A detection device for a gas delivery system

Abstract

The utility model provides a kind of detection device for air supply system, comprising: workbench includes support piece and bearing mesa, support piece is fixed in the below of bearing mesa and is used to support bearing mesa;Detection mechanism includes the sampler for collecting the gas that fan filter unit of air supply system exports and particle detector, the gas sampling output port of sampler and the gas detection input port of particle detector are communicated by gas pipeline, and the particle detector for detecting the gas from gas pipeline is set on bearing mesa;The top of telescopic mechanism with workbench detachably connected is equipped with the first connecting portion with opposite first connecting end and second connecting end, the first connecting end is connected with the top of telescopic mechanism, the second connecting end is detachably connected with sampler, so that sampler can move along the telescopic direction of telescopic mechanism, avoid artificial control the height of sampler, save manpower cost while improving detection result accuracy.

Description

Technical Field

[0001] This utility model belongs to the field of gas detection technology and relates to a detection device for a gas delivery system. Background Technology

[0002] In modern high-precision manufacturing industries, a clean environment is the core foundation for ensuring product quality and performance. For example, fields such as integrated circuit manufacturing, biopharmaceuticals, high-end medical devices, and precision machining all rely on cleanrooms of different grades for production. A cleanroom typically includes a clean space, a ceiling, and a raised floor. The ceiling has multiple air supply zones, each containing at least one air supply mechanism, usually an FFU (Fan Filter Unit). The FFU is used to deliver gas and filter particulate contaminants. During cleanroom use, regular leak checks of the FFUs on the ceiling are necessary to ensure all FFUs are functioning properly and to prevent particulate leakage due to HEPA filter damage, which could affect production quality. The FFU fan draws in air from the top, filters it through the HEPA filter, and then delivers clean air at a uniform speed, while simultaneously providing static pressure to maintain a positive pressure relative to the outside environment. Therefore, FFU leak testing involves slowly scanning the entire filter surface and the area between the filter and its frame directly below the FFU using a sampling head.

[0003] Currently, FFU leak detection operations employ a two-person collaborative work mode: one person operates the particle counter, while the other holds and suspends the sampling rod to maintain a constant distance between the sampling head on the rod and the FFU outlet. However, in this mode, the movement of the operators and muscle fatigue caused by holding the sampling rod for extended periods inevitably lead to vibration of the sampling rod. This artificially introduced mechanical vibration interferes with the sampling stability of the sampling head, thereby reducing the accuracy and reliability of the leak detection results. Utility Model Content

[0004] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a detection device for a gas delivery system, which solves the problem of low accuracy of detection results caused by high labor costs and poor stability of manual operation in the prior art.

[0005] To achieve the above and other related objectives, this utility model provides a detection device for a gas delivery system, comprising:

[0006] A workbench includes a support member and a support surface, wherein the support member is fixed below the support surface and is used to support the support surface;

[0007] The detection mechanism includes a sampler and a particle detector. The sampler is used to collect the gas output from the fan filter unit of the gas supply system. The gas sampling output port of the sampler and the gas detection input port of the particle detector are connected through a gas pipeline. The particle detector is set on the support platform and is used to detect the gas from the gas pipeline.

[0008] A telescopic mechanism is detachably connected to the worktable. The top of the telescopic mechanism is provided with a first connecting part having a first connecting end and a second connecting end opposite to each other. The first connecting end is connected to the top of the telescopic mechanism, and the second connecting end is detachably connected to the sampler, so that the sampler can move along the telescopic direction of the telescopic mechanism.

[0009] Preferably, the second connection end is provided with a snap-fit ​​structure that is adapted to the bottom of the sampler and snaps into the sampler.

[0010] Preferably, the bottom of the telescopic mechanism is further provided with a driving component for driving the telescopic mechanism to move in a plane perpendicular to the telescopic direction of the telescopic mechanism.

[0011] Preferably, the detection device further includes an electrical controller disposed on the support platform, electrically connected to the drive component, for controlling the drive component.

[0012] Preferably, the second connection end is provided with a distance indicator structure, which is used to indicate the distance between the sampler and the fan filter unit in the vertical direction.

[0013] Preferably, the distance indicating structure includes a distance measuring element for measuring the distance between the distance measuring element and the fan filter unit in the vertical direction.

[0014] Preferably, the detection device further includes a display disposed on the support platform, electrically connected to the distance measuring element, for displaying the measurement value of the distance measuring element.

[0015] Preferably, the telescopic mechanism has a pipe receiving cavity adapted to the gas pipe, and the gas pipe is disposed inside the pipe receiving cavity.

[0016] Preferably, the telescopic mechanism includes an inner tube, an outer tube, a plurality of toothed grooves on the outer wall of the inner tube, a gear through hole, a limiting through hole, a gear, and a limiting block on the outer tube. The outer tube is sleeved on the outside of the inner tube. The plurality of toothed grooves are spaced apart along the central axis of the inner tube. Part of the teeth of the gear penetrates the gear through hole and meshes with the toothed groove. The limiting block penetrates the limiting through hole and is adapted to the toothed groove. The limiting block can move radially along the outer tube.

[0017] Preferably, the telescopic mechanism includes an inner rod and an outer rod that are sleeved together. The outer wall of the inner rod is provided with a limiting protrusion, and the inner wall of the outer rod is provided with an L-shaped guide groove that is adapted to the limiting protrusion. The L-shaped guide groove includes a sliding groove and a locking groove. The extension direction of the sliding groove is the same as the extension direction of the telescopic mechanism, and the extension direction of the locking groove is perpendicular to the extension direction of the telescopic mechanism.

[0018] As described above, the detection device for a gas delivery system provided by this utility model has the following beneficial effects: by setting a telescopic mechanism that can be detachably connected to the worktable, the top of the telescopic mechanism is provided with a first connecting part having a first connecting end and a second connecting end opposite to each other. The first connecting end is connected to the top of the telescopic mechanism, and the second connecting end is detachably connected to the sampler in the detection device located on the worktable, so that the sampler can move along the telescopic direction of the telescopic mechanism, avoiding manual control of the height of the sampler, saving labor costs, improving the accuracy of the detection results, and occupying little space and easy to store. Attached Figure Description

[0019] Figure 1 The diagram shown is a structural schematic of a detection device for an air supply system according to this utility model.

[0020] Explanation of reference numerals in the attached figures

[0021] 11 Support components

[0022] 12 Supporting tabletop

[0023] 13 Pulleys

[0024] 14 handles

[0025] 15 First railing

[0026] 16 Second railing

[0027] 17 Fixed structure

[0028] 21 Sampler

[0029] 22 Particle Detector

[0030] 23 Gas sampling output port

[0031] 24 Gas detection input port

[0032] 25 Gas Piping

[0033] 26 Handles

[0034] 27 Display Interface

[0035] 30 Telescopic mechanism

[0036] 31 Top of the telescopic mechanism

[0037] 32. Bottom of the telescopic mechanism

[0038] 33 Limiting ring

[0039] 40 First connecting part

[0040] 41 First connection end

[0041] 42 Second connection end Detailed Implementation

[0042] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0043] It should be emphasized that the term "including / comprises" as used herein refers to the presence of a feature, whole, step, or component, but does not exclude the presence or addition of one or more other features, wholes, steps, or components.

[0044] Features described and / or illustrated for one embodiment may be used in the same or similar manner in one or more other embodiments, combined with features in other embodiments, or substituted for features in other embodiments.

[0045] In the detailed description of the embodiments of this utility model, for ease of explanation, the schematic diagrams illustrating the device structure may be partially enlarged without adhering to the general scale, and the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. Furthermore, in actual manufacturing, the three-dimensional spatial dimensions of length, width, and depth should be included.

[0046] For ease of description, spatial relation terms such as “below,” “under,” “lower than,” “below,” “above,” and “upper” may be used herein to describe the relationship between one element or feature shown in the accompanying drawings and other elements or features. It will be understood that these spatial relation terms are intended to include directions other than those depicted in the drawings for devices in use or operation. Furthermore, when a layer is referred to as being “between” two layers, it may be the only layer between the two layers, or there may be one or more layers in between.

[0047] In the context of this application, the structure described above the first feature may include embodiments in which the first and second features are in direct contact, or embodiments in which additional features are formed between the first and second features, such that the first and second features may not be in direct contact.

[0048] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of the present invention. Therefore, the illustrations only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0049] This application provides a detection device for an air delivery system; please refer to the specific details. Figure 1 As shown, the detection device includes a workbench, a detection mechanism, and a telescopic mechanism 30. The workbench includes a support member 11 and a support platform 12. The support member 11 is fixed below the support platform 12 and supports it. The detection mechanism includes a sampler 21 and a particle detector 22. The sampler 21 collects the gas output from the fan filter unit of the gas supply system. The gas sampling output port 23 of the sampler 21 and the gas detection input port 24 of the particle detector 22 are connected through a gas pipeline 25. The particle detector 22 is mounted on the support platform 12 and detects the gas from the gas pipeline 25. The telescopic mechanism 30 is detachably connected to the workbench. The top 31 of the telescopic mechanism 30 has a first connecting portion 40 with opposing first connecting ends 41 and second connecting ends 42. The first connecting end 41 is connected to the top 31 of the telescopic mechanism 30, and the second connecting end 42 is detachably connected to the sampler 21, allowing the sampler 21 to move along the telescopic direction of the telescopic mechanism 30.

[0050] Specifically, the specific structure, material, and size of the support member 11 are set according to actual needs, and the material, shape, and area of ​​the bearing platform 12 are set according to actual needs. For example, the end of the support member 11 away from the bearing platform 12 is provided with a pulley 13, and the edge of the bearing platform 12 is provided with a handle 14. When the worktable needs to be moved, the inspector pushes the handle 14 to make the pulley 13 roll, thereby moving the worktable. The edge of the bearing platform 12 is also provided with a fence structure, which includes a first railing 15 and a second railing 16. One end of the first railing 15 is vertically fixed to the bearing platform 12, and the end of the first railing 15 away from the bearing platform 12 is connected to the second railing 16, which is set parallel to the bearing platform 12. The first railing 15 is fixed to the bearing platform 12 through the second railing 16. The two connecting ends of the handle 14 are respectively connected to the ends of the two adjacent first railings 15 away from the bearing platform 12.

[0051] Specifically, the model, size, material, and specific structure of the sampler 21 can be set according to actual needs. The sampler 21 also has a gas sampling inlet, the size and number of which can be set according to actual needs. The size of the gas sampling outlet 23 is adapted to the gas pipeline 25 and is sealed. The size and model of the particle detector 22 can be set according to actual needs (e.g., a particle counter). The particle detector 22 is provided with a handle 26, which is fixedly connected to the upper surface of the particle detector 22. The particle detector 22 also has a display interface 27 and a gas outlet. The display interface 27 is used to display the detection results, and the gas outlet is used to discharge the detected gas. The gas outlet is equipped with a removable particle filter screen to filter particles in the detected gas.

[0052] Specifically, this application embodiment does not specifically limit the connection and disassembly methods between the telescopic mechanism 30 and the worktable, or between the second connecting end 42 and the sampler 21. The specific structure, length, shape, and material of the telescopic mechanism 30 can be set according to actual needs. For example, the telescopic mechanism 30 can extend to a maximum height of 4 meters and has a retracted height of 1.5 meters. The telescopic mechanism 30 is made of aluminum alloy, which is lightweight. The second connecting end 42 is connected to the sampler 21 via magnetic attraction, and the telescopic mechanism 30 is connected to the worktable via snap-fit, which facilitates installation and disassembly. The telescopic mechanism 30 can also be used independently.

[0053] In this embodiment, a fixing structure 17 is provided on the edge of the workbench. The fixing structure 17 is provided with a locking mechanism. The locking mechanism is adapted to the part that contacts the telescopic mechanism 30 and is used to lock the telescopic mechanism 30. The locking part of the locking mechanism for locking the telescopic mechanism 30 can be the outer wall of the part of the telescopic mechanism 30 that the locking mechanism contacts (i.e., the fixing structure 17 is sleeved and connected to the telescopic mechanism 30), or the locking mechanism can lock a part of the outer wall of the telescopic mechanism 30 that it contacts (i.e., the fixing structure 17 is locked and connected to the telescopic mechanism 30). When the fixing structure 17 is sleeved and connected to the telescopic mechanism 30, a limiting ring 33 can be provided on the outside of the telescopic mechanism 30. The limiting ring 33 is sleeved and fixed to the telescopic mechanism 30, and the limiting distance does not exceed the connection distance. The limiting distance represents the distance between the limiting ring 33 and the bottom 32 of the telescopic mechanism 30 in the vertical direction. The connection distance represents the distance between the fixing structure 17 and the bottom of the workbench in the vertical direction.

[0054] In this embodiment of the application, the second connection end 42 is provided with a snap-fit ​​structure that is adapted to the bottom of the sampler 21 and snap-fits with the sampler 21.

[0055] Specifically, the construction, length, shape and material of the snap-fit ​​structure can be set according to actual needs. For example, the snap-fit ​​structure is a slot that is adapted to the bottom of the sampler 21.

[0056] In this embodiment of the application, the second connection end 42 is magnetically connected to the bottom of the sampler 21. Both the second connection end 42 and the bottom of the sampler 21 are made of ferromagnetic material, and the magnetic poles of the second connection end 42 and the bottom of the sampler 21 are opposite.

[0057] In this embodiment of the application, the bottom 32 of the telescopic mechanism 30 is further provided with a driving member for driving the telescopic mechanism 30 to move in a plane perpendicular to the telescopic direction of the telescopic mechanism 30.

[0058] Specifically, the specific structure, quantity, and material of the driving component can be set according to actual needs. The driving component is detachably connected to the telescopic mechanism 30, and the driving component can drive the telescopic mechanism 30 to move in any direction on a plane perpendicular to the telescopic direction of the telescopic mechanism 30.

[0059] In this embodiment of the application, the detection device further includes an electrical controller disposed on the support platform 12, which is electrically connected to the drive component and is used to control the drive component.

[0060] Specifically, the electrical controller is electrically connected to the drive component and can control the speed and direction of movement of the drive component. For example, during the detection process, the drive component drives the telescopic mechanism 30 to move at a speed of about 1.5 cm / s, and the movement path is back and forth along a straight line. During the leak detection process, if the particle detector 22 shows a non-zero characteristic reading, it indicates that there may be a leak. The sampler 21 can be stopped at the leak point and scanned continuously for 1 minute.

[0061] In this embodiment of the application, a distance indicator structure is provided on the second connection end 42. The distance indicator structure is used to indicate the distance between the sampler 21 and the fan filter unit in the vertical direction.

[0062] Specifically, the specific structure and material of the distance indicator structure can be set according to actual needs. For example, a caliper with a preset length can be used as the distance indicator structure. When the upper end of the caliper just touches the outer shell of the fan filter unit during the adjustment of the length of the telescopic mechanism 30 in the vertical direction, the distance between the sampler 21 and the fan filter unit is the target working distance, and the sampling test can begin.

[0063] In this embodiment of the application, the distance indication structure includes a distance measuring element, which is used to measure the distance between the distance measuring element and the fan filter unit in the vertical direction.

[0064] For example, the distance measuring device is an infrared rangefinder, which measures the distance from itself to the surface of the air outlet of the fan filter unit. When the measured value by the infrared rangefinder meets a preset threshold, the distance between the sampler 21 and the fan filter unit is indicated as the target working distance, and sampling testing can begin. For example, the infrared rangefinder and the sampler 21 are on the same plane perpendicular to the extension direction of the telescopic mechanism 30. The measured value by the infrared rangefinder is 4cm, meaning the distance between the sampler 21 and the surface of the fan filter unit is 4cm, which meets the preset threshold of 3-5cm, and sampling testing can begin.

[0065] In this embodiment of the application, the detection device further includes a display disposed on the support platform 12, which is electrically connected to the distance measuring element and is used to display the measurement value of the distance measuring element.

[0066] Specifically, the display is electrically connected to the distance measuring device, and can display the measured value of the distance measuring device in real time.

[0067] In this embodiment, the telescopic mechanism 30 has a pipe receiving cavity adapted to the gas pipe 25, and the gas pipe 25 is disposed inside the pipe receiving cavity.

[0068] Specifically, the telescopic mechanism 30 is provided with a first outlet and a second outlet respectively adapted to the two ends of the gas pipeline 25. The two ends of the gas pipeline 25, which is disposed inside the pipeline receiving cavity, are exposed at the first outlet and the second outlet respectively, and are connected to their respective gas sampling output port 23 or gas detection input port 24. For example, the two ends of the gas pipeline 25 include a first end and a second end. The first end is exposed at the first outlet and connected to the gas sampling output port 23, and the second end is exposed at the second outlet and connected to the gas detection input port 24.

[0069] In this embodiment, the telescopic mechanism 30 includes an inner tube, an outer tube, a plurality of toothed grooves on the outer wall of the inner tube, a gear through hole, a limiting through hole, a gear, and a limiting block on the outer tube. The outer tube is sleeved on the outside of the inner tube. The plurality of toothed grooves are spaced apart along the central axis of the inner tube. Part of the teeth of the gear penetrates the gear through hole and meshes with the toothed groove. The limiting block penetrates the limiting through hole and is adapted to the toothed groove. The limiting block can move along the radial direction of the outer tube.

[0070] Specifically, the inner and outer tubes are adapted to each other, and the materials of both can be set according to actual needs. The size, material, and shape of the gears and the limiting block can also be set according to actual needs. The shape and size of the multiple tooth grooves and the spacing between them are adapted to the teeth of the gears. The gears can be rotated manually or electrically. This application embodiment does not specifically limit the driving method of gear rotation. When the limiting block is inserted into the tooth groove, it limits the inner tube. When the limiting block moves away from the tooth groove, rotating the gear can drive the inner tube to move relative to the outer tube. When rotation is no longer needed, the limiting block can be moved back into the tooth groove. At this time, the length of the telescopic mechanism 30 is fixed. The length of the telescopic mechanism 30 is adjusted and fixed by the displacement of the limiting block. This not only simplifies the structure but also reduces manufacturing costs.

[0071] In this embodiment of the application, the telescopic mechanism 30 includes an inner rod and an outer rod that are sleeved together. The outer wall of the inner rod is provided with a limiting protrusion, and the inner wall of the outer rod is provided with an L-shaped guide groove that is adapted to the limiting protrusion. The L-shaped guide groove includes a sliding groove and a locking groove. The extension direction of the sliding groove is the same as the extension direction of the telescopic mechanism 30, and the extension direction of the locking groove is perpendicular to the extension direction of the telescopic mechanism 30.

[0072] Specifically, the number of locking slots can be one or more. For example, the L-shaped guide groove is provided with multiple locking slots that are perpendicular to the slide groove. The multiple locking slots are evenly spaced. When the limiting protrusion is located in the slide groove, the inner rod and the outer rod can slide relative to each other based on the action of external force, that is, the length of the telescopic mechanism 30 is adjustable. When the limiting protrusion is located in the locking slot, the length of the telescopic mechanism 30 is fixed.

[0073] In this embodiment, the outer walls of the inner rod and the outer rod may also be provided with indicator marks to indicate the radial movement direction of the inner rod relative to the outer rod when the length needs to be fixed or adjusted.

[0074] Specifically, the shape and color of the indicator marks in the embodiments of this application are not specifically limited.

[0075] Specifically, by detachably mounting the sampler 21 onto the telescopic mechanism 30, the height of the sampler 21 can be fixed simply by adjusting the length of the telescopic mechanism 30 before testing. During the testing process, there is no need for testing personnel to manually fix the height of the sampler 21, and one worker can carry out the operation. This not only saves labor costs but also avoids mechanical vibrations introduced by humans from interfering with the sampling stability of the sampler 21, thereby improving the accuracy and reliability of the leak detection results.

[0076] In summary, the present invention provides a detection device for a gas delivery system. By incorporating a telescopic mechanism detachably connected to a worktable carrying the detection device, the top of this telescopic mechanism has a first connecting portion with opposing first and second connecting ends. The first connecting end connects to the top of the telescopic mechanism, and the second connecting end is detachably connected to a sampler in the detection device. This allows the sampler to move along the telescopic direction of the mechanism, avoiding manual control of the sampler's height, saving labor costs, and improving the accuracy of the detection results. Therefore, the present invention effectively overcomes the various shortcomings of the prior art and has high industrial applicability.

[0077] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A detection device for a gas delivery system, characterized by, include: A workbench includes a support member and a support surface, wherein the support member is fixed below the support surface and is used to support the support surface; The detection mechanism includes a sampler and a particle detector. The sampler is used to collect the gas output from the fan filter unit of the gas supply system. The gas sampling output port of the sampler and the gas detection input port of the particle detector are connected through a gas pipeline. The particle detector is set on the support platform and is used to detect the gas from the gas pipeline. A telescopic mechanism is detachably connected to the worktable. The top of the telescopic mechanism is provided with a first connecting part having a first connecting end and a second connecting end opposite to each other. The first connecting end is connected to the top of the telescopic mechanism, and the second connecting end is detachably connected to the sampler, so that the sampler can move along the telescopic direction of the telescopic mechanism.

2. The detection device for a gas delivery system of claim 1, wherein: The second connection end is provided with a snap-fit ​​structure that is adapted to the bottom of the sampler and snaps into the sampler.

3. The detection device for a gas delivery system of claim 1, wherein: The bottom of the telescopic mechanism is also provided with a driving component for driving the telescopic mechanism to move in a plane perpendicular to the telescopic direction of the telescopic mechanism.

4. The detection device for a gas delivery system of claim 3, wherein: The detection device also includes an electrical controller disposed on the support platform, which is electrically connected to the drive component and is used to control the drive component.

5. The detection device for a gas delivery system of claim 1, wherein: The second connection end is provided with a distance indicator structure, which is used to indicate the distance between the sampler and the fan filter unit in the vertical direction.

6. The detection device for a gas delivery system of claim 5, wherein: The distance indication structure includes a distance measuring element for measuring the distance between the distance measuring element and the fan filter unit in the vertical direction.

7. The detection device for a gas delivery system of claim 6, wherein: The detection device also includes a display disposed on the support platform, electrically connected to the distance measuring element, for displaying the measurement value of the distance measuring element.

8. The detection device for a gas delivery system of claim 1, wherein: The telescopic mechanism has a pipe receiving cavity adapted to the gas pipeline, and the gas pipeline is located inside the pipe receiving cavity.

9. The detection device for a gas delivery system of claim 1, wherein: The telescopic mechanism includes an inner tube, an outer tube, multiple toothed grooves on the outer wall of the inner tube, a gear through hole, a limiting through hole, a gear, and a limiting block on the outer tube. The outer tube is sleeved on the outside of the inner tube. The multiple toothed grooves are spaced apart along the central axis of the inner tube. Part of the teeth of the gear penetrates the gear through hole and meshes with the toothed groove. The limiting block penetrates the limiting through hole and is adapted to the toothed groove. The limiting block can move radially along the outer tube.

10. The detection device for a gas delivery system of claim 1, wherein: The telescopic mechanism includes an inner rod and an outer rod that are sleeved together. The outer wall of the inner rod is provided with a limiting protrusion, and the inner wall of the outer rod is provided with an L-shaped guide groove that is adapted to the limiting protrusion. The L-shaped guide groove includes a sliding groove and a locking groove. The extension direction of the sliding groove is the same as the extension direction of the telescopic mechanism, and the extension direction of the locking groove is perpendicular to the extension direction of the telescopic mechanism.

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