An optical path imaging system

Abstract

The utility model belongs to optical technology field, concretely relates to a kind of optical path imaging system, including support frame, reflector, lighting assembly, imaging lens and camera, the reflector is installed inside support frame, the reflector has two oppositely arranged reflecting surfaces, respectively for receiving the reflected light of first target object and second target object;The lighting assembly is used to provide lighting for first target object and second target object, the imaging lens is arranged between reflector and camera, for receiving the light reflected by two reflecting surfaces, the light of first target object and second target object respectively after corresponding reflector reflection, through the same imaging lens synchronous imaging in the same focal plane of camera;The utility model can make first target object and second target object can be synchronous imaging in the same focal plane of camera by the same imaging lens, simplifies the design complexity of bidirectional target object imaging optical path, reduces the difficulty of processing manufacture and adjustment, reduces cost input.

Description

Technical Field

[0001] This utility model belongs to the field of optical technology, specifically relating to an optical path imaging system. Background Technology

[0002] Given the high precision requirements for chip bonding between wafers and substrates in the semiconductor industry, accurate alignment and positioning of the bonding points are essential to achieve optimal bonding quality. If there is a deviation between the wafer position and the chip solder joint position on the substrate, the bonding quality requirements can be compensated for by adjusting the wafer or substrate position.

[0003] In the semiconductor industry, optical vision systems are typically used to identify, align, and position wafer locations and chip solder joints to achieve high-quality soldering. However, conventional optical vision systems suffer from problems such as complex bidirectional target imaging optical path design, high manufacturing and assembly difficulty, high cost, and poor ability to identify and align wafer locations and chip solder joint locations on the substrate, thus failing to meet the demands for high-quality soldering.

[0004] Therefore, it is necessary to improve upon the shortcomings of existing technologies in order to overcome their deficiencies in practical applications. Utility Model Content

[0005] Based on the aforementioned shortcomings and deficiencies in the prior art, one of the objectives of this utility model is to at least solve one or more of the aforementioned problems in the prior art. In other words, one of the objectives of this utility model is to provide an optical path imaging system that meets one or more of the aforementioned requirements.

[0006] To achieve the above-mentioned objectives, this utility model adopts the following technical solution:

[0007] This invention provides an optical path imaging system, including a support frame, a reflector, an illumination assembly, an imaging lens, and a camera. The reflector is installed inside the support frame and has two opposing reflective surfaces for receiving reflected light from a first target object and a second target object, respectively. The illumination assembly provides illumination for the first and second target objects. The imaging lens is positioned between the reflector and the camera to receive light reflected from the two reflective surfaces. The light from the first and second target objects, after being reflected by their respective reflectors, is simultaneously imaged onto the same focal plane of the camera through the same imaging lens.

[0008] As a preferred embodiment, the lighting assembly includes a ring light and / or a coaxial lighting source, wherein two ring lights are configured, one corresponding to the first target and the other to the second target; and the coaxial lighting source is disposed on the imaging lens.

[0009] As a preferred embodiment, the reflector is fixed to the support frame and positioned between the two ring lights to fix the relative positions of the two reflective surfaces.

[0010] As a preferred embodiment, the imaging lens is fixedly connected to the support frame, and the imaging lens, the reflector, and the camera are coaxially arranged.

[0011] As a preferred embodiment, the working distances of the first target and the second target to the corresponding reflective surface are equal.

[0012] As a preferred embodiment, the two reflecting surfaces of the reflector are arranged perpendicularly, and the angles between the two reflecting surfaces and the axis of the imaging lens are 45°.

[0013] As a preferred embodiment, the camera is used to acquire images of the first target and the second target on the same focal plane.

[0014] Compared with the prior art, the advantages of this utility model are:

[0015] This invention provides an optical path imaging system that, through a unique dual-reflective surface design, enables the first and second target objects to be synchronously imaged onto the same focal plane of the camera via the same imaging lens. This greatly simplifies the design complexity of the optical path for bidirectional target object imaging, reduces the difficulty of processing, manufacturing, and assembly, and significantly reduces cost.

[0016] This invention provides an optical path imaging system that significantly improves the ability to align and identify the positions of wafers and chip solder joints on substrates, meeting the requirements of high-quality soldering and providing an efficient and reliable solution for precise alignment and positioning in the semiconductor industry. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other embodiments can be obtained from these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the split structure of an optical path imaging system according to an embodiment of the present invention;

[0019] Figure 2 This is a schematic diagram of the connection structure between the support frame and the reflector in an embodiment of this utility model;

[0020] Figure 3 This is a schematic diagram of the optical path transmission route according to an embodiment of the present invention;

[0021] In the figure: 1 support frame, 2 reflector, 21 reflective surface, 3 lighting assembly, 31 first ring light, 32 second ring light, 33 coaxial lighting source, 4 imaging lens, 5 camera, 61 first target object, 62 second target object. Detailed Implementation

[0022] To more clearly illustrate the embodiments of this application, the specific implementation methods of this application will be described below with reference to the accompanying drawings. Obviously, the drawings described below are merely some embodiments of this application. For those skilled in the art, other drawings and other implementation methods can be obtained based on these drawings without any creative effort.

[0023] In the description of the embodiments of this application, the terms "upper," "lower," "front," "rear," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first," "second," etc., are only used for distinction in description and have no special meaning.

[0024] According to some embodiments of this application, please refer to Figures 1 to 3 As shown, an optical path imaging system is provided, including a support frame 1, a reflector 2, an illumination assembly 3, an imaging lens 4, and a camera 5. The reflector 2 is installed inside the support frame 1. The reflector 2 has two opposing reflective surfaces 21, which are used to receive reflected light from a first target object 61 and a second target object 62, respectively. The illumination assembly 3 is used to provide illumination for the first target object 61 and the second target object 62. The imaging lens 4 is disposed between the reflector 3 and the camera 5 and is used to receive light reflected by the two reflective surfaces 21. The light from the first target object 61 and the second target object 62 is reflected by the corresponding reflector 2 and then synchronously imaged onto the same focal plane of the camera 5 through the same imaging lens.

[0025] According to some embodiments of this application, the support frame 1 serves as the structural foundation of the entire optical path system. It not only provides a stable mounting platform for the reflector 2, illumination component 3, imaging lens 4, and camera 5, but also ensures the relative positional accuracy between the components, further improving the overall performance of the system.

[0026] According to some embodiments of this application, the reflector 2 is manufactured using high-precision processing technology. Its two opposing reflective surfaces 21 have extremely high flatness and reflectivity, which can effectively reduce light scattering and loss, and improve the clarity and contrast of the image. The fixed reflector 2 ensures that it will not undergo slight displacement due to vibration or temperature changes during use, thereby guaranteeing the stability of the image.

[0027] According to some embodiments of this application, the lighting component 3 includes a ring light and / or a coaxial lighting source 33. Two ring lights are configured, respectively corresponding to the first target object 61 and the second target object 62. The coaxial lighting source 33 is disposed on the imaging lens 4. The reflector 2 is fixed on the support frame 1 and located between the two ring lights so that the relative positions of the two reflective surfaces are fixed.

[0028] Specifically, the lighting component 3 can be configured as ring lights 31 and 32 respectively, corresponding to the first target object 61 and the second target object 62, providing uniform and sufficient illumination to clearly reveal the details on the surface of the target object. The lighting component 3 can also be configured as a coaxial lighting source 33, which illuminates the target object in the opposite direction along the light path to provide illumination.

[0029] According to some embodiments of this application, the imaging lens 4 is fixedly connected to the support frame 1, and the imaging lens 4, the reflector 2, and the camera 5 are coaxially arranged. This coaxial arrangement can minimize the offset and aberration of light during transmission, ensuring the clarity and consistency of the images of the two targets. The coaxial arrangement also simplifies the debugging and calibration process of the optical path system, improving the stability and reliability of the system.

[0030] According to some embodiments of this application, the reflector 2 is installed inside the support frame 1, and the first target object 61 and the second target object 62 are respectively disposed on both sides of the reflector 2 and are arranged facing each other. This allows the light from the two target objects to be received by the reflector at the same time and to be imaged, thereby realizing synchronous imaging in the same optical path system. The facing arrangement further ensures the symmetry and balance of light transmission, which helps to improve the imaging quality.

[0031] Furthermore, the working distances from the first target 61 and the second target 62 to the corresponding reflective surface 21 are equal, which helps to ensure the consistency of the imaging size and position of the two targets on the focal plane of the camera 5, thereby improving the measurement accuracy and stability of the entire system.

[0032] Furthermore, the two reflecting surfaces 21 of the reflector 2 are arranged perpendicularly, and the angle between them and the axis of the imaging lens 4 is 45°, which enables the light to maintain minimal loss and maximum transmission efficiency during reflection, thereby optimizing the overall performance of the system.

[0033] According to some embodiments of this application, the camera 5, as the final imaging component of the system, directly affects the quality and effect of the imaging. When selecting the camera 5, key parameters such as resolution, sensitivity, and dynamic range were fully considered to ensure the acquisition of clear, accurate, and rich image information. The matching degree between the camera 5 and the imaging lens 4 was also carefully adjusted to ensure that their collaborative operation reaches its optimal state.

[0034] According to an embodiment of this application, the specific workflow of an optical path imaging system is as follows:

[0035] First, the illumination assembly 3 is activated, where ring lights 31 and 32 provide uniform illumination to the first target 61 and the second target 62, respectively, ensuring sufficient light on the target surfaces for subsequent imaging. Alternatively, a coaxial illumination source 33 can be used to illuminate the target objects in the opposite direction along the light path.

[0036] Subsequently, the light reflected by the first target object 61 and the second target object 62 is projected onto the two opposing reflective surfaces 21 of the reflector 2. Since the reflective surfaces 21 are vertically arranged and form a 45° angle with the axis of the imaging lens 4, the reflected light can be accurately and efficiently guided to the imaging lens 4.

[0037] Finally, after receiving the reflected light from the two reflective surfaces 21, the imaging lens 4 performs focusing processing so that the images of the first target object 61 and the second target object 62 can be presented synchronously and clearly on the same focal plane of the camera 5. The camera 5 then acquires the image data on this focal plane to complete the high-precision imaging of the bidirectional target object.

[0038] In the description of the embodiments of this application, unless otherwise expressly specified and limited, the technical terms such as "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in the embodiments of this application can be understood according to the specific circumstances.

[0039] The above description is only a detailed explanation of the preferred embodiments and principles of this application. For those skilled in the art, there may be changes in the specific implementation based on the ideas provided by this utility model, and these changes should also be considered within the scope of protection of this application.

Claims

1. An optical path imaging system, characterized in that, The device includes a support frame, a reflector, an illumination assembly, an imaging lens, and a camera. The reflector is installed inside the support frame and has two opposing reflective surfaces for receiving reflected light from a first target object and a second target object, respectively. The illumination assembly provides illumination for the first and second target objects. The imaging lens is positioned between the reflector and the camera to receive light reflected from the two reflective surfaces. The light from the first and second target objects, after being reflected by their respective reflectors, is simultaneously imaged onto the same focal plane of the camera through the same imaging lens.

2. The optical path imaging system according to claim 1, characterized in that, The lighting assembly includes a ring light and / or a coaxial lighting source. Two ring lights are configured, one for the first target and the other for the second target. The coaxial lighting source is located on the imaging lens.

3. The optical path imaging system according to claim 2, characterized in that, The reflector is fixed to the support frame and located between the two ring lights to fix the relative positions of the two reflective surfaces.

4. The optical path imaging system according to claim 1, characterized in that, The imaging lens is fixedly connected to the support frame, and the imaging lens, the reflector, and the camera are coaxially arranged.

5. The optical path imaging system according to claim 1, characterized in that, The working distances from the first target and the second target to their corresponding reflective surfaces are equal.

6. The optical path imaging system according to claim 1, characterized in that, The two reflective surfaces of the mirror are arranged perpendicularly, and the angles between the two reflective surfaces and the axis of the imaging lens are 45°.

7. The optical path imaging system according to claim 1, characterized in that, The camera is used to capture images of the first target and the second target on the same focal plane.

Images