An apparatus for recovering silver on a plating chamber gasket

CN224692199UActive Publication Date: 2026-08-28WANGMEI IND GRP CO LTD
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Patent Information

Application Number
CN202522131924.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-10-09
Publication Date
2026-08-28
Estimated Expiration
2035-10-09

AI Technical Summary

Technical Problem

[0002]在离线低辐射(Low-E)镀膜玻璃的生产过程中,镀膜生产线银靶阴极位腔室内固定底板的螺丝上方通常会放置一个石墨垫片(44mm×30mm×1.06mm),该石墨垫片的主要作用是防止银靶溅射下来的银沉积到螺丝帽上,若直接沉积在螺丝帽上,会导致后期设备维护保养时固定底板的螺丝难以拆卸,严重影响保养效率

Benefits of technology

[0015]本实用新型的技术效果和优点:通过高温加热使石墨垫片上的银层熔化聚集并与石墨垫片本体有效分离,实现银的有效回收;直接回收价格昂贵的银材料可进行进一步加工利用,降低了低辐射镀膜玻璃生产成本,核心组件仅为耐高温容器和高温加热炉,结构简单且制造和使用成本低廉,箱式电阻炉配备有耐高温炉门和锁紧装置,有效防止高温灼伤和热辐射,保障操作人员安全。

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Abstract

The utility model discloses a device for recovering silver on the coating cavity gasket belongs to vacuum magnetron sputtering technical field, including resistance furnace, crucible and graphite gasket, put the graphite gasket plated with silver layer into the crucible, then put the crucible into resistance furnace, heat the temperature in resistance furnace to 1000 DEG C, utilize high temperature heating to make the silver layer on graphite gasket melt and gather and with graphite gasket body effective separation, realize the effective recovery of silver, directly recycle expensive silver material can be further processed and utilized, reduce the low -radiation coated glass production cost, and the core component is only high -temperature -resistant container and high -temperature resistance furnace, simple structure and low cost of manufacture and use, and the box type resistance furnace is equipped with high -temperature -resistant furnace door and locking device, effectively prevent high -temperature burn and heat radiation, guarantee the safety of operating personnel.
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Claims

1. An apparatus for recovering silver from a gasket in a coated chamber, comprising a resistance furnace (1), a crucible (2), and a graphite gasket (10), characterized in that: The resistance furnace (1) consists of a furnace body (3) and a furnace door (4). The furnace door (4) is hinged to the furnace body (3). A furnace chamber (6) is provided on the furnace body (3). The crucible (2) is placed in the furnace chamber (6). Heating elements (7) are provided on the opposite inner walls and the inner bottom wall of the furnace chamber (6). A thermocouple (8) is installed on the inner wall of the furnace chamber (6) away from the furnace door (4). A temperature controller (9) is installed on the furnace body (3). The temperature controller (9) is connected to the thermocouple (8). Silver is attached to the outer wall of the graphite gasket (10). The graphite gasket (10) is placed inside the crucible (2). The furnace door (4) is provided with a locking mechanism for locking the furnace door (4); The furnace body (3) is equipped with a cooling assembly for rapidly cooling the crucible (2).

2. The apparatus for recovering silver from a coated chamber gasket according to claim 1, characterized in that: The crucible (2) is made of graphite and has a circular opening.

3. The apparatus for recovering silver from a coated chamber gasket according to claim 1, characterized in that: The furnace body (3) and furnace door (4) are both made of high-temperature resistant materials.

4. The apparatus for recovering silver from a coated chamber gasket according to claim 1, characterized in that: The heating element (7) is a silicon molybdenum rod electric heating element. When the furnace door (4) is closed, the temperature inside the furnace chamber (6) can reach more than 1000℃.

5. The apparatus for recovering silver from a coated chamber gasket according to claim 1, characterized in that: The locking mechanism includes a handwheel (5), one end of which is fitted with a screw (12). A locking seat (11) is fitted on one side of the furnace body (3), and a mounting seat (13) is fitted on one side of the furnace door (4). Both the locking seat (11) and the mounting seat (13) are threadedly engaged with the screw (12), and the locking seat (11) and the mounting seat (13) are correspondingly arranged.

6. The apparatus for recovering silver from a coated chamber gasket according to claim 1, characterized in that: The cooling assembly includes a cooling pipe (14), an air inlet pipe (15), and an air outlet pipe (16). The cooling pipe (14) is installed at the bottom of the furnace chamber (6). The two ends of the cooling pipe (14) are respectively set as a water inlet pipe (141) and a water outlet pipe (142). The air inlet pipe (15) and the air outlet pipe (16) are both installed on one side of the furnace body (3) and pass through the furnace body (3) to communicate with the inside of the furnace chamber (6).

7. The apparatus for recovering silver from a coated chamber gasket according to claim 6, characterized in that: The cooling pipe (14) is S-shaped.