Electron beam evaporation water-cooled crucible

Abstract

An electron beam evaporation water-cooled crucible includes a water-cooled crucible and a shielding cover plate. The water-cooled crucible is located in the opening of the shielding cover plate. A groove is formed on the upper surface of the water-cooled crucible base. The groove starts from the upper edge of the side of the water-cooled crucible cover plate and extends to the edge of the opening of the shielding cover plate. The bottom of the groove is flush with the upper edge of the side of the water-cooled crucible cover plate, and the upper edge of the side of the water-cooled crucible cover plate is flush with the upper edge of the electron gun side of the water-cooled crucible. The distance D2 between the upper edge of the side of the water-cooled crucible cover plate and the edge of the opening of the shielding cover plate is 2mm-20mm. This invention uses a groove between the upper edge of the water-cooled crucible cover and the edge of the opening of the shielding cover as a transition structure. This prevents the vapor-deposited product from adhering to the upper edge of the water-cooled crucible, facilitates the removal of the liner containing the vapor-deposited material, avoids the protruding upper edge from obstructing the diffusion of the vapor-deposited material, thereby improving the utilization rate of the vapor-deposited material and the uniformity of the film, and prevents particles from entering the gap between the shielding cover and the water-cooled crucible.

Description

Technical Field

[0001] This utility model relates to the field of crucible technology, specifically to an electron beam evaporation water-cooled crucible. Background Technology

[0002] like Figure 1 , Figure 2 As shown, when using TELEMARK multi-group water-cooled crucibles to deposit thin films, due to its own design flaws, the opening of the shielding cover of the water-cooled crucible is close to the water-cooled crucible, and the upper edge of the water-cooled crucible on the side near the shielding cover is not on the same plane as the upper edge of the water-cooled crucible on the side near the electron gun. The former is 3-5mm higher than the latter. This design approach presents many technical challenges to the actual vapor deposition process, as follows: 1. The vapor-deposited material will adhere to the upper edge of the water-cooled crucible near the shielding cover. After changing the liner containing different materials, the material may be contaminated, and the purity of the vapor-deposited sample film will decrease. 2. The upper edge of the water-cooled crucible protrudes on the side near the shielding cover, which to some extent obstructs the dispersion of the vapor-deposited material and affects the uniformity of the deposited film. 3. As the usage time increases, the vapor-deposited material adhering to the upper edge of the water-cooled crucible near the shielding cover plate becomes thicker and thicker, hindering the removal of the liner. 4. When the material to be vapor-deposited is particulate, the particles may enter the gap between the shielding cover and the water-cooled crucible, affecting the rotation. Utility Model Content

[0003] In view of the deficiencies in the prior art, the purpose of this utility model is to provide an electron beam evaporation water-cooled crucible.

[0004] The electron beam evaporation water-cooled crucible provided by this utility model includes a water-cooled crucible and a shielding cover plate, wherein the shielding cover plate covers the base of the water-cooled crucible and the water-cooled crucible is located in the opening of the shielding cover plate. The upper surface of the water-cooled crucible base is provided with a groove. The groove starts from the upper edge of the water-cooled crucible cover plate and extends to the edge of the cover plate opening. The bottom of the groove is flush with the upper edge of the water-cooled crucible cover plate and the upper edge of the water-cooled crucible cover plate is flush with the upper edge of the electron gun side of the water-cooled crucible. The distance D2 between the upper edge of the side of the water-cooled crucible cover plate and the edge of the opening of the cover plate is 2mm-20mm.

[0005] Preferably, the depth D1 of the settling tank is 1mm-10mm.

[0006] Preferably, the upper edge of the water-cooled crucible cover plate is flush with the upper edge of the inner lining of the water-cooled crucible.

[0007] Preferably, the edge of the opening of the shielding cover is arc-shaped, and the curvature of the arc is the same as the curvature of the upper edge of the side of the water-cooled crucible cover.

[0008] Preferably, the edge of the opening of the cover plate is zigzag-shaped.

[0009] Preferably, there is a gap between the shielding cover and the water-cooled crucible base, and the end of the gap is at a distance D2 from the upper edge of the side of the water-cooled crucible cover.

[0010] The electron beam evaporation water-cooled crucible provided by this utility model includes a water-cooled crucible and a shielding cover plate, wherein the shielding cover plate covers the base of the water-cooled crucible and the water-cooled crucible is located in the opening of the shielding cover plate. The upper surface of the water-cooled crucible base is provided with a groove. The groove starts from the upper edge of the water-cooled crucible cover plate and extends to the edge of the cover plate opening. The bottom of the groove is flush with the upper edge of the water-cooled crucible cover plate and the upper edge of the water-cooled crucible cover plate is flush with the upper edge of the electron gun side of the water-cooled crucible. The distance D2 between the upper edge of the side of the water-cooled crucible cover plate and the edge of the opening of the cover plate is 2mm-20mm; The depth D1 of the settling tank is 1mm-10mm; The upper edge of the cover plate of the water-cooled crucible is flush with the upper edge of the inner lining of the water-cooled crucible. The edge of the opening of the shielding cover is arc-shaped, and the curvature of the arc is the same as the curvature of the upper edge of the water-cooled crucible cover, or the edge of the opening of the shielding cover is zigzag-shaped. There is a gap between the shielding cover and the water-cooled crucible base, and the end of the gap is at a distance D2 from the upper edge of the side of the water-cooled crucible cover.

[0011] Compared with the prior art, the present invention has the following beneficial effects: This invention uses a groove between the upper edge of the water-cooled crucible cover and the edge of the opening of the shielding cover as a transition structure. This prevents the vapor-deposited product from adhering to the upper edge of the water-cooled crucible, facilitates the removal of the liner containing the vapor-deposited material, avoids the protruding upper edge from obstructing the diffusion of the vapor-deposited material, thereby improving the utilization rate of the vapor-deposited material and the uniformity of the film, and prevents particles from entering the gap between the shielding cover and the water-cooled crucible. Attached Figure Description

[0012] Other features, objects, and advantages of this invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings: Figure 1 This is a top-view structural diagram of the TELEMARK water-cooled crucible in the prior art; Figure 2This is a side sectional view of the TELEMARK water-cooled crucible in the prior art; Figure 3 This is a top-view structural diagram of the present invention; Figure 4 This is a side sectional view of the present invention.

[0013] The diagram shows: Detailed Implementation

[0014] The present invention will now be described in detail with reference to specific embodiments. These embodiments will help those skilled in the art to further understand the present invention, but do not limit the present invention in any way. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all fall within the protection scope of the present invention.

[0015] This utility model discloses an electron beam evaporation water-cooled crucible. By optimizing the design of the opening of the shielding cover and the contact position between the crucible wall and the opening of the shielding cover, the evaporation product can be prevented from adhering to the upper edge of the water-cooled crucible, making it easier to remove the liner containing the evaporation material. It also avoids the protruding upper edge from blocking the diffusion of the evaporation material, thereby improving the utilization rate of the evaporation material and the uniformity of the film. Furthermore, it can prevent particles from entering the gap between the shielding cover and the water-cooled crucible.

[0016] According to the electron beam evaporation water-cooled crucible provided by this utility model, such as Figure 3 , Figure 4 As shown, the device includes a water-cooled crucible and a shielding cover 1. The shielding cover 1 covers the water-cooled crucible base 3, and the water-cooled crucible is located in the opening of the shielding cover 1. A recessed groove is formed on the upper surface of the water-cooled crucible base 3. The recessed groove starts from the upper edge of the side of the water-cooled crucible cover and extends to the edge of the opening of the shielding cover 1. The bottom of the recessed groove is flush with the upper edge of the side of the water-cooled crucible cover, and the upper edge of the side of the water-cooled crucible cover is flush with the upper edge 4 of the electron gun side of the water-cooled crucible. The distance D2 between the upper edge of the side of the water-cooled crucible cover and the edge of the opening of the shielding cover 1 is 2mm-20mm. This invention, by creating a recessed groove between the upper edge of the side of the water-cooled crucible cover and the edge of the opening of the shielding cover as a transition structure, can prevent the vapor-deposited material located at the bottom 5 of the water-cooled crucible from adhering during vapor deposition and avoids obstructing the diffusion of the vapor-deposited material.

[0017] In a preferred embodiment, there is a gap 2 between the shielding cover plate 1 and the water-cooled crucible base 3, and there is a distance D2 between the end of the gap 2 and the upper edge of the side of the water-cooled crucible cover plate. By setting a sink as a transition structure, the distance between the gap 2 and the upper edge of the side of the water-cooled crucible cover plate is increased, thereby preventing particles from entering the gap 2 between the shielding cover plate and the water-cooled crucible during vapor deposition.

[0018] In a preferred embodiment, the depth D1 of the settling groove is 1mm-10mm. The specific groove depth is adjusted according to the height of the liner. The optimal situation is that the liner is placed inside the water-cooled crucible so that the upper edge of the water-cooled crucible cover is flush with the upper edge of the liner inside the water-cooled crucible.

[0019] In a preferred embodiment, the edge of the opening of the shielding cover 1 and the edge of the settling tank are both arc-shaped, and the curvature of the arc is the same as the curvature of the upper edge of the water-cooled crucible cover plate. Alternatively, the edge of the opening of the shielding cover 1 and the edge of the settling tank are both zigzag-shaped. Specifically, the shape of the edge of the opening of the shielding cover 1 and the edge of the settling tank is not limited.

[0020] In the description of this application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0021] The specific embodiments of this utility model have been described above. It should be understood that this utility model is not limited to the specific embodiments described above, and those skilled in the art can make various changes or modifications within the scope of the claims, which do not affect the substantive content of this utility model. Unless otherwise specified, the embodiments and features described in this application can be arbitrarily combined with each other.

Claims

1. A water-cooled crucible for electron beam evaporation, characterized in that, Includes a water-cooled crucible and a shielding cover (1), the shielding cover (1) covering the water-cooled crucible base (3), the water-cooled crucible being located in the opening of the shielding cover (1); The upper surface of the water-cooled crucible base (3) is provided with a sink groove. The sink groove starts from the upper edge of the side of the water-cooled crucible cover plate and extends to the edge of the opening of the cover plate (1). The bottom of the sink groove is flush with the upper edge of the side of the water-cooled crucible cover plate, and the upper edge of the side of the water-cooled crucible cover plate is flush with the upper edge of the side of the electron gun of the water-cooled crucible (4). The distance D2 between the upper edge of the side of the water-cooled crucible cover plate and the edge of the opening of the shielding cover plate (1) is 2mm-20mm.

2. The electron beam evaporation water-cooled crucible according to claim 1, characterized in that, The depth D1 of the settling tank is 1mm-10mm.

3. The electron beam evaporation water-cooled crucible according to claim 1, characterized in that, The upper edge of the cover plate of the water-cooled crucible is flush with the upper edge of the inner lining of the water-cooled crucible.

4. The electron beam evaporation water-cooled crucible according to claim 1, characterized in that, The edge of the opening of the shielding cover (1) is arc-shaped, and the curvature of the arc is the same as the curvature of the upper edge of the side of the water-cooled crucible cover.

5. The electron beam evaporation water-cooled crucible according to claim 1, characterized in that, The edge of the opening of the cover plate (1) is zigzag-shaped.

6. The electron beam evaporation water-cooled crucible according to claim 1, characterized in that, There is a gap (2) between the shielding cover (1) and the water-cooled crucible base (3), and there is a distance D2 between the end of the gap (2) and the upper edge of the side of the water-cooled crucible cover.

7. A water-cooled crucible for electron beam evaporation, characterized in that, Includes a water-cooled crucible and a shielding cover (1), the shielding cover (1) covering the water-cooled crucible base (3), the water-cooled crucible being located in the opening of the shielding cover (1); The upper surface of the water-cooled crucible base (3) is provided with a sink groove. The sink groove starts from the upper edge of the side of the water-cooled crucible cover plate and extends to the edge of the opening of the cover plate (1). The bottom of the sink groove is flush with the upper edge of the side of the water-cooled crucible cover plate, and the upper edge of the side of the water-cooled crucible cover plate is flush with the upper edge of the side of the electron gun of the water-cooled crucible (4). The distance D2 between the upper edge of the side of the water-cooled crucible cover plate and the edge of the opening of the shielding cover plate (1) is 2mm-20mm; The depth D1 of the settling tank is 1mm-10mm; The upper edge of the cover plate of the water-cooled crucible is flush with the upper edge of the inner lining of the water-cooled crucible. The edge of the opening of the shielding cover (1) is arc-shaped, and the curvature of the arc is the same as the curvature of the upper edge of the water-cooled crucible cover, or the edge of the opening of the shielding cover (1) is zigzag-shaped. There is a gap (2) between the shielding cover (1) and the water-cooled crucible base (3), and there is a distance D2 between the end of the gap (2) and the upper edge of the side of the water-cooled crucible cover.

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