of tantalum sheet, insert piece circuit board and qPlus tuning fork;The space between the opposite surface of front circuit board and backplate is marked as clamping space;The base is equipped with slope, the backplate is equipped with limit post, the side wall of tantalum sheet is equipped with limit protrusion;When the sensor structure is inserted into clamping space, the limit protrusion of tantalum sheet is in contact with the slope of base and the limit post of backplate, and the metal elastic component is in contact with insert piece circuit board circuit and compression;The utility model is by using metal elastic component type mechanical coupling design, improves sensor stability and easy to make, it is convenient to replace, avoid magnetic attraction type problem, promote Q value, applicable to need additional magnetic field experiment.

Description

Technical Field

[0001] This utility model relates to the field of high-resolution surface imaging technology, and more specifically, to a mechanically coupled qPlus atomic force sensor. Background Technology

[0002] In the field of high-resolution surface imaging, the performance of atomic force microscopy (AFM) sensors directly affects image quality and accuracy. Traditional AFM sensors often face challenges in terms of stability and repeatability, especially in dynamic modes. In dynamic modes, changes in the probe's vibration frequency are used to measure the interaction force between the probe and the sample. However, traditional designs are susceptible to thermal drift and mechanical vibration during long-term scanning or repeated measurements, leading to image distortion and performance fluctuations.

[0003] Mechanically coupled qPlus atomic force sensors, as novel AFM sensors, aim to overcome these limitations by improving stability, repeatability, and sensitivity through special design and material selection. However, existing qPlus atomic force sensors, especially the magnetically attached design, still face technical challenges. The lack of precise positioning in the magnetically attached design makes it difficult to fix the position and angle during installation, affecting sensor performance, potentially generating peaks, reducing Q values, and even causing incorrect phase-locked loop locking, thus impacting the accuracy of experimental data. Furthermore, the magnets in the magnetically attached design limit its application in experiments requiring an external magnetic field. Therefore, developing a novel qPlus atomic force sensor to solve existing technical problems and improve performance has become a pressing technical challenge in this field. Utility Model Content

[0004] The purpose of this invention is to provide a mechanically coupled qPlus atomic force sensor to improve the aforementioned problems. To achieve this objective, the technical solution adopted by this invention is as follows:

[0005] This application provides a mechanically coupled qPlus atomic force sensor, including a piezoelectric ceramic tube, a base, a front circuit board, a back plate, a metal elastic element, and a sensor structure. The base extends along the clamping space and has an inclined surface. The piezoelectric ceramic tube is connected to the base. The front circuit board is connected to the base. The back plate is connected to the base. The back plate has a limiting post extending horizontally along its width direction. The limiting post is located at the bottom of the inner sidewall of the back plate, parallel to the lower edge of the back plate, and perpendicular to the front and rear surfaces of the back plate. The space between the opposing surfaces of the front circuit board and the back plate is denoted as the clamping space. At least two metal elastic elements are disposed within the clamping space. The sensor structure includes a tantalum sheet, a plug-in circuit board, and a qPlus tuning fork. The plug-in circuit board is disposed between the front circuit board and the back plate. The tantalum sheet is disposed between the back plate and the plug-in circuit board. The qPlus tuning fork is disposed on the side wall of the plug-in circuit board. The side wall of the tantalum sheet is provided with a first limiting protrusion and a second limiting protrusion. When the sensor structure is inserted into the clamping space, the first limiting protrusion abuts against the inclined surface of the base, and the second limiting protrusion abuts against the limiting post on the back plate. The metal elastic element contacts and compresses the plug-in circuit board electrode of the plug-in circuit board.

[0006] Optionally, the base is a trapezoidal platform that is wider at the top and narrower at the bottom. A fixing cylinder is provided on the wide surface of the base. A first fixing through hole and a second fixing through hole are provided opposite to each other on the side wall of the base. The first fixing through hole and the second fixing through hole are arranged in parallel. The fixing cylinder is connected to the piezoelectric ceramic tube.

[0007] Optionally, the front circuit board is provided with a third fixing through hole, a fourth fixing through hole and at least two limiting through holes, and a copper electrode is provided outside each limiting through hole. The third fixing through hole corresponds to the first fixing through hole, and the fourth fixing through hole corresponds to the second fixing through hole.

[0008] Optionally, the back plate is further provided with a fifth fixing through hole, a sixth fixing through hole, and a back plate copper electrode. The fifth fixing through hole corresponds to the first fixing through hole and the third fixing through hole, and the sixth fixing through hole corresponds to the second fixing through hole and the fourth fixing through hole. The back plate copper electrode is disposed in the central area of ​​the inner sidewall of the back plate.

[0009] Optionally, the front circuit board is further provided with a first bolt and a second bolt. The first bolt passes through the first fixing through hole and the fifth fixing through hole, and the second bolt passes through the second fixing through hole and the sixth fixing through hole. The first bolt and the second bolt fix the front circuit board, the base and the back plate together.

[0010] Optionally, the tantalum sheet is further provided with gripping through holes.

[0011] Optionally, the insert circuit board is provided with at least two insert circuit board electrodes and a first STM electrode.

[0012] Optionally, the qPlus tuning fork is provided with a tuning fork cantilever, a first AFM electrode, a second AFM electrode, and a second STM electrode. The tuning fork cantilever is disposed on the bottom surface of the qPlus tuning fork. The first AFM electrode, the second AFM electrode, and the second STM electrode are all disposed on the side wall of the qPlus tuning fork, and the second STM electrode is disposed between the first AFM electrode and the second AFM electrode. The first AFM electrode is electrically connected to one of the insert circuit board electrodes on the insert circuit board, and the second AFM electrode is electrically connected to another insert circuit board electrode on the insert circuit board. The first STM electrode and the second STM electrode are electrically connected.

[0013] Optionally, the tantalum sheet is made of a conductive metal material, and when the sensor structure is inserted into the clamping space, the tantalum sheet contacts the copper electrode on the back plate.

[0014] Optionally, the number of the metal elastic elements corresponds to the number of the limiting through holes.

[0015] The beneficial effects of this utility model are as follows:

[0016] This invention effectively improves the stability and performance of the sensor by designing limiting protrusions on the metal elastic element and tantalum sheet to engage with the inclined surface of the base and the limiting posts of the back plate. This design overcomes the performance fluctuations caused by unstable coupling in traditional magnetic designs, achieving a higher Q value and a narrower resonance peak, thereby enhancing measurement sensitivity and accuracy. Furthermore, the magnetless design allows it to adapt to experimental environments requiring an external magnetic field, simplifying experimental operations and facilitating sensor maintenance and replacement. These innovations not only expand the sensor's application range but also reduce production and maintenance costs, providing an efficient and reliable solution for high-resolution surface imaging technology.

[0017] Other features and advantages of this invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing embodiments of this invention. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the mechanically coupled qPlus atomic force sensor structure described in the embodiments of this utility model;

[0020] Figure 2 This is a schematic diagram of the structure of the base described in the embodiment of this utility model;

[0021] Figure 3 This is a schematic diagram of the front circuit board described in an embodiment of the present invention;

[0022] Figure 4 This is a schematic diagram of the structure of the back plate described in the embodiment of this utility model;

[0023] Figure 5 This is a schematic diagram of the structure of the metal elastic element described in the embodiment of this utility model;

[0024] Figure 6 This is a schematic diagram of the structure of the tantalum sheet described in the embodiments of this utility model;

[0025] Figure 7 This is a schematic diagram of the structure of the insert circuit board described in the embodiment of this utility model;

[0026] Figure 8 This is a front view of the qPlus tuning fork as described in this embodiment of the present invention.

[0027] Figure 9 This is a schematic diagram of the back structure of the qPlus tuning fork described in this embodiment of the present invention;

[0028] Figure 10 This is a side view of the mechanically coupled qPlus atomic force sensor described in this embodiment of the present invention.

[0029] The diagram shows the following markings: 1. Piezoelectric ceramic tube; 2. Base; 3. Front circuit board; 4. Back plate; 5. Metal elastic element; 6. Tantalum sheet; 7. Insert circuit board; 8. qPlus tuning fork; 201. Fixing cylinder; 202. First fixing through hole; 203. Second fixing through hole; 204. Inclined surface; 301. Third fixing through hole; 302. Fourth fixing through hole; 303. Limiting through hole; 304. Copper electrode; 401. Fifth fixing through hole; 402. Sixth fixing through hole; 403. Back plate copper electrode; 404. Limiting post; 601. Grasping through hole; 602. First limiting protrusion; 603. Second limiting protrusion; 701. First STM electrode; 702. Insert circuit board electrode; 801. Tuning fork cantilever; 802. Second AFM electrode; 803. Second STM electrode; 804. First AFM electrode. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. The components of the embodiments of this utility model described and shown in the accompanying drawings can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely to illustrate selected embodiments of the utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0031] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the description of this utility model, terms such as "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0032] Example 1

[0033] like Figure 1 , Figure 10 As shown, this embodiment provides a mechanically coupled qPlus atomic force sensor, including: a piezoelectric ceramic tube 1, a base 2, a front circuit board 3, a back plate 4, a metal elastic element 5, and a sensor structure; as shown... Figure 2As shown, the base 2 is configured as a trapezoidal platform that is wider at the top and narrower at the bottom. A fixing cylinder 201 is provided on the wide surface of the base 2. A first fixing through hole 202 and a second fixing through hole 203 are provided opposite to each other on the side wall of the base 2. The first fixing through hole 202 and the second fixing through hole 203 are arranged in parallel. The fixing cylinder 201 is connected to the piezoelectric ceramic tube 1, and the piezoelectric ceramic tube 1 is connected to the fixing cylinder 201. The front circuit board 3 is connected to the base 2. The back plate 4 is connected to the base 2. The front circuit board 3 is provided with a third fixing through hole 301, a fourth fixing through hole 302, at least two limiting through holes 303, a first bolt, and a second bolt. Each of the limiting through holes 301... A copper electrode 304 is provided on the outside of the 03. The third fixing through hole 301 corresponds to the first fixing through hole 202, and the fourth fixing through hole 302 corresponds to the second fixing through hole 203. The first bolt passes through the first fixing through hole 202 and the fifth fixing through hole 401, and the second bolt passes through the second fixing through hole 203 and the sixth fixing through hole 402. The first bolt and the second bolt fix the front circuit board 3, the base 2, and the back plate 4 together. The space between the opposite surfaces of the front circuit board 3 and the back plate 4 is called the clamping space. At least two metal elastic elements 5 are provided in the clamping space. The tail of each metal elastic element 5 is connected to the front circuit board 3. The limiting through-hole 303 on the surface circuit board 3 is connected; the sensor structure includes a tantalum sheet 6, a plug-in circuit board 7, and a qPlus tuning fork 8. The plug-in circuit board 7 is provided with at least two plug-in circuit board electrodes 702 and a first STM electrode 701. The qPlus tuning fork 8 is provided with a tuning fork cantilever 801, a first AFM electrode 804, a second AFM electrode 802, and a second STM electrode 803. The tuning fork cantilever 801 is located on the bottom surface of the qPlus tuning fork 8. The first AFM electrode 804, the second AFM electrode 802, and the second STM electrode 803 are all located on the sidewall of the qPlus tuning fork 8, and the second STM electrode 803 is located on the sidewall of the qPlus tuning fork 8. The first AFM electrode 804 and the second AFM electrode 802 are positioned between the first AFM electrode 804 and the second AFM electrode 802. The first AFM electrode 804 is electrically connected to one of the insert circuit board electrodes 702 on the insert circuit board 7, and the second AFM electrode 802 is electrically connected to another insert circuit board electrode 702 on the insert circuit board 7. The first STM electrode 701 and the second STM electrode 803 are electrically connected. The insert circuit board 7 is positioned between the front circuit board 3 and the back plate 4. The tantalum sheet 6 is positioned between the back plate 4 and the insert circuit board 7. The qPlus tuning fork 8 is positioned on the side wall of the insert circuit board 7 and protrudes from the insert circuit board 7. Figure 6As shown, the sidewall of the tantalum sheet 6 is provided with a first limiting protrusion 602 and a second limiting protrusion 603. When the sensor structure is inserted into the clamping space, the first limiting protrusion 602 abuts against the inclined surface 204 of the base 2, and the second limiting protrusion 603 abuts against the limiting post 404 on the back plate 4. The metal elastic member 5 contacts the electrode of the insert circuit board 7 and compresses the metal elastic member 5.

[0034] The present invention comprises four metal elastic elements 5, and the number of the metal elastic elements 5, the number of the limiting through holes 303, and the number of the insert circuit board electrodes 702 correspond to each other. Figure 5 As shown, each metal elastic element 5 includes a base, a connecting portion, and a tail. The base has a vertical support surface, the connecting portion extends horizontally and bends to form a first curved portion, and the tail portion bends in the opposite direction to form a second curved portion. Figure 3 As shown, four limiting through holes 303 are symmetrically arranged on the front circuit board 3, and a rectangular copper electrode 304 is provided on the outside of each through hole. The base of the metal elastic element 5 is connected to the limiting through hole 303 by soldering, and the solder fills most of the through hole area to realize the electrical connection between the metal elastic element 5 and the copper electrode 304. The insert circuit board 7 is provided with four symmetrically arranged insert circuit board electrodes 702, corresponding to the positions of the limiting through holes 303. The tail of the metal elastic element 5 contacts the insert circuit board electrodes of the insert circuit board 7 and compresses the metal elastic element 5.

[0035] like Figure 4 , Figure 7 , Figure 8 , Figure 9 As shown, in this invention, the signal is exported to the computer in the following three ways:

[0036] 1. The signal of the first AFM electrode 804 on the qPlus tuning fork 8 is connected to the upper right corner electrode 702 on the insert circuit board 7 via a silver wire, and then is sent to the copper electrode 304 outside the corresponding limit through hole 303 by contacting the metal elastic element 5 at the upper right corner limit through hole 303 of the front circuit board 3, and finally sent to the computer.

[0037] 2. The signal from the second AFM electrode 802 on the qPlus tuning fork 8 is connected to the lower left corner electrode 702 on the insert circuit board 7 via a silver wire. Then, it is sent to the copper electrode 304 outside the corresponding limit hole 303 by contacting the metal elastic element 5 at the lower left corner limit hole 303 of the front circuit board 3, and finally sent to the computer.

[0038] 3. The signal of the second STM electrode 803 on the qPlus tuning fork 8 is connected to the first STM electrode 701 on the insert circuit board 7 through a silver wire, then covered onto the tantalum sheet 6 with conductive adhesive, and then exported to the backplate copper electrode 403 through contact with the backplate copper electrode 403 on the backplate 4, and finally exported to the computer.

[0039] In this invention, four metal elastic elements 5 are used, and four limiting through holes 303 are provided on the front circuit board 3. The base of the metal elastic element 5 is connected to the limiting through holes 303 by soldering. The tail of the metal elastic element 5 contacts the electrode of the insert circuit board 7 and compresses the metal elastic element 5.

[0040] It is understandable that by equipping four metal elastic elements 5, not only is effective signal transmission ensured, but also the sensor structure can uniformly bear the reaction force from the metal elastic elements 5 when it is inserted into the clamping space, thereby providing stability to the sensor structure.

[0041] When the sensor structure is inserted into the clamping space, the first limiting protrusion 602 on the tantalum sheet 6 abuts against the inclined surface 204 of the base 2, and the second limiting protrusion 603 on the tantalum sheet 6 abuts against the limiting post 404 on the back plate 4.

[0042] Understandably, the above-mentioned limiting settings achieve precise positioning of the sensor structure within the clamping space. This design effectively prevents improper movement or rotation of the sensor structure, ensuring a stable connection when inserted into the clamping space. This limiting structure not only improves the operational stability of the sensor but also helps maintain consistent measurement conditions, thereby improving imaging and detection accuracy. Furthermore, the uniform pressure distribution and symmetrical electrode design further optimize signal transmission quality, reduce interference from inter-electrode capacitance, and ensure consistent sensor performance under different operating conditions.

[0043] The first AFM electrode 804 signal of the qPlus tuning fork 8 is connected to the upper right corner insert circuit board electrode 702 on the insert circuit board 7 via a silver wire, and the second AFM electrode 802 signal of the qPlus tuning fork 8 is connected to the lower left corner insert circuit board electrode 702 on the insert circuit board 7 via a silver wire.

[0044] Understandably, the two diagonal electrodes 702 on the insert circuit board 7 are electrically connected to the first AFM electrode 804 and the second AFM electrode 802, respectively. This diagonal connection design maximizes the distance between the two AFM electrodes, effectively reducing the impact of inter-electrode capacitance on signal quality. This design helps reduce interference between signals, improves signal clarity and quality, and also helps maintain the stability of the sensor structure, as the longer connection path reduces the impact of mechanical vibration or thermal expansion, thereby improving the overall performance and reliability of the mechanically coupled qPlus atomic force sensor. Therefore, this long-distance electrode connection design not only optimizes signal transmission but also enhances the sensor's stability and measurement accuracy.

[0045] This application provides a mechanically coupled qPlus atomic force sensor, including a piezoelectric ceramic tube 1, a base 2, a front circuit board 3, a back plate 4, a metal elastic element 5, and a sensor structure. The space between the opposite surfaces of the front circuit board 3 and the back plate 4 is referred to as the clamping space. The sensor structure includes a tantalum sheet 6, a plug-in circuit board 7, and a qPlus tuning fork 8. The tantalum sheet 6 is also provided with a gripping through hole 601.

[0046] It is understood that in the design of this utility model, by setting a gripping through-hole 601 on the tantalum sheet 6 and using a gripping tool to install the sensor structure, the operation process is greatly simplified. This design allows technicians to easily and accurately insert the sensor structure into the clamping space without direct contact with sensitive components, reducing the difficulty of operation and the error rate. This design also helps to maintain the stability and accuracy of the sensor because it reduces the mechanical stress or damage that may occur during installation. In addition, the position design of the gripping through-hole 601 makes the positioning of the sensor structure more accurate, ensuring that the limiting protrusion on the tantalum sheet 6 correctly abuts against the limiting structure on the base 2 and the back plate 4, further enhancing the fixed stability of the sensor structure, achieving a higher Q value and a narrower resonance peak, thereby improving the performance and reliability of the entire mechanically coupled qPlus atomic force sensor. The above description is only a preferred embodiment of this utility model and is not intended to limit this utility model. For those skilled in the art, this utility model can have various modifications and variations. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

[0047] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

Claims

1. A mechanically coupled qPlus atomic force sensor, characterized in that, include: Piezoelectric ceramic tube (1); The base (2) has an inclined surface (204) extending along the clamping space, and the piezoelectric ceramic tube (1) is connected to the base (2). Front circuit board (3), the front circuit board (3) is connected to the base (2); Back plate (4), the back plate (4) is connected to the base (2), the back plate (4) extends horizontally along the width direction of the back plate (4) and is provided with a limiting post (404), the limiting post (404) is provided at the bottom of the inner sidewall of the back plate (4), the limiting post (404) is parallel to the lower edge of the back plate (4) and the limiting post (404) is perpendicular to the inner sidewall of the back plate (4), the space between the front circuit board (3) and the opposite surface of the back plate (4) is called the clamping space; Metal elastic element (5), at least two metal elastic elements (5) are provided in the clamping space, and the tail of each metal elastic element (5) is connected to the front circuit board (3); The sensor structure includes a tantalum sheet (6), a plug-in circuit board (7), and a qPlus tuning fork (8). The plug-in circuit board (7) is disposed between the front circuit board (3) and the back plate (4). The tantalum sheet (6) is disposed between the back plate (4) and the plug-in circuit board (7). The qPlus tuning fork (8) is disposed on the side wall of the plug-in circuit board (7). The side wall of the tantalum sheet (6) is provided with a first limiting protrusion (602) and a second limiting protrusion (603). When the sensor structure is inserted into the clamping space, the first limiting protrusion (602) abuts against the inclined surface (204) of the base (2), and the second limiting protrusion (603) abuts against the limiting post (404) on the back plate (4). The metal elastic element (5) contacts the plug-in circuit board electrode of the plug-in circuit board (7) and compresses the metal elastic element (5).

2. The mechanically coupled qPlus atomic force sensor according to claim 1, characterized in that: The base (2) is configured as a trapezoidal platform that is wider at the top and narrower at the bottom. A fixed cylinder (201) is provided on the wide surface of the base (2). A first fixed through hole (202) and a second fixed through hole (203) are provided opposite to each other on the side wall of the base (2). The first fixed through hole (202) and the second fixed through hole (203) are arranged in parallel. The fixed cylinder (201) is connected to the piezoelectric ceramic tube (1).

3. The mechanically coupled qPlus atomic force sensor according to claim 2, characterized in that: The front circuit board (3) is provided with a third fixed through hole (301), a fourth fixed through hole (302) and at least two limiting through holes (303). A copper electrode (304) is provided outside each limiting through hole (303). The third fixed through hole (301) corresponds to the first fixed through hole (202), and the fourth fixed through hole (302) corresponds to the second fixed through hole (203).

4. The mechanically coupled qPlus atomic force sensor according to claim 3, characterized in that: The back plate (4) is also provided with a fifth fixing through hole (401), a sixth fixing through hole (402) and a back plate copper electrode (403). The fifth fixing through hole (401) corresponds to the first fixing through hole (202) and the third fixing through hole (301) respectively. The sixth fixing through hole (402) corresponds to the second fixing through hole (203) and the fourth fixing through hole (302) respectively. The back plate copper electrode (403) is provided on the inner sidewall of the back plate (4).

5. The mechanically coupled qPlus atomic force sensor according to claim 4, characterized in that: The front circuit board (3) is also provided with a first bolt and a second bolt. The first bolt passes through the first fixing through hole (202) and the fifth fixing through hole (401), and the second bolt passes through the second fixing through hole (203) and the sixth fixing through hole (402). The first bolt fixes the front circuit board (3), the base (2) and the back plate (4) together. The second bolt fixes the front circuit board (3), the base (2) and the back plate (4) together.

6. The mechanically coupled qPlus atomic force sensor according to claim 1, characterized in that: The tantalum sheet (6) is also provided with a gripping through hole (601).

7. The mechanically coupled qPlus atomic force sensor according to claim 1, characterized in that: The insert circuit board (7) is provided with at least two insert circuit board electrodes (702) and a first STM electrode (701).

8. The mechanically coupled qPlus atomic force sensor according to claim 7, characterized in that: The qPlus tuning fork (8) is provided with a tuning fork cantilever (801), a first AFM electrode (804), a second AFM electrode (802), and a second STM electrode (803). The tuning fork cantilever (801) is disposed on the bottom surface of the qPlus tuning fork (8). The first AFM electrode (804), the second AFM electrode (802), and the second STM electrode (803) are all disposed on the side wall of the qPlus tuning fork (8). The second STM electrode (803) is disposed between the first AFM electrode (804) and the second AFM electrode (802). The first AFM electrode (804) is electrically connected to one of the insert circuit board electrodes (702) on the insert circuit board (7). The second AFM electrode (802) is electrically connected to another insert circuit board electrode (702) on the insert circuit board (7). The first STM electrode (701) and the second STM electrode (803) are electrically connected.

9. The mechanically coupled qPlus atomic force sensor according to claim 4, characterized in that: The tantalum sheet (6) is made of conductive metal. When the sensor structure is inserted into the clamping space, the tantalum sheet (6) contacts the copper electrode (403) on the back plate.

10. The mechanically coupled qPlus atomic force sensor according to claim 3, characterized in that: The number of the metal elastic elements (5) corresponds to the number of the limiting through holes (303).

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