Drying oven and vacuum drying equipment
Patent Information
- Application Number
- CN202522147796.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-11
- Publication Date
- 2026-09-01
- Estimated Expiration
- 2035-10-11
AI Technical Summary
相关技术中，通常采用真空干燥单元装置对玻璃基材进行干燥，现有的真空干燥单元会设置抽气机构以对干燥装置内进行抽真空，但是相关技术中尽管会在干燥装置的上侧以及旁侧均设置抽气装置，但是气流的流出时并无法保证均匀，从而导致干燥装置内部气体流动不畅，进而影响真空干燥效果
[0015]本实用新型的有益效果是，本干燥炉通过设置的匀流装置实现炉内气流的均匀流动，并且，匀流装置包括若干层匀流板，层叠设置的匀流板上的匀流孔密度由内层向外层逐渐减小，即最内层的匀流板上匀流孔排布最密集，最外层匀流板上匀流孔排布最稀疏，且由内至外匀流孔的排布均匀减小过渡，同时，各层板上的匀流孔孔径均匀增大，通过匀流孔密度的变化与孔径的变化从而使得炉内气体流动顺畅，进而确保炉内气体可以均匀排出，提高了干燥炉的干燥效果。
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Figure CN224707141U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the technical field of perovskite thin film vacuum drying equipment, specifically relating to a drying oven and vacuum drying device. Background Technology
[0002] Drying the perovskite-coated glass substrate is one of the processes in perovskite solar cell manufacturing. In related technologies, a vacuum drying unit is typically used to dry the glass substrate. Existing vacuum drying units include an air extraction mechanism to create a vacuum within the drying device. However, although air extraction devices are installed on the top and sides of the drying device, the airflow cannot be guaranteed to be uniform, resulting in poor gas flow inside the drying device and consequently affecting the vacuum drying effect.
[0003] There is an urgent need to provide a drying oven and vacuum drying device to solve the technical problem of poor gas flow inside the drying device in related technologies.
[0004] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content
[0005] This disclosure provides at least one drying oven, including: an oven body and a flow equalization device disposed inside the oven body; The furnace body is equipped with a vacuum pipe connected to the flow equalization device; among which... The flow equalization device is installed on the inner wall of the furnace body, and the flow equalization device includes several layers of flow equalization plates; and The density of flow equalization holes on each layer of flow equalization plate gradually decreases from the inner layer to the outer layer, while the diameter of the flow equalization holes gradually increases.
[0006] In one optional embodiment, the flow equalization device includes: an upper flow equalization module and a side flow equalization module; wherein The upper flow equalization module is installed on the inner top wall of the furnace body; and The side flow equalization modules are symmetrically arranged on the front and rear inner walls of the furnace body.
[0007] In one optional embodiment, the upper flow equalization module includes: a first flow equalization plate, a second flow equalization plate, and a third flow equalization plate arranged from top to bottom; wherein The diameter of the flow equalization holes on each layer of the flow equalization plate gradually decreases from top to bottom, while the density of the flow equalization holes gradually increases.
[0008] In one alternative embodiment, the diameter of the flow equalization hole at the center of the first flow equalization plate is smaller than the diameter of the flow equalization holes at its periphery. The diameter of the flow equalization hole at the center of the second flow equalization plate is larger than the diameter of the flow equalization holes at its periphery; and The orifices on the third flow equalizer plate have the same diameter.
[0009] In one optional embodiment, the side flow equalization module includes: a fourth flow equalization plate, a fifth flow equalization plate, and a sixth flow equalization plate arranged from the inside out; wherein The aperture of the flow equalizer on each layer of the flow equalizer gradually increases from the inside out, while the density of the flow equalizer gradually decreases.
[0010] In one optional embodiment, a pair of flow equalization holes are provided on the sixth flow equalization plate, and the two flow equalization holes are arranged in a mirror image at the left and right ends of the sixth flow equalization plate. The diameter of the flow equalization orifice at the left end of the fifth flow equalization plate is mirrored that at its right end; and The orifices on the fourth flow equalizer plate have the same diameter.
[0011] In one alternative embodiment, the diameter of the flow equalization holes at the left and right ends of the fifth flow equalization plate, which correspond to the flow equalization holes of the sixth flow equalization plate, is smaller than the diameter of the flow equalization holes at the other ends.
[0012] In one alternative implementation, the total area of the flow equalization holes on each flow equalization plate is 1.3-1.5 times the area of the vacuum tube opening.
[0013] Secondly, this disclosure also provides a vacuum drying apparatus using the above-described drying oven, comprising: a vacuum generating device; The vacuum generator is connected to the vacuum tube of the drying oven to remove gas from the drying oven through the vacuum tube.
[0014] In one alternative embodiment, the vacuum drying apparatus further includes: a backfill pipe; One end of the backfill pipe is connected to the vacuum generator, and the other end is set on the upper, lower, front, and rear side walls of the drying oven.
[0015] The beneficial effects of this utility model are that the drying oven achieves uniform airflow within the oven through a flow equalization device. This flow equalization device comprises several layers of flow equalization plates. The density of flow equalization holes on the stacked flow equalization plates gradually decreases from the innermost layer to the outermost layer; that is, the innermost flow equalization plate has the densest arrangement of flow equalization holes, while the outermost flow equalization plate has the sparsest arrangement. Furthermore, the arrangement of flow equalization holes decreases uniformly from the inside to the outside. Simultaneously, the diameter of the flow equalization holes on each layer uniformly increases. Through the changes in flow equalization hole density and diameter, the gas flow within the oven is smooth, ensuring uniform gas discharge and improving the drying effect of the drying oven.
[0016] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.
[0017] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description
[0018] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0019] Figure 1 A three-dimensional structural schematic diagram of the drying oven provided in an embodiment of this disclosure is shown; Figure 2 A three-dimensional structural schematic diagram of the upper flow uniform module provided in an embodiment of this disclosure is shown; Figure 3 A three-dimensional structural schematic diagram of the first flow uniform plate provided in an embodiment of this disclosure is shown; Figure 4 A three-dimensional structural schematic diagram of the second flow uniform plate provided in an embodiment of this disclosure is shown; Figure 5 A three-dimensional structural schematic diagram of the third flow uniform plate provided in an embodiment of this disclosure is shown; Figure 6 A three-dimensional structural schematic diagram of the side flow equalization module provided in an embodiment of this disclosure is shown. Figure 7 A three-dimensional structural schematic diagram of the fourth flow uniform plate provided in an embodiment of this disclosure is shown; Figure 8 A three-dimensional structural schematic diagram of the fifth flow uniform plate provided in an embodiment of this disclosure is shown; Figure 9 A three-dimensional structural schematic diagram of the sixth flow uniform plate provided in an embodiment of this disclosure is shown; Figure 10 A three-dimensional structural schematic diagram of the vacuum drying apparatus provided in the embodiments of this disclosure is shown. In the picture: 1. Furnace body; 11. Vacuum tube; 2. Flow equalization device; 200. Flow equalization hole; 21. Upper flow equalization module; 211. First flow equalization plate; 212. Second flow equalization plate; 213. Third flow equalization plate; 22. Side flow equalization module; 221. Fourth flow equalization plate; 222. Fifth flow equalization plate; 223. Sixth flow equalization plate; 3. Vacuum generating device; 31. Backfilling pipe. Detailed Implementation
[0020] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0021] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the figures, the thickness of parts may be exaggerated or reduced for the purpose of effectively depicting the technical content.
[0022] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0023] See Figure 1 , Figure 1 A drying oven is shown, comprising: an oven body 1 and a flow equalization device 2 disposed within the oven body 1; a vacuum tube 11 connected to the flow equalization device 2 is disposed on the oven body 1; wherein the flow equalization device 2 is disposed on the inner wall of the oven body 1, and the flow equalization device 2 comprises several layers of flow equalization plates; and the density of flow equalization holes 200 on each layer of flow equalization plates gradually decreases from the inner layer to the outer layer, and the diameter of flow equalization holes 200 on each layer of flow equalization plates gradually increases from the inner layer to the outer layer.
[0024] In some embodiments, a uniform flow of air inside the furnace is achieved by a flow equalization device 2. The flow equalization device 2 includes several layers of flow equalization plates. The density of flow equalization holes 200 on the stacked flow equalization plates gradually decreases from the inner layer to the outer layer. That is, the flow equalization holes 200 are most densely arranged on the innermost flow equalization plate and sparsely arranged on the outermost flow equalization plate. The arrangement of flow equalization holes 200 decreases uniformly from the inside to the outside. At the same time, the aperture of flow equalization holes 200 on each layer plate increases uniformly. The change in density and aperture of flow equalization holes 200 makes the gas flow inside the furnace smooth, thereby ensuring that the gas inside the furnace can be discharged uniformly and improving the drying effect of the drying furnace.
[0025] See Figure 1 and Figure 2 In some embodiments, the flow equalization device 2 includes: an upper flow equalization module 21 and a side flow equalization module 22; wherein the upper flow equalization module 21 is disposed on the inner top wall of the furnace body 1; and the side flow equalization module 22 is symmetrically disposed on the front inner wall and the rear inner wall of the furnace body 1.
[0026] Specifically, by configuring the flow equalization device 2 to include an upper flow equalization module 21 set on the inner top wall of the furnace body 1 and a set of side flow equalization modules 22 symmetrically set on the front inner wall and rear inner wall of the furnace body 1, vacuuming can be achieved in multiple directions, avoiding dead zones in airflow caused by vacuuming in one direction.
[0027] See Figure 3 , Figure 4 and Figure 5 In some embodiments, the upper flow equalization module 21 includes a first flow equalization plate 211, a second flow equalization plate 212 and a third flow equalization plate 213 arranged from top to bottom; wherein the diameter of the flow equalization holes 200 on each layer of flow equalization plate from top to bottom gradually decreases and the density of the flow equalization holes 200 gradually increases.
[0028] As a preferred embodiment, the upper flow equalization module 21 includes three flow equalization plates, wherein the bottommost flow equalization plate, which is closest to the inner cavity of the drying furnace body 1, has the largest pore density and the pore density gradually decreases from bottom to top, while the bottommost flow equalization plate has the smallest pore diameter and the pore diameter gradually increases from bottom to top.
[0029] Specifically, the diameter of the central flow equalization hole 200 of the first flow equalization plate 211 is smaller than that of the outer flow equalization holes 200. That is, the diameter of the central flow equalization hole 200 of the flow equalization plate that is in contact with the vacuum tube 11 is smaller than that of the outer flow equalization holes 200. This arrangement reduces the effective flow area of the gas at the location directly subjected to the suction force of the pipeline. However, because it is in contact with the pipeline, the vacuum flow rate at this location is faster, which makes the vacuum gas flow rate close to that at other locations, resulting in a stable suction effect.
[0030] The second flow equalizer 212 is located in the middle layer. The diameter of the flow equalizer hole 200 in the center of this plate is larger than that of the flow equalizer holes 200 in other positions. This is to make up for the defect that the diameter of the flow equalizer hole 200 in the center of the first flow equalizer 211 is small. By increasing the diameter of the flow equalizer hole 200 in the center of this plate, more vacuum gas can flow compared to its periphery, thus avoiding insufficient subsequent exhaust.
[0031] The third flow equalizer 213 is closest to the drying furnace chamber. Therefore, the flow equalizer holes 200 on the third flow equalizer 213 are evenly distributed to ensure that the vacuum gas is drawn out evenly.
[0032] See Figure 6 , Figure 7 , Figure 8 and Figure 9 In some embodiments, the side flow equalization module 22 includes: a fourth flow equalization plate 221, a fifth flow equalization plate 222 and a sixth flow equalization plate 223 arranged from the inside to the outside; wherein the flow equalization plate aperture on each layer of flow equalization plate gradually increases from the inside to the outside, and the flow equalization plate density gradually decreases.
[0033] Specifically, the sixth flow equalizer 223 has a pair of equalizing holes 200, which are mirror images of each other at the left and right ends of the sixth flow equalizer 223. This allows the side vacuum tube 11 to directly connect with the equalizing holes 200, increasing the vacuuming speed. The diameter of the equalizing hole 200 at the left end of the fifth flow equalizer 222 is also mirrored that at its right end. This allows the fifth flow equalizer 222 and the sixth flow equalizer 223 to form a vacuuming channel. Furthermore, the diameters of the equalizing holes 200 at the left and right ends of the fifth flow equalizer 222 are smaller than those at other locations. This is because these holes are directly connected to the vacuum tube 11, resulting in a faster vacuuming flow rate and reducing the effective gas flow area during vacuuming, thus stabilizing the airflow. The equalizing holes 200 on the fourth flow equalizer 221 have the same diameter, ensuring uniform gas extraction.
[0034] In some embodiments, the total area of the flow equalization holes 200 on each flow equalization plate is 1.3-1.5 times the area of the vacuum tube 11 opening.
[0035] See Figure 10 At least one other disclosed embodiment also provides a vacuum drying apparatus using the above-described drying oven, comprising: a vacuum generating device 3; the vacuum generating device 3 is connected to a vacuum tube 11 of the drying oven to discharge gas inside the drying oven through the vacuum tube 11.
[0036] Specifically, the vacuum generating device 3 includes, but is not limited to, using a vacuum pump to draw gas out of the drying oven through negative pressure suction. Specifically, the vacuum drying device also includes a backfill pipe 31; one end of the backfill pipe 31 is connected to the vacuum generating device 3, and the other end is respectively installed on the upper, lower, front, and rear side walls of the drying oven. Thus, the backfill pipe 31 enables rapid vacuum breaking in the vacuum drying device.
[0037] The working process of the vacuum drying device is as follows: When the equipment starts to evacuate, the angle valve on the vacuum pipe 11 is opened, and the vacuum is quickly evacuated for 10 seconds until the air pressure inside the drying oven is 10 Pa. Then, the process pressure is maintained. At this time, the corresponding butterfly valve on the backfill pipe 31 is opened to allow a small amount of air to be introduced, so that the air pressure inside the drying oven is always kept stable at 10 Pa. After the process time is over, the angle valve is closed, and all the corresponding butterfly valves on the backfill pipe 31 are quickly opened to break the vacuum state inside the drying oven, so that the air pressure inside the drying oven is atmospheric pressure.
[0038] In summary, the uniform flow of air inside the furnace is achieved by the flow equalization device 2. The flow equalization device 2 includes several layers of flow equalization plates. The density of the flow equalization holes 200 on the stacked flow equalization plates gradually decreases from the inner layer to the outer layer. That is, the flow equalization holes 200 are most densely arranged on the innermost flow equalization plate and sparsely arranged on the outermost flow equalization plate. The arrangement of the flow equalization holes 200 decreases uniformly from the inside to the outside. At the same time, the diameter of the flow equalization holes 200 on each layer plate increases uniformly. The change in the density and diameter of the flow equalization holes 200 makes the gas flow inside the furnace smooth, thereby ensuring that the gas inside the furnace can be discharged uniformly and improving the drying effect of the drying furnace.
[0039] In this document, when it is said that the first component is located on the second component, this can mean that the first component can be directly formed on the second component, or that the third component can be inserted between the first component and the second component.
[0040] In this document, when an element or layer is referred to as “located,” “joined to,” “connected to,” “attached to,” or “coupled to” another element or layer, it may be directly located, joined, connected, attached to, or coupled to the other element or layer, or there may be intermediate elements or layers present. Conversely, when an element is referred to as “directly on another element or layer,” “directly joined to,” “directly connected to,” “directly attached to,” or “directly coupled to” another element or layer, there may be no intermediate elements or layers present. Other terms used to describe relationships between elements should be interpreted in a similar manner (e.g., “between” versus “directly between,” “adjacent” versus “directly adjacent,” etc.). As used herein, the term “and / or” includes any and all combinations of one or more of the related listed items.
[0041] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as the second element, component, region, layer, or segment.
[0042] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.
Claims
1. A drying oven, characterized in that, include: Furnace body (1) and flow equalization device (2) installed inside furnace body (1); The furnace body (1) is equipped with a vacuum pipe (11) connected to the flow equalization device (2); wherein The flow equalization device (2) is disposed on the inner wall of the furnace body (1), and the inner layer of the flow equalization device (2) faces the interior of the furnace body (1); and The flow equalization device (2) includes several layers of flow equalization plates. The density of flow equalization holes (200) on each layer of flow equalization plates gradually decreases from the inner layer to the outer layer, and the diameter of flow equalization holes (200) on each layer of flow equalization plates gradually increases from the inner layer to the outer layer.
2. The drying oven as described in claim 1, characterized in that, The flow equalization device (2) includes: an upper flow equalization module (21) and a side flow equalization module (22); wherein The upper flow equalization module (21) is disposed on the inner top wall of the furnace body (1); and The side flow equalization module (22) is symmetrically arranged on the front inner wall and the rear inner wall of the furnace body (1).
3. The drying oven as described in claim 2, characterized in that, The upper flow equalization module (21) includes: a first flow equalization plate (211), a second flow equalization plate (212), and a third flow equalization plate (213) arranged from top to bottom; wherein The diameter of the flow equalization holes (200) on each layer of flow equalization plate from top to bottom gradually decreases, and the density of the flow equalization holes (200) gradually increases.
4. The drying oven as described in claim 3, characterized in that, The diameter of the flow equalization hole (200) at the center of the first flow equalization plate (211) is smaller than the diameter of the flow equalization hole (200) at its periphery; The diameter of the flow equalization hole (200) at the center of the second flow equalization plate (212) is larger than the diameter of the flow equalization holes (200) at its periphery; and The flow equalization holes (200) on the third flow equalization plate (213) have the same diameter.
5. The drying oven as described in claim 2, characterized in that, The side flow equalization module (22) includes: a fourth flow equalization plate (221), a fifth flow equalization plate (222), and a sixth flow equalization plate (223) arranged from the inside to the outside; wherein The aperture of the flow equalizer on each layer of the flow equalizer gradually increases from the inside out, while the density of the flow equalizer gradually decreases.
6. The drying oven as described in claim 5, characterized in that, The sixth flow equalization plate (223) is provided with a pair of flow equalization holes (200), and the two flow equalization holes (200) are arranged in a mirror image at the left and right ends of the sixth flow equalization plate (223); The diameter of the flow equalization hole (200) at the left end of the fifth flow equalization plate (222) is mirrored that at its right end; and The flow equalization holes (200) on the fourth flow equalization plate (221) have the same diameter.
7. The drying oven as described in claim 6, characterized in that, The diameter of the flow equalization holes (200) at the left and right ends of the fifth flow equalization plate (222) corresponding to the flow equalization holes (200) of the sixth flow equalization plate (223) is smaller than the diameter of the flow equalization holes (200) at the other positions.
8. The drying oven as described in claim 1, characterized in that, The total area of the flow equalization holes (200) on each of the flow equalization plates is 1.3-1.5 times the area of the vacuum tube (11) opening.
9. A vacuum drying apparatus, characterized in that, include: The drying oven as described in any one of claims 1-8; and Vacuum generating device (3); The vacuum generating device (3) is connected to the vacuum tube (11) of the drying oven to discharge the gas inside the drying oven through the vacuum tube (11).
10. The vacuum drying apparatus as described in claim 9, characterized in that, Also includes: Backfill pipe (31); One end of the backfill pipe (31) is connected to the vacuum generator (3), and the other end is respectively set on the upper, lower, front and rear side walls of the drying oven.