A cleaning device

Abstract

The utility model relates to the field of semiconductor manufacturing technology discloses a kind of cleaning devices, including clamping assembly, mounting assembly, spraying mechanism and drive mechanism;The clamping assembly is used to clamp fixed substrate sheet, the clamping assembly has first rotation axis;The mounting assembly is connected in the clamping assembly, the mounting assembly has the second rotation axis perpendicular to the first rotation axis;The spray pipe is located above the clamping assembly, and the bottom of the spray pipe is equipped with spray hole;The drive mechanism is connected the mounting assembly and the clamping assembly respectively, the drive mechanism can drive the mounting assembly rotate around the second rotation axis and can drive the clamping assembly rotate around the first rotation axis;Through the collaborative cooperation of clamping assembly, mounting assembly, spraying mechanism and drive structure, the dynamic comprehensive cleaning of multiple angles, all directions can be realized to work piece, improve the cleaning quality of work piece.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a cleaning device. Background Technology

[0002] In the semiconductor manufacturing field, substrates serve as the foundation and main carrier for chip growth. Typically, substrates are composed of large crystals and undergo fine grinding to achieve a highly smooth surface, facilitating subsequent wafer manufacturing processes. The substrate manufacturing process requires cleaning; however, most existing cleaning devices only spray cleaning fluid onto one location on the substrate using a single nozzle, resulting in incomplete cleaning and low cleaning quality. Utility Model Content

[0003] With the aim of at least solving one of the technical problems existing in the prior art, this utility model aims to provide a cleaning device that can improve the cleaning quality of workpieces.

[0004] To achieve the above objectives, this utility model provides a cleaning device, including a clamping assembly, a mounting assembly, a spraying mechanism, and a driving mechanism; the clamping assembly is used to clamp and fix a workpiece, and the clamping assembly has a first rotation axis; the mounting assembly is connected to the clamping assembly, and the mounting assembly has a second rotation axis perpendicular to the first rotation axis; the spraying mechanism includes a spray pipe, which is disposed above the clamping assembly, and the bottom of the spray pipe is provided with spray holes; the driving mechanism is connected to the mounting assembly and the clamping assembly respectively, and the driving mechanism can drive the mounting assembly to rotate around the second rotation axis and can drive the clamping assembly to rotate around the first rotation axis.

[0005] In some embodiments, the mounting assembly includes a second gear, a connecting shaft, a crossbar, a first vertical bar, and a second vertical bar. The central axis of the second gear is a second rotation axis. The second gear is coaxially connected to the connecting shaft. The crossbar is connected to the upper end of the connecting shaft and located above the second gear. The first vertical bar is connected to one end of the crossbar, and the second vertical bar is connected to the end of the crossbar away from the first vertical bar. The clamping assembly connects the first vertical bar and the second vertical bar respectively. The driving mechanism meshes with the second gear to drive the second gear to rotate around the second rotation axis.

[0006] In some embodiments, the clamping assembly includes a first clamping member, a first rotating shaft, a first gear, a second clamping member, a second rotating shaft, and a spring; the first clamping member is located between the first vertical rod and the second vertical rod, the second clamping member is located between the first clamping member and the second vertical rod, the first rotating shaft is connected to the side of the first clamping member opposite to the second clamping member and passes through the first vertical rod, the central axis of the first gear is the first rotation axis, the first gear is coaxially connected to the first rotating shaft and located on the side of the first vertical rod opposite to the first clamping member, the second rotating shaft is connected to the side of the second clamping member opposite to the first clamping member and passes through the second vertical rod, the spring is sleeved on the second rotating shaft and located between the second clamping member and the second vertical rod; the driving mechanism is meshed with the first gear to drive the first gear to rotate around the first rotation axis.

[0007] In some embodiments, the first clamping member has a first clamping groove suitable for embedding the workpiece, and the second clamping member has a second clamping groove disposed opposite to the first clamping groove and suitable for embedding the workpiece.

[0008] In some embodiments, the clamping assembly further includes a handle connected to the second pivot and located on the side of the second vertical rod opposite to the second clamping member.

[0009] In some embodiments, the cleaning device has a first horizontal direction; the driving mechanism includes a driving device, a support plate, a rack, a support frame, and a gear ring; the driving device is connected to the support plate and can drive the support plate to move along the first horizontal direction; the crossbar is located above the support plate; the connecting shaft passes through the support plate; the second gear is located below the support plate; the rack extends along the first horizontal direction; the rack is located on one side of the support plate and meshes with the second gear; the support frame is connected to the top of the support plate; the gear ring is connected to the upper end of the support frame; the first vertical rod and the second vertical rod are both located inside the gear ring; and the first gear and the gear ring mesh with each other.

[0010] In some embodiments, the driving device includes a drive motor, a support base, a transmission screw, and a slide. The support base has a limiting groove. The transmission screw passes through the support base along the first horizontal direction, and at least a portion of the transmission screw is located within the limiting groove. The slide is sleeved on the transmission screw and threadedly engaged with it. At least a portion of the slide is located within the limiting groove. The support plate is connected to the top of the slide. The drive motor is connected to the transmission screw and can drive the transmission screw to rotate around its central axis.

[0011] In some embodiments, the support frame includes a support ring and a support rod, the support ring being connected to the top of the support plate, and the lower end of the support rod being connected to the support ring and the upper end being connected to the gear ring.

[0012] In some embodiments, the bottom of the spray pipe is provided with multiple spray holes.

[0013] In some embodiments, there are multiple clamping components, one of which is used to clamp and fix one workpiece; at least one spray hole is located above the workpiece.

[0014] Compared with the prior art, the cleaning device of this utility model has the following advantages: By setting up a clamping component and an installation component, and respectively configuring a first rotation axis and a second rotation axis that are perpendicular to each other, and combining the coordinated drive of the clamping component and the installation component by the drive mechanism, the workpiece clamped in the clamping component can simultaneously achieve rotational motion around the first rotation axis and revolution motion around the second rotation axis. This composite motion mode of the workpiece allows the workpiece to continuously change its spatial orientation during the cleaning process. At the same time, with the spray mechanism set above the clamping component, the cleaning liquid is sprayed onto the surface of the moving workpiece through the spray holes. With the rotational and revolution motion of the workpiece, the cleaning liquid can more comprehensively cover all areas of the workpiece, improving the uniformity and thoroughness of the cleaning. Therefore, the cleaning device provided by this utility model, through the coordinated cooperation of the clamping component, the installation component, the spray mechanism and the drive structure, can achieve multi-angle and all-round dynamic comprehensive cleaning of the workpiece, improving the cleaning quality of the workpiece. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of a cleaning device provided in an embodiment of the present invention; Figure 2 This is a schematic diagram of a cleaning device provided in an embodiment of the present invention when a workpiece is loaded; Figure 3 This is a side view of a cleaning device provided in an embodiment of the present utility model; Figure 4 This is a schematic diagram of the structure when the clamping component and the mounting component provided in this embodiment of the utility model are connected; Figure 5 This is a side view of the clamping component and the mounting component provided in this embodiment of the present invention when connected; Figure 6 This is a bottom view of the spray pipe provided in this embodiment of the utility model; Figure 7 This is a schematic diagram of the structure of the drive device provided in an embodiment of the present utility model; Figure 8 This is a rear view of the rack provided in an embodiment of the present utility model; Figure 9 This is a schematic diagram of the structure when the support frame and the gear ring are connected according to an embodiment of this utility model.

[0016] In the diagram, 100 represents the cleaning device. 1. Clamping assembly; 10. First rotation axis; 11. First clamping member; 12. First rotating shaft; 13. First gear; 14. Second clamping member; 15. Second rotating shaft; 16. Spring; 17. Handle; 111. First clamping groove; 141. Second clamping groove; 2. Mounting components; 20. Second rotation axis; 21. Second gear; 22. Connecting shaft; 23. Horizontal bar; 24. First vertical bar; 25. Second vertical bar; 3. Spraying mechanism; 31. Spray pipe; 32. First fixing rod; 311. Spray hole; 4. Drive mechanism; 41. Drive device; 42. Support plate; 43. Rack; 44. Support frame; 45. Gear ring; 411. Drive motor; 412. Support base; 413. Transmission screw; 414. Slide; 431. Second fixed rod; 441. Support ring; 442. Support rod; 4121. Limiting groove; 200. Workpiece; X, first horizontal direction; Y, second horizontal direction; Z, vertical direction. Detailed Implementation

[0017] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0018] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0019] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature.

[0020] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0021] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0022] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used in the description of this application is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms "comprising" and "having" and any variations thereof in the description, claims and foregoing drawings of this application are intended to cover non-exclusive inclusion.

[0023] In this application, the reference to "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment that is mutually exclusive with other embodiments.

[0024] like Figures 1 to 9 As shown, a preferred embodiment of the present invention, a cleaning device 100, includes a clamping assembly 1, a mounting assembly 2, a spraying mechanism 3, and a driving mechanism 4.

[0025] The clamping assembly 1 is used to clamp and fix the workpiece 200, and the clamping assembly 1 has a first rotation axis 10; the mounting assembly 2 is connected to the clamping assembly 1, and the mounting assembly 2 has a second rotation axis 20 perpendicular to the first rotation axis 10; the spraying mechanism 3 includes a spray pipe 31, which is located above the clamping assembly 1, and the bottom of the spray pipe 31 is provided with a spray hole 311; the driving mechanism 4 is connected to the mounting assembly 2 and the clamping assembly 1 respectively, and the driving mechanism 4 can drive the mounting assembly 2 to rotate around the second rotation axis 20 and can drive the clamping assembly 1 to rotate around the first rotation axis 10.

[0026] Based on this technical solution, by setting up a clamping component 1 and an mounting component 2, and respectively configuring a first rotation axis 10 and a second rotation axis 20 that are perpendicular to each other, and combining the coordinated drive of the clamping component 1 and the mounting component 2 by the drive mechanism 4, the workpiece 200 clamped in the clamping component 1 can simultaneously achieve rotational motion around the first rotation axis 10 and revolution motion around the second rotation axis 20. This composite motion mode of the workpiece 200 allows the workpiece 200 to continuously change its spatial orientation during the cleaning process. At the same time, in conjunction with the spraying mechanism 3 set above the clamping component 1, the cleaning liquid is sprayed onto the surface of the moving workpiece 200 through the spray holes 311. With the rotational and revolution motion of the workpiece 200, the cleaning liquid can more comprehensively cover all areas of the workpiece 200, improving the uniformity and thoroughness of the cleaning. Therefore, the coordinated cooperation of the clamping component 1, the mounting component 2, the spraying mechanism 3 and the drive structure provided by this utility model can achieve multi-angle, all-round dynamic and comprehensive cleaning of the workpiece 200, improving the cleaning quality of the workpiece 200.

[0027] In this embodiment, the workpiece 200 is a substrate.

[0028] The cleaning device 100 has a first horizontal direction X, a second horizontal direction Y, and a vertical direction Z that are perpendicular to each other.

[0029] Specifically, in this embodiment, the first horizontal direction is the length direction of the cleaning device 100, the second horizontal direction Y is the width direction of the cleaning device 100, and the vertical direction Z is the height direction of the cleaning device 100. Furthermore, the first rotation axis 10 is parallel to the vertical direction Z, and the second rotation axis 20 is perpendicular to the vertical direction Z.

[0030] The spraying mechanism 3 also includes a cleaning fluid storage container (not shown), a water pump (not shown), and a water supply pipe (not shown). The cleaning fluid storage container delivers water to the spray pipe 31 through the water pump and the water supply pipe.

[0031] In this embodiment, the cleaning solution is water.

[0032] See Figures 1 to 3 ,and Figure 6The spraying mechanism 3 also includes a first fixing rod 32, and the spraying pipe 31 is fixed to the ground or other components by the first fixing rod 32.

[0033] The bottom of the spray pipe 31 is provided with a plurality of spray holes 311, which face the clamping assembly 1. The plurality of spray holes 311 are distributed at intervals along the first horizontal direction X.

[0034] Multiple spray holes 311 can achieve uniform distribution of cleaning fluid on the surface of workpiece 200, reduce local concentration of liquid flow impact, and prevent differences in surface residue distribution caused by uneven cleaning intensity. At the same time, the multiple spray holes 311 combined with the rotation and revolution of workpiece 200 can form a staggered cleaning trajectory in space, which enhances the ability to remove particles, organic matter and metal ions, ensures a high degree of uniformity in the cleanliness of the entire surface of workpiece 200, and further improves the cleaning quality of the substrate.

[0035] There are multiple clamping components 1, one clamping component 1 is used to clamp and fix one workpiece 200; there is at least one spray hole 311 above the workpiece 200.

[0036] By setting multiple clamping components 1, the cleaning device 100 can clamp and process multiple workpieces 200 simultaneously, thereby improving cleaning efficiency.

[0037] Multiple spray holes 311 are distributed along the first horizontal direction X; multiple clamping components 1 are distributed along the first horizontal direction X; multiple mounting components 2 are distributed along the first horizontal direction X.

[0038] Preferably, the bottom of the spray pipe 31 is provided with at least fifty spray holes 311. When the workpiece 200 is fixed to the clamping assembly 2, there are at least ten spray holes 311 directly above the workpiece 200.

[0039] Specifically, in this embodiment, the number of clamping components 1 is three, and the number of mounting components 2 is three.

[0040] See Figures 1 to 5 The mounting assembly 2 includes a second gear 21, a connecting shaft 22, a crossbar 23, a first vertical bar 24, and a second vertical bar 25. The central axis of the second gear 21 is the second rotation axis 20. The second gear 21 is coaxially connected to the connecting shaft 22. The crossbar 23 is connected to the upper end of the connecting shaft 22 and is located above the second gear 21. The first vertical bar 24 is connected to one end of the crossbar 23, and the second vertical bar 25 is connected to the end of the crossbar 23 away from the first vertical bar 24. The clamping assembly 1 is connected to the first vertical bar 24 and the second vertical bar 25 respectively. The driving mechanism 4 is meshed with the second gear 21 to drive the second gear 21 to rotate around the second rotation axis 20.

[0041] By setting up an installation assembly 2 including a second gear 21, a connecting shaft 22, a crossbar 23, a first vertical bar 24, and a second vertical bar 25, the central axis of the second gear 21 is the second rotation axis 20, and the second gear 21 is coaxially connected to the connecting shaft 22, ensuring the coaxiality and stability of power transmission. The drive mechanism 4, by meshing with the second gear 21, can efficiently and smoothly drive the entire installation assembly 2 to rotate around the second rotation axis 20, realizing the revolution of the workpiece 200. The crossbar 23 is connected to the upper end of the connecting shaft 22, providing lateral support. The first vertical bar 24 and the second vertical bar 25 are respectively connected to the two ends of the crossbar 23, forming a symmetrical and stable suspension structure for connecting and supporting the clamping assembly 1.

[0042] The clamping assembly 1 includes a first clamping member 11, a first rotating shaft 12, a first gear 13, a second clamping member 14, a second rotating shaft 15, and a spring 16. The first clamping member 11 is located between the first vertical rod 24 and the second vertical rod 25, and the second clamping member 14 is located between the first clamping member 11 and the second vertical rod 25. The first rotating shaft 12 is connected to the side of the first clamping member 11 away from the second clamping member 14 and passes through the first vertical rod 24. The central axis of the first gear 13 is the first rotation axis 10. The first gear 13 is coaxially connected to the first rotating shaft 12 and is located on the side of the first vertical rod 24 away from the first clamping member 11. The second rotating shaft 15 is connected to the side of the second clamping member 14 away from the first clamping member 11 and passes through the second vertical rod 25. The spring 16 is sleeved on the second rotating shaft 15 and is located between the second clamping member 14 and the second vertical rod 25. The driving mechanism 4 is meshed with the first gear 13 to drive the first gear 13 to rotate around the first rotation axis 10.

[0043] The first clamping member 11 is rotatably mounted on the first vertical rod 24 via the first rotating shaft 12. The first gear 13 is coaxially connected to the first rotating shaft 12, and the central axis of the first gear 13 is the first rotation axis 10. The driving mechanism 4 meshes with the first gear 13, thereby driving the first rotating shaft 12 and the first clamping member 11 to rotate around the first rotation axis 10, realizing the rotational motion of the workpiece 200.

[0044] The second clamping member 14 is rotatably mounted on the second vertical rod 25 via the second rotating shaft 15. A spring 16 is sleeved on the second rotating shaft 15 and acts between the second clamping member 14 and the second vertical rod 25, providing an adjustable elastic clamping force. When loading the workpiece 200, the spring 16 can be manually compressed to allow the second clamping member 14 to make room for loading. After loading, the spring 16 returns to its original shape, firmly clamping the workpiece 200 between the first clamping member 11 and the second clamping member 14. This ensures adaptability to workpieces 200 of different sizes while avoiding potential damage from rigid clamping.

[0045] It should be noted that "the second gear 21 is coaxially connected to the connecting shaft 22" means that the central axis of the second gear 21 and the central axis of the connecting shaft coincide. "The first gear 13 is coaxially connected to the first rotating shaft 12" means that the central axis of the first gear 13 and the central axis of the first rotating shaft 12 coincide. In other words, when one component is coaxially connected to another component, it means that the central axes of the two components coincide.

[0046] In some embodiments, the bottom wall and / or side wall of the first clamping groove 111 are provided with a buffer layer, and the bottom wall and / or side wall of the second clamping groove 141 are provided with a buffer layer. In actual production, substrates from different batches or process stages may have slight differences in thickness or diameter. The buffer layer has a certain compressive deformation capability, which can automatically compensate for dimensional tolerances through elastic deformation during clamping, achieving "adaptive fit" and ensuring uniform distribution of clamping force. This ensures firm clamping without causing damage due to excessive tightness, thus improving the fault tolerance and versatility of clamping.

[0047] The buffer layer can be made of flexible buffer materials, including but not limited to rubber, sponge, and silicone.

[0048] The clamping assembly 1 also includes a handle 17, which is connected to the second pivot 15 and located on the side of the second vertical bar 25 opposite to the second clamping member 14.

[0049] When it is necessary to load or replace workpiece 200, the operator can manually turn the handle 17 to drive the second rotating shaft 15 to move axially, thereby overcoming the preload of the spring 16 and moving the second clamping member 14 away from the first clamping member 11, opening the clamping space. At this time, workpiece 200 can be easily inserted between the first clamping groove 111 and the second clamping groove 141. After releasing the handle 17, the spring 16 returns to its original shape, pushing the second clamping member 14 to reset, realizing automatic clamping of workpiece 200. The operation process is simple, labor-saving, and intuitive, without the need for additional tools or complex adjustments.

[0050] See Figures 1 to 5 ,and Figures 7 to 9 The drive mechanism 4 includes a drive device 41, a support plate 42, a rack 43, a support frame 44, and a gear ring 45. The drive device 41 is connected to the support plate 42 and can drive the support plate 42 to move along the first horizontal direction X. The crossbar 23 is located above the support plate 42. The connecting shaft 22 passes through the support plate 42. The second gear 21 is located below the support plate 42. The rack 43 extends along the first horizontal direction X. The rack 43 is located on one side of the support plate 42 and meshes with the second gear 21. The support frame 44 is connected to the top of the support plate 42. The gear ring 45 is connected to the upper end of the support frame 44. The first vertical rod 24 and the second vertical rod 25 are both located inside the gear ring 45. The first gear 13 and the gear ring 45 are meshed together.

[0051] The drive device 41 is connected to the support plate 42 and drives the support plate 42 to reciprocate along the first horizontal direction X. The support plate 42, as the core motion platform, drives the connecting shaft 22, the second gear 21, and the horizontal bar 23, vertical bar, and clamping assembly 1 above it to perform linear motion as a whole. Since the second gear 21 meshes with the rack 43 extending along the first horizontal direction X, when the support plate 42 moves, the second gear 21 "rolls" on the rack 43, converting the linear motion of the second gear 21 into the rotational motion of the second gear 21, thereby driving the connecting shaft 22 and the horizontal bar 23 to rotate around the second rotation axis 20, realizing the revolution motion of the clamping assembly 1 and the workpiece 200.

[0052] A support frame 44 is connected to the top of a support plate 42, and a gear ring 45 is provided on the upper end of the support frame 44. The first gear 13 (coaxial with the first rotation axis 10) in the clamping assembly 1 is located inside the gear ring 45 and meshes with it. When the support plate 42 drives the entire mounting assembly 2 to move along the first horizontal direction X, since the gear ring 45 is fixed on the support frame 44 and moves synchronously with the support plate 42, and the first gear 13 remains meshed with the gear ring 45, the first gear 13 will roll along the gear ring 45 during the revolution, thereby being forced to rotate around the first rotation axis 10, realizing the rotational motion of the workpiece 200. Thus, the workpiece 200 performs both rotational and revolutionary motions during the cleaning process, enhancing the rinsing effect of the cleaning fluid on the surface of the workpiece 200, eliminating cleaning blind spots, improving the comprehensiveness and uniformity of cleaning, and improving the cleaning quality.

[0053] The drive mechanism 4 organically combines linear motion, gear rack transmission, and gear ring transmission. All moving parts are driven uniformly through the support plate 42, ensuring a high degree of synchronization and phase consistency between rotation and revolution.

[0054] Under the combined motion of rotation and revolution, each area of ​​the workpiece 200 surface is periodically exposed to the spray area and subjected to liquid flow impacts at different angles. This enhances the renewal rate of the cleaning fluid and the ability to remove contaminants, thus helping to improve the cleaning quality of the workpiece 200.

[0055] The first horizontal direction X can be any direction perpendicular to the height direction of the cleaning device 100.

[0056] In this embodiment, the driving device 41 is a linear module. Linear modules have the advantages of high motion accuracy, high stability, and high reliability.

[0057] In some other embodiments, the driving device 41 may also be any device such as a pneumatic cylinder, hydraulic cylinder, or electric cylinder that can drive the support plate 42 to move along the first horizontal direction X.

[0058] The rack 43 is fixed to the ground or other components by the second fixing rod 431, so that the rack 43 is located on one side of the support plate 42 and meshes with the second gear 21.

[0059] Specifically, in this embodiment, the linear module includes a drive motor 411, a support base 412, a transmission screw 413, and a slide 414. The support base 412 is provided with a limiting groove 4121. The transmission screw 413 passes through the support base 412 along the first horizontal direction X, and at least a portion of the transmission screw 413 is located in the limiting groove 4121. The slide 414 is sleeved on the transmission screw 413 and threadedly engaged with the transmission screw 413. At least a portion of the slide 414 is located in the limiting groove 4121. The support plate 42 is connected to the top of the slide 414. The drive motor 411 is connected to the transmission screw 413 and can drive the transmission screw 413 to rotate around its central axis.

[0060] In this embodiment, the drive motor 411 is located outside the limiting groove 4121, and the drive motor 411 is connected to the transmission screw 413 through a coupling.

[0061] The slide 414 is provided with a transmission nut that cooperates with the transmission screw 413. The slide 414 is sleeved on the transmission screw 413 through the transmission nut and is threadedly engaged with the transmission screw 413.

[0062] The support frame 44 includes a support ring 441 and a support rod 442. The support ring 441 is connected to the top of the support plate 42, and the lower end of the support rod 442 is connected to the support ring 441 and the upper end is connected to the gear ring 45.

[0063] The support ring 441 and support rod 442 can form a hollow layout in the vertical direction, so that the clamping assembly 1, workpiece 200 and spraying mechanism 3 are located in the internal area of ​​the support frame 44, making compact use of space and not affecting the arrangement of other components.

[0064] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present utility model, and these improvements and substitutions should also be considered within the protection scope of the present utility model.

Claims

1. A cleaning device (100), characterized in that, include: A clamping assembly (1) is used to clamp and fix a workpiece (200), and the clamping assembly (1) has a first rotation axis (10). Mounting assembly (2), which is connected to clamping assembly (1), has a second rotation axis (20) perpendicular to the first rotation axis (10). The spraying mechanism (3) includes a spray pipe (31), which is located above the clamping assembly (1), and the bottom of the spray pipe (31) is provided with a spray hole (311). The driving mechanism (4) is connected to the mounting component (2) and the clamping component (1) respectively. The driving mechanism (4) can drive the mounting component (2) to rotate around the second rotation axis (20) and can drive the clamping component (1) to rotate around the first rotation axis (10).

2. The cleaning device (100) according to claim 1, characterized in that, The mounting assembly (2) includes a second gear (21), a connecting shaft (22), a crossbar (23), a first vertical bar (24), and a second vertical bar (25). The central axis of the second gear (21) is the second rotation axis (20). The second gear (21) is coaxially connected to the connecting shaft (22). The crossbar (23) is connected to the upper end of the connecting shaft (22) and is located above the second gear (21). The first vertical bar (24) is connected to one end of the crossbar (23). The second vertical bar (25) is connected to the end of the crossbar (23) away from the first vertical bar (24). The clamping assembly (1) is connected to the first vertical rod (24) and the second vertical rod (25) respectively; the driving mechanism (4) is meshed with the second gear (21) to drive the second gear (21) to rotate around the second rotation axis (20).

3. The cleaning device (100) according to claim 2, characterized in that, The clamping assembly (1) includes a first clamping member (11), a first rotating shaft (12), a first gear (13), a second clamping member (14), a second rotating shaft (15), and a spring (16). The first clamping member (11) is located between the first vertical rod (24) and the second vertical rod (25), the second clamping member (14) is located between the first clamping member (11) and the second vertical rod (25), the first rotating shaft (12) is connected to the side of the first clamping member (11) away from the second clamping member (14) and passes through the first vertical rod (24), the central axis of the first gear (13) is the first rotating axis (10), the first gear (13) is coaxially connected to the first rotating shaft (12) and located on the side of the first vertical rod (24) away from the first clamping member (11), the second rotating shaft (15) is connected to the side of the second clamping member (14) away from the first clamping member (11) and passes through the second vertical rod (25), the spring (16) is sleeved on the second rotating shaft (15) and located between the second clamping member (14) and the second vertical rod (25); The drive mechanism (4) meshes with the first gear (13) to drive the first gear (13) to rotate around the first rotation axis (10).

4. The cleaning device (100) according to claim 3, characterized in that, The first clamping member (11) is provided with a first clamping groove (111) suitable for the workpiece (200) to be inserted, and the second clamping member (14) is provided with a second clamping groove (141) opposite to the first clamping groove (111) and suitable for the workpiece (200) to be inserted.

5. The cleaning device (100) according to claim 3, characterized in that, The clamping assembly (1) further includes a handle (17) which is connected to the second pivot (15) and located on the side of the second vertical rod (25) away from the second clamping member (14).

6. The cleaning apparatus (100) according to claim 3, characterized in that, It has a first horizontal direction (X); The driving mechanism (4) includes a driving device (41), a support plate (42), a rack (43), a support frame (44), and a gear ring (45); the driving device (41) is connected to the support plate (42) and can drive the support plate (42) to move along the first horizontal direction (X); the crossbar (23) is located above the support plate (42); the connecting shaft (22) passes through the support plate (42); and the second gear (21) is located below the support plate (42). The rack (43) extends along the first horizontal direction (X), the rack (43) is located on one side of the support plate (42) and meshes with the second gear (21), the support frame (44) is connected to the top of the support plate (42), the gear ring (45) is connected to the upper end of the support frame (44), the first vertical rod (24) and the second vertical rod (25) are both located inside the gear ring (45), and the first gear (13) and the gear ring (45) mesh with each other.

7. The cleaning apparatus (100) according to claim 6, characterized in that, The driving device (41) includes a drive motor (411), a support base (412), a transmission screw (413), and a slide (414). The support base (412) is provided with a limiting groove (4121). The transmission screw (413) passes through the support base (412) along the first horizontal direction (X), and at least a portion of the transmission screw (413) is located in the limiting groove (4121). The slide (414) is sleeved on the transmission screw (413) and threadedly engaged with the transmission screw (413). At least a portion of the slide (414) is located in the limiting groove (4121). The support plate (42) is connected to the top of the slide (414). The drive motor (411) is connected to the transmission screw (413) and can drive the transmission screw (413) to rotate around its central axis.

8. The cleaning apparatus (100) according to claim 6, characterized in that, The support frame (44) includes a support ring (441) and a support rod (442). The support ring (441) is connected to the top of the support plate (42), and the lower end of the support rod (442) is connected to the support ring (441), while the upper end is connected to the gear ring (45).

9. The cleaning apparatus (100) according to any one of claims 1-8, characterized in that, The bottom of the spray pipe (31) is provided with multiple spray holes (311).

10. The cleaning apparatus (100) according to claim 9, characterized in that, The number of clamping components (1) is multiple, and one clamping component (1) is used to clamp and fix one workpiece (200).

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