A cooling device for a crystal pulling furnace

Abstract

This utility model belongs to the field of crystal pulling furnace technology, specifically a crystal pulling furnace cooling device, including a worktable, a crystal pulling furnace body fixedly connected to the top of the worktable; an air pump fixedly connected to the top of the worktable; a tee connected to the end of the air pump; a connecting seat fixedly connected to the top of the worktable; a first sliding groove opened inside the connecting seat; a slider disposed inside the first sliding groove; the slider being slidably connected inside the first sliding groove; a nozzle fixedly connected to the top of the slider; an air injection port opened on the side wall of the nozzle; a rotating cylinder fixedly connected to the top of the worktable; a support seat rotatably disposed inside the rotating cylinder; by adding a nozzle, the crystal pulling furnace body can be rapidly cooled, reducing the excessively high temperature of the outer wall of the crystal pulling furnace body, reducing thermal fatigue of the furnace shell, seals and other components, and improving the working condition of the crystal pulling furnace body during long-term operation.

Description

Technical Field

[0001] This utility model relates to the field of crystal pulling furnace technology, specifically a crystal pulling furnace cooling device. Background Technology

[0002] Crystal pulling furnaces are core equipment in the semiconductor and photovoltaic industries. They are mainly used to grow monocrystalline silicon rods using the Czochralski method. Their working principle is to melt polycrystalline silicon raw materials in a high-temperature environment and then gradually pull out high-purity monocrystalline silicon crystals of a specific diameter through seed crystal guidance. The performance of the crystal pulling furnace directly affects the quality and production efficiency of monocrystalline silicon and is a key link in chip manufacturing and solar cell production.

[0003] When processing monocrystalline silicon in a crystal pulling furnace, high-purity polycrystalline silicon material and dopants are first loaded into a quartz crucible. After evacuation, the material is heated to melt. Then, the seed crystal is lowered to contact the molten silicon, slowly rotated and lifted, allowing silicon atoms to grow in an orderly manner along the seed crystal structure into a monocrystalline silicon rod. The temperature, vacuum degree and other parameters need to be precisely controlled throughout the process.

[0004] Crystal pulling furnaces are used to grow crystals under high temperature conditions during the production of monocrystalline silicon. The internal temperature of the furnace can reach thousands of degrees Celsius during operation. Due to prolonged high-temperature operation, a large amount of heat will accumulate on the furnace wall and surrounding structure. If the heat cannot be removed in time, it may not only affect the stability of the temperature field inside the furnace, but also accelerate the thermal fatigue of components such as the furnace shell and seals, thus shortening their service life.

[0005] Therefore, a cooling device for crystal pulling furnace is proposed to address the above problems. Utility Model Content

[0006] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.

[0007] The technical solution adopted by this utility model to solve its technical problem is as follows: The crystal pulling furnace cooling device of this utility model includes a workbench, a crystal pulling furnace body fixedly connected to the top of the workbench; an air pump fixedly connected to the top of the workbench; a tee connected to the end of the air pump; a connecting seat fixedly connected to the top of the workbench; a first sliding groove is opened inside the connecting seat; a slider is arranged inside the first sliding groove; the slider is slidably connected inside the first sliding groove; a spray pipe is fixedly connected to the top of the slider; an air injection port is opened on the side wall of the spray pipe; by adding a spray pipe, the crystal pulling furnace body can be cooled down quickly, reducing the excessively high temperature of the outer wall of the crystal pulling furnace body, reducing the thermal fatigue of the furnace shell, seals and other components, and improving the working condition of the crystal pulling furnace body during long-term operation.

[0008] Preferably, a rotating cylinder is fixedly connected to the top of the workbench; a support base is rotatably arranged inside the rotating cylinder; multiple cooling plates are fixedly connected inside the support base; by adding cooling plates, the outer wall of the crystal pulling furnace body can be cooled more quickly. The cooling plates can assist the nozzle in cooling the outer wall of the workbench, reducing the situation where the temperature of the outer wall of the crystal pulling furnace body is too high and cannot be reduced quickly during cooling.

[0009] Preferably, the workbench has a second sliding groove inside; a flat plate is provided inside the second sliding groove; an electric push rod is fixed to the top of the flat plate; a water pump is fixed to the top of the electric push rod; and a nozzle is connected to the end of the water pump. By adding a nozzle, the workbench can be cooled down after use, the outer wall of the crystal pulling furnace can be cleaned, and the adsorption of dust and impurities on the outer wall of the crystal pulling furnace can be reduced.

[0010] Preferably, a sponge block is provided on the outside of the crystal pulling furnace body; the sponge block is slidably connected to the outside of the crystal pulling furnace body; by adding the sponge block, the situation where some stubborn impurities stick to the outer wall of the crystal pulling furnace body and are inconvenient to remove can be reduced, thereby improving the cleanliness of the outside of the crystal pulling furnace body.

[0011] Preferably, a filter screen is fixedly connected inside the nozzle; the filter screen and the nozzle are correspondingly arranged; by adding a filter screen, the accumulation of dust and impurities inside the nozzle can be reduced, and the possibility of dust entering the nozzle and causing damage can be reduced.

[0012] Preferably, multiple rubber pads are fixed to the outer wall of the workbench; the rubber pads and the workbench are correspondingly arranged; by adding rubber pads, the workbench can be protected and the displacement deviation of the workbench can be reduced.

[0013] The advantages of this utility model are: 1. The crystal pulling furnace cooling device described in this utility model can rapidly cool the worktable by adding a spray nozzle, reducing the excessive temperature of the outer wall of the worktable, reducing thermal fatigue of the furnace shell, seals and other components, and improving the working condition of the worktable during long-term operation.

[0014] 2. The crystal pulling furnace cooling device described in this utility model can cool the outer wall of the worktable more quickly by adding cooling plates. The cooling plates can assist the nozzle in cooling the outer wall of the worktable, reducing the situation where the temperature of the outer wall of the worktable is too high and cannot be reduced quickly during cooling. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the main body of this utility model; Figure 2 This is a schematic diagram of the cooling plate structure in this utility model; Figure 3 This is a schematic diagram of the structure of the filter screen in this utility model; Figure 4 This is a schematic diagram of the nozzle structure in this utility model; Figure 5 This is a schematic diagram of the structure of the rubber pad in this utility model.

[0017] In the diagram: 1. Workbench; 11. Crystal pulling furnace body; 12. Air pump; 13. T-junction; 14. Connecting seat; 15. First slide groove; 16. Slider; 17. Nozzle; 18. Gas injection port; 2. Cooling plate; 21. Rotary drum; 22. Support base; 3. Nozzle; 31. Second slide groove; 32. Flat plate; 33. Electric actuator; 34. Water pump; 4. Sponge block; 5. Filter screen; 6. Rubber pad. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0019] Specific implementation examples are given below.

[0020] like Figures 1 to 5As shown in the embodiment of this utility model, a crystal pulling furnace cooling device includes a workbench 1, with a crystal pulling furnace body 11 fixedly connected to the top of the workbench 1; an air pump 12 fixedly connected to the top of the workbench 1; a tee 13 connected to the end of the air pump 12; a connecting seat 14 fixedly connected to the top of the workbench 1; a first sliding groove 15 formed inside the connecting seat 14; a slider 16 disposed inside the first sliding groove 15; the slider 16 being slidably connected inside the first sliding groove 15; a nozzle 17 fixedly connected to the top of the slider 16; and an air injection port 18 formed on the side wall of the nozzle 17. After the workbench 1 has been processing for a long time, the two ends of the tee 13 can be connected to the two nozzles 17 respectively, and the air pump 12 can be started after the connection is completed. Subsequently, the air pump 12 injects air into the nozzle 17, and the injected air is then ejected through the nozzle 17. At this time, the slider 16 can be slid, and the slider 16 will slide inside the first slide groove 15. The air jet position of the nozzle 17 can be adjusted by sliding the slider 16. When the external temperature of the crystal pulling furnace body 11 is high, the slider 16 can be slid to one side of the first slide groove 15. At this time, the nozzle 17 will be closer to the crystal pulling furnace body 11, thereby cooling the crystal pulling furnace body 11. By adding the nozzle 17, the crystal pulling furnace body 11 can be cooled down quickly, reducing the excessive temperature of the outer wall of the crystal pulling furnace body 11, reducing the thermal fatigue of the furnace shell, seals and other components, and improving the working condition of the worktable 1 during long-term operation.

[0021] like Figures 1 to 3 As shown, a rotating cylinder 21 is fixedly connected to the top of the workbench 1; a support base 22 is rotatably arranged inside the rotating cylinder 21; multiple cooling plates 2 are fixedly connected inside the support base 22; when the nozzle 17 blows air onto the outer wall of the workbench 1, the cooling plates 2 can be connected to a power source, and then the cooling plates 2 will start to cool. The cooling plates 2 will spread the cold air inside the support base 22. At this time, the support base 22 can be rotated and aligned with the spray position of the nozzle 17. The air sprayed by the nozzle 17 will become cool air after passing through the support base 22. By adding cooling plates 2, the outer wall of the workbench 1 can be cooled more quickly. The cooling plates 2 can assist the nozzle 17 in cooling the outer wall of the workbench 1, reducing the situation where the temperature of the outer wall of the workbench 1 is too high and cannot be reduced quickly during cooling.

[0022] like Figures 1 to 4As shown, the workbench 1 has a second sliding groove 31 inside; a flat plate 32 is arranged inside the second sliding groove 31; an electric actuator 33 is fixedly connected to the top of the flat plate 32; a water pump 34 is fixedly connected to the top of the electric actuator 33; a nozzle 3 is connected to the end of the water pump 34; when the workbench 1 is finished using, the water pump 34 can be started, and then the water pump 34 will inject water into the nozzle 3, and finally the water will be sprayed out through the nozzle 3 onto the outer wall of the workbench 1. The nozzle 3 will spray water mist onto the outer wall of the crystal pulling furnace body 11. When it is necessary to adjust the position of the nozzle 3, the electric actuator 33 can be started, and then the electric actuator 33 will drive the nozzle 3 to move upward. When it is necessary to move back and forth, the sliding plate 32 can move inside the second sliding groove 31. By adding the nozzle 3, the workbench 1 can be cooled down after use, and the outer wall of the workbench 1 can be cleaned, reducing the adsorption of dust and impurities on the outer wall of the workbench 1.

[0023] like Figures 1 to 4 As shown, a sponge block 4 is provided on the outside of the crystal pulling furnace body 11; the sponge block 4 is slidably connected to the outside of the crystal pulling furnace body 11; after the nozzle 3 sprays water mist onto the surface of the crystal pulling furnace body 11, the sponge block 4 can slide, and then the sponge block 4 will slide on the outer wall of the crystal pulling furnace body 11, and the sponge block 4 can further remove dirt and impurities on the surface of the crystal pulling furnace body 11; by adding the sponge block 4, the situation where some stubborn impurities stick to the outer wall of the workbench 1 and are inconvenient to remove can be reduced, and the cleanliness of the outside of the crystal pulling furnace body 11 can be improved.

[0024] like Figure 3 As shown, a filter screen 5 is fixedly connected inside the nozzle 17; the filter screen 5 and the nozzle 17 are correspondingly arranged; when the nozzle 17 blows air to clean the surface of the crystal pulling furnace body 11, if dust is about to enter the nozzle 17, the filter screen 5 can filter the dust and impurities; by adding the filter screen 5, the accumulation of dust and impurities inside the nozzle 17 can be reduced, and the occurrence of dust entering the nozzle 17 and causing damage can be reduced.

[0025] like Figure 5 As shown, multiple rubber pads 6 are fixed to the outer wall of the worktable 1; the rubber pads 6 and the worktable 1 are correspondingly arranged; when the crystal pulling furnace body 11 is used, if an external object touches the worktable 1, the rubber pads 6 will protect the worktable 1 and reduce the vibration of the worktable 1; by adding rubber pads 6, the worktable 1 can be protected and the displacement deviation of the worktable 1 can be reduced.

[0026] Working principle: After the workbench 1 has been processing for a long time, the two ends of the tee 13 can be connected to the two nozzles 17 respectively. After the connection is completed, the air pump 12 can be started, and the air pump 12 will inject air into the nozzle 17. The injected air will then be ejected through the nozzle 17. At this time, the slider 16 can be slid, and the slider 16 will slide inside the first slide groove 15. The air jet position of the nozzle 17 can be adjusted by sliding the slider 16. When the external temperature of the crystal pulling furnace body 11 is high, the slider 16 can be slid to the first slide groove 15. On one side of the slide 15, the nozzle 17 will be closer to the crystal pulling furnace body 11, thereby cooling the crystal pulling furnace body 11. When the nozzle 17 blows air onto the outer wall of the worktable 1, the cooling plate 2 can be connected to the power supply, and then the cooling plate 2 will start to cool. The cooling plate 2 will spread the cold air inside the support 22. At this time, the support 22 can be rotated and aligned with the air jet position of the nozzle 17. The air ejected by the nozzle 17 will become cool air after passing through the support 22. After the worktable 1 is finished using... At this point, water pump 34 can be started, and water pump 34 will inject water into nozzle 3. Finally, the water will be sprayed out through nozzle 3 onto the outer wall of worktable 1. Nozzle 3 will spray water mist onto the outer wall of the crystal pulling furnace body 11. When the position of nozzle 3 needs to be adjusted, electric actuator 33 can be started, and electric actuator 33 will drive nozzle 3 to move upward. When forward or backward movement is needed, sliding plate 32 can move inside the second slide groove 31. After nozzle 3 sprays water mist onto the surface of crystal pulling furnace body 11, the sponge block can be slid. 4. Subsequently, the sponge block 4 will slide on the outer wall of the crystal pulling furnace body 11. The sponge block 4 can further remove dirt and impurities on the surface of the crystal pulling furnace body 11. When the nozzle 17 blows air to clean the surface of the crystal pulling furnace body 11, if dust is about to enter the nozzle 17, the filter screen 5 can filter the dust and impurities. When the crystal pulling furnace body 11 is in use, if an external object touches the worktable 1, the rubber pad 6 will protect the worktable 1 and reduce the vibration of the worktable 1.

[0027] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A cooling device for a crystal pulling furnace, comprising a worktable (1), characterized in that: The top of the workbench (1) is fixedly connected to the crystal pulling furnace body (11); the top of the workbench (1) is fixedly connected to the air pump (12); the end of the air pump (12) is connected to a tee (13); the top of the workbench (1) is fixedly connected to the connecting seat (14); the connecting seat (14) has a first sliding groove (15) inside; the first sliding groove (15) has a slider (16) inside; the slider (16) is slidably connected inside the first sliding groove (15); the top of the slider (16) is fixedly connected to the nozzle (17); the side wall of the nozzle (17) has an air injection port (18).

2. The crystal pulling furnace cooling device according to claim 1, characterized in that: The top of the workbench (1) is fixedly connected to a rotating cylinder (21); a support seat (22) is rotatably arranged inside the rotating cylinder (21); and multiple cooling plates (2) are fixedly connected inside the support seat (22).

3. The crystal pulling furnace cooling device according to claim 2, characterized in that: The workbench (1) has a second slide groove (31) inside; a flat plate (32) is provided inside the second slide groove (31); an electric actuator (33) is fixedly connected to the top of the flat plate (32); a water pump (34) is fixedly connected to the top of the electric actuator (33); and a nozzle (3) is connected to the end of the water pump (34).

4. A crystal pulling furnace cooling device according to claim 3, characterized in that: A sponge block (4) is provided on the outside of the crystal pulling furnace body (11); the sponge block (4) is slidably connected to the outside of the crystal pulling furnace body (11).

5. A crystal pulling furnace cooling device according to claim 4, characterized in that: A filter screen (5) is fixed inside the nozzle (17); the filter screen (5) and the nozzle (17) are configured accordingly.

6. A crystal pulling furnace cooling device according to claim 5, characterized in that: Multiple rubber pads (6) are fixed to the outer wall of the workbench (1); the rubber pads (6) and the workbench (1) are arranged correspondingly.

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