A liquid supply assembly

Abstract

The utility model discloses a liquid supply assembly, including supply pump and drain valve, and the drain valve includes the valve flow channel, and the radial outside of liquid outlet is equipped with the annular first flat surface, and the radial outside of first liquid inlet is equipped with the annular second flat surface, and the first flat surface and the second flat surface are opposite and are formed to accommodate the sealing groove of annular sealing element, and the first flat surface and the second flat surface are opposite and extrude annular sealing element, the pump liquid outlet channel includes the circular table shape's first expanding diameter portion extending to the second flat surface, and the inner diameter of first expanding diameter portion is gradually expanded diameter setting from the one end away from the first flat surface to the one end close to the first flat surface. First expanding diameter portion is equivalent to a small buffer cavity, improves the stability of liquid, reduces the probability of liquid fluctuation and gas generation, for drain valve, first expanding diameter portion provides a more smooth, smaller disturbance inlet flow field for drain valve, so that liquid can flow into drain valve more evenly, gently.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a liquid supply component. Background Technology

[0002] In the chemical solution application process of semiconductor manufacturing equipment, in order to coat a predetermined amount of photoresist solution onto a semiconductor wafer each time, a chemical solution supply system as described in JP4265820B2 has been proposed. This patent's chemical solution supply system includes a chemical solution supply pump that draws the chemical solution contained in a chemical solution tank and coats the drawn-in chemical solution onto the semiconductor wafer each time in a predetermined amount. Specifically, the chemical solution supply pump has a diaphragm separating a pump chamber for filling the chemical solution from a working chamber for the flow of working gas. Air is supplied to the working chamber via a regulator, causing the diaphragm to deform towards the pump chamber side, thereby discharging the chemical solution. The chemical solution supply pump is connected to a vacuum source, and negative pressure is applied to the pump by the vacuum source to increase the volume of the pump chamber, thereby drawing in the chemical solution.

[0003] When coating semiconductor wafers, the amount of photoresist applied is subject to extremely strict requirements, especially to prevent the formation of air bubbles in the photoresist, as these bubbles severely affect dispensing and wafer quality. The supply pump's outlet and the discharge-side flow path components are controlled by a drain valve, and these components are typically arranged in a circuitous manner. During dispensing, the supply pump is prone to generating air bubbles due to violent collisions, affecting coating quality. Specifically, on the pump outlet side, especially in the area between the two clamping planes corresponding to the pump body and drain valve body, a compression seal is used. If the photoresist flow rate is too high, turbulence can easily occur, and violent collisions between the photoresist and the inner wall of the flow channel can easily generate air bubbles. These bubbles not only become trapped in the gap between the seal and the clamping planes but also escape with the photoresist, interfering with photoresist coating. Furthermore, the gap between the seal and the clamping planes itself can easily create dead zones where photoresist accumulates, wasting expensive photoresist.

[0004] Therefore, further improvements to the supply pump are still needed to further reduce the probability of bubbles being generated in the liquid due to violent collisions. Utility Model Content

[0005] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a liquid supply component that solves the problem that the liquid is prone to generating bubbles due to violent collisions when dispensing liquid in existing liquid supply components.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A liquid supply assembly includes a supply pump and a discharge valve. The supply pump has a variable-volume pump chamber, a pump inlet channel communicating with the pump chamber, and a pump outlet channel.

[0008] The drain valve includes a valve flow channel, and the valve flow channel has a first liquid inlet.

[0009] The pump outlet channel has a second inlet communicating with the pump chamber and an outlet configured to correspond to the first inlet of the drain valve.

[0010] The outlet has a first annular flat surface on its radial outer side, and the inlet has a second annular flat surface on its radial outer side. The first flat surface and the second flat surface are arranged opposite each other to form a sealing groove for accommodating the annular seal. The first flat surface and the second flat surface press the annular seal against each other.

[0011] The pump outlet channel includes a frustum-shaped first enlarged diameter portion extending toward the second flat surface, wherein the inner diameter of the first enlarged diameter portion is gradually increased from the end away from the first flat surface to the end closer to the first flat surface.

[0012] In this invention, the liquid supply assembly involves the liquid in the pump chamber being compressed by the reduced volume of the pump chamber, entering the pump outlet channel and flowing into the valve channel of the drain valve, where it is finally discharged to achieve quantitative coating on the wafer. During this process, the liquid first enters the pump outlet channel through the second inlet. As it approaches the outlet, the liquid's flow velocity decreases in the first expansion section, which gradually increases in cross-sectional area. The first expansion section acts as a small buffer chamber, improving the stability of the liquid and allowing it to flow slowly and steadily past the seal, reducing the likelihood of violent collisions with the second flat surface and decreasing the probability of liquid fluctuations and gas generation. For the drain valve, the first expansion section provides a smoother, less turbulent inlet flow field, allowing the liquid to flow into the drain valve more evenly and smoothly. This reduces water hammer and pressure fluctuations, extending the drain valve's service life. Furthermore, it reduces the impact force and turbulence experienced by the drain valve, significantly reducing local resistance losses when the liquid enters the valve, decreasing wear, maintaining the accuracy and reliability of its operation, and ensuring the overall efficiency of the liquid supply assembly.

[0013] Meanwhile, a sealing groove is formed between the outlet of the pump outlet channel and the first inlet of the valve flow channel through two flat surfaces. The annular seal is placed in the sealing groove to achieve effective sealing at the junction of the pump outlet channel and the valve flow channel. After the flat surface is squeezed, the contact area between the flat surface and the annular seal is larger, which can maintain the stability of the annular seal and ensure that the annular seal can maintain a reliable seal even under the supply pump pressure. Furthermore, since the first flat surface is located on the outer periphery of the first expansion section, the radial width of the first flat surface is shortened and sufficient to support the annular seal. The gap between the compressed annular seal and the inner edge of the first flat surface is reduced, thereby reducing any dead angles that may exist between the annular seal and the inner edge of the first flat surface and avoiding waste caused by residual liquid in dead angles.

[0014] Preferably, the valve flow channel includes a frustum-shaped second diameter expansion portion extending toward the first flat surface, wherein the inner diameter of the second diameter expansion portion is gradually increased from one end away from the second flat surface to one end closer to the second flat surface.

[0015] With this configuration, the inner diameter of the frustum-shaped second expansion section matches the inner diameter of the first expansion section. Similar to the principle of the first expansion section, the second flat surface is located on the outer periphery of the second expansion section. The radial width of the second flat surface is shortened and sufficient to support the annular seal. The gap between the compressed annular seal and the inner edge of the second flat surface is reduced to minimize any dead angles that may exist between the annular seal and the inner edge of the second flat surface, thus avoiding waste caused by residual liquid in the dead angles. Furthermore, the cross-sectional area of ​​the liquid flow channel from the pump outlet channel to the valve channel is continuous with no abrupt changes or very small abrupt changes, avoiding additional turbulence and energy loss caused by sudden contraction of the cross-section. Therefore, the coordinated operation of the first and second expansion sections not only reduces the dead angle area at the annular seal but also slows down and stabilizes the liquid to reduce the generation of bubbles. Moreover, after the liquid passes the annular seal, the liquid gradually increases its flow velocity as the inner diameter of the valve channel gradually narrows to reach the predetermined discharge rate, achieving high-precision and high-responsive flow control and balancing the contradictory requirements of shock resistance and precise control.

[0016] Preferably, a cylindrical first guide portion is provided at one end of the first diameter expansion portion near the first flat surface. The first guide portion and the first diameter expansion portion are smoothly connected by a first arc portion. The first guide portion extends along the central axis of the first diameter expansion portion, and the opening of the first guide portion toward the valve flow channel constitutes the liquid outlet.

[0017] With this configuration, the first guide section provides a sufficiently stable space for the slightly turbulent liquid that has passed through the first expansion section, corrects the liquid that diffuses outward along the first expansion section, and guides the liquid flow into the valve channel, avoiding direct collision between the liquid and the inner corner of the second flat surface. The first guide section and the first expansion section are smoothly transitioned through the first arc section, so that the streamlines smoothly change direction, completely avoiding flow separation, maintaining fluid flow attached to the wall, reducing local resistance loss, protecting shear-sensitive fluid, and reducing bubble generation.

[0018] Preferably, a cylindrical second guide portion is provided at one end of the second diameter expansion portion near the second flat surface. The second guide portion and the second diameter expansion portion are smoothly connected by a second arc portion. The second guide portion extends along the central axis of the second diameter expansion portion, and the opening of the second guide portion toward the pump outlet channel constitutes the first inlet.

[0019] With this configuration, the second guide section further stabilizes the liquid flowing out of the pump outlet channel. The equal-diameter second guide section helps the liquid form a relatively uniform circumferential velocity distribution, improving liquid stability. The subsequent second arc section smoothly turns the streamline, maintaining fluid adhesion to the wall surface. The second expansion section further narrows its diameter away from the second guide section, allowing the liquid to accelerate uniformly along the conical wall through the discharge valve, maintaining low turbulence and high stability throughout the process. This helps reduce local resistance loss, protect shear-sensitive fluids, and reduce bubble generation.

[0020] Preferably, the vertical length of the first diameter-expanding portion is greater than the vertical length of the second diameter-expanding portion.

[0021] With this configuration, the first expansion section is part of the pump outlet channel. After the liquid is squeezed from the pump chamber into the pump outlet channel, it is relatively unstable. The long and slowly expanding first expansion section can stabilize the liquid and prevent violent fluctuations that could generate bubbles. The liquid entering the second expansion section has already been stabilized by the first expansion section. Therefore, the second expansion section does not need to be too long, in order to reduce the volume of the entire liquid supply assembly.

[0022] Preferably, the annular seal is a sealing ring. The inner diameter of the sealing ring is such that, in the uncompressed state, the inner side of the sealing ring does not protrude beyond the inner wall of the outlet and the first inlet. The inner diameter of the sealing ring in the uncompressed state is L1, the inner diameter of the outlet is L2, and the inner diameter of the first inlet is L3, satisfying L1:L2 = 1.1-1.4 and L1:L3 = 1.1-1.4. This setting takes into account that the inner diameter of the sealing ring will appropriately decrease after being compressed and deformed. By controlling L1:L2 > 1.1 and L1:L3 > 1.1, the inner side of the compressed sealing ring will not protrude beyond the inner wall of the outlet and the first inlet, thus interfering with the liquid flow channel. By controlling L1:L2 < 1.4 and L1:L3 < 1.4, the radial distance between the inner side of the compressed sealing ring and the outlet and the first inlet is minimized, reducing the flow dead zone and the amount of liquid remaining in the sealing ring.

[0023] Preferably, the pump outlet channel further includes a vertical equal-diameter section and a horizontal section. The end of the horizontal section away from the vertical equal-diameter section forms a second inlet. The second inlet is located at the bottom of the pump chamber. The vertical equal-diameter section connects the first expansion section and the horizontal section. The inner diameter of the vertical equal-diameter section is equal to the minimum inner diameter of the first expansion section.

[0024] In this configuration, the pump outlet channel is connected to the pump chamber. The liquid in the pump chamber enters the transverse section from the second inlet, then turns and enters the vertical equal-diameter section, and then enters the first expansion section. This is because the vertical equal-diameter section and the first expansion section are located inside the pump casing of the supply pump. The transverse section is needed to connect the pump chamber and the vertical equal-diameter section. The liquid enters the small-volume pump outlet channel from the large-volume pump chamber. When the liquid flows from the transverse section to the vertical equal-diameter section, it turns 90°. The turning radius of the liquid on the side closer to the pump chamber wall and the side farther away from the pump chamber wall are different, resulting in uneven flow velocity distribution on both sides of the liquid. After the liquid flows into the vertical equal-diameter section, the liquid flows from bottom to top with equal diameter, which alleviates the uneven flow velocity on both sides of the liquid and promotes the liquid to enter a more stable state. Then, the liquid with stable flow velocity enters the first expansion section. The cross-section enlargement slows down the liquid flow velocity, and the liquid enters a more stable state.

[0025] Preferably, the vertical length of the vertical equal-diameter section is H1, and the vertical length of the first expansion section is H2, satisfying H1:H2 = 2.1-4.5. Based on the function of the vertical equal-diameter section, when the pump chamber pressure is high, the vertical length of the vertical equal-diameter section is greater than the vertical length of the first expansion section, and the length ratio is controlled between 2.1 and 4.5. This allows the liquid to achieve a symmetrical flow velocity distribution before entering the first expansion section. If the length ratio is less than 2.1, the liquid enters the first expansion section before reaching a relatively stable state, which can easily cause the liquid to deflect circumferentially under the action of the increased inner diameter of the first expansion section, resulting in fluctuations, which is not conducive to liquid stability and bubble suppression. If the length ratio is greater than 4.5, the vertical length of the first expansion section is insufficient, and it cannot effectively realize the function of stabilizing the liquid in the long and slowly expanding first expansion section, which is not conducive to the stability of the liquid from the pump outlet channel to the valve flow channel.

[0026] Preferably, the inner diameter of the vertical equal-diameter section is L4, and the maximum inner diameter of the first expanded diameter section is L2, satisfying L2:L4 = 1.1-3.5. Since both the vertical equal-diameter section and the first expanded diameter section are located inside the pump casing of the supply pump, if the ratio of their inner diameters is too large, the thickness of the pump casing at the corresponding position of the first expanded diameter section will be too thin, resulting in insufficient structural strength of the pump casing. Furthermore, if the inner diameter of the vertical equal-diameter section is too small, it cannot achieve a uniform flow effect on the liquid inside, which is not conducive to suppressing the generation of bubbles. If the ratio of their inner diameters is too small, the cross-sectional area change of the first expanded diameter section is not significant, and it cannot effectively reduce the liquid flow rate and play a buffering role. Therefore, the ratio of their inner diameters is controlled between 1.1 and 3.5.

[0027] Preferably, the inner diameter of the transverse section is larger than the inner diameter of the vertical equal-diameter section, making the inlet of the liquid in the pump chamber into the pump outlet channel wider, appropriately reducing the speed and turbulence of the liquid entering the pump outlet channel, and reducing the probability of bubble formation; the connection between the transverse section and the vertical equal-diameter section has a rounded corner, and the inner wall of the rounded corner is concave relative to the inner wall of the vertical equal-diameter section to accommodate part of the liquid turning from the transverse section to the vertical equal-diameter section, and guide the liquid to turn along the inner wall of the rounded corner, flowing smoothly into the vertical equal-diameter section.

[0028] Preferably, the supply pump includes a first pump housing, a second pump housing, and a diaphragm that is clamped and sealed between the first pump housing and the second pump housing. The diaphragm is elastically deformable to change the volume of the pump chamber.

[0029] The first pump housing is recessed towards the inner wall of the diaphragm, and the inner wall of the first pump housing towards the diaphragm forms the pump chamber with the diaphragm. The second liquid inlet is formed on the inner wall of the first pump housing towards the diaphragm, and a notch extending from the second liquid inlet towards the center of the first pump housing is provided on the radially outer side of the second liquid inlet. The function of the notch is to further increase the inlet area when the liquid enters the pump outlet channel from the pump chamber, avoid the liquid colliding with each other and forming excessive turbulence, reduce the probability of bubble generation, and guide the liquid in the pump chamber to flow towards the second liquid inlet to improve the liquid discharge efficiency.

[0030] Preferably, the drain valve includes a first L-shaped flow channel, a second L-shaped flow channel, and an actuator. One end of the first L-shaped flow channel is connected to the valve flow channel, and the other end is connected to the second L-shaped flow channel via the actuator. The function of the first L-shaped flow channel and the second L-shaped flow channel is to increase the flow rate of the liquid and reduce the unit flow rate, thereby improving the liquid discharge efficiency and liquid discharge accuracy.

[0031] Preferably, the inner wall of the first pump casing is provided with an annular groove surrounding the center of the first pump casing, and a communicating groove is provided between the notch groove and the annular groove. The communicating groove is partially placed in the notch groove and is recessed relative to the inner wall of the notch groove.

[0032] In this configuration, the annular groove serves to prevent the diaphragm from completely adhering to the inner wall of the first pump casing, thus preventing it from being pulled apart and affecting the response speed. However, liquid may remain in the annular groove. Therefore, a connecting groove is provided so that the liquid in the annular groove can flow along the connecting groove to the notch groove, and then flow into the pump outlet channel.

[0033] In summary, compared with the prior art, the present invention has at least the following beneficial effects:

[0034] In this invention, the liquid supply assembly involves the liquid in the pump chamber being compressed by the reduced volume of the pump chamber, entering the pump outlet channel and flowing into the valve channel of the drain valve, where it is finally discharged to achieve quantitative coating on the wafer. During this process, the liquid first enters the pump outlet channel through the second inlet. As it approaches the outlet, the liquid's flow velocity decreases in the first expansion section, which gradually increases in cross-sectional area. The first expansion section acts as a small buffer chamber, improving the stability of the liquid and allowing it to flow slowly and steadily past the seal, reducing the likelihood of violent collisions with the second flat surface and decreasing the probability of liquid fluctuations and gas generation. For the drain valve, the first expansion section provides a smoother, less turbulent inlet flow field, allowing the liquid to flow into the drain valve more evenly and smoothly. This reduces water hammer and pressure fluctuations, extending the drain valve's service life. Furthermore, it reduces the impact force and turbulence experienced by the drain valve, significantly reducing local resistance losses when the liquid enters the valve, decreasing wear, maintaining the accuracy and reliability of its operation, and ensuring the overall efficiency of the liquid supply assembly. Attached Figure Description

[0035] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0036] Figure 1 This is a schematic diagram of the structure of the liquid supply assembly according to an embodiment of the present invention;

[0037] Figure 2 for Figure 1 Schematic diagram of the cross section at point AA;

[0038] Figure 3 for Figure 2 Enlarged view of point B in the image;

[0039] Figure 4 This is a cross-sectional view of the liquid supply assembly according to another embodiment of the present invention;

[0040] Figure 5 This is a schematic diagram of the structure of the first pump casing according to an embodiment of the present invention;

[0041] Figure 6 This is a schematic diagram showing the connection between the pump outlet channel and the valve flow channel according to another embodiment of the present invention.

[0042] Explanation of reference numerals in the attached figures

[0043] 10. Supply pump; 11. Pump chamber; 12. Pump inlet channel; 13. Pump outlet channel; 131. Second inlet; 132. Outlet; 133. First expansion section; 134. Horizontal section; 135. Vertical equal diameter section; 136. First flat surface; 137. Rounded corner; 138. Notch; 14. First pump casing; 141. Annular groove; 142. Connecting groove; 15. Second pump casing; 16. Diaphragm; 17. First guide section; 18. First rounded section;

[0044] 20. Drain valve; 21. Valve flow channel; 211. First inlet; 212. Second flat surface; 213. Second diameter expansion section; 214. Second flow guide section; 215. Second arc section; 216. Sealing groove; 22. First L-shaped flow channel; 23. Second L-shaped flow channel; 24. Actuator;

[0045] 30. Annular seal. Detailed Implementation

[0046] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0047] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0048] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0049] like Figures 1 to 4As shown, the liquid supply assembly of this utility model embodiment includes a supply pump 10 and a drain valve 20. The supply pump 10 has a pump chamber 11 with variable volume, a pump inlet channel 12 and a pump outlet channel 13 respectively connected to the pump chamber 11. The pump chamber 11 changes its volume to expand, and the liquid at the front end is drawn into the pump chamber 11 through the pump inlet channel 12. Then the pump chamber 11 changes its volume to shrink again, and the liquid is discharged from the pump outlet channel 13 into the drain valve 20. The amount of liquid discharged is precisely controlled to meet the requirements of wafer coating. The supply pump 10 is specifically a diaphragm pump, which includes a first pump housing 14, a second pump housing 15, and a diaphragm 16 that clamps and seals between the first pump housing 14 and the second pump housing 15. The diaphragm 16 divides the inner cavity of the supply pump 10 into a pump chamber 11, which serves as a liquid chamber, and a working chamber, which serves as a gas chamber. The first pump housing 14 is recessed towards the inner wall of the diaphragm 16, and the inner wall of the first pump housing 14 and the diaphragm 16 together form the pump chamber 11. Similarly, the second pump housing 15 is recessed towards the inner wall of the diaphragm 16. The recessed design allows the inner wall of the second pump housing 15 and the diaphragm 16 to form a working chamber. By introducing or extracting gas into the working chamber, the deformable diaphragm 16 can be deformed, thereby changing the volume of the pump chamber 11 to expand or shrink. The diaphragm 16 can elastically deform to change the volume of the pump chamber 11, thereby allowing the pump chamber 11 to discharge or draw in liquid. The pump chamber 11 is connected to and communicates with the valve flow channel 21 of the drain valve 20 through the pump outlet channel 13. The drain valve 20 controls the opening and closing of the valve flow channel 21 to control the start and end of the coating process.

[0050] like Figure 2 and Figure 3 As shown, the drain valve 20 includes a valve flow channel 21, which has a first inlet 211; the pump outlet channel 13 has a second inlet 131 communicating with the pump chamber 11 and an outlet 132 corresponding to the first inlet 211 of the drain valve 20. The second inlet 131 is located at the bottom of the pump chamber 11, and the outlet 132 is located at the top of the supply pump; the outlet 132 has an annular first flat surface 136 on its radially outer side, and the first inlet 211 has an annular second flat surface 212 on its radially outer side. The first flat surface 136 and the second flat surface 212 are arranged opposite to each other to form a sealing groove for accommodating the annular seal 30. The first flat surface 136 and the second flat surface 212 press the annular seal 30 against each other. The annular seal 30 is placed in the sealing groove 216, achieving effective sealing at the junction of the pump outlet channel 13 and the valve flow channel 21. Moreover, after the flat surface presses against the annular seal 30, the contact area between the two surfaces is larger, which can maintain the stability of the annular seal 30 and ensure that the annular seal 30 maintains a reliable seal even under the pressure of the supply pump 10. It should be noted that the flat surface mentioned above does not need to be absolutely flat, but only basically flat to facilitate clamping the annular seal 30. Even if the flat surface has an angular error of less than 10° due to manufacturing errors, it is still considered to be a basically flat surface.

[0051] like Figure 4 As shown, the annular seal 30 is an O-ring. The inner diameter of the seal ring is such that, in the uncompressed state, the inner side of the seal ring does not protrude beyond the inner wall of the outlet 132 and the first inlet 211. The inner diameter of the seal ring in the uncompressed state is L1, the inner diameter of the outlet 132 is L2, and the inner diameter of the first inlet 211 is L3, satisfying L1:L2 = 1.1-1.4 and L1:L3 = 1.1-1.4. This design takes into account that the inner diameter of the sealing ring will decrease appropriately after being compressed and deformed. By controlling L1:L2>1.1 and L1:L3>1.1, the inner side of the compressed sealing ring will not protrude from the inner wall of the liquid outlet 132 and the first liquid inlet 211 and interfere with the liquid flow channel. By controlling L1:L2<1.4 and L1:L3<1.4, the radial distance between the inner side of the compressed sealing ring and the liquid outlet 132 and the first liquid inlet 211 is minimized, thereby reducing the flow dead zone and the amount of liquid remaining in the sealing ring.

[0052] like Figure 2 As shown, the pump outlet channel 13 includes a frustum-shaped first expansion section 133 extending toward the second flat surface 212. The inner diameter of the first expansion section 133 gradually increases from the end away from the first flat surface 136 to the end closer to the first flat surface 136. During drainage, the liquid first enters the pump outlet channel 13 through the second inlet 131 and flows from bottom to top along the pump outlet channel 13. As it gradually approaches the outlet 132, the liquid's flow velocity decreases in the first expansion section 133, which has a gradually increasing cross-sectional area. The first expansion section 133 acts as a small buffer chamber, improving the stability of the liquid and reducing the probability of liquid fluctuations and gas generation. For the drain valve 20, the first expansion section 133 provides a smoother, less turbulent inlet flow field, allowing the liquid to flow more evenly. The smooth flow of liquid into the drain valve 20 reduces the water hammer effect and pressure fluctuations on the drain valve 20. The drain valve 20 experiences less impact force and turbulence disturbance, which can significantly reduce the local resistance loss when the liquid enters the valve, reduce the wear of the drain valve 20, maintain its accuracy and reliability, ensure the overall efficiency of the liquid supply assembly, and extend the service life of the drain valve 20. In addition, since the first flat surface 136 is located on the outer periphery of the first expanded diameter portion 133, the radial width of the first flat surface 136 is shortened and is sufficient to support the annular seal 30. The gap between the compressed annular seal 30 and the annular inner edge of the first flat surface 136 is reduced, thereby reducing any dead angles that may exist between the annular seal 30 and the inner edge of the first flat surface 136 and avoiding liquid waste caused by residual liquid in dead angles.

[0053] like Figure 2 and 3As shown, the valve flow channel 21 includes a frustum-shaped second expansion section 213 extending toward the first flat surface 136. The inner diameter of the second expansion section 213 gradually increases from the end away from the second flat surface 212 to the end near the second flat surface 212, that is, the second expansion section 213 gradually decreases in diameter along the flow direction of the liquid. Simultaneously, a cylindrical second guide section 214 is provided at the end of the second expansion section 213 near the second flat surface 212. The second guide section 214 and the second expansion section 213 are smoothly connected by a second arc section 215. The second guide section 214 extends along the central axis of the second expansion section 213 toward the first expansion section 133. The opening of the second guide section 214 is the first liquid inlet 211, and the opening of the first expansion section 133 is the liquid outlet 132. The inner diameter of the second guide section 214 is adapted to the maximum inner diameter of the first expansion section 133. Therefore, the second... The flow guide 214 matches the first expansion section 133 without any abrupt change in inner diameter. It can reduce the gap and dead angle between the annular seal 30 and the inner edge of the second flat surface 212 from the valve flow channel 21 side, so that the cross-sectional area of ​​the liquid flow channel from the pump outlet channel 13 to the valve channel is continuous without abrupt change or with very small abrupt change, avoiding additional turbulence and energy loss caused by sudden contraction of the cross-section. Then, the liquid gradually increases its flow velocity as the inner diameter of the valve flow channel 21 gradually decreases, realizing high-precision and high-response flow control, balancing the contradictory requirements of anti-impact and precise control. Furthermore, the function of the second guide section 214 is to further stabilize the liquid flowing out of the pump outlet channel 13. The equal diameter of the second guide section helps the liquid form a relatively uniform circumferential velocity distribution, improving the stability of the liquid. The subsequent second arc section 215 makes the streamline smoothly turn, keeping the fluid adhering to the wall surface. The second diameter expansion section 213 further narrows its diameter in the direction away from the second guide section 214, so that the liquid accelerates uniformly along the conical wall through the drain valve 20, maintaining a low turbulence and high stability flow, which helps to reduce local resistance loss, protect shear-sensitive fluids, and reduce bubble generation.

[0054] In other embodiments, such as Figure 6As shown, a cylindrical first guide portion 17 is provided at one end of the first diameter expansion portion 133 near the first flat surface 136. The first guide portion 17 and the first diameter expansion portion 133 are smoothly connected by a first arc portion 18. The first guide portion 17 extends along the central axis of the first diameter expansion portion 133. The opening of the first guide portion 17 facing the valve flow channel 21 forms a liquid outlet 132. The opening of the first guide portion 17 is the liquid outlet 132, and it is adapted to the inner diameter of the second guide portion 214. The function of the first guide section 17 is to provide a more stable space for the liquid passing through the first expansion section 133. The first guide section 17 corrects the flow that originally expanded outward from the first expansion section 133 and guides the liquid flow into the valve channel 21. It can be visualized that because the first flat surface 136 and the second flat surface 212 press against the sealing point of the annular seal 30, the connection between the pump outlet channel 13 and the valve channel 21 is discontinuous due to the presence of the sealing groove 216. The sealing point or sealing groove 216 can be regarded as a crossroads. The liquid must not only slow down but also straighten its direction when passing through the sealing point to avoid excessively fast liquid flow directly impacting the inner edge corner of the second flat surface 212, so as to reduce the generation of bubbles. The first guide section 17 and the first expansion section 133 are smoothly transitioned through the first arc section 18, so that the streamline smoothly turns, completely avoiding flow separation, maintaining fluid adhesion to the wall flow, reducing local resistance loss, protecting shear-sensitive fluid, and reducing bubble generation.

[0055] In some other embodiments, the valve flow channel 21 does not include the second guide portion 214, and the pump outlet flow channel does not include the first guide portion 17. In this case, the opening of the first expansion portion 133 is the outlet 132, and the opening of the second expansion portion 213 is the first inlet 211. The inner diameter of the frustum-shaped second expansion portion 213 is adapted to the inner diameter of the first expansion portion 133.

[0056] In this embodiment, as Figure 3 As shown, the vertical length of the first expansion section 133 is H2, and the vertical length of the second expansion section 213 is H3, where H2 > H3. The reason for this arrangement is that the first expansion section 133 is part of the pump outlet channel 13. After the liquid is squeezed from the pump chamber 11 into the pump outlet channel 13, it is relatively unstable. The longer and slowly expanding first expansion section 133 can stabilize the liquid and prevent violent fluctuations that could generate bubbles. The liquid entering the second expansion section 213 has already been stabilized by the first expansion section 133. Therefore, the second expansion section 213 does not need to be too long, in order to reduce the volume of the entire liquid supply assembly.

[0057] like Figure 2As shown, the pump outlet channel 13 also includes a vertical equal-diameter section 135 and a transverse section 134. The end of the transverse section 134 away from the vertical equal-diameter section 135 forms a second inlet 131, which is located at the bottom of the pump chamber 11. The interior of the transverse section 134 communicates with the second inlet 131. The vertical equal-diameter section 135 connects the first expansion section 133 and the transverse section 134. The inner diameter of the vertical equal-diameter section 135 is equal to the minimum inner diameter of the first expansion section 133. The vertical equal-diameter section 135 and the first expansion section 133 are located inside the pump casing of the supply pump 10, requiring the transverse section 134 to connect the pump chamber 11 and the vertical equal-diameter section 135. Liquid enters the small-volume pump outlet channel 13 from the large-volume pump chamber 11 at a relatively high flow rate, and flows through the transverse section 134. When the liquid flows to the vertical equal diameter section 135, it will turn 90°. The turning radius of the liquid is different on the side closer to the inner wall of the pump chamber 11 and the side farther away from the inner wall of the pump chamber 11. The flow velocity distribution on both sides of the liquid is uneven. After the liquid flows into the vertical equal diameter section 135, the liquid flows from bottom to top with equal diameter, which alleviates the uneven flow velocity on both sides of the liquid and promotes the liquid to enter a more stable state. Then, the liquid with a more stable flow velocity enters the first expansion section 133. The cross-section is enlarged, which slows down the liquid flow velocity and the liquid enters a more stable state. The pump outlet channel 13 is connected to the pump chamber 11. The liquid in the pump chamber 11 enters the transverse section 134 from the second inlet 131, and then turns to enter the vertical equal diameter section 135. After passing through the vertical equal diameter section 135, it enters the first expansion section 133.

[0058] like Figure 2 As shown, the vertical length of the equal-diameter section 135 is H1, and the vertical length of the first expansion section 133 is H2, satisfying H1:H2=2.1-4.5. Based on the function of the equal-diameter section 135, when the pressure in the pump chamber 11 is high, making the vertical length of the equal-diameter section 135 greater than the vertical length of the first expansion section 133, and controlling the length ratio between 2.1 and 4.5, allows the liquid to achieve a symmetrical velocity distribution before entering the first expansion section 133. If the length ratio... If the length ratio is less than 2.1, the liquid enters the first expansion section 133 before achieving a symmetrical flow velocity distribution. This can easily cause the liquid to deflect circumferentially under the influence of the increased inner diameter of the first expansion section 133, leading to fluctuations. This is not conducive to liquid stability and bubble suppression. If the length ratio is greater than 4.5, the vertical length of the first expansion section 133 is insufficient, making it unable to effectively achieve the function of stabilizing the liquid in the longer and slower expansion section 133. This is not conducive to the stability of the liquid from the pump outlet channel 13 to the valve channel 21.

[0059] like Figure 4As shown, the inner diameter of the vertical constant diameter section 135 is L4, and the maximum inner diameter of the first expansion section 133 is L2, satisfying L2:L4=1.1-3.5. Since both the vertical constant diameter section 135 and the first expansion section 133 are located inside the pump casing of the supply pump 10, if the ratio of their inner diameters is too large, the thickness of the pump casing at the corresponding position of the first expansion section 133 will be too thin, resulting in insufficient structural strength of the pump casing. Furthermore, if the inner diameter of the vertical constant diameter section 135 is too small, it cannot achieve a uniform flow effect on the liquid inside, which is not conducive to suppressing the generation of bubbles. If the ratio of their inner diameters is too small, the cross-sectional area of ​​the first expansion section 133 will not change significantly, and it will not be able to effectively reduce the liquid flow rate and play a buffering role. Therefore, the ratio of their inner diameters is controlled between 1.1 and 3.5.

[0060] like Figure 2 As shown, the transverse section 134 serves as the first section for liquid to enter the pump outlet channel 13. The inner diameter of the transverse section 134 is larger than the inner diameter of the vertical equal-diameter section 135, making the inlet of the liquid in the pump chamber 11 into the pump outlet channel 13 wider. This appropriately reduces the speed and turbulence of the liquid entering the pump outlet channel 13, and reduces the probability of bubble generation. The connection between the transverse section 134 and the vertical equal-diameter section 135 has an arc corner 137. The inner wall of the arc corner 137 is concave relative to the inner wall of the vertical equal-diameter section 135 to accommodate part of the liquid turning from the transverse section 134 to the vertical equal-diameter section 135, and guides the liquid to turn along the inner wall of the arc corner 137, flowing smoothly to the vertical equal-diameter section 135.

[0061] like Figure 2 and Figure 5 As shown, the second liquid inlet 131 is formed on the inner wall of the first pump housing 14 facing the diaphragm 16, and a notch 138 extending from the second liquid inlet 131 toward the center of the first pump housing 14 is provided on the radially outer side of the second liquid inlet 131. The function of the notch 138 is to further increase the inlet area when the liquid enters the pump outlet channel 13 from the pump chamber 11, avoid the liquid from colliding with each other and forming excessive turbulence, reduce the probability of bubble generation, and guide the liquid in the pump chamber 11 to flow toward the second liquid inlet 131 to improve the liquid discharge efficiency.

[0062] When the diaphragm 16 is deformed towards the inner wall of the first pump housing 14 under the pressure of the working chamber, it eventually adheres to the inner wall of the first pump housing 14. However, when the diaphragm 16 is deformed towards the second pump housing 15 under the pressure of the working chamber, complete adhesion to the inner wall of the first pump housing 14 makes it difficult for the diaphragm 16 to detach from the first pump housing 14, thereby affecting the response speed of the supply pump 10. Therefore, if... Figure 4As shown, an annular groove 141 is provided on the inner wall of the first pump housing 14, leaving a small space that does not fit with the diaphragm 16; however, liquid may remain in the annular groove 141, so a connecting groove 142 is also provided between the notch groove 138 and the annular groove 141. The connecting groove 142 is partially placed in the notch groove 138 and is recessed relative to the inner wall of the notch groove 138, so that the liquid in the annular groove 141 can flow along the connecting groove 142 to the notch groove 138, and then flow into the pump outlet channel 13.

[0063] like Figure 2 As shown, the drain valve 20 includes a first L-shaped flow channel, a second L-shaped flow channel, and an actuator 24. One end of the first L-shaped flow channel is connected to the valve flow channel 21, and the other end is connected to the second L-shaped flow channel via the actuator 24. The function of the first and second L-shaped flow channels is to increase the liquid flow rate and reduce the unit flow rate, thereby improving the liquid discharge efficiency and accuracy. The actuator 24 includes a diaphragm to block or open the first and second L-shaped flow channels.

[0064] The above embodiments are merely preferred embodiments of this utility model and should not be construed as limiting the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.

Claims

1. A liquid supply assembly comprising a supply pump (10) and a discharge valve (20), said supply pump (10) having a variable volume pump chamber (11), a pump inlet channel (12) communicating with said pump chamber (11), and a pump outlet channel (13), characterized in that, The drain valve (20) includes a valve flow channel (21) having a first inlet (211); The pump outlet channel (13) has a second inlet (131) communicating with the pump chamber (11) and an outlet (132) corresponding to the first inlet (211) of the drain valve (20); The outlet (132) has an annular first flat surface (136) on its radial outer side, and the inlet (211) has an annular second flat surface (212) on its radial outer side. The first flat surface (136) and the second flat surface (212) are arranged opposite to each other to form a sealing groove (216) for accommodating the annular seal (30). The first flat surface (136) and the second flat surface (212) press the annular seal (30) against each other. The pump outlet channel (13) includes a frustum-shaped first diameter expansion portion (133) extending toward the second flat surface (212), wherein the inner diameter of the first diameter expansion portion (133) is gradually expanded from one end away from the first flat surface (136) to one end close to the first flat surface (136).

2. The liquid supply assembly as claimed in claim 1, characterized in that, The valve flow channel (21) includes a frustum-shaped second diameter expansion portion (213) extending toward the first flat surface (136), the inner diameter of the second diameter expansion portion (213) being gradually expanded from one end away from the second flat surface (212) to one end close to the second flat surface (212).

3. The liquid supply assembly as claimed in claim 1, characterized in that, The first diameter expansion section (133) is provided with a cylindrical first flow guide section (17) at one end near the first flat surface (136). The first flow guide section (17) and the first diameter expansion section (133) are smoothly connected by a first arc section (18). The first flow guide section (17) extends along the central axis of the first diameter expansion section (133). The first flow guide section (17) opens towards the valve flow channel (21) to form the liquid outlet (132).

4. The liquid supply assembly as claimed in claim 2, characterized in that, The second diameter expansion section (213) is provided with a cylindrical second flow guide section (214) at one end near the second flat surface (212). The second flow guide section (214) and the second diameter expansion section (213) are smoothly connected by a second arc section (215). The second flow guide section (214) extends along the central axis of the second diameter expansion section (213). The second flow guide section (214) opens at one end toward the pump outlet channel (13) to form the first inlet port (211).

5. The liquid supply assembly as claimed in claim 2, characterized in that, The vertical length of the first enlarged diameter portion (133) is greater than the vertical length of the second enlarged diameter portion (213); and / or The annular seal (30) is a sealing ring. The inner diameter of the sealing ring is such that, in the uncompressed state, the inner side of the sealing ring does not protrude beyond the inner wall of the liquid outlet (132) and the first liquid inlet (211). The inner diameter of the sealing ring is L1, the inner diameter of the liquid outlet (132) is L2, and the inner diameter of the first liquid inlet (211) is L3, satisfying L1:L2=1.1-1.4 and L1:L3=1.1-1.

4.

6. The liquid supply assembly as claimed in claim 1, characterized in that, The pump outlet channel (13) further includes a vertical equal diameter section (135) and a horizontal section (134). The end of the horizontal section (134) away from the vertical equal diameter section (135) forms a second inlet (131). The second inlet (131) is located at the bottom of the pump chamber (11). The vertical equal diameter section (135) connects the first expansion section (133) and the horizontal section (134). The inner diameter of the vertical equal diameter section (135) is equal to the minimum inner diameter of the first expansion section (133).

7. The liquid supply assembly as claimed in claim 6, characterized in that, The vertical length of the equal-diameter section (135) is H1, and the vertical length of the first diameter-expanding section (133) is H2, satisfying H1:H2=2.1-4.5; and / or The inner diameter of the vertical equal diameter section (135) is L4, and the maximum inner diameter of the first diameter expansion section (133) is L2, satisfying L2:L4=1.1-3.

5.

8. The liquid supply assembly as claimed in claim 6, characterized in that, The inner diameter of the transverse segment (134) is larger than the inner diameter of the vertical equal-diameter segment (135). The connection between the transverse segment (134) and the vertical equal-diameter segment (135) has an arc corner (137), and the inner wall of the arc corner (137) is concave relative to the inner wall of the vertical equal-diameter segment (135).

9. The liquid supply assembly as claimed in claim 1, characterized in that, The supply pump (10) includes a first pump housing (14), a second pump housing (15), and a diaphragm (16) that is sandwiched and sealed between the first pump housing (14) and the second pump housing (15). The diaphragm (16) is elastically deformable to change the volume of the pump chamber (11). The first pump housing (14) is recessed towards the inner wall of the diaphragm (16), and the inner wall of the first pump housing (14) towards the diaphragm (16) forms the pump chamber (11) with the diaphragm (16). The second liquid inlet (131) is formed on the inner wall of the first pump housing (14) towards the diaphragm (16), and a notch (138) extending from the second liquid inlet (131) towards the center of the first pump housing (14) is provided on the radially outer side of the second liquid inlet (131); and / or, The drain valve (20) includes a first L-shaped flow channel (22), a second L-shaped flow channel (23), and an actuator (24). One end of the first L-shaped flow channel (22) is connected to the valve flow channel (21), and the other end is connected to the second L-shaped flow channel (23) via the actuator (24).

10. The liquid supply assembly as claimed in claim 9, characterized in that, The inner wall of the first pump housing (14) is provided with an annular groove (141) surrounding the center of the first pump housing (14). A connecting groove (142) is also provided between the notch groove (138) and the annular groove (141). The connecting groove (142) is partially placed in the notch groove (138) and is recessed relative to the inner wall of the notch groove (138).

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