A rotary adjustment mechanism

Abstract

The utility model relates to the technical field of semiconductor handling equipment, especially a rotary adjusting mechanism, including mounting bracket, the movable frame of rotation connection in mounting bracket, the adjusting frame of rotation connection in movable frame, the sliding piece of sliding connection in adjusting frame and drive unit, the rotation center of adjusting frame is centrifugal relative to the rotation center of movable frame, drive unit and sliding piece drive connection, when needing to rotate movable frame, drive unit drives sliding piece to slide along adjusting frame, makes adjusting frame rotate to make movable frame rotate, the utility model can avoid the influence of manual operation to wafer box cleanliness, eliminates the human regulation deviation, ensures that wafer box and the butt joint accuracy of process machine platform satisfy the requirement.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor handling equipment technology, and in particular to a rotary adjustment mechanism. Background Technology

[0002] Automated Material Handling Systems (AMHS), also known as overhead crane systems, are widely used in semiconductor wafer fabs. They accurately and quickly transport wafer cassettes to process equipment and other destinations. AMHS mainly consists of tracks, overhead cranes (OHT), and a control system. OHT systems are widely used in industry, manufacturing, and warehousing. They can improve material handling efficiency, reduce labor costs, reduce workshop space occupancy, and correspondingly reduce product contamination rates, thereby fundamentally improving the overall production process.

[0003] In practical applications, the overhead crane includes a traveling mechanism, a lifting mechanism, and a clamping mechanism. The lifting mechanism is driven to move the clamping mechanism up and down. The traveling mechanism is driven to move the lifting mechanism. When transporting wafer cassettes, the traveling mechanism moves along the overhead crane track to the target position, so that the lifting mechanism is above the wafer cassette to be gripped. Then, the lifting mechanism drives the clamping mechanism to move down to the specified height, thereby successfully gripping the corresponding wafer cassette.

[0004] To ensure the precision of the docking between the wafer cassette and the machine tool, a horizontally rotating lifting mechanism is required so that the clamping mechanism can rotate horizontally, ensuring a precise match between the mechanical interface of the wafer cassette and the process machine tool. However, the existing method involves manually rotating the lifting mechanism horizontally, which causes personnel to come into contact with the wafer cassette, affecting cleanliness. Furthermore, manual adjustment results in deviations in the rotation angle, affecting the docking accuracy. Utility Model Content

[0005] This invention addresses the shortcomings of existing technologies by providing a rotary adjustment mechanism that avoids the impact of manual operation on the cleanliness of the wafer cassette, eliminates human adjustment deviations, and ensures that the docking accuracy between the wafer cassette and the process equipment meets the requirements.

[0006] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0007] This utility model provides a rotary adjustment mechanism, including a mounting frame, a movable frame rotatably connected to the mounting frame, an adjustment frame rotatably connected to the movable frame, a sliding member slidably connected to the adjustment frame, and a drive unit. The rotation center of the adjustment frame is centrifugal relative to the rotation center of the rotating frame, and the drive unit is drivenly connected to the sliding member.

[0008] When the movable frame needs to be rotated, the drive unit drives the sliding member to slide along the adjustment frame, causing the adjustment frame to rotate, which in turn causes the movable frame to rotate.

[0009] The output end of the drive unit is connected to a push rod, which is connected to a slider. The drive unit drives the push rod to move along its own axis.

[0010] When the push rod is in the initial position, the direction of movement of the push rod is perpendicular to the rotation center of the adjustment frame;

[0011] When the push rod moves toward the slider, the drive unit drives the slider to slide along the adjustment frame, causing the adjustment frame to rotate, thereby causing the movable frame to rotate.

[0012] Wherein, the line connecting the rotation centers of the movable frame and the adjustment frame is perpendicular to the initial thrust direction of the push rod, and the initial thrust of the push rod is parallel to the tangential direction of the rotation of the movable frame;

[0013] When it is necessary to rotate the movable frame, the drive unit drives the sliding member to slide along the adjustment frame, causing the adjustment frame to rotate, thereby making the movable frame rotate.

[0014] Wherein, the front end of the push rod is connected to a limiting member, the sliding member is provided with a docking part, the docking part is engaged with the push rod, one end of the docking part corresponds to one side of the limiting member, the docking part and the push rod have a first movable gap in the circumferential direction, and the docking part has a second movable gap along the axial direction of the push rod.

[0015] When the push rod moves toward the slider, it causes the mating part to move within the first and second movable gaps, causing the slider to slide along the adjusting frame.

[0016] The docking part is provided with a first docking section and a second docking section that are parallel to each other. The push rod is provided with a first limiting surface and a second limiting surface. The first docking section corresponds to the first limiting surface, the second docking section corresponds to the second limiting surface, and the first movable gap is located between the first docking section and the second docking section.

[0017] The limiting member is threadedly connected to the push rod, the push rod is equipped with a limiting ring, and the mating part is engaged between the limiting member and the limiting ring.

[0018] The sliding member is provided with a receiving space, and one end of the adjusting frame extends into the receiving space;

[0019] When the adjustment frame rotates, at least a portion of the adjustment frame is located within the accommodating space.

[0020] The adjusting frame includes an adjusting shaft and an adjusting slide rail connected to the adjusting shaft. The adjusting slide rail is slidably engaged with a sliding member. The movable frame is equipped with a longitudinally arranged first bearing and a second bearing. The adjusting shaft is connected to the first bearing and the second bearing.

[0021] When the push rod is in the initial position, the adjustment shaft is directly opposite the center of the adjustment slide rail.

[0022] The beneficial effects of this utility model are:

[0023] The entire process of adjusting the rotation of the lifting mechanism is fully automated, avoiding the impact of manual operation on the cleanliness of the wafer cassette. At the same time, the linear motion of the drive unit is precisely converted into the rotation angle of the movable frame through mechanical transmission, eliminating human adjustment deviations and ensuring that the docking accuracy between the wafer cassette and the process equipment meets the requirements. Attached Figure Description

[0024] Figure 1 This is a front view of the rotary adjustment mechanism.

[0025] Figure 2 This is a partial three-dimensional view of the rotary adjustment mechanism.

[0026] Figure 3 This is a schematic diagram of the installation structure of the docking part and the push rod.

[0027] Figure 4 This is a top view of the mounting structure for the limiters, sliding parts, and limit rings.

[0028] Figure 5 This is an exploded view of the installation structure of the adjustment frame.

[0029] 1. Mounting bracket;

[0030] 2. Movable frame; 21. First bearing; 22. Second bearing;

[0031] 3. Adjusting bracket; 31. Adjusting shaft; 32. Adjusting slide rail;

[0032] 4. Sliding component; 41. Connecting part;

[0033] 411. First docking section; 412. Second docking section; 413. Accommodation space;

[0034] 5. Drive unit; 51. Push rod; 511. First limiting surface; 512. Second limiting surface;

[0035] 6. Limiting components;

[0036] 701. First activity gap; 702. Second activity gap;

[0037] 8. Limiting ring. Detailed Implementation

[0038] To facilitate understanding by those skilled in the art, the present invention will be further described below in conjunction with embodiments and accompanying drawings. Specific embodiments of the present invention will be described below. It should be noted that, in order to provide a concise description of these embodiments, this specification cannot provide a detailed description of all features of the actual embodiments.

[0039] refer to Figures 1 to 5 As shown, this utility model provides a rotary adjustment mechanism, including a mounting frame 1, a movable frame 2 rotatably connected to the mounting frame 1, an adjustment frame 3 rotatably connected to the movable frame 2, a sliding member 4 slidably connected to the adjustment frame 3, and a drive unit 5. The rotation center of the adjustment frame 3 is centrifugal relative to the rotation center of the rotating frame, and the drive unit 5 is drivenly connected to the sliding member 4. The mounting frame 1 is a support structure that supports the movable frame 2 and the adjustment frame 3, and is used to provide support for the transmission system. The movable frame 2 is a load-bearing component that forms a rotating pair with the mounting frame 1, and is used to transmit the rotational torque generated by the adjustment frame 3. The adjustment frame 3 is a transmission component with an eccentric rotation center, whose eccentric arrangement converts the linear displacement of the sliding member 4 into asymmetrical rotational motion. The sliding member 4 is a moving component that forms a sliding fit with the adjustment frame 3, and drives the adjustment frame 3 to rotate by displacement along a specific trajectory of the adjustment frame 3. The drive unit 5 is an actuator that outputs linear power, which can be implemented by an electric push rod 51, a hydraulic cylinder, or a linear cylinder, and is used to precisely control the movement stroke of the sliding member 4.

[0040] refer to Figure 1 , 2 As shown, in practical applications, when the angle of the movable frame 2 needs to be adjusted, the drive unit 5 pushes the slider 4 to move along the sliding path of the adjusting frame 3. Since the rotation center of the adjusting frame 3 deviates from the rotation center of the movable frame 2, the displacement of the slider 4 forces the adjusting frame 3 to rotate around its own axis. The rotational motion of the adjusting frame 3 generates a lever effect through the rotational connection point of the movable frame 2, converting the linear driving force into the rotational torque of the movable frame 2. During this process, the displacement of the slider 4 is proportional to the eccentricity of the adjusting frame 3, so that the linear stroke of the drive unit 5 corresponds linearly to the rotation angle of the movable frame 2, thereby achieving precise rotation angle control. 5. In conjunction with the mechanical transmission structure, fully enclosed automatic adjustment is achieved, eliminating the risk of personnel contact. The displacement-angle conversion mechanism of the eccentric structure of the adjustment frame 3 and the sliding part 4 can accurately convert the millimeter-level linear displacement of the drive unit 5 into the rotation angle of the movable frame 20 at the 0.1 degree level, significantly improving the adjustment accuracy. In summary, this application realizes the full automation of the rotation adjustment process of the lifting mechanism, avoiding the impact of manual operation on the cleanliness of the wafer cassette. At the same time, through the mechanical transmission relationship, the linear motion of the drive unit 5 is accurately converted into the rotation angle of the movable frame 2, eliminating human adjustment deviation and ensuring that the docking accuracy between the wafer cassette and the process equipment meets the requirements.

[0041] refer to Figure 2As shown, in this embodiment, the output end of the drive unit 5 is connected to a push rod 51, which is connected to the slider 4. The drive unit 5 drives the push rod 51 to move along its own axis. In actual application, when the push rod 51 is in the initial position, the direction of movement of the push rod 51 is perpendicular to the rotation center of the adjustment frame 3. When the push rod 51 moves towards the slider 4, its axial thrust acts directly on the slider 4, pushing the slider 4 to slide along a predetermined trajectory on the adjustment frame 3. The force component is eliminated by the vertical layout in the initial state. When the push rod 51 moves towards the slider 4, the drive unit 5 drives the slider 4 to slide along the adjustment frame 3, causing the adjustment frame 3 to rotate, so that the movable frame 2 rotates, ensuring precise control of the rotation angle of the movable frame 2.

[0042] refer to Figure 1 , 2As shown, in this embodiment, the line connecting the rotation centers of the movable frame 2 and the adjusting frame 3 is perpendicular to the initial thrust direction of the push rod 51. The initial thrust of the push rod 51 is parallel to the tangential direction of the rotation of the movable frame 2. In the initial state of the push rod 51, the moving direction of the push rod 51 is parallel to the tangential direction of the rotation of the movable frame 2, and simultaneously perpendicular to the line connecting the rotation centers of the adjusting frame 3 and the movable frame 2. In practical applications, when it is necessary to drive the movable frame 2 to rotate, the drive unit 5 drives the sliding member 4 to slide along the adjusting frame 3 through the push rod 51, causing the adjusting frame 3 to rotate. The thrust of push rod 51 is entirely converted into the rotational torque of movable frame 2, with no radial component. As movable frame 2 rotates, the direction of push rod 51 shifts relative to the tangential direction of movable frame 2, and the thrust is decomposed into tangential and radial components. The tangential component drives the rotation of movable frame 2, while the radial component acts on the rotation radius. This radial component is absorbed by the sliding member 4, adjusting frame 3, and other structures during the rotation of movable frame 2, and does not contribute to the force driving the rotation of movable frame 2. By ensuring that the thrust is parallel to the rotational tangential direction in the initial state, it is ensured that the zero point position is maintained. The thrust can be fully used for rotational torque, allowing the conversion between displacement and angle to start directly from the ideal state. Through the geometric orthogonality of the initial state, the displacement of the sliding member 4 is proportional to the eccentricity of the adjusting frame 3, so that the design of the initial tangential force can control the overall angle error within 0.05 degrees. When the push rod 51 returns to the initial position, the direction of the driving force is automatically adjusted to the tangential direction required for the rotation of the movable frame 2, eliminating the thrust direction deviation without manual intervention. By forcibly limiting the perpendicular relationship between the moving direction of the push rod 51 and the line connecting the two rotation centers, the force transmission path of the push rod 51 is precisely controlled, eliminating the accumulation of angle deviation caused by manual operation and realizing adaptive adjustment of the rotation direction. It solves the problem of rotation angle deviation caused by manual adjustment, ensuring that the initial thrust direction of the push rod 51 is strictly consistent with the rotation tangential direction of the movable frame 2, improving the angle matching accuracy when the wafer box is docked with the process equipment. The rotational motion of the movable frame 2 is automatically calibrated through mechanical structure constraints, and precise angle adjustment can be completed without manual intervention, effectively avoiding docking errors caused by differences in operator skills.

[0043] refer to Figure 2 , 3 As shown, in this embodiment, the front end of the push rod 51 is connected to the limiting member 6, the sliding member 4 is provided with a docking part 41, the docking part 41 is engaged with the push rod 51, one end of the docking part 41 corresponds to one side of the limiting member 6, the docking part 41 and the push rod 51 have a first movable gap 701 in the circumferential direction, and the docking part 41 has a second movable gap 702 along the axial direction of the push rod 51.

[0044] refer to Figure 2 , 4As shown, in practical applications, when the push rod 51 moves towards the sliding member 4, the push rod 51 contacts one end of the docking part 41 to form an axial push, driving the docking part 41 to move within the first movable gap 701 and the second movable gap 702. The docking part 41 can produce slight displacement in both the circumferential and axial directions, driving the sliding member 4 to slide along the adjusting frame 3. The first movable gap 701 allows the docking part 41 to adapt to the radial position deviation between the push rod 51 and the sliding member 4, avoiding jamming caused by installation errors. The second movable gap 702 allows the push rod 51 to perform position calibration before fully contacting the docking part 41, eliminating the transmission backlash in the initial stage. When the push rod 51 retracts, the docking part 41 contacts one end of the limiting member 6 and generates a pulling force, ensuring that the sliding member 4 can follow the push rod 51 to reset. Therefore, the push rod 51 can smoothly drive the sliding member 4 to complete the predetermined stroke, ensuring the accuracy of the rotation angle control of the movable frame 2, and extending the service life of the transmission components.

[0045] refer to Figure 3 , 4 As shown, in this embodiment, the docking part 41 is provided with a first docking segment 411 and a second docking segment 412 that are parallel to each other, and the push rod 51 is provided with a first limiting surface 511 and a second limiting surface 512. The first docking segment 411 corresponds to the first limiting surface 511, and the second docking segment 412 corresponds to the second limiting surface 512. The first movable gap 701 is located between the first docking segment 411 and the second docking segment 412. In actual application, the push rod 51 pushes the docking part 41 to move. Due to the existence of the second movable gap 702, a controllable movable gap is provided in the horizontal direction of the docking part 41, so that the docking part 41 can swing horizontally at a certain angle relative to the push rod 51, avoiding the sliding part 4 from getting stuck, thereby driving the adjusting frame 3 to rotate. By docking or disengaging the first docking segment 411 and the second docking segment 412 with the corresponding first limiting surface 511 and the second limiting surface 512, the connection and disconnection of the push rod 51 and the sliding part 4 can be realized, which facilitates rapid assembly and improves assembly efficiency.

[0046] refer to Figure 4 As shown, in this embodiment, the limiting member 6 is threadedly connected to the push rod 51, the push rod 51 is equipped with a limiting ring 8, and the mating part 41 is snapped between the limiting member 6 and the limiting ring 8. The axial position of the limiting member 6 on the push rod 51 can be changed by screwing the limiting member 6. The installation position of the limiting ring 8 is determined at the end of the push rod 51, so that the limiting member 6 and the limiting ring 8 together form an adjustable clamping space of the second movable gap 702 to meet the usage requirements of different working conditions.

[0047] refer to Figure 5As shown, in this embodiment, the sliding member 4 is provided with a receiving space 413, and one end of the adjusting frame 3 extends into the receiving space 413. When the adjusting frame 3 rotates, at least a part of the adjusting frame 3 is located in the receiving space 413, so that when the adjusting frame 3 rotates, a part of the structure is kept inside the receiving space 413, forming a space occupation compensation mechanism, effectively utilizing space occupation, with a compact structural arrangement, and avoiding fluctuations in the outer dimensions of the mechanism due to changes in the rotation angle.

[0048] refer to Figure 2 , 5 As shown, in this embodiment, the adjusting frame 3 includes an adjusting shaft 31 and an adjusting slide rail 32 connected to the adjusting shaft 31. The adjusting slide rail 32 is slidably engaged with the sliding member 4. The movable frame 2 is equipped with a longitudinally arranged first bearing 21 and a second bearing 22. The adjusting shaft 31 is connected to the first bearing 21 and the second bearing 22, forming a double support structure through the first bearing 21 and the second bearing 22, providing stable rotational constraints for the adjusting shaft 31 and avoiding radial offset.

[0049] refer to Figure 2 , 5 As shown, in practical applications, the initial position of the push rod 51 is such that the adjusting shaft 31 is directly opposite the middle of the adjusting slide rail 32, making the initial thrust direction perpendicular to the slide rail movement direction. At this time, the torque transmission efficiency is the highest, which facilitates the direct conversion of the linear thrust output by the drive unit 5 into the rotational torque of the adjusting frame 3. This optimizes the torque transmission path, avoids the generation of lateral component forces, reduces the squeezing friction between the adjusting frame 3 and the sliding member 4, and reduces structural wear. As the sliding member 4 continues to move, the relative position change between the adjusting slide rail 32 and the adjusting shaft 31 causes the adjusting frame 3 to produce continuous rotation angle changes, thereby driving the horizontal rotation of the movable frame 2.

[0050] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present utility model without departing from the scope of the present utility model shall fall within the scope of the present utility model.

Claims

1. A rotary adjustment mechanism, characterized in that, It includes a mounting frame (1), a movable frame (2) rotatably connected to the mounting frame (1), an adjusting frame (3) rotatably connected to the movable frame (2), a sliding member (4) slidably connected to the adjusting frame (3), and a driving unit (5). The rotation center of the adjusting frame (3) is centrifugal relative to the rotation center of the rotating frame, and the driving unit (5) is drivingly connected to the sliding member (4). When it is necessary to rotate the movable frame (2), the drive unit (5) drives the sliding member (4) to slide along the adjusting frame (3), so that the adjusting frame (3) rotates, thereby causing the movable frame (2) to rotate.

2. The rotary adjustment mechanism according to claim 1, characterized in that, The output end of the drive unit (5) is connected to a push rod (51), the push rod (51) is connected to the slider (4), and the drive unit (5) drives the push rod (51) to move along its own axis. When the push rod (51) is in the initial position, the direction of movement of the push rod (51) is perpendicular to the rotation center of the adjusting frame (3); When the push rod (51) moves toward the slider (4), the drive unit (5) drives the slider (4) to slide along the adjustment frame (3) to rotate the adjustment frame (3), so that the movable frame (2) rotates.

3. The rotary adjustment mechanism according to claim 2, characterized in that, The line connecting the rotation centers of the movable frame (2) and the adjusting frame (3) is perpendicular to the initial thrust direction of the push rod (51), and the initial thrust of the push rod (51) is parallel to the tangential direction of the rotation of the movable frame (2). When it is necessary to rotate the movable frame (2), the drive unit (5) drives the sliding member (4) to slide along the adjusting frame (3) to rotate the adjusting frame (3) so that the movable frame (2) rotates.

4. The rotary adjustment mechanism according to claim 2, characterized in that, The front end of the push rod (51) is connected to a limiting member (6), and the sliding member (4) is provided with a docking part (41). The docking part (41) is engaged with the push rod (51). One end of the docking part (41) corresponds to one side of the limiting member (6). The docking part (41) and the push rod (51) have a first movable gap (701) in the circumferential direction. The docking part (41) has a second movable gap (702) along the axial direction of the push rod (51). When the push rod (51) moves toward the slider (4), it drives the docking part (41) to move within the first movable gap (701) and the second movable gap (702), causing the slider (4) to slide along the adjusting frame (3).

5. The rotary adjustment mechanism according to claim 4, characterized in that, The docking part (41) is provided with a first docking section (411) and a second docking section (412) that are parallel to each other. The push rod (51) is provided with a first limiting surface (511) and a second limiting surface (512). The first docking section (411) corresponds to the first limiting surface (511), and the second docking section (412) corresponds to the second limiting surface (512). The first movable gap (701) is located between the first docking section (411) and the second docking section (412).

6. The rotary adjustment mechanism according to claim 4, characterized in that, The limiting member (6) is threadedly connected to the push rod (51), the push rod (51) is equipped with a limiting ring (8), and the mating part (41) is snapped between the limiting member (6) and the limiting ring (8).

7. The rotary adjustment mechanism according to claim 2, characterized in that, The sliding member (4) is provided with a receiving space (413), and one end of the adjusting bracket (3) extends into the receiving space (413); When the adjusting frame (3) rotates, at least a portion of the adjusting frame (3) is located within the accommodating space (413).

8. The rotary adjustment mechanism according to claim 2, characterized in that, The adjusting frame (3) includes an adjusting shaft (31) and an adjusting slide rail (32) connected to the adjusting shaft (31). The adjusting slide rail (32) is slidably engaged with the sliding member (4). The movable frame (2) is equipped with a longitudinally arranged first bearing (21) and a second bearing (22). The adjusting shaft (31) is connected to the first bearing (21) and the second bearing (22). When the push rod (51) is in the initial position, the adjustment shaft (31) is directly opposite the middle of the adjustment slide rail (32).

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