Detection device

Abstract

The application provides a detection device, comprising: a platform for carrying a to-be-detected member; a pressing device above the platform, the pressing device comprising a pressing member with a central opening, the pressing member being used for pressing a side of the to-be-detected member away from the platform and exposing a predetermined to-be-detected area; and a measuring device above the platform, the measuring device being used for measuring the predetermined to-be-detected area of the to-be-detected member. The detection device of the application can press the side of the to-be-detected member away from the platform by the pressing device before measurement, so as to flatten the surface of the to-be-detected member, and then measure the to-be-detected member by the measuring device, thereby reducing the measurement error caused by the change of the position of the layer plate in the thickness direction due to the deformation of the to-be-detected member itself, and further improving the measurement accuracy of the measuring device on the to-be-detected member.

Description

Technical Field

[0001] This application belongs to the field of measurement technology, and more specifically, relates to a testing device. Background Technology

[0002] After a printed circuit board (PCB) is manufactured, various parameters need to be measured, such as the hole depth, to ensure a high yield rate. Currently, PCB measurement primarily involves placing the PCB on a platform and fixing it in place using magnetic adsorption. However, during the manufacturing process, the PCB deforms, causing changes in the layer positions along its thickness. If fixation is solely by adsorption, unevenness will still occur, leading to measurement errors and low accuracy. Utility Model Content

[0003] The purpose of this application is to provide a testing device to solve the technical problem of low measurement accuracy of PCB boards in the prior art.

[0004] To achieve the above objectives, the technical solution adopted in this application is: to provide a testing device, comprising: Platform, the platform being used to carry the device under test; A pressing device is located above the platform. The pressing device includes a pressing member with a central opening. The pressing member is used to press against the side of the test piece facing away from the platform and expose a predetermined test area. A measuring device is located above the platform and is used to measure the predetermined test area of ​​the test piece.

[0005] In some embodiments, the pressing device includes a driving member and a pressing structure, the pressing structure being connected to the driving member, and the driving member being used to drive the pressing structure to move in a predetermined direction.

[0006] In some embodiments, the pressing member is detachably mounted on the pressing structure, and the pressing member protrudes from the pressing structure to abut against one side of the test piece; And / or, the pressure member is made of a flexible material.

[0007] In some embodiments, the measuring device is disposed inside the pressure structure, and the measuring device includes a measuring head configured to align with the central opening of the pressure member along an optical axis to measure the predetermined area to be measured.

[0008] In some embodiments, the pressing device further includes a first connecting plate. The pressing structure includes a top plate, a pressure plate, and a guide rod disposed between the top plate and the pressure plate and passing through the first connecting plate. The top plate, the first connecting plate, and the pressure plate are arranged in sequence at intervals. The driving member connects the top plate and the first connecting plate. The driving member is used to drive the top plate to rise and fall, so as to drive the top plate, the guide rod, and the pressure plate to rise and fall.

[0009] In some embodiments, the pressure plate includes a through opening, and the pressing member is configured to be detachably connected to the pressure plate along the circumferential direction of the through opening to form a central opening of the pressing member; the pressing member abuts against one side of the test piece protruding from the main surface of the pressure plate facing the platform. In some embodiments, the measuring device is connected to the first connecting plate, and the measuring device is located within the space enclosed by the first connecting plate, the pressure plate, and each of the guide rods.

[0010] In some embodiments, the pressure-reducing device further includes a pressure regulating valve, which is pneumatically connected to the drive element, and the pressure regulating valve is used to adjust the air pressure of the drive element.

[0011] In some embodiments, the detection device further includes a visual positioning device, which is installed on one side of the pressing device and located above the platform. The visual positioning device is used to position the test piece to achieve alignment between the measuring device and the test part on the predetermined test area.

[0012] In some embodiments, the detection device further includes a fine-tuning mechanism for adjusting the pose of the visual positioning device.

[0013] In some embodiments, the detection device further includes a first mounting member and a second mounting member, the first mounting member and the second mounting member being slidably connected, the first mounting member being mounted on the pressing device, and the visual positioning device being mounted on the second mounting member; the fine-tuning mechanism includes a trapezoidal lead screw mechanism, the trapezoidal lead screw mechanism including a nut, a lead screw and a knob, the lead screw being mounted on the first mounting member, the knob being mounted on one end of the lead screw, and the nut being mounted on the second mounting member.

[0014] In some embodiments, the detection device further includes a frame and a lifting mechanism, the lifting mechanism being mounted on the frame, and the measuring device and the pressing device being mounted on the motion output end of the lifting mechanism.

[0015] In some embodiments, the testing equipment further includes a frame, a lifting mechanism, and a visual positioning device. The lifting mechanism is mounted on the frame, and the visual positioning device, the measuring device, and the pressing device are all mounted on the motion output end of the lifting mechanism. The visual positioning device is used to position the workpiece to be tested so as to achieve alignment between the measuring device and the part to be tested on the predetermined test area. The beneficial effects of the testing equipment provided in this application are as follows: by setting up the pressing device, before measurement, the pressing part of the pressing device can be pressed against the side of the test piece away from the platform and the predetermined test area can be exposed to flatten the surface of the test piece (at least the predetermined test area). Then, the predetermined test area of ​​the test piece can be measured by the measuring device, thereby reducing the measurement error caused by the change in the position of the plate in the thickness direction due to the deformation of the test piece itself, and thus improving the measurement accuracy of the measuring device on the test piece. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the structure of the measuring device in the testing equipment provided in the embodiments of this application for detecting the test piece; Figure 2 This is a three-dimensional structural diagram of the detection equipment provided in the embodiments of this application; Figure 3 A three-dimensional structural diagram of the measuring instrument in the testing equipment provided in the embodiments of this application; Figure 4 This is a side view of the measuring instrument in the testing equipment provided in the embodiments of this application; Figure 5 This is a schematic diagram of the inverted three-dimensional structure of the measuring instrument in the testing equipment provided in the embodiments of this application; Figure 6 A schematic diagram of the inverted three-dimensional structure of the measuring instrument in a testing device provided in another embodiment of this application; Figure 7 This is a schematic diagram of the assembly structure of the fine-tuning device in the testing equipment provided in the embodiments of this application; Figure 8 This is a schematic diagram of the lifting mechanism and the third guide mechanism in the testing equipment provided in the embodiments of this application; Figure 9 This is a schematic diagram of the structure of the base and the second moving mechanism in the testing equipment provided in the embodiments of this application; Figure 10 This is a schematic diagram of the structure of the base, the first moving mechanism, and the second moving mechanism in the testing equipment provided in the embodiments of this application.

[0018] The following are the labeling elements in the figure: 100. Frame; 110. Base; 120. Crossbeam; 130. Elevating component; 200. Platform; 210. Bearing surface; 220. Adsorption hole; 300. Lifting mechanism; 400. Measuring instrument; 410. Measuring device; 411. Measuring head; 420. Pressing device; 421. Pressing structure; 4211. Top plate; 4212. Pressure plate; 4213. Guide rod; 4214. Through opening; 422. Driving component; 4221. Fixing part; 4222. Sliding part; 423. Pressing component; 4231. Center opening; 424. First connecting plate; 425. First limiting component; 426. Second limiting component; 427. Pressure regulating valve; 428. Guide sleeve; 430. Visual positioning device; 440. Fine-tuning mechanism; 441. Lead screw; 442. Nut; 443. Knob; 444. Locking block; 450. Second connecting plate; 460. Fourth guide rail; 470. Fourth slider; 480. First mounting component; 490. Second mounting component; 500. First moving mechanism; 600. Second moving mechanism; 700. First guide mechanism; 710. First guide rail; 720. First slider; 800. Second guide mechanism; 810. Second guide rail; 900. Third guide mechanism; 910. Third guide rail; 920. Third slider; 1000. Limiting structure; 1001. First baffle; 1002. Second baffle; 1100. Mounting base; 2. Component to be tested; 21. Hole to be tested; 22. First surface; 23. Second surface; X, First direction; Y, Second direction; Z, Vertical direction. Detailed Implementation

[0019] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0020] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0021] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0022] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0023] As described in the background section, when measuring PCB boards, the PCB board is mainly placed on a platform and then fixed by adsorption. However, during the manufacturing process, the PCB board deforms, causing the layer positions to change in the thickness direction. If it is fixed by adsorption alone, the PCB board will still have unevenness, which can easily lead to measurement errors and low measurement accuracy.

[0024] To address the aforementioned technical problems, this application provides a detection device.

[0025] Please see Figure 1The testing equipment provided in this application embodiment will now be described. This testing equipment is used to test the component under test 2, for example, to detect the hole depth, thickness, or coaxiality of stepped holes in the component under test 2. The component under test 2 can be a circuit board or other board structures. Specifically, the circuit board may include a PCB (Printed Circuit Board), an IC (Integrated Circuit) packaging substrate, or other circuit boards used to achieve chip interconnection; it should be noted that the circuit board is used to carry electronic components (chips, resistors, capacitors, inductors, diodes, transistors, amplifiers, etc.) and to achieve electrical connections between different electronic components. Specifically, in the context of this application, circuit boards include ordinary boards, multilayer boards, HDI (High Density Interconnect), FPC (Flexible Printed Circuit) and other PCBs (Printed Circuit Boards), as well as IC (Integrated Circuit) carriers and their semi-finished products made of organic substrates, ceramic substrates or glass, etc. In some feasible embodiments, the circuit board can be formed by stacking electrically conductive layers and electrically insulating layers in parallel and mechanically pressing and / or hot-pressing them. The electrically insulating layer is used to isolate the electrically conductive layers and provide local interconnections between the layers. The electrically insulating layer can be made of materials such as glass fiber and resin. The electrically conductive layer is used to transmit current and signals, etc., and can be made of materials with good conductivity, such as metals (especially copper) or carbon (especially graphene).

[0026] Please refer to the following: Figures 2 to 5 The testing equipment includes a platform 200, a pressing device 420, and a measuring device 410. The platform 200 is used to support the test piece 2. The pressing device 420 is located above the platform 200 and includes a pressing member 423 with a central opening 4231. The pressing member 423 is used to press against the side of the test piece 2 away from the platform 200 and expose a predetermined test area. The measuring device 410 is located above the platform 200 and is used to measure the predetermined test area of ​​the test piece 2.

[0027] For ease of description, assume that the test piece 2 has a first surface 22 and a second surface 23 arranged opposite to each other along its thickness direction. The first surface 22 of the test piece 2 is supported on the platform 200, and the pressing member 423 of the pressing device 420 presses against the second surface 23 of the test piece 2.

[0028] When using this testing equipment to test the test piece 2, the test piece 2 is first placed on the platform 200; then, the pressing member 423 of the pressing device 420 presses against the second side 23 of the test piece 2 away from the platform 200 and exposes the predetermined test area, so that the predetermined test area of ​​the test piece 2 is flat; finally, the predetermined test area of ​​the test piece 2 is measured by the measuring device 410.

[0029] The detection device in this embodiment of the application, by setting the pressing device 420, obtains a predetermined test area with high flatness before measurement, and then the measuring device 410 measures the predetermined test area of ​​the test piece 2, thereby reducing the measurement error caused by the change in the position of the plate in the thickness direction due to the deformation of the test piece 2 itself, and thus improving the measurement accuracy of the measuring device 410 on the test piece 2.

[0030] In some embodiments, please refer to Figure 4 and Figure 5 The pressing component 423 is a pad made of flexible material. The pressing component 423 has a certain degree of compressive elasticity. The pressing component 423 can be set to allow a certain degree of deformation to compensate for the flatness error of itself and the PCB board (test component 2), thereby making the clamping force more uniform. For example, the pressing component 423 is made of polyoxymethylene or soft rubber material.

[0031] In some embodiments, please refer to Figure 3 and Figure 4 The pressing device 420 includes a driving member 422 and a pressing structure 421. The pressing structure 421 is connected to the driving member 422, and the driving member 422 is used to drive the pressing structure 421 to move in a predetermined direction.

[0032] The predetermined direction is the direction in which the pressure structure 421 and the platform 200 are spaced apart. The predetermined direction can be the vertical direction Z, or it can be a direction that forms an angle with the vertical direction Z, such as the horizontal direction.

[0033] Taking the predetermined direction as the vertical direction Z as an example, after the relative positions of the measuring device 410 and the workpiece 2 under test along the vertical direction Z are determined, the pressing structure 421 is driven to descend by the driving member 422, so that the pressing structure 421 presses against the second surface 23 of the workpiece 2 under test, thereby flattening at least the predetermined measurement area of ​​the workpiece 2 under test, thus improving the measurement accuracy of the measuring device 410. Furthermore, it should be noted that the relative positions of the measuring device 410 and the workpiece 2 under test along the vertical direction Z can be achieved by driving the measuring device 410 to descend or the workpiece 2 under test to rise using another driving device.

[0034] In some embodiments, please refer to Figures 3 to 5The pressing member 423 is detachably installed on the pressing structure 421. The pressing member 423 is used to press against one side of the test piece 2, which protrudes from the pressing structure 421. The detachable arrangement of the pressing member 423 and the pressing structure 421 facilitates the disassembly and replacement of the pressing member 423 when it is damaged, thereby extending the service life of the pressing structure 421. At the same time, different specifications (material, thickness, size) of the pressing member 423 can also be replaced according to usage requirements.

[0035] In some embodiments, please refer to Figure 3 The measuring device 410 is disposed inside the pressing structure 421. For example, by constructing the pressing structure 421 as a three-dimensional frame and placing the measuring device 410 inside the pressing structure 421, not only can the overall space occupied by the measuring device 410 and the pressing structure 421 be reduced, but also the pressing member 423 of the pressing structure 421 can press against the perimeter of the predetermined test area of ​​the test piece 2 to ensure that the predetermined test area is flat. Then, the measuring device 410 detects the predetermined test area through the central opening 4231 of the pressing member 423, thereby improving the measurement accuracy of the measuring device 410 for the predetermined test area. The predetermined test area of ​​the test piece 2 should include at least one test hole on the test piece 2. Preferably, the predetermined test area includes multiple holes, and the pressing structure 421 presses against the perimeter of one or more holes.

[0036] For details, please refer to Figure 5 and Figure 6 The measuring device 410 includes a measuring head 411, which is configured to align with the central opening 4231 of the pressing member 423 along an optical axis to measure a predetermined area to be measured. During testing, the detection light emitted by the measuring head 411 passes through the central opening 4231 to measure the predetermined area to be measured.

[0037] Optionally, the cross-sectional shape of the central opening 4231 perpendicular to the optical axis can be square, rectangular, elliptical, racetrack-shaped, or other regular or irregular polygons. Preferably, the cross-sectional shape of the central opening 4231 perpendicular to the optical axis is adapted to the cross-sectional shape of the measuring head 411 perpendicular to the optical axis.

[0038] Optionally, along the optical axis, the central opening 4231 has a first orthographic projection on the platform 200, and the measuring head 411 has a second orthographic projection on the platform 200. The second orthographic projection is located within the range of the first orthographic projection, so as to ensure that the measuring head 411 can capture information of the predetermined area to be measured through the central opening 4231.

[0039] Please see Figure 2 and Figure 3The testing equipment includes a measuring instrument 400, which includes a measuring device 410 and a pressing device 420. The pressing structure 421 is a three-dimensional frame, and the measuring device 410 is located inside the pressing structure 421. In this embodiment, by integrating the measuring device 410 and the pressing device 420 into the measuring instrument 400, the relative positions of the measuring device 410 and the pressing device 420 are fixed. This ensures that once the relative positions of the measuring device 410 and the test piece 2 are adjusted, the relative positions of the measuring device 410 and the test piece 2 are also adjusted. The test piece 2 can be directly pressed by the measuring device 410 without the need for separate position adjustments for the measuring device 410 and the pressing device 420.

[0040] Optionally, the measuring device 410 and the pressing device 420 can be integrated into a housing to avoid mechanical damage and contact with foreign objects from the outside.

[0041] In some embodiments, please refer to Figure 4 The first centerline of the measuring device 410 coincides with the second centerline of the pressing device 420. The first centerline of the measuring device 410 refers to its transverse centerline, which is the intersection of its center plane along the first direction X and its center plane along the second direction Y. The first direction X and the second direction Y are two mutually perpendicular transverse directions, meaning both are perpendicular to the vertical direction Z. Similarly, the second centerline of the pressing device 420 refers to the intersection of its center plane along the first direction X and its center plane along the second direction Y.

[0042] In this embodiment, by aligning the first center line of the measuring device 410 with the second center line of the pressing device 420, the overall center of gravity of the pressing device 420 and the measuring device 410 is balanced, so that the measuring device 410 is located at the center of the pressing device 420, and the measuring device 410 has higher measurement accuracy after the pressing device 420 presses the surface of the workpiece 2.

[0043] In some embodiments, please refer to Figure 3 and Figure 4The pressing device 420 also includes a first connecting plate 424. The pressing structure 421 includes a top plate 4211, a pressure plate 4212, and a guide rod 4213 disposed between the top plate 4211 and the pressure plate 4212 and passing through the first connecting plate 424. The top plate 4211, the first connecting plate 424, and the pressure plate 4212 are arranged in sequence at intervals. The driving member 422 connects the top plate 4211 and the first connecting plate 424. The driving member 422 is used to drive the top plate 4211 to rise and fall, so as to drive the top plate 4211, the guide rod 4213, and the pressure plate 4212 to rise and fall. In this embodiment, a three-dimensional frame-shaped pressing structure 421 is formed by the top plate 4211, the pressure plate 4212, and the guide rod 4213, which facilitates the assembly of the measuring device 410 and the pressing structure 421. Simultaneously, the top plate 4211 and the first connecting plate 424 are connected by a driving member 422, which drives the top plate 4211 and the pressure plate 4212 located on the upper and lower sides of the first connecting plate 424 to rise and fall. This reduces the overall space occupied by the pressing structure 421 of the driving member 422 in the vertical direction Z. It is understood that in other embodiments of this application, the first connecting plate 424 can also be positioned above the top plate 4211, and then the top plate 4211 and the pressure plate 4212 can be driven to rise and fall by the driving member 422; this is not the only possible embodiment.

[0044] In some embodiments, please refer to Figure 3 , Figure 5 and Figure 6 The pressure plate 4212 includes a through opening 4214. A pressing member 423 is configured to be detachably connected to the pressure plate 4212 along the circumferential direction of the through opening 4214, forming a central opening 4231 in the pressing member 423. The pressing member 423 protrudes from the main surface of the pressure plate 4212 facing the platform, abutting against one side of the test piece 2. Because the pressing member 423 is detachably connected to the pressure plate 4212 along the circumferential direction of the through opening 4214, forming a central opening 4231, the contact surface of the pressing member 423 against the test piece 2 is much smaller than that of the pressure plate 4212. This allows the pressing member 423 to have greater pressure under less pressure, resulting in better flattening and allowing the testing equipment to be made very small and light while still ensuring sufficient pressure. Meanwhile, when the pressing member 423 presses against the test piece 2, there is no relative movement between it and the test piece 2 along the first direction X and the second direction Y. By pressing in the vertical direction, it remains static in the first direction X and the second direction Y, so that the test piece 2 mainly generates uniform compressive stress. This avoids the introduction of tensile stress by relative movement in the first direction X and the second direction Y, which would cause concentrated tensile stress to damage the test piece 2, such as breakage or shattering. At the same time, it can also avoid damage to the surface of the test piece 2, such as wear or scratches.

[0045] In some other embodiments, the main surface of the pressure plate 4212 is also made of a flexible material, so that when the test piece 2 is warped to a high degree, the test piece 2 will not be damaged even if it partially contacts the main surface of the pressure plate 4212.

[0046] In some embodiments, please refer to Figure 3 and Figure 4 The measuring device 410 is mounted on the first connecting plate 424, and is located within the space enclosed by the first connecting plate 424, the pressure plate 4212, and the guide rods 4213. By connecting the measuring device 410 to the first connecting plate 424, the position of the measuring device 410 remains unchanged when the pressing structure 421 is raised or lowered. This prevents the height of the measuring device 410 from being affected by the raising or lowering of the pressing structure 421 after the height of the measuring device 410 is adjusted, thus avoiding any impact on the measurement accuracy of the measuring device 410.

[0047] In some other possible embodiments, the pressure plate 4212 is provided with a through opening 4214 extending vertically in the Z direction. The light emitted by the measuring device 410 to measure the test piece 2 is directed towards the test piece 2 through the through opening 4214. In practical applications, the pressure plate 4212 is first lowered by the driving member 422 to press against the second surface 23 of the test piece 2 and surround the predetermined test area. Then, the measuring device 410 emits light towards the predetermined test area through the through opening 4214 to achieve measurement of the measuring part. The through opening 4214 avoids the influence of the pressure plate 4212 on the measurement effect of the measuring device 410. It is understood that in other embodiments of this application, the pressure plate 4212 can also be made of a light-transmitting material, so that the light emitted by the measuring device 410 can directly pass through the pressure plate 4212 and be directed towards the predetermined test area. In this case, the through opening 4214 may not be provided on the pressure plate 4212.

[0048] In some embodiments, please refer to Figure 3 and Figure 4The driving component 422 includes a linear cylinder, which includes a fixed part 4221 and a sliding part 4222. The fixed part 4221 is mounted on the top plate 4211, and the sliding part 4222 is mounted on the first connecting plate 424. When the driving component 422 is activated, the sliding part 4222 of the driving component 422 slides relative to the fixed part 4221. Due to the relative movement between the sliding part 4222 and the fixed part 4221, the first connecting plate 424 and the top plate 4211, which are respectively connected to the sliding part 4222 and the fixed part 4221, slide relative to each other. Since the first connecting plate 424 is fixed to the frame 100, the top plate 4211 rises and falls relative to the first connecting plate 424, thereby causing the top plate 4211, the pressure plate 4212, and the pressing member 423 to rise and fall relative to the first connecting plate 424, thereby driving the pressure plate 4212 and the pressing member 423 to fall and abut against the test piece 2.

[0049] Optionally, the drive unit 422 can also be an electric drive device (such as a servo motor or a stepper motor), a mechanical drive device, or a hydraulic drive device; that is, the drive unit 422 can be selected according to actual needs.

[0050] For details, please refer to Figure 3 and Figure 4 The pressing structure 421 also includes multiple guide rods 4213 and multiple guide sleeves 428. Each guide rod 4213 is respectively disposed between the top plate 4211 and the pressure plate 4212 and is arranged parallel to each other at intervals. One end of the guide rod 4213 is fixedly connected to the top plate 4211, and the other end of the guide rod 4213 is fixedly connected to the pressure plate 4212. Each guide sleeve 428 is slidably sleeved on each guide rod 4213 and fixedly sleeved on each guide sleeve 428, thereby enabling the first connecting plate 424 to slide and connect with the pressing structure 421.

[0051] In some embodiments, please refer to Figure 3 and Figure 4 The pressing device 420 also includes a first limiting member 425 and a second limiting member 426. The first limiting member 425 and the second limiting member 426 are respectively connected to the first connecting plate 424. The first limiting member 425 and the second limiting member 426 are spaced apart along the vertical direction Z. The top plate 4211 is slidably disposed between the first limiting member 425 and the second limiting member 426. The first limiting member 425 and the second limiting member 426 are used to limit the movement stroke of the top plate 4211 along the vertical direction Z, thereby limiting the extreme position of the pressure plate 4212 and effectively protecting the measuring device located inside the pressing device 420.

[0052] Specifically, the testing equipment also includes a second connecting plate 450, which is connected to the first connecting plate 424. The first connecting plate 424 is set perpendicular to the vertical direction Z, and the second connecting plate 450 is set perpendicular to the first connecting plate 424. The first limiting member 425 and the second limiting member 426 are respectively installed on the first connecting plate 424 and the second connecting plate 450.

[0053] In some embodiments, please refer to Figure 4 The pressure-reducing device 420 also includes a pressure regulating valve 427, which is pneumatically connected to the drive component 422. The pressure regulating valve 427 is used to adjust the air pressure of the drive component 422 to provide different pressure levels for different working conditions. The so-called working conditions include, but are not limited to, processing equipment, processing parameters; the material, shape, compressive strength, and structural features (structure type, size, density, etc.) of the test piece.

[0054] In some embodiments, please refer to Figure 2 , Figure 3 , Figure 5 and Figure 6 The testing equipment also includes a visual positioning device 430, which is installed on one side of the pressing device 420 and located above the platform 200. The visual positioning device 430 is used to position the workpiece 2 to achieve alignment between the measuring device 410 and the part to be measured on the predetermined test area. Before measuring the workpiece 2 by the measuring device 410, the positioning mark on the workpiece 2 is acquired by the visual positioning device 430, and then image processing and position calculation are performed. Then, the platform is moved by the drive mechanism of the platform 200 to adjust the position of the workpiece 2 supported on it, moving the part to be measured on the predetermined test area of ​​the workpiece 2 to below the measuring device 410. Finally, the part to be measured on the predetermined test area is measured by the measuring device 410. The positioning mark is usually located in the passive area on the workpiece 2 and is circular, annular, cross-shaped, L-shaped, or a combination thereof.

[0055] In some feasible implementations, the relative position of the measuring device 410 and the part to be tested on the predetermined testing area can be finely adjusted by motion compensation to achieve high-precision alignment between the measuring device 410 and the part to be tested. Optionally, the platform 200 also includes an adsorption mechanism and through holes (array), such as a vacuum adsorption mechanism, which uses vacuum negative pressure to adsorb and fix the part to be tested 2 carried on the platform through the through holes, so that the platform 200 can stably drive the part to be tested 2 to move.

[0056] In some of these embodiments, please refer to Figure 5The visual positioning device 430 is disposed on one side of the pressing device 420 along the second direction Y, for example, the visual positioning device 430 is disposed on the side of the pressing device 420 opposite to the second connecting plate 450. In other embodiments, please refer to Figure 6 Alternatively, the visual positioning device 430 can be placed on one side of the pressing device 420 along the first direction X to reduce the space occupied by the detection device along the second direction Y.

[0057] In some embodiments, please refer to Figure 7 The detection equipment also includes a fine-tuning mechanism 440, which is used to adjust the pose of the visual positioning device 430, wherein the pose includes position and angle. In this embodiment, the pose of the visual positioning device 430 is fine-tuned by the fine-tuning mechanism 440 so that the visual positioning device 430 is initially in a suitable measurement position and angle. For example, it is not necessary to adjust the initial height of the visual positioning device 430 through the lifting mechanism 300, reducing one vertical Z-direction movement and reducing the debugging time of the entire detection equipment.

[0058] In some embodiments, please refer to Figure 7 The detection equipment also includes a first mounting component 480 and a second mounting component 490, which are slidably connected. The first mounting component 480 is mounted on the pressing device 420, and the visual positioning device 430 is mounted on the second mounting component 490. The fine-tuning mechanism 440 includes a trapezoidal lead screw mechanism, which includes a nut 442, a lead screw 441, and a knob 443. The lead screw 441 is mounted on the first mounting component 480, the knob 443 is mounted on one end of the lead screw 441, and the nut 442 is mounted on the second mounting component 490. By rotating the knob 443, the lead screw 441 is rotated, which in turn causes the nut 442 to rise or fall. The nut 442 then causes the second mounting component 490 and the visual positioning device 430 mounted on it to rise or fall, thereby achieving fine-tuning of the height position of the visual positioning device 430.

[0059] In some embodiments, please refer to Figure 7 The first mounting component 480 is also provided with a locking block 444. After the position of the visual positioning device 430 is adjusted, the lead screw 441 can be locked by the locking block 444 to prevent the lead screw 441 from rotating and causing misoperation.

[0060] In addition, the first mounting member 480 is provided with a fourth slider 470, and the second mounting member 490 is provided with a fourth guide rail 460. The fourth slider 470 is slidably disposed on the fourth guide rail 460, thereby guiding the sliding of the visual positioning device 430 and preventing the visual positioning device 430 from rotating with the lead screw 441.

[0061] It is understood that in other embodiments of this application, the fine-tuning mechanism 440 may also be a screw and nut mechanism or a ball screw mechanism, etc., and is not limited to this one.

[0062] In some embodiments, please refer to Figure 2 and Figure 3 The testing equipment also includes a frame 100 and a lifting mechanism 300. The lifting mechanism 300 is installed on the frame 100. The measuring device 410 and the pressing device 420 are both installed on the motion output end of the lifting mechanism 300. The lifting mechanism 300 drives the measuring device 410 and the pressing device 420 to rise and fall, so as to adjust the height of the measuring device 410 and the pressing device 420.

[0063] It should be noted that when the testing equipment is used to detect the hole depth of each hole in the test component 2 (i.e., the circuit board), the actual hole depth of the test hole 21 is generally obtained by acquiring the three-dimensional information of the test hole 21. For each measuring device 410, its focal depth is a fixed value. When the difference in the actual hole depth of each test hole 21 exceeds the focal depth range, the same measuring device 410 cannot accurately measure the actual hole depth of multiple test holes 21, that is, the actual hole depth of some test holes 21 cannot be accurately measured. In this embodiment, by setting the lifting mechanism 300, the height of the measuring device 410 can be adjusted according to the actual hole depth of different test holes 21, so that when the measuring device 410 measures each test hole 21, the focal point of the measuring device 410 is located at the actual hole depth position of the test hole 21, so as to ensure measurement accuracy. It can be understood that in other embodiments of this application, the lifting mechanism 300 can also be used to adjust the height of the platform 200 to adjust the height of the test component 2. In this case, the height of the measuring device 410 can remain unchanged, and this is not a unique limitation.

[0064] In the above embodiments, please refer to Figure 3 The testing equipment also includes a second connecting plate 450, which is connected to the motion output end of the lifting mechanism 300. The lifting mechanism 300 can drive the second connecting plate 450 to move up and down. The measuring device 410 and the pressing device 420 are both installed on the second connecting plate 450. The second connecting plate 450 enables the connection between the measuring device 410 and the pressing device 420 at the motion output end of the lifting mechanism 300.

[0065] In some embodiments, please refer to Figure 2 and Figure 3The testing equipment also includes a lifting mechanism 300 and a visual positioning device 430. The lifting mechanism 300 is mounted on the frame 100. The measuring device 410, the pressing device 420, and the visual positioning device 430 are all mounted on the motion output end of the lifting mechanism 300. The visual positioning device 430 is used to position the horizontal position of the side part of the workpiece 2 to be tested. The lifting mechanism 300 drives the measuring device 410, the pressing device 420, and the visual positioning device 430 to rise and fall, thereby adjusting the height of the measuring device 410, the pressing device 420, and the visual positioning device 430.

[0066] In the above embodiments, please refer to Figure 3 The output end of the lifting mechanism 300 is connected to a second connecting plate 450. The pressing device 420 includes a driving member 422, a pressing structure 421, and a first connecting plate 424. The second connecting plate 450 is vertically arranged, and the first connecting plate 424 is horizontally arranged. The first connecting plate 424 and the second connecting plate 450 are vertically connected. The pressing structure 421 includes a top plate 4211, a pressure plate 4212, and a guide rod 4213 connected between the top plate 4211 and the pressure plate 4212. The top plate 4211, the first connecting plate 424, and the pressure plate 4212 are arranged at intervals along the vertical direction Z. The driving member 422 is connected to the top plate 4211 and the first connecting plate 424. The driving member 422 is used to drive the top plate 4211 to rise and fall, so as to drive the top plate 4211, the guide rod 4213, and the pressure plate 4212 to rise and fall. The measuring device 410 is installed on the first connecting plate 424 and located between the pressure plate 4212, the first connecting plate 424 and each guide rod 4213. The first mounting part 480 of the visual positioning device 430 is installed on the first connecting plate 424, so that the second connecting plate 450 can be driven to rise and fall by the lifting mechanism 300, thereby driving the pressing device 420, the measuring device 410 and the visual positioning device 430 to rise and fall.

[0067] Specifically, the first mounting component 480 is plate-shaped and is mounted on the side of the first connecting plate 424 opposite to the second connecting plate 450.

[0068] In some embodiments, please refer to Figure 2 The frame 100 includes a base 110, a raised piece 130 and a crossbeam 120. The platform 200 is located on the base 110. The raised piece 130 is located on the base 110 and surrounds the platform 200. The opposite ends of the crossbeam 120 are respectively installed on the raised piece 130. The lifting mechanism 300 is installed on the crossbeam 120.

[0069] In some embodiments, the detection device further includes a first moving mechanism 500 and a second moving mechanism 600. The second moving mechanism 600 outputs movement along a second direction Y, and the first moving mechanism 500 outputs movement along a first direction X. The first moving mechanism 500 is mounted on the second moving mechanism 600, and the platform 200 is mounted on the first moving mechanism 500. Furthermore, the detection device generally includes a controller. The first moving mechanism 500 and the second moving mechanism 600 are communicatively connected to the controller. The controller controls the first moving mechanism 500 and / or the second moving mechanism 600 to move the platform 200 along the first direction X and / or the second direction Y, thereby moving each predetermined test area in the test piece 2 sequentially below the measuring device 410, so that each predetermined test area can be detected by the measuring device 410. It is understood that in other embodiments of this application, the second moving mechanism 600 may also be mounted on the first moving mechanism 500, and the platform 200 may also be mounted on the second moving mechanism 600; this is not a unique limitation.

[0070] Optionally, the first moving mechanism 500 includes a first linear motor, which drives the platform 200 to move along a first direction X. The first linear motor directly pushes the mover along the second guide rail 810 via electromagnetic force. The first linear motor has the advantages of high speed, high acceleration, and high responsiveness, thereby improving the detection efficiency of the entire detection equipment. It is understood that in other embodiments of this application, the first moving mechanism 500 may also include a ball screw mechanism, a screw and nut mechanism, a belt transmission mechanism, a chain transmission mechanism, or a gear and rack mechanism, etc., and is not limited to these specific mechanisms.

[0071] The second moving mechanism 600 includes a second linear motor, which drives the first moving mechanism 500 to move along the second direction Y. The second linear motor directly pushes the mover along the first guide rail 710 via electromagnetic force. The second linear motor has the advantages of high speed, high acceleration, and high responsiveness, thereby improving the detection efficiency of the entire detection equipment. It is understood that in other embodiments of this application, the second moving mechanism 600 may also include a ball screw mechanism, a screw and nut mechanism, a belt transmission mechanism, a chain transmission mechanism, or a gear and rack mechanism, etc., and is not limited to these specific mechanisms.

[0072] In some embodiments, please refer to Figure 9 and Figure 10The testing equipment also includes a first guide mechanism 700, a second guide mechanism 800, and a mounting base 1100. The mounting base 1100 is connected to the output end of the second moving mechanism 600, and the first moving mechanism 500 is mounted on the mounting base 1100. The first guide mechanism 700 is connected between the base 110 and the mounting base 1100, and is used to guide the mounting base 1100 and the first moving mechanism 500 to move along the second direction Y. The second guide mechanism 800 is connected between the mounting base 1100 and the platform 200, and is used to guide the platform 200 and the workpiece 2 under test to move along the first direction X. The arrangement of the first guide mechanism 700 and the second guide mechanism 800 ensures the smoothness of movement and the accuracy of linear movement of the platform 200 and the workpiece 2 under test along the first direction X and the second direction Y. Furthermore, the mounting base 1100 provides support for the first moving mechanism 500, allowing it to have a larger range of movement along the first direction X, thereby enabling hole depth measurement of a larger area of ​​the workpiece 2 under test.

[0073] For some specific embodiments, please refer to Figure 9 and Figure 10 The first guide mechanism 700 includes at least two first guide rails 710 and a plurality of first sliders 720. Each first guide rail 710 is respectively mounted on the base 110. Each first guide rail 710 is spaced apart along the first direction X and extends along the second direction Y. At least two first sliders 720 are slidably provided for each first guide rail 710. The at least two first sliders 720 are spaced apart along the extension direction of the first guide rail 710. Each first slider 720 is connected to a different position of the mounting base 1100 to realize the sliding guidance of the mounting base 1100.

[0074] In some embodiments, please refer to Figure 10 The second guide mechanism 800 includes at least two second guide rails 810 and a plurality of second sliders (not shown). Each second guide rail 810 is mounted on the mounting base 1100. Each second guide rail 810 is spaced apart along the second direction Y and extends along the first direction X. At least two second sliders are slidably provided for each second guide rail 810. The at least two second sliders are spaced apart along the extension direction of the second guide rail 810. Each second slider is connected to a different position on the platform 200 to achieve sliding guidance of the platform 200.

[0075] In some embodiments, please refer to Figure 2The platform 200 has a bearing surface 210 for supporting the test piece 2. The platform 200 also has multiple adsorption holes 220, one end of which penetrates the bearing surface 210, and the other end of which is connected to a vacuum device. The adsorption holes 220 are used to fix the test piece 2 onto the platform 200. When assembling the test piece 2, it is first placed on the bearing surface 210 of the platform 200 with its second side facing upwards, and its position is fixed. Then, the vacuum device is activated to evacuate each adsorption hole 220, creating a negative pressure within each hole. This tightly adsorbs the first side 22 of the test piece 2 onto the bearing surface 210 of the platform 200. This not only ensures the secure installation of the test piece 2 on the platform 200 and the stability of its movement, thus guaranteeing measurement accuracy, but also eliminates the need for mounting and fitting structures on the test piece 2, simplifying its installation. It is understood that in other embodiments of this application, the test piece 2 can also be clamped on the platform 200 by a clamping fixture or other means, which is not the only limitation here.

[0076] In some embodiments, please refer to Figure 2 The adsorption holes 220 are distributed in a matrix along the first direction X and the second direction Y on the platform 200 to ensure that the test piece 2 is subjected to uniform force at all points and to ensure the stability of the test piece 2 on the platform 200.

[0077] In some embodiments, please refer to Figure 8 The lifting mechanism 300 includes a ball screw mechanism, which has advantages such as high efficiency, high precision, and high rigidity. This not only ensures high lifting accuracy of the measuring device 410, improving measurement precision, but also ensures smooth lifting of the measuring device 410, reducing shaking caused by lifting and thus minimizing damage to the internal structure of the measuring device 410. It is understood that in other embodiments of this application, the lifting mechanism 300 may also include a linear motor, a screw and nut mechanism, a gear and rack mechanism, a belt drive mechanism, or a chain drive mechanism, etc., and is not limited to any single one.

[0078] In some embodiments, please refer to Figure 2 and Figure 8 The crossbeam 120 is also provided with a third guide mechanism 900, which includes a third guide rail 910 and a third slider 920. The third guide rail 910 is installed on the crossbeam 120 and extends in the vertical direction Z. The third slider 920 is installed on the measuring device 410 and slides on the third guide rail 910, thereby ensuring the smooth sliding of the measuring device 410 and reducing the shaking of the measuring device 410.

[0079] Optionally, each measuring device 410 is provided with two third guide rails 910, which are spaced apart along the first direction X. One or more third sliders 920 are slidably provided on each third guide rail 910, and the measuring device 410 is respectively mounted on each third slider 920.

[0080] In some embodiments, please refer to Figure 8 The crossbeam 120 is also equipped with a limiting structure 1000, which is used to limit the lifting stroke of the measuring device 410.

[0081] Specifically, the limiting structure 1000 includes a first baffle 1001 and a second baffle 1002. The first baffle 1001 and the second baffle 1002 are respectively disposed on the crossbeam 120 and are spaced apart along the vertical direction Z. The first baffle 1001 is used to restrict the measuring device 410 from moving upward, and the second baffle 1002 is used to restrict the measuring device 410 from moving downward.

[0082] In some embodiments, please refer to Figure 1 This testing equipment is primarily used to detect the depth of back-drilled holes in circuit boards. Specifically, the back-drilled holes are drilled from the second surface 23 of the circuit board to a preset depth. During assembly, the circuit board is mounted on the platform 200 with the second surface 23 facing upwards. The measuring device 410 is located above the second surface 23 of the circuit board, and the actual depth of the back-drilled holes can be directly measured from the second surface 23 of the circuit board using the measuring device 410. Specifically, a first distance D1 from the measuring device 410 to the second surface 23 of the circuit board can be measured first, and then a second distance D2 from the measuring device 410 to the back-drilled hole can be measured. The actual depth of the back-drilled hole is obtained by subtracting the first distance D1 from the second distance D2. It is understood that in other embodiments of this application, this testing equipment can also be used to detect the depth of other holes in the circuit board, such as the depth of blind vias, and is not limited to this specific application.

[0083] In some embodiments, the measuring device 410 is used to transmit and receive infrared light to measure the depth of each hole 21 to be measured based on the interference signal of the infrared light. Specifically, the measuring device 410 is a measuring device 410 made by combining the principles of spectral confocalization and Michelson interferometry. Its specific structure and principle will be described in detail in another patent of the applicant and will not be described in detail here. In this embodiment, by using the above-mentioned measuring device 410, the measurement accuracy of the actual hole depth of the back drilled hole can be improved. It is understood that in other embodiments of this application, the measuring device 410 may also be a measuring device 410 that detects the depth of the back drilled hole by emitting light into the back drilled hole, such as a spectral confocalization instrument, a 3D camera, a telecentric lens, a white light interferometer, a laser rangefinder, a spectral confocal displacement sensor, and a displacement sensor, etc., and is not limited to these here.

[0084] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A detection device, characterized by include: Platform, the platform being used to carry the device under test; A pressing device is located above the platform. The pressing device includes a pressing member with a central opening. The pressing member is used to press against the side of the test piece facing away from the platform and expose a predetermined test area. A measuring device is located above the platform and is used to measure the predetermined test area of ​​the test piece.

2. The detection device of claim 1, wherein, The pressing device includes a driving member and a pressing structure. The pressing structure is connected to the driving member, and the driving member is used to drive the pressing structure to move in a predetermined direction.

3. The detection device of claim 2, wherein, The pressing member is detachably installed on the pressing structure, and the pressing member is used to abut against one side of the test piece that protrudes from the pressing structure; And / or, the pressure member is made of a flexible material.

4. The detection device of claim 3, wherein, The measuring device is located inside the pressure structure. The measuring device includes a measuring head, which is configured to align with the central opening of the pressure member along an optical axis to measure the predetermined area to be measured.

5. The detection device of claim 3, wherein, The pressing device further includes a first connecting plate. The pressing structure includes a top plate, a pressure plate, and a guide rod disposed between the top plate and the pressure plate and passing through the first connecting plate. The top plate, the first connecting plate, and the pressure plate are arranged in sequence at intervals. The driving member connects the top plate and the first connecting plate. The driving member is used to drive the top plate to rise and fall, so as to drive the top plate, the guide rod, and the pressure plate to rise and fall.

6. The detection device of claim 5, wherein, The pressure plate includes a through opening, and the pressing member is configured to be detachably connected to the pressure plate along the circumferential direction of the through opening to form a central opening of the pressing member; the pressing member is used to abut against one side of the test piece protruding from the main surface of the pressure plate facing the platform.

7. The detection device of claim 5, wherein, The measuring device is connected to the first connecting plate, and the measuring device is located within the space formed by the first connecting plate, the pressure plate, and each of the guide rods.

8. The detection device of claim 2, wherein, The pressure-reducing device also includes a pressure regulating valve, which is pneumatically connected to the drive component. The pressure regulating valve is used to adjust the air pressure of the drive component.

9. The detection device according to any one of claims 1 to 8, characterized in that The testing equipment also includes a visual positioning device, which is installed on one side of the pressing device and located above the platform. The visual positioning device is used to locate the position of the test piece so as to achieve alignment between the measuring device and the test part on the predetermined test area.

10. The detection device of claim 9, wherein, The detection equipment also includes a fine-tuning mechanism for adjusting the pose of the visual positioning device.

11. The detection device of claim 10, wherein, The detection equipment further includes a first mounting component and a second mounting component, which are slidably connected. The first mounting component is mounted on the pressing device, and the visual positioning device is mounted on the second mounting component. The fine-tuning mechanism includes a trapezoidal lead screw mechanism, which includes a nut, a lead screw, and a knob. The lead screw is mounted on the first mounting component, the knob is mounted on one end of the lead screw, and the nut is mounted on the second mounting component.

12. The detection device according to any one of claims 1 to 8, characterized in that The detection device further comprises a rack and a lifting mechanism, the lifting mechanism is installed on the rack, and the measuring device and the pressing device are both installed on the motion output end of the lifting mechanism.

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