A semiconductor device precision part drilling jig

Abstract

The utility model belongs to semiconductor manufacturing equipment technical field especially is a kind of semiconductor equipment precision piece drilling jig, including support plate, the upper surface of support plate is respectively fixedly connected with controller and placement platform, the top of support plate is respectively provided with fixed collar and embrace brake motor, the inside rotation of fixed collar is connected with rotating ring, the outer surface of rotating ring is fixedly connected with gear ring, the output of embrace brake motor is fixedly connected with gear, gear and gear ring are engaged, the inside of rotating ring is provided with two groups of first electric push rod, the telescopic end of each first electric push rod is fixedly connected with second electric push rod, through the combination structure of first electric push rod and second electric push rod, utilize first electric push rod telescopic drive second electric push rod adjustment height, cooperate second electric push rod telescopic and realize the stable clamping of precision piece, can adapt to the precision piece of different lateral dimension and thickness, solved the problem that traditional jig is difficult to flexibly adjust positioning according to workpiece volume.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing equipment technology, and specifically relates to a precision drilling fixture for semiconductor equipment. Background Technology

[0002] Precision drilling for semiconductor equipment refers to the drilling of precision parts such as silicon wafers, ceramic components, etc., in semiconductor manufacturing equipment. This is done using specialized drilling equipment in clean environments such as vacuum chambers or under specific working conditions, with a precision of micrometers or even nanometers. This process requires strict control of hole diameter, hole depth, positional accuracy, and surface roughness to ensure that the internal structure of the workpiece is not damaged. It is often used for functional requirements such as gas passages, circuit connections, and fixed installations, and is a key processing link to ensure the precision and reliability of semiconductor equipment.

[0003] However, when drilling precision parts for semiconductor equipment in a vacuum chamber, traditional vacuum chuck fixtures have certain limitations in application. Their sealing structure may leak gas due to long-term use or uneven workpiece surface, which may damage the vacuum environment of the chamber. Furthermore, the fixed adsorption design is difficult to adapt to precision parts of different sizes and lacks an adjustable positioning structure. In addition, when drilling workpieces at multiple angles, traditional fixtures cannot achieve dynamic adjustment of the angle after clamping, resulting in a cumbersome processing flow and making it difficult to meet the high-precision, multi-condition flexible processing requirements in semiconductor manufacturing.

[0004] To address the aforementioned issues, this application proposes a precision drilling fixture for semiconductor equipment components. Utility Model Content

[0005] To address the aforementioned problems in the existing technology, this utility model provides a precision drilling fixture for semiconductor equipment, which features flexible processing capabilities to adapt to various working conditions.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a precision drilling fixture for semiconductor equipment, comprising a support plate, a controller and a placement platform fixedly connected to the upper surface of the support plate, a fixing collar and a brake motor respectively arranged above the support plate, a rotating ring rotatably connected inside the fixing collar, a toothed ring fixedly connected to the outer surface of the rotating ring, a gear fixedly connected to the output end of the brake motor, the gear and the toothed ring meshing, and two sets of first electric push rods arranged inside the rotating ring, each first electric push rod having a second electric push rod fixedly connected to its telescopic end.

[0007] As a preferred embodiment of this utility model, two sets of fixing pins are provided above the support plate, and the bottom end of each fixing pin passes through the support plate and extends to the bottom of the support plate.

[0008] As a preferred embodiment of this utility model, a reinforcing ring is fixedly connected to the outer surface of the fixing collar, and the bottom surface of the reinforcing ring is fixedly connected to the upper surface of the support plate.

[0009] As a preferred embodiment of this utility model, a fixing frame is fixedly connected to the right side of the brake motor, and the bottom surface of the fixing frame is fixedly connected to the upper surface of the support plate.

[0010] As a preferred embodiment of this utility model, a protective shell is fixedly connected to the upper surface of the support plate, and the protective shell is sleeved on the outside of the brake motor.

[0011] As a preferred embodiment of this utility model, the inner wall of the rotating ring is fitted with two sets of protective covers, and the inner wall of each protective cover is in contact with the outer surface of the first electric push rod.

[0012] As a preferred embodiment of this utility model, a connecting ring is fixedly connected to the bottom end of each of the first electric push rods, and the bottom surface of each connecting ring is fixedly connected to the inner bottom wall of the rotating ring.

[0013] As a preferred embodiment of this utility model, each of the telescopic ends of the second electric push rod is fixedly connected with a protective pad, and each of the protective pads is made of polytetrafluoroethylene.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows: By setting a combination structure of a first electric push rod and a second electric push rod, the extension and retraction of the first electric push rod drives the second electric push rod to adjust the height, and the extension and retraction of the second electric push rod achieves stable clamping of precision parts. It can adapt to precision parts with different lateral dimensions and thicknesses, solving the problem that traditional fixtures are difficult to flexibly adjust the positioning according to the workpiece volume. Through the transmission cooperation of the brake motor, gear and gear ring, the rotating ring can drive the clamped workpiece to achieve angular rotation. The locking function of the brake motor ensures the stability after angle adjustment. Multi-angle drilling can be completed in the vacuum chamber without disassembly and reassembly, simplifying the processing process. At the same time, each component adopts a vacuum-resistant and low-exhaust-rate adaptable material, which can stably adapt to the vacuum chamber environment and avoid affecting the vacuum degree of the chamber. Furthermore, the modular design and integrated control of the controller further improve the ease of operation and positioning accuracy of the fixture in the vacuum chamber, meeting the processing requirements of high adaptability and high reliability when drilling precision parts of semiconductor equipment. Attached Figure Description

[0015] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings: Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the toothed ring structure in this utility model; Figure 3 This is a schematic diagram of the structure of the placement platform in this utility model; Figure 4 This is a cross-sectional view of the rotating ring in this utility model; Figure 5 This is a schematic diagram of the structure of the second electric push rod in this utility model; In the diagram: 1. Support plate; 2. Fixing collar; 3. Gear ring; 4. Reinforcing ring; 5. Fixing pin; 6. Controller; 7. Protective shell; 8. Gear; 9. Fixing frame; 10. Brake motor; 11. Rotating ring; 12. Placement platform; 13. Protective cover; 14. First electric push rod; 15. Connecting ring; 16. Second electric push rod; 17. Protective pad. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example

[0017] Please see Figure 1-5 The present invention provides the following technical solution: a precision drilling fixture for semiconductor equipment, including a support plate 1, a controller 6 and a placement platform 12 are fixedly connected to the upper surface of the support plate 1, a fixing collar 2 and a brake motor 10 are respectively arranged above the support plate 1, a rotating ring 11 is rotatably connected inside the fixing collar 2, a toothed ring 3 is fixedly connected to the outer surface of the rotating ring 11, a gear 8 is fixedly connected to the output end of the brake motor 10, the gear 8 and the toothed ring 3 mesh with each other, and two sets of first electric push rods 14 are arranged inside the rotating ring 11, and a second electric push rod 16 is fixedly connected to the telescopic end of each first electric push rod 14. In this embodiment, the controller 6 adopts a high-precision PLC control system with multi-axis linkage control function, which can accurately adjust the action sequence and parameters of each actuator. Meanwhile, the brake motor 10 adopts a servo-driven brake motor with high positioning accuracy, stable locking torque and rapid response, ensuring reliable fixation after angle adjustment. The first electric push rod 14 and the second electric push rod 16 adopt high-precision ball screw electric push rods with high repeatability, smooth operation without crawling, and overload protection function, which is suitable for the precision drive requirements in the vacuum chamber. Furthermore, the rotating ring 11 can rotate stably inside the fixed collar 2, and achieves precise angle adjustment through the meshing transmission of the gear 8 and the gear ring 3. The overall structure fits tightly and meets the high-precision working conditions required for drilling semiconductor precision parts.

[0018] Specifically, two sets of fixing pins 5 are provided above the support plate 1. The bottom end of each fixing pin 5 passes through the support plate 1 and extends to the bottom of the support plate 1. In this embodiment, the support plate 1 is fixedly connected to the bottom of the vacuum chamber by the fixing pins 5 to ensure that the fixture as a whole will not be displaced during the processing, thereby improving the structural stability.

[0019] Specifically, a reinforcing ring 4 is fixedly connected to the outer surface of the fixed collar 2. The bottom surface of the reinforcing ring 4 is fixedly connected to the upper surface of the support plate 1. In this embodiment, the reinforcing ring 4 enhances the connection strength between the fixed collar 2 and the support plate 1, prevents the rotating ring 11 from shaking when rotating, and ensures the accuracy of angle adjustment.

[0020] Specifically, a fixing frame 9 is fixedly connected to the right side of the brake motor 10. The bottom surface of the fixing frame 9 is fixedly connected to the upper surface of the support plate 1. In this embodiment, the brake motor 10 is stably fixed on the support plate 1 by the fixing frame 9, ensuring that the gear 8 and the gear ring 3 always maintain a precise meshing state, and avoiding the transmission gap from affecting the angle adjustment accuracy.

[0021] Specifically, a protective shell 7 is fixedly connected to the upper surface of the support plate 1. The protective shell 7 is sleeved on the outside of the brake motor 10. In this embodiment, the protective shell 7 forms a closed protection for the brake motor 10, preventing debris generated during drilling from entering the motor and reducing the impact of gas convection in the vacuum chamber on the motor operation.

[0022] Specifically, two sets of protective covers 13 are snapped onto the inner wall of the rotating ring 11. The inner wall of each protective cover 13 is in contact with the outer surface of the first electric push rod 14. In this embodiment, the protective cover 13 forms a wrap-around protection for the first electric push rod 14, preventing processing debris from adhering to the push rod surface or entering the drive structure, and ensuring the smoothness of its extension and retraction adjustment.

[0023] Specifically, each first electric push rod 14 is fixedly connected to a connecting ring 15 at its bottom end. The bottom surface of each connecting ring 15 is fixedly connected to the inner bottom wall of the rotating ring 11. In this embodiment, the connecting ring 15 increases the connection area between the first electric push rod 14 and the rotating ring 11, disperses the force, prevents the connection from loosening due to long-term high-frequency use, and improves the durability of the structure.

[0024] Specifically, each of the extension ends of the second electric push rod 16 is fixedly connected to a protective pad 17, each of which is made of polytetrafluoroethylene. In this embodiment, the protective pad 17 directly contacts the surface of the precision part, which avoids damage to the workpiece caused by rigid clamping and can adapt to the vacuum chamber environment, reducing the risk of gas leakage.

[0025] The working principle and usage process of this utility model are as follows: In use, the support plate 1 is first securely installed at the bottom of the vacuum chamber using the fixing pin 5, providing a solid foundation for the entire fixture. Then, the semiconductor precision component to be processed is stably placed on the placement table 12. The controller 6 simultaneously starts the first electric push rod 14 and the second electric push rod 16. The extension and retraction of the first electric push rod 14 drives the second electric push rod 16 to adjust up and down, precisely adapting to the workpiece thickness. Next, the second electric push rod 16 further extends and retracts, allowing the protective pad 17 to gently conform to the workpiece surface, achieving stable clamping. This dual-push rod combination design can flexibly handle precision components with different lateral dimensions and thicknesses. When it is necessary to adjust the drilling angle, the controller 6 issues a command to start the brake motor 10. The gear 8 at the motor output end meshes tightly with the gear ring 3 to transmit power. The rotating ring 11 is driven to rotate smoothly within the fixed collar 2, thereby causing the clamped workpiece to complete the angle adjustment. After the angle is in place, the brake motor 10 quickly locks to ensure that the angle is stable and without deviation during drilling. During the drilling process, each component performs its function. The protective shell 7 tightly wraps the brake motor 10 to effectively prevent debris from entering. At the same time, the protective cover 13 is close to the first electric push rod 14 to prevent processing debris from interfering with its normal operation. The connecting ring 15 strengthens the connection between the first electric push rod 14 and the rotating ring 11, ensuring the structural stability of the fixture under long-term high-frequency use. In addition, all components are made of vacuum-resistant materials to reduce the risk of gas leakage from the source. With the multi-axis linkage precise control of the controller 6, the multi-angle, high-precision drilling requirements of semiconductor precision components in the vacuum chamber are perfectly realized.

[0026] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A precision drilling fixture for semiconductor equipment, characterized in that: The device includes a support plate (1), on the upper surface of which a controller (6) and a placement platform (12) are fixedly connected. A fixing collar (2) and a brake motor (10) are respectively arranged above the support plate (1). A rotating ring (11) is rotatably connected inside the fixing collar (2). A toothed ring (3) is fixedly connected to the outer surface of the rotating ring (11). A gear (8) is fixedly connected to the output end of the brake motor (10). The gear (8) and the toothed ring (3) mesh with each other. Two sets of first electric push rods (14) are arranged inside the rotating ring (11). A second electric push rod (16) is fixedly connected to the telescopic end of each first electric push rod (14).

2. The precision drilling fixture for semiconductor equipment according to claim 1, characterized in that: Two sets of fixing pins (5) are provided above the support plate (1), and the bottom end of each fixing pin (5) passes through the support plate (1) and extends to the bottom of the support plate (1).

3. The precision drilling fixture for semiconductor equipment according to claim 1, characterized in that: The outer surface of the fixed collar (2) is fixedly connected to a reinforcing ring (4), and the bottom surface of the reinforcing ring (4) is fixedly connected to the upper surface of the support plate (1).

4. A precision drilling fixture for semiconductor equipment according to claim 1, characterized in that: A fixing frame (9) is fixedly connected to the right side of the brake motor (10), and the bottom surface of the fixing frame (9) is fixedly connected to the upper surface of the support plate (1).

5. A precision drilling fixture for semiconductor equipment according to claim 1, characterized in that: A protective shell (7) is fixedly connected to the upper surface of the support plate (1), and the protective shell (7) is sleeved on the outside of the brake motor (10).

6. A precision drilling fixture for semiconductor equipment according to claim 1, characterized in that: The inner wall of the rotating ring (11) is fitted with two sets of protective covers (13), and the inner wall of each protective cover (13) is in contact with the outer surface of the first electric push rod (14).

7. A precision drilling fixture for semiconductor equipment according to claim 1, characterized in that: Each of the first electric push rods (14) has a connecting ring (15) fixedly connected to its bottom end, and the bottom surface of each connecting ring (15) is fixedly connected to the inner bottom wall of the rotating ring (11).

8. A precision drilling fixture for semiconductor equipment according to claim 1, characterized in that: Each of the second electric push rods (16) has a protective pad (17) fixedly connected to its telescopic end, and each of the protective pads (17) is made of polytetrafluoroethylene.

Images