A magnetic suspension molecular pump shaft end screw dismounting tool and a magnetic suspension molecular pump

Abstract

The application discloses a magnetic suspension molecular pump shaft end screw dismounting tool and a magnetic suspension molecular pump applying the same. The magnetic suspension molecular pump shaft end screw dismounting tool comprises a positioning device and a shaft end force applying device. The positioning device comprises a plurality of blade connecting structures and a first force applying structure component connecting the blade connecting structures. The blade connecting structures are used for connecting magnetic suspension molecular pump impeller blades. The first force applying structure component is used for applying a limiting external force. The shaft end force applying device comprises a shaft end screw sleeve and a second force applying structure component detachably connected with the shaft end screw sleeve. The shaft end screw sleeve is matched with the shape of the shaft end screw. The first force applying structure component and the second force applying structure component apply opposite reaction forces to dismount the shaft end screw. The magnetic suspension molecular pump shaft end screw dismounting tool can improve the production efficiency of the shaft end screw dismounting of the magnetic suspension molecular pump and the equipment maintenance convenience, reduce the damage to the parts, and improve the reliability of the pump body operation.

Description

Technical Field

[0001] The embodiments of this utility model relate to the field of disassembly and assembly fixtures for magnetic levitation molecular pumps. More specifically, this utility model relates to a disassembly and assembly fixture for a magnetic levitation molecular pump shaft end screw and a magnetic levitation molecular pump using the same. Background Technology

[0002] Magnetic levitation molecular pumps are core components of high vacuum equipment, offering advantages such as frictionless operation and high rotational speed, and are widely used in fields with stringent vacuum requirements. The rotating assembly is the core moving part of the magnetic levitation molecular pump; its assembly precision affects the pump's performance and lifespan. Tightening and loosening the shaft end screws are critical processes, requiring high reliability and adaptability of the tooling.

[0003] Currently, conventional processes in the assembly of shaft-end screws for magnetic levitation molecular pumps and similar rotating machinery rely on standard positioning structures for parts to restrict rotational degrees of freedom. Existing technologies mainly fall into two categories: one is a fixing scheme based on standard positioning interfaces for parts, which uses a pre-set standard wrench adapter structure to clamp and position the shaft-end screw with a corresponding standard wrench or special fixture; this is a commonly used technology in mass production. The other is an indirect fixing scheme based on the main shaft or related components. When the rotating assembly lacks a positioning structure, fixing the main shaft or related components indirectly restricts rotational degrees of freedom, provided that the main shaft or related components have a fixable structure and the operating space is unobstructed. Existing technologies can meet basic requirements in assembly with standard positioning structures and sufficient operating space, and are simple to operate with strong tool versatility.

[0004] For specially designed magnetic levitation molecular pumps, existing technologies have core defects that make assembly and maintenance difficult: First, there is a lack of standard positioning structures, rendering conventional fixing methods ineffective. Because there is no standard positioning design on the top of the rotating component and the end of the main shaft screw, conventional wrenches or clamps cannot be used for fixing. Second, the operating space is limited, and standard tools cannot reach the working area. The pump can be fixed close to the thrust plate, but due to space constraints, standard tools cannot be inserted or are not fixed stably. Third, existing tooling cannot balance "fixing freedom" and "screw operation." Most of them are single-function designs that do not consider special working conditions, cannot reliably fix the rotating component, and cannot provide an operating channel, affecting production efficiency and equipment maintenance convenience. They may also damage parts and reduce the reliability of pump operation. Utility Model Content

[0005] To address one or more of the technical problems mentioned above, this utility model provides a tooling for disassembling and assembling the shaft end screws of a magnetic levitation molecular pump and a magnetic levitation molecular pump using the same, thereby improving the production efficiency of disassembling and assembling the shaft end screws of the magnetic levitation molecular pump.

[0006] According to a first aspect of this utility model, a fixture for disassembling and assembling the shaft end screw of a magnetic levitation molecular pump is provided. This fixture includes: a positioning device comprising a plurality of blade connecting structures and a first force-applying structural component connecting the plurality of blade connecting structures; the plurality of blade connecting structures are used to connect the impeller blades of the magnetic levitation molecular pump; the first force-applying structural component is used to apply a limiting external force; and a shaft end force-applying device comprising a shaft end screw sleeve and a second force-applying structural component detachably connected to the shaft end screw sleeve; the shaft end screw sleeve is adapted to the shape of the shaft end screw. The first force-applying structural component and the second force-applying structural component use relative reaction forces to disassemble and assemble the shaft end screw.

[0007] In some embodiments, the shaft end screw ferrule includes a ferrule sleeve with a limiting structure formed on one end and an axially extending sleeve groove formed on the other end. The inner peripheral wall of the sleeve groove is formed with an annular fixing groove, wherein the opening of the sleeve groove is used to form a limiting fit with the neck of the shaft end screw, and the annular fixing groove is used to accommodate and avoid the top circle of the shaft end screw.

[0008] In some embodiments, the sleeve groove has a half-side notch formed along the axial direction for the shaft end screw to be sleeved into the sleeve groove.

[0009] In some embodiments, the limiting structure is configured as an external hexagonal boss, and the second force-applying structure component is configured as a hexagonal wrench adapted to the external hexagonal boss.

[0010] In some embodiments, the limiting structure is configured as a wrench socket, and the second force-applying structure component is configured as a rod-shaped wrench adapted to the wrench socket.

[0011] In some embodiments, the first force-applying structure component is configured as a tubular structure, and the blade connection structure is configured as screws vertically fixed to the tubular structure, wherein the plurality of screws include: a limiting screw portion for inserting into the gap between the impeller blades of the magnetic levitation molecular pump; and a fixing screw portion for passing through the mounting hole of the pump housing flange.

[0012] In some embodiments, at least the limiting screw portion is fitted with a protective sleeve.

[0013] In some embodiments, the protective sleeve is made of nylon or rubber.

[0014] In some embodiments, the positioning device is constructed as an asymmetrical structure through a plurality of blade connecting structures, wherein one end of the tubular structure is used for a limiting connection with a fixed foundation.

[0015] According to a second aspect of the present invention, a magnetic levitation molecular pump is provided, which is applied to the above-mentioned magnetic levitation molecular pump shaft end screw disassembly and assembly fixture, including a molecular pump body, the axis of which is placed on a platform in a horizontal direction.

[0016] The above-mentioned tooling for disassembling and assembling the shaft end screws of the magnetic levitation molecular pump can improve the production efficiency and equipment maintenance convenience of disassembling and assembling the shaft end screws of the magnetic levitation molecular pump, reduce damage to parts, and improve the reliability of pump operation. Attached Figure Description

[0017] The above and other objects, features, and advantages of the present invention will become readily understood by reading the following detailed description of exemplary embodiments with reference to the accompanying drawings. In the drawings, several embodiments of the present invention are shown by way of example and not limitation, and like or corresponding reference numerals denote like or corresponding parts, wherein:

[0018] Figure 1 This is a schematic diagram illustrating an exemplary application scenario of the magnetic levitation molecular pump shaft end screw disassembly and assembly tooling according to an embodiment of the present utility model.

[0019] Figure 2 It shows Figure 1 The schematic diagram of an exemplary application scenario of the magnetic levitation molecular pump shaft end screw disassembly and assembly tool shown is a view along the AA direction.

[0020] Figure 3 This is a schematic diagram of the disassembly and assembly tooling for the magnetic levitation molecular pump shaft end screws according to an embodiment of the present invention;

[0021] Figure 4 This is a schematic diagram of the shaft end force application device of the magnetic levitation molecular pump shaft end screw disassembly and assembly tooling according to an embodiment of the present utility model.

[0022] Figure 5 for Figure 4 The diagram shows a side view of the shaft-end force application device. Detailed Implementation

[0023] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0024] According to a first aspect of the present invention, a tooling 100 for disassembling and assembling screws on the shaft end of a magnetic levitation molecular pump is provided. Figure 1 and Figure 2 An exemplary application scenario of the magnetic levitation molecular pump shaft end screw disassembly and assembly tool 100 according to an embodiment of the present invention is shown, including a schematic diagram of its connection with the magnetic levitation molecular pump. Figure 3 This describes the structure of the magnetic levitation molecular pump shaft end screw disassembly and assembly tool 100 according to an embodiment of the present invention. For example... Figures 1 to 3As shown, the magnetic levitation molecular pump shaft end screw disassembly and assembly fixture 100 includes: a positioning device 1, which includes a plurality of blade connecting structures 11 and a first force-applying structure component 12 connecting the plurality of blade connecting structures 11, wherein the plurality of blade connecting structures 11 are used to connect the impeller blades 200 of the magnetic levitation molecular pump, and the first force-applying structure component 12 is used to apply a limiting external force; and a shaft end force-applying device 2, which includes a shaft end screw sleeve 21 and a second force-applying structure component (e.g., a wrench, not shown in the figure) detachably connected to the shaft end screw sleeve 21, wherein the shaft end screw sleeve 21 is adapted to the shape of the shaft end screw 400. The first force-applying structure component 12 and the second force-applying structure component use relative reaction forces to disassemble and assemble the shaft end screw 400.

[0025] Based on existing technology, when assembling the rotating component of a magnetic levitation molecular pump, the main shaft needs to pass through the upper axial magnetic bearing, and then the thrust disc is fastened to the main shaft with shaft end screws 400. The rotating component, in conjunction with the upper and lower magnetic bearings, is then assembled with the pump body assembly (including the pump body flange 300). Each assembly and disassembly requires tightening or loosening the shaft end screws 400.

[0026] In practical use, the magnetic levitation molecular pump shaft end screw disassembly and assembly fixture 100 according to an embodiment of this utility model first requires connection to the magnetic levitation molecular pump using the blade connecting structure 11 of the positioning device 1. This process specifically includes two main steps: first, connecting the blade connecting structure 11 of the positioning device 1 to the blade 200 of the magnetic levitation molecular pump; second, connecting the first force-applying structure component 12 of the positioning device 1 to the main body of the molecular pump (e.g., the pump body flange 300). Next, the first force-applying structure component 12 is connected to a fixed base for limiting, for example, by fixing the first force-applying structure component 12 to an operating platform to ensure that it will not shift during operation. At this time, the rotational movement of the positioning device 1 relative to the pump casing of the molecular pump has been effectively limited, thereby providing a stable base for subsequent operations. Subsequently, the shaft end screw sleeve 21 of the shaft end force-applying device 2 is sleeved and connected to the shaft end screw 400 to ensure that the shaft end screw sleeve 21 and the screw fit tightly together to achieve a reliable locking effect. During the installation and removal of the shaft end screw 400, the product is subjected to the coordinated rotational force of the first force-applying structural component 12 and the second force-applying structural component (not shown in the figure). By rotating the shaft end screw 400, the tightening or loosening operation can be completed smoothly, thereby achieving efficient installation and removal of the magnetic levitation molecular pump shaft end screw 400.

[0027] The above settings can improve the production efficiency and equipment maintenance convenience of disassembling and assembling the shaft end screw 400, reduce damage to parts, and improve the reliability of pump operation.

[0028] Please refer to Figure 4 and Figure 5 In some embodiments, the shaft end screw sleeve 21 may include a sleeve sleeve 211, one end of which has a limiting structure 212 and the other end has an axially extending sleeve groove 213. The inner peripheral wall of the sleeve groove 213 has an annular fixing groove 214. The groove opening 215 of the sleeve groove 213 is used to form a limiting fit with the neck of the shaft end screw 400, and the annular fixing groove 214 is used to accommodate and avoid the top circle of the shaft end screw 400.

[0029] In this application, the slot 215 of the sleeve groove 213 can be constructed as a rectangular slot 215 to effectively limit the axial rotation of the neck of the shaft end screw 400.

[0030] Please continue to refer to Figure 4 and Figure 5 In some embodiments, the sleeve groove 213 has a half-side notch 216 formed along the axial direction for the shaft end screw 400 to be sleeved into the sleeve groove 213.

[0031] The above configuration makes it easier for the shaft end screw 400 to be inserted into the sleeve groove 213 from the side, thereby reducing the difficulty of operation.

[0032] Please continue to refer to Figure 4 and Figure 5 In some embodiments, the limiting structure 212 may be configured as an external hexagonal boss 2121, and the second force-applying structure component (not shown in the figure) may be configured as a hexagonal wrench adapted to the external hexagonal boss 2121.

[0033] Please continue to refer to Figure 4 and Figure 5 In some embodiments, the limiting structure 212 may be configured as a wrench socket 2122, and the second force-applying structure component (not shown in the figure) may be configured as a rod-shaped wrench adapted to the wrench socket 2122.

[0034] In this application, the rod-shaped wrench can be constructed as a steel pipe structure, or it can be an irregularly shaped steel pipe structure, to facilitate the operator's application of force.

[0035] Please return Figure 3 In some embodiments, the first force-applying structure component 12 may be constructed as a tubular structure, and the blade connection structure 11 may be constructed as screws 111 vertically fixed to the tubular structure (locked by nuts). The plurality of screws 111 include: a limiting screw portion for inserting into the gap of the impeller blade 200 of the magnetic levitation molecular pump; and a fixing screw portion for passing through the mounting hole of the pump housing flange 300.

[0036] In this application, the first force-applying structural component 12 can be made of φ15mm steel pipe (the size can be adjusted according to the specific situation). Under the premise of meeting the strength requirements, it can also reduce the weight of the first force-applying structural component 12 and facilitate operation and use.

[0037] In some embodiments, at least the limiting screw portion (for insertion into the gap of the impeller blade 200 of the magnetic levitation molecular pump) is fitted with a protective sleeve (not shown in the figure).

[0038] In some embodiments, the protective sleeve (not shown) may be made of nylon or rubber.

[0039] The above settings can prevent damage to the blades 200 caused by the screw disassembly and assembly tool 100 on the shaft end of the magnetic levitation molecular pump during use.

[0040] In some embodiments, the positioning device 1 can be constructed as an asymmetrical structure through a plurality of blade connecting structures 11, wherein one end of the tubular structure is used for a limiting connection with a fixed base (e.g., a workbench).

[0041] In this application, the longer side of the main body of the positioning device 1 will come into contact with the worktable surface, thereby restricting the degree of freedom of the overall rotation of the product.

[0042] According to a second aspect of the present invention, a magnetic levitation molecular pump is provided, which is applied to the aforementioned magnetic levitation molecular pump shaft end screw disassembly and assembly fixture 100, including a molecular pump body (including impeller blades 200, pump housing flange 300 and shaft end screw 400), and the axis of the molecular pump body is placed on a platform in a horizontal direction.

[0043] In the foregoing description of this application, unless otherwise expressly specified and limited, the terms "fixed," "installed," "connected," or "linked" should be interpreted broadly. For example, the term "linked" can refer to a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; or it can refer to the internal communication of two components or the interaction between two components. Therefore, unless otherwise expressly limited in this application, those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0044] Based on the above description of this application, those skilled in the art will also understand that the following terms used, such as "upper," "lower," "front," "rear," "left," "right," "length," "width," "thickness," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," "center," "longitudinal," "transverse," "clockwise," or "counterclockwise," are terms indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings of this application. They are only for the purpose of facilitating the explanation of the present invention and simplifying the description, and do not explicitly or implicitly suggest that the device or element involved must have the specific orientation, or be constructed and operated in a specific orientation. Therefore, the above-mentioned orientation or positional relationship terms cannot be understood or interpreted as a limitation on the present invention.

[0045] Furthermore, the terms "first" or "second," etc., used in this application to refer to numbers or ordinal numbers are for descriptive purposes only and should not be construed as explicitly or implicitly indicating relative importance or specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, or more, unless otherwise explicitly specified.

[0046] While various embodiments of the present invention have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Many modifications, alterations, and alternatives will occur to those skilled in the art without departing from the spirit and intent of the present invention. It should be understood that various alternatives to the embodiments of the present invention described herein may be employed in the practice of the present invention. The appended claims are intended to define the scope of protection of the present invention and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A tooling for disassembling and assembling screws on the shaft end of a magnetic levitation molecular pump, characterized in that, include: The positioning device includes a plurality of blade connection structures and a first force-applying structural component connecting the plurality of blade connection structures. The plurality of blade connection structures are used to connect the impeller blades of a magnetically levitated molecular pump. The first force-applying structural component is used to apply a limiting external force. A shaft end force application device includes a shaft end screw sleeve and a second force application structure component detachably connected to the shaft end screw sleeve, wherein the shaft end screw sleeve is adapted to the shape of the shaft end screw; The first force-applying structural component and the second force-applying structural component use relative reaction forces to disassemble and assemble the shaft end screws.

2. The fixture for disassembling and assembling the shaft end screw of the magnetic levitation molecular pump according to claim 1, characterized in that, The shaft end screw ferrule includes a ferrule sleeve with a limiting structure formed on one end and an axially extending sleeve groove formed on the other end. The inner circumferential wall of the sleeve groove is formed with an annular fixing groove. The groove opening of the sleeve groove is used to form a limiting fit with the neck of the shaft end screw, and the annular fixing groove is used to accommodate and avoid the top circle of the shaft end screw.

3. The fixture for disassembling and assembling the shaft end screw of the magnetic levitation molecular pump according to claim 2, characterized in that, The sleeve groove has a half-side notch formed along the axial direction for the shaft end screw to be sleeved into the sleeve groove.

4. The fixture for disassembling and assembling the shaft end screw of the magnetic levitation molecular pump according to claim 2, characterized in that, The limiting structure is constructed as an external hexagonal boss, and the second force-applying structure component is constructed as a hexagonal wrench adapted to the external hexagonal boss.

5. The fixture for disassembling and assembling the shaft end screw of the magnetic levitation molecular pump according to claim 2, characterized in that, The limiting structure is configured as a wrench insertion hole, and the second force-applying structure component is configured as a rod-shaped wrench adapted to the wrench insertion hole.

6. The fixture for disassembling and assembling the shaft end screws of the magnetic levitation molecular pump according to any one of claims 1-5, characterized in that, The first force-applying structural component is constructed as a tubular structure, and the blade connection structure is constructed as screws vertically fixed to the tubular structure. The screws include: a limiting screw portion for inserting into the gap between the impeller blades of the magnetic levitation molecular pump; and a fixing screw portion for passing through the mounting hole of the pump casing flange.

7. The fixture for disassembling and assembling the shaft end screw of the magnetic levitation molecular pump according to claim 6, characterized in that, At least the limiting screw portion is fitted with a protective sleeve.

8. The fixture for disassembling and assembling the shaft end screw of the magnetic levitation molecular pump according to claim 7, characterized in that, The protective sleeve is made of nylon or rubber.

9. The fixture for disassembling and assembling the shaft end screw of the magnetic levitation molecular pump according to claim 6, characterized in that, The positioning device is constructed as an asymmetrical structure through a plurality of blade connecting structures, wherein one end of the tubular structure is used for a limiting connection with a fixed foundation.

10. A magnetically levitated molecular pump, applied to a fixture for disassembling and assembling the shaft end screws of a magnetically levitated molecular pump according to any one of claims 1 to 9, characterized in that, It includes a molecular pump body, the axis of which is placed on a platform in a horizontal direction.

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