A spraying mechanism and photomask processing equipment

Abstract

This application provides a spraying mechanism and a photomask processing device, relating to the field of photomask processing technology. The spraying mechanism includes: a flow distribution component and a nozzle connected to the outlet of the flow distribution component; the inlet of the flow distribution component is connected to a liquid storage tank; the flow distribution component has a flow cavity and multiple diversion channels, the flow cavity is connected to the inlet of the flow distribution component, and one end of each of the multiple diversion channels is connected to the flow cavity, while the opposite end is connected to the outlet of the flow distribution component. The spraying mechanism is equipped with a flow distribution component, which has a flow cavity and multiple diversion channels simultaneously connected to the flow cavity. Before entering the nozzle, the fluid first enters the flow cavity and then is diverted into the multiple diversion channels. The diversion channels can optimize the fluid flow characteristics, reduce turbulence, eddies, and other undesirable flow phenomena, allowing the fluid to be sprayed more smoothly from the nozzle and flow to the target location, thereby improving the operating efficiency and stability of the spraying mechanism.

Description

Technical Field

[0001] This application relates to the field of photomask processing technology, and more specifically, to a spraying mechanism and photomask processing equipment. Background Technology

[0002] Development is a crucial step in photomask fabrication, transferring the designed circuit pattern onto the substrate. During development, a developing solution is sprayed onto the substrate surface. Through chemical dissolution or reduction reactions, exposed or unexposed areas of the photosensitive material are selectively removed, thereby achieving pattern transfer.

[0003] The commonly used method for spraying developer is to use a nozzle structure to spray the developer onto the surface of the substrate. However, existing nozzle structures are prone to generating bubbles or droplet splashes during the spraying process, which reduces the development quality. Utility Model Content

[0004] The purpose of this application is to address the shortcomings of the prior art by providing a spraying mechanism that can effectively reduce the probability of bubbles or droplet splashing during the spraying process.

[0005] To achieve the above objectives, the technical solutions adopted in the embodiments of this application are as follows: In one aspect of this application, a spraying mechanism is provided, comprising: a flow distribution component and a nozzle communicating with the outlet of the flow distribution component, wherein the inlet of the flow distribution component is used to communicate with a liquid storage tank; the flow distribution component is provided with a flow cavity and a plurality of diversion channels, wherein the flow cavity is communicating with the inlet of the flow distribution component, and one end of the plurality of diversion channels is communicating with the flow cavity and the other end of the diversion channels is communicating with the outlet of the flow distribution component.

[0006] Optionally, the flow distribution unit is further provided with at least two flow distribution chambers, one end of which is connected to the flow chamber and the other end of which is connected to the end of multiple flow distribution channels.

[0007] Optionally, the end face connecting the flow cavity and the diversion cavity is the first end face, and the orthographic projection of the diversion cavity on the first end face is located within the edge of the first end face. The end face connecting the diversion cavity and the diversion channel is the second end face, and the orthographic projection of the diversion channel on the second end face of the diversion cavity connected to it is located within the edge of the second end face.

[0008] Optionally, the number of outlets of the flow distribution element is at least two, and the outlets of the at least two flow distribution elements correspond to the positions of at least two flow splitting chambers respectively. The fluid in the flow splitting chamber flows out through the outlet of the corresponding flow distribution element and enters the nozzle.

[0009] Optionally, at least two flow dividers are parallel to each other, and multiple flow dividers are parallel to each other.

[0010] Optionally, it also includes: a flow regulator, the inlet of which is connected to the liquid storage tank and the outlet of which is connected to the inlet of the flow distribution device, the flow regulator being used to regulate the flow rate of the fluid entering the flow chamber.

[0011] Optionally, the flow regulating component is provided with a piston, and a flow channel is formed between the outer wall of the piston and the inner wall of the flow regulating component. The flow channel connects the inlet and outlet of the flow regulating component. The piston is connected to a first driving component, and the first driving component drives the piston to move to adjust the cross-sectional area of ​​the flow channel.

[0012] Optionally, it also includes: a controller and a position sensor, wherein the position sensor is used to acquire the position signal of the nozzle and transmit the position signal to the controller, and the controller is used to control the action of the first drive element according to the position signal.

[0013] Optionally, it may also include a robotic arm for driving the nozzle movement.

[0014] In another aspect of the embodiments of this application, a photomask processing apparatus is provided, including a spraying mechanism as described in any of the above.

[0015] The beneficial effects of this application include: This application provides a spraying mechanism, including: a flow distribution component and a nozzle connected to the outlet of the flow distribution component; the inlet of the flow distribution component is connected to a liquid storage tank; the flow distribution component has a flow cavity and multiple diversion channels, the flow cavity is connected to the inlet of the flow distribution component, and one end of each of the multiple diversion channels is connected to the flow cavity, while the opposite end is connected to the outlet of the flow distribution component. This spraying mechanism is equipped with a flow distribution component, which has a flow cavity and multiple diversion channels simultaneously connected to the flow cavity. Before entering the nozzle, the fluid first enters the flow cavity and then is diverted into the multiple diversion channels. The diversion channels can optimize the fluid flow characteristics, reduce undesirable flow phenomena such as turbulence and eddies, make the fluid flow more stable and uniform, and enable it to be sprayed more smoothly from the nozzle and flow to the target location, thereby improving the operating efficiency and stability of the spraying mechanism. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the spraying mechanism provided in the embodiments of this application; Figure 2 A cross-sectional view of the spraying mechanism provided in an embodiment of this application; Figure 3 One of the cross-sectional views of the flow distribution component in the spraying mechanism provided in the embodiments of this application; Figure 4 This is a second cross-sectional view of the flow distribution component in the spraying mechanism provided in the embodiments of this application.

[0018] Icons: 100-Spraying mechanism; 110-Flow distribution component; 111-Inlet of flow distribution component; 112-Outlet of flow distribution component; 113-Flow chamber; 1131-First end face; 114-Diverting channel; 115-Diverting cavity; 1151-Second end face; 120-Nozzle; 130-Flow regulating component; 131-Inlet of flow regulating component; 132-Outlet of flow regulating component; 133-Piston; 1331-Piston head; 134-Flow channel; 135-First driving component; 136-Annular boss; 137-First regulating cavity; 138-Second regulating cavity; 140-Controller; 150-Position sensor; 160-Robotic arm; E1-Orthographic projection of the diverting cavity on the first end face; E2-Edge of the first end face; E3-Orthographic projection of the diverting channel on the second end face of the diverting cavity connected to it; E4-Edge of the second end face. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. It should be noted that, unless otherwise specified, the various features in the embodiments of this application can be combined with each other, and the combined embodiments are still within the protection scope of this application.

[0021] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0022] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this application is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0023] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0024] Regarding one aspect of the embodiments of this application, please refer to Figure 1 and Figure 2 A spraying mechanism 100 is provided for spraying fluid. The spraying mechanism 100 includes a flow distribution member 110 and a nozzle 120 communicating with the outlet 112 of the flow distribution member. The inlet 111 of the flow distribution member is used to communicate with a storage tank. The fluid stored in the storage tank is distributed by the flow distribution member 110 and then enters the nozzle 120. In practical applications, a water pump can be used for fluid transfer.

[0025] Please refer to the reference. Figure 3 The flow distribution component 110 has a flow chamber 113 and multiple flow diversion channels 114. The flow chamber 113 is connected to the inlet 111 of the flow distribution component, and one end of each of the multiple flow diversion channels 114 is connected to the flow chamber 113, while the other end is connected to the outlet 112 of the flow distribution component. Fluid enters the flow chamber 113 through the inlet 111 of the flow distribution component, then enters the multiple flow diversion channels 114 through the flow chamber 113, and finally exits through the outlet 112 of the flow distribution component and enters the nozzle 120.

[0026] The aforementioned spraying mechanism 100 is equipped with a flow distribution component 110, which contains a flow chamber 113 and multiple diversion channels 114 that communicate with the flow chamber 113. Before entering the nozzle 120, the fluid first enters the flow chamber 113 and then is diverted into the multiple diversion channels 114. The diversion channels 114 can optimize the fluid flow characteristics, reduce undesirable flow phenomena such as turbulence and eddies, and make the fluid flow more stable and uniform, enabling it to be sprayed more smoothly from the nozzle 120 and flow to the target position, thereby improving the operating efficiency and stability of the spraying mechanism 100.

[0027] Optionally, the flow distribution component 110 is further provided with at least two flow distribution chambers 115, one end of which is connected to the flow chamber 113, and the other end of which is connected to the end of multiple flow distribution channels 114.

[0028] The flow chamber 113 and the flow-dividing channel 114 are connected via flow-dividing chambers 115. There are at least two flow-dividing chambers 115, each simultaneously connected to the flow chamber 113. When fluid flows from the flow chamber 113 into the at least two flow-dividing chambers 115, a first flow diversion is achieved. Each flow-dividing chamber 115 is also simultaneously connected to multiple flow-dividing channels 114. When fluid flows from the flow-dividing chamber 115 into the multiple flow-dividing channels 114, a second flow diversion is achieved. This two-stage flow diversion method can further optimize the fluid flow characteristics, reducing the likelihood of undesirable flow phenomena such as turbulence and eddies.

[0029] Alternatively, please refer to Figure 3 and Figure 4 The end face connecting the flow cavity 113 and the diversion cavity 115 is the first end face 1131. The orthographic projection E1 of the diversion cavity on the first end face is located within the edge E2 of the first end face. The end face connecting the diversion cavity 115 and the diversion channel 114 is the second end face 1151. The orthographic projection E3 of the diversion channel on the second end face of the diversion cavity connected to it is located within the edge E4 of the second end face.

[0030] The cross-sectional areas of the flow chamber 113, the diversion chamber 115, and the diversion channel 114 decrease sequentially, while their number increases sequentially. This allows the fluid to be diverted more and more finely, thereby improving the optimization effect of fluid flow characteristics. At the same time, the diversion chamber 115 does not exceed the range of the flow chamber 113, and the diversion channel 114 does not exceed the range of the diversion chamber 115, which makes the fluid flow smoother.

[0031] It should be noted that the cross-sectional area refers to the area of ​​the cross section perpendicular to the direction of fluid flow.

[0032] Optionally, the flow distribution component 110 is provided with a guide plate, and the inner wall of the flow distribution component 110 and the guide plate enclose a flow cavity 113. A flow splitting cavity 115 and a flow splitting channel 114 are machined inside the guide plate.

[0033] Optionally, please refer to the following: Figure 2 The number of outlets 112 of the flow distribution element is at least two, and the outlets 112 of the at least two flow distribution elements correspond to the positions of at least two flow dividers 115 respectively. The fluid in the flow divider 115 flows out through the outlets 112 of the corresponding flow distribution elements and enters the nozzle 120.

[0034] The number of outlets 112 of the flow distribution components is equal to the number of flow distribution chambers 115 and corresponds one-to-one. At least two outlets 112 of the flow distribution components are simultaneously connected to the nozzle 120. The fluid flowing out of the flow distribution chamber 115 enters multiple flow distribution channels 114 connected to it, then enters the outlet 112 of the corresponding flow distribution component through the flow distribution channel 114, and finally enters the nozzle 120. The one-to-one correspondence between the outlets 112 of the flow distribution components and the flow distribution chambers 115 makes the fluid sprayed from the nozzle 120 more uniform.

[0035] Optionally, at least two flow distribution chambers 115 are parallel to each other, and multiple flow distribution channels 114 are parallel to each other. This arrangement makes the fluid ejected from the nozzle 120 more uniform and also makes the flow distribution component 110 easier to manufacture.

[0036] Optionally, at least two flow dividers 115 are not interconnected, and multiple flow dividers 114 are not interconnected. In this way, fluid will not flow between flow dividers 115 or between flow dividers 114, which can further improve the flow divider effect and optimize the fluid flow characteristics.

[0037] Optionally, at least two of the flow-dividing cavities 115 have equal cross-sectional areas, and the multiple flow-dividing channels 114 have equal cross-sectional areas. This allows for more uniform fluid distribution.

[0038] Optionally, the flow cavity 113, the flow branch cavity 115, and the flow branch channel 114 are all cylindrical. Such flow cavity 113, flow branch cavity 115, and flow branch channel 114 have smooth inner walls and extend in a straight line, which is conducive to the flow of fluid and can further reduce undesirable flow phenomena such as turbulence and eddies.

[0039] Alternatively, please refer to Figure 2 The spraying mechanism 100 also includes a flow regulating component 130, the inlet 131 of which is connected to the liquid storage tank, and the outlet 132 of which is connected to the inlet 111 of the flow distribution component. The flow regulating component 130 is used to regulate the flow rate of the fluid entering the flow chamber 113.

[0040] The flow rate regulator 130 allows the nozzle 120 to spray the appropriate flow rate of fluid according to the actual required flow rate, thereby precisely controlling the fluid flow rate. Taking the spraying mechanism 100 spraying developer onto a substrate as an example, the difference between the required developer flow rate and the actual flow rate at the current position can be calculated based on the development intensity requirements of different areas of the substrate. The flow rate regulator 130 is then used to adjust the fluid flow rate sprayed from the nozzle 120, thereby achieving uniform development and making the development process more automated and intelligent.

[0041] Optionally, the flow regulating component 130 is provided with a piston 133, and a flow channel 134 is formed between the outer wall of the piston 133 and the inner wall of the flow regulating component 130. The flow channel 134 connects the inlet 131 and the outlet 132 of the flow regulating component. The piston 133 is connected to the first driving component 135, and the first driving component 135 drives the piston 133 to move so as to adjust the cross-sectional area of ​​the flow channel 134.

[0042] Fluid enters through inlet 131 of the flow regulator, passes through flow channel 134, and then exits through outlet 132 of the flow regulator. The flow rate of fluid entering the flow distribution member 110 can be adjusted by regulating the cross-sectional area of ​​flow channel 134. Flow channel 134 is formed between the outer wall of piston 133 and the inner wall of flow regulator 130. The cross-sectional area of ​​flow channel 134 is adjusted by regulating the position of piston 133 using first drive member 135.

[0043] For example, the flow regulator 130 includes a regulating cavity and an annular boss 136. The annular boss 136 divides the regulating cavity into a first regulating cavity 137 and a second regulating cavity 138. The inlet 131 and outlet 132 of the flow regulator are located on opposite sides of the annular boss 136. The thickness of the annular boss 136 is less than the thickness of the piston head 1331. The inner wall of the annular boss 136 is cylindrical, and the outer wall of the piston head 1331 is frustoconical. A flow channel 134 is formed between the inner wall of the annular boss 136 and the outer wall of the piston head 1331. Thus, when the piston head 1331 moves axially within the annular boss 136, the cross-sectional area of ​​the flow channel 134 changes.

[0044] Alternatively, the flow regulator 130 may include a fluid channel and a movable block. The movable block is located at the end of the fluid channel and can block the port of the fluid channel. The movable block is connected to a second driving member. When the fluid flows within the flow regulator 130, it must pass through the fluid channel. The second driving member drives the movable block to move, thereby adjusting the blocking area of ​​the movable block on the port of the fluid channel, and thus adjusting the fluid flow rate.

[0045] Optionally, the spraying mechanism 100 further includes a controller 140 and a position sensor 150. The position sensor 150 is used to acquire the position signal of the nozzle 120 and transmit the position signal to the controller 140. The controller 140 is used to control the first drive member 135 to operate according to the position signal.

[0046] The controller 140 is connected to both the position sensor 150 and the drive component. The position sensor 150 can be directly mounted on the nozzle 120 or on other parts that move synchronously with the nozzle 120. The position sensor 150 acquires the position of the nozzle 120 in real time and sends the position signal to the controller 140. After receiving the position signal, the controller 140 compares the current position of the nozzle 120 with a preset position-flow correspondence, and calculates the difference between the required flow rate at the current position and the actual flow rate. Based on the calculated difference, the controller 140 generates corresponding control commands to adjust the operating state of the drive component, thereby precisely controlling the position of the piston 133 and adjusting the flow rate. Taking a drive motor as an example, the control commands can include information such as the motor's speed and direction of rotation.

[0047] The controller 140 can store a model library of traffic requirements for different products and locations. It can retrieve preset location traffic from the model library, and the model library can be adjusted at any time.

[0048] Optionally, the spraying mechanism 100 further includes a robotic arm 160 for driving the nozzle 120 to move.

[0049] The robotic arm 160 can be directly or indirectly connected to any one of the nozzle 120, the flow distribution component 110, and the flow regulating component 130, so that the position of the nozzle 120 can be adjusted by the robotic arm 160 to spray fluid onto different areas.

[0050] This embodiment also provides a photomask processing device, including a spraying mechanism 100 as described above.

[0051] This photomask processing equipment has the same structure and beneficial effects as the spraying mechanism 100 in the foregoing embodiments. The structure and beneficial effects of the spraying mechanism 100 have been described in detail in the foregoing embodiments and will not be repeated here.

[0052] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A spraying mechanism, characterized in that, include: A flow distribution device and a nozzle communicating with the outlet of the flow distribution device, wherein the inlet of the flow distribution device is configured to communicate with a storage tank; The flow distribution device is provided with a flow cavity and multiple flow distribution channels. The flow cavity is connected to the inlet of the flow distribution device, and one end of each of the multiple flow distribution channels is connected to the flow cavity, while the other end is connected to the outlet of the flow distribution device.

2. The spraying mechanism as described in claim 1, characterized in that, The flow distribution component is further provided with at least two flow distribution cavities. One end of each flow distribution cavity is connected to the flow cavity, and the other end is simultaneously connected to the ends of multiple flow distribution channels.

3. The spraying mechanism as described in claim 2, characterized in that, The end face connecting the flow cavity and the diversion cavity is the first end face, and the orthographic projection of the diversion cavity on the first end face is located within the edge of the first end face. The end face connecting the diversion cavity and the diversion channel is the second end face, and the orthographic projection of the diversion channel on the second end face of the diversion cavity to which it is connected is located within the edge of the second end face.

4. The spraying mechanism as described in claim 2, characterized in that, The flow distribution component has at least two outlets, and the outlets of the at least two flow distribution components correspond to the positions of at least two flow dividers. The fluid in the flow divider flows out through the outlet of the corresponding flow distribution component and enters the nozzle.

5. The spraying mechanism as described in claim 2, characterized in that, At least two flow dividers are parallel to each other, and multiple flow dividers are parallel to each other.

6. The spraying mechanism as described in claim 1, characterized in that, Also includes: A flow regulator, wherein the inlet of the flow regulator is connected to the liquid storage tank and the outlet is connected to the inlet of the flow distribution device, and the flow regulator is used to regulate the flow rate of fluid entering the flow cavity.

7. The spraying mechanism as described in claim 6, characterized in that, The flow regulating component is equipped with a piston, and a flow channel is formed between the outer wall of the piston and the inner wall of the flow regulating component. The flow channel connects the inlet and outlet of the flow regulating component. The piston is connected to a first driving component, and the first driving component drives the piston to move so as to adjust the cross-sectional area of ​​the flow channel.

8. The spraying mechanism as described in claim 7, characterized in that, Also includes: The controller and the position sensor are provided. The position sensor is used to acquire the position signal of the nozzle and transmit the position signal to the controller. The controller is used to control the first drive unit to operate according to the position signal.

9. The spraying mechanism as described in claim 1, characterized in that, Also includes: A robotic arm for driving the nozzle to move.

10. A photomask processing device, characterized in that, Includes the spraying mechanism as described in any one of claims 1 to 9.

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