An apparatus for disassembling a valve body

Abstract

The application relates to the technical field of equipment maintenance, and provides an appliance for disassembling a valve body, which comprises a base provided with a fixing hole position used for fixing an air outlet end of a shell, a top part provided with a first hole position and a second hole position with different hole diameters, a first disassembling piece matched with the first hole position, the first disassembling piece being used for penetrating through the first hole position and being connected with a first plug, and driving the first plug to move in a direction away from a control end of the shell, and a second disassembling piece matched with the second hole position, the second disassembling piece being used for penetrating through the second hole position after the first plug and a first piston are disassembled, extending into the inside of the shell from the control end of the shell and abutting against a second piston, so as to push the second piston and make the second piston and a second plug fall off from the air outlet end of the shell. The scheme realizes the disassembly of the valve body, is simple to operate, and avoids the high cost problem caused by directly replacing a new valve body without maintenance.

Description

Technical Field

[0001] This application relates to the field of equipment maintenance technology, and in particular to an apparatus for disassembling valve bodies. Background Technology

[0002] Chemical vapor deposition (CVD) is a common method for manufacturing semiconductors. This process can be used to deposit various types of materials, including insulators, semiconductors, and conductors.

[0003] Chemical vapor deposition (CVD) equipment deposits thin films on wafer surfaces by heating precursor gases within a chamber and utilizing their thermal dissociation and chemical reaction. Simultaneously, to achieve high-speed deposition at low temperatures, CVD equipment utilizes plasma enhancement technology, which uses an electric field to excite the precursor gases to form plasma at low temperatures, thereby improving deposition efficiency.

[0004] During the process, the precursor gas needs to be controlled to enter the chamber through the valve body. Over prolonged operation, the internal components of the valve body are susceptible to gas corrosion, leading to performance degradation. When a problem occurs, workers need to disassemble the valve body, remove the damaged parts for maintenance, and perform servicing on the remaining components. Due to the high degree of integration in the valve body's structure, manual disassembly and assembly is difficult, time-consuming, and labor-intensive. If disassembly and repair are not performed, and a new valve body is directly replaced, this increases replacement costs.

[0005] Therefore, how to provide a tool that facilitates the disassembly of the valve body is a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0006] This application provides a tool for disassembling a valve body, which enables the valve body to be disassembled in a simple, time-saving and labor-saving manner, while also avoiding the high cost of directly replacing the valve body without maintenance.

[0007] To address the technical problems existing in the prior art, the following technical solution is adopted: A device for disassembling a valve body, the valve body comprising a housing, a first plug and a second plug respectively sealing a control end and an outlet end of the housing, and a first piston and a second piston disposed inside the housing, wherein the first plug, the first piston, the second piston, and the second plug are arranged sequentially along the length of the housing, and the device comprises: The base has fixing holes for fixing the air outlet end of the outer casing; The top component has a first hole and a second hole with different diameters; A first disassembly component that matches the first hole, the first disassembly component being used to pass through the first hole and connect to the first plug, thereby driving the first plug to move in a direction away from the control end of the housing; A second disassembly piece that matches the second hole is used to extend through the second hole from the control end of the housing into the interior of the housing and abut against the second piston after the first plug and the first piston have been removed, so as to push the second piston so that the second piston and the second plug are both dislodged from the vent end of the housing.

[0008] Preferably, the first disassembly component includes a threaded rod, and the first plug has a threaded hole, wherein the threaded rod matches the threaded hole.

[0009] Preferably, the second disassembly component includes a push rod that extends through the second hole from the control end of the housing into the interior of the housing and abuts against the end of the second piston.

[0010] Preferably, the second piston includes a piston rod with a protrusion at one end near the second plug. The second disassembly component includes an abutment rod and a hollow rod. One end of the hollow rod extends from the control end of the housing into the interior of the housing, is sleeved on the outer periphery of the piston rod and abuts against the protrusion, and the other end abuts against the abutment rod that passes through the second hole.

[0011] Preferably, the appliance further includes a support assembly connected between the base and the top component for supporting the top component.

[0012] Preferably, there are two support components, which are located diagonally opposite the valve body on the base, with the valve body positioned between the two support components.

[0013] Preferably, the support assembly includes a fixed rod and a support column, the base is provided with a connection hole, the top component is provided with a support hole, one end of the support column is connected to the connection hole, and the other end is connected to the fixed rod that passes through the support hole.

[0014] Preferably, one end of the support column is provided with a connecting structure, which is engaged in the connecting hole, and the other end is provided with a channel structure. The fixing rod passes through the support hole and is tightly fitted in the channel structure, so that the top component abuts against the end face of the support column.

[0015] Preferably, the first hole, the second hole, and the support hole are arranged along the length of the top component.

[0016] Preferably, the longitudinal depth of the fixing hole is greater than the length of the air outlet end of the housing, and the second piston and the second plug can pass through the fixing hole.

[0017] According to the specific embodiments provided in this application, the following technical effects are disclosed: The technical solution of this application provides a device for disassembling a valve body. The valve body includes a housing, a first plug and a second plug respectively sealing the control end and the air outlet end of the housing, and a first piston and a second piston disposed inside the housing. The first plug, the first piston, the second piston, and the second plug are arranged sequentially along the length of the housing. The device includes: a base with a fixing hole for fixing the air outlet end of the housing; a top component with a first hole and a second hole of different diameters; a first disassembly component matching the first hole, which is used to pass through the first hole and connect to the first plug, driving the first plug to move away from the control end of the housing; and a second disassembly component matching the second hole, which, after the first plug and the first piston are removed, passes through the second hole and extends from the control end of the housing into the interior of the housing to abut against the second piston, thereby pushing the second piston to cause both the second piston and the second plug to detach from the air outlet end of the housing. In this solution, the first plug is removed by using the threaded engagement between the first disassembly component and the first plug at the first hole, and the first piston is taken out. Then, the second piston and the second plug are pushed out at the second hole by using the second disassembly component. This achieves the disassembly of the valve body, which is simple to operate, saves time and effort, and avoids the high cost problem of directly replacing the valve body without maintenance. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is an overall schematic diagram of the valve body provided in the embodiments of this application; Figure 2 This is a cross-sectional schematic diagram of the valve body provided in an embodiment of this application; Figure 3 This is a schematic diagram showing the first disassembly component and the valve body in conjunction with each other, as provided in an embodiment of this application. Figure 4 This is provided by the embodiments of this application. Figure 3 A cross-sectional view under the condition; Figure 5 This is provided by the embodiments of this application. Figure 3 A schematic diagram of an explosion in a certain state; Figure 6 This is a schematic diagram showing the second disassembly component and its engagement with the valve body, as provided in an embodiment of this application. Figure 7 This is provided by the embodiments of this application. Figure 6 A cross-sectional view under the condition; Figure 8 This is provided by the embodiments of this application. Figure 6 A schematic diagram of an explosion in a certain state.

[0020] Figure label: 1. Valve body; 2. Base; 3. Top component; 4. First disassembly component; 5. Second disassembly component; 6. Support assembly; 10. Housing; 11. First plug; 12. Second plug; 13. First piston; 14. Second piston; 20. Fixing hole; 21. Connecting hole; 30. First hole; 31. Second hole; 32. Supporting hole; 50. Abutment rod; 51. Hollow rod; 60. Fixing rod; 61. Support column; 110. Threaded hole; 610. Connecting structure; 620. Channel structure. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0022] As described in the background section, during the process, the precursor gas needs to be controlled to enter the chamber through a valve body. Over long-term operation, the internal components of the valve body are susceptible to gas corrosion and mechanical wear, leading to performance degradation. When a problem occurs with the valve body, operators need to disassemble it, remove the damaged components for maintenance, and perform servicing on the remaining parts. Due to the high degree of integration in the valve body's structure, manual disassembly and assembly are difficult, time-consuming, and labor-intensive. If disassembly and repair are not performed, and a new valve body is directly replaced, this increases replacement costs.

[0023] Based on this, the present application aims to provide a device for disassembling valve bodies to solve the technical problem of cumbersome disassembly in the prior art.

[0024] The embodiments of this application will be analyzed in detail below with reference to the accompanying drawings.

[0025] refer to Figure 1 and Figure 2The valve body 1 includes an outer shell 10, a first plug 11 and a second plug 12 respectively sealing the control end and the air outlet end of the outer shell 10, and a first piston 13 and a second piston 14 disposed inside the outer shell 10. The first plug 11, the first piston 13, the second piston 14 and the second plug 12 are arranged sequentially along the length direction of the outer shell 10.

[0026] The valve body 1 is cylindrical; when the valve body 1 is working, the precursor gas flows in from the control end, flows through the first plug 11, the first piston 13, the second piston 14 and the second plug 12 and then flows out from the outlet end.

[0027] refer to Figures 1 to 6 An apparatus for disassembling a valve body includes: a base 2 with a fixing hole 20 for fixing the air outlet end of a housing 10; a top component 3 with a first hole 30 and a second hole 31 of different diameters; a first disassembly component 4 matching the first hole 30, passing through the first hole 30 and threadedly connected to a first plug 11, the first disassembly component 4 being screwed into the first plug 11 to move the first plug 11 away from the control end of the housing 10; and a second disassembly component 5 matching the second hole 31, after the first plug 11 and the first piston 13 are removed, the second disassembly component 5 passing through the second hole 31, extending from the control end of the housing 10 into the interior of the housing 10 and abutting against a second piston 14, the second disassembly component 5 being used to push the second piston 14 so that both the second piston 14 and the second plug 12 fall off from the air outlet end of the housing 10.

[0028] The fixing hole 20 holds the columnar valve body 1 upright on the base 2 for subsequent disassembly. The first hole 30 and the second hole 31 on the top component 3 provide positioning guidance for the use of the first disassembly component 4 and the second disassembly component 5, respectively.

[0029] As a specific implementation method, refer to Figure 4 The longitudinal depth of the fixing hole 20 is greater than the length of the air outlet end of the outer casing 10, and the second piston 14 and the second plug 12 can pass through the fixing hole 20.

[0030] As an example of disassembling the first plug 11 and the first piston 13, refer to Figures 3 to 5The operator fixes the valve body 1 to the base 2, aligns the first hole 30 of the top component 3 with the center of the first plug 11, passes the first disassembly piece 4 through the first hole 30 and threadedly connects the first disassembly piece 4 to the first plug 11. Since the air outlet of the valve body 1 is fixed in the fixed hole 20, the operator only needs to rotate the first disassembly piece 4 to move the first plug 11, which is threadedly engaged with the first disassembly piece 4, away from the control end along the thread to detach it from the housing 10. After removing the top component 3, the operator removes the first plug 11 from the first disassembly piece 4 and then removes the first piston 13 located inside the housing 10. The first piston 13 is movably installed in the housing 10, thus achieving the disassembly of the first plug 11 and the first piston 13.

[0031] As an example of disassembling the second plug 12 and the second piston 14, refer to Figures 6 to 8 The worker reinstalls the top component 3, aligning the second hole 31 of the top component 3 with the center of the second piston 14. The second disassembly piece 5 is then passed through the second hole 31 and inserted into the housing 10 to abut against the second piston 14. Since the fixing hole 20 is a through hole, the worker only needs to push the second disassembly piece 5 to transmit the thrust to the second piston 14 and the second plug 12, causing the second piston 14 and the second plug 12 to detach from the housing 10 and slide down the fixing hole 20 onto the worktable. This completes the disassembly of the second plug 12 and the second piston 14.

[0032] As a specific implementation method, refer to Figure 4 and Figure 7 The first hole 30 matches the diameter of the first disassembly part 4, and the second hole 31 matches the diameter of the second disassembly part 5. This arrangement ensures that the first disassembly part 4 is limited by the first hole 30 during rotation, and the second disassembly part 5 is limited by the second hole 31 during pushing. Neither of them is prone to tilting or shifting during their respective movements, thus ensuring the stability of the disassembly process.

[0033] As a specific implementation method, refer to Figure 4 and Figure 7 The main body of the first plug 11 is a flat disc-shaped structure, and the main body of the second piston 14 is a long strip-shaped structure. The shape and diameter of the first plug 11 are larger than the shape and diameter of the second piston 14. The diameter of the first hole 30 is larger than the diameter of the second hole 31. The diameter of the first disassembly part 4 is larger than the diameter of the second disassembly part 5.

[0034] In summary, by using the threaded engagement between the first disassembly piece 4 and the first plug 11 at the first hole 30, the first plug 11 can be removed, and the first piston 13 can be taken out. Then, by using the second disassembly piece 5 at the second hole 31, the second piston 14 and the second plug 12 can be pushed out. This achieves the disassembly of the valve body 1. The operation is simple, time-saving, and labor-saving, and also avoids the high cost problem caused by directly replacing the valve body without maintenance.

[0035] As a preferred embodiment, refer to Figures 3 to 5 The first disassembly component 4 includes a threaded rod, and the end of the first plug 11 away from the first piston 13 has a threaded hole 110, and the threaded rod matches the threaded hole 110.

[0036] As an example, the worker passes the threaded rod through the first hole 30 so that the threaded end of the threaded rod abuts against the top of the threaded hole 110. The threaded rod is rotated so that the threaded end is screwed into the threaded hole 110. At the same time, the first plug 11 moves along the thread in a direction away from the first piston 13 so as to disengage from the control end of the housing 10. When the relative movement between the threaded rod and the first plug 11 ends, the tail end of the threaded rod abuts against the top surface of the top component 3, and the threaded end is connected to the first plug 11.

[0037] As an optional implementation, the second disassembly member 5 includes a push rod that extends from the control end of the housing 10 through the second hole 31 into the interior of the housing 10 and abuts against the end of the second piston 14.

[0038] In this process, the thrust is transmitted to the second piston 14 and the second plug 12 by means of a single push rod, causing them to fall off from the air outlet of the outer casing 10.

[0039] As a preferred embodiment, refer to Figures 6 to 8 The second piston 14 includes a piston rod, and the piston rod has a protrusion at one end near the second plug 12. The second disassembly component 5 includes an abutment rod 50 and a hollow rod 51. One end of the hollow rod 51 extends from the control end of the housing 10 into the interior of the housing 10, is sleeved on the outer periphery of the piston rod and abuts against the protrusion, and the other end abuts against the abutment rod 50 provided through the second hole 31.

[0040] Since the piston rod (i.e. the main body of the second piston 14) has a long and thin strip structure, one end of the hollow rod 51 is fitted around the outer periphery of the piston rod to perfectly match the shape of the piston rod. Then, with the push of the abutment rod 50, the thrust is transmitted to the second piston 14 and the second plug 12.

[0041] As an example, after the worker removes the first plug 11 and the first piston 13, the hollow rod 51 is inserted into the outer casing 10 and fitted onto the second piston 14. Then, the abutment rod 50 is passed through the second hole 31, so that the abutment rod 50 abuts against the end of the hollow rod 51 away from the second piston 14. Pushing the abutment rod 50, the hollow rod 51 transmits the thrust to the second piston 14 and the second plug 12, causing them to detach from the air outlet of the outer casing 10 and slide down the fixing hole 20 onto the worktable. In some cases, if the hollow rod 51 is too tightly connected to the second piston 14, it may detach from the outer casing 10 along with the second piston 14 and slide down the fixing hole 20.

[0042] As a preferred embodiment, refer to Figures 3 to 8 The appliance also includes a support component 6, which is connected between the base 2 and the top component 3 to support the top component 3.

[0043] As a preferred embodiment, refer to Figure 3 and Figure 6 There are two support components 6. The two support components 6 are located at two opposite corners of the base 2, and the valve body 1 is located between the two support components 6. The two support components 6 and the valve body 1 are all located on the same diagonal line of the base 2. The arrangement of the support components 6 provides two fulcrums for the top component 3, so that the balance of the top component 3 will not be affected by excessive movements when the operator performs disassembly, thus ensuring the safety of the operation.

[0044] As a preferred embodiment, refer to Figures 3 to 8 The support component 6 includes a fixed rod 60 and a support column 61. The base 2 also has a connection hole 21, and the top component 3 also has a support hole 32. One end of the support column 61 is connected to the connection hole 21, and the other end is connected to the fixed rod 60 that passes through the support hole 32.

[0045] Among them, the support column 61 serves to separate the base 2 from the top component 3, and the cooperation between the fixing rod 60 and the support column 61 realizes the limiting and fixing of the top component 3 by the support component 6.

[0046] In a preferred embodiment, one end of the support column 61 is provided with a connecting structure 610, which is engaged in the connecting hole 21, and the other end is provided with a channel structure 620. The fixing rod 60 passes through the support hole 32 and is tightly fitted in the channel structure 620, so that the top component 3 abuts against the end face of the support column 61.

[0047] The connecting structure 610 is formed by extending outward from one end of the support column 61, and the channel structure 620 is formed by recessing inward from the other end of the support column 61. The insertion and engagement of the connecting structure 610 with the connecting hole 21 and the insertion and engagement of the fixing rod 60 with the channel structure 620 make the support component 6 stably connected between the base 2 and the top component 3, so as to achieve a good support effect for the top component 3.

[0048] As a preferred embodiment, refer to Figures 3 to 8 The first hole 30, the second hole 31 and the support hole 32 are arranged along the length of the top component 3.

[0049] As an example, with Figure 3 and Figure 6 Based on the perspective, and referencing Figures 3 to 8 The top component 3 has six holes arranged sequentially from left to right along its length: a first support hole, a second support hole, a first hole 30, a second hole 31, a third support hole, and a fourth support hole. The first hole 30 is for the passage of the first disassembly member 4, the second hole 31 is for the passage of the second disassembly member 5, and the first to fourth support holes are for connecting the support assembly 6. (Reference) Figure 3 Two support components 6 are respectively connected to the first support hole and the third support hole. The worker uses the first disassembly piece 4 to remove the first plug 11, loosens the fixing rod 60 and removes the top component 3, removes the first plug 11 from the first disassembly piece 4, and then removes the first piston 13 from the outer casing 10. This completes the disassembly of the first plug 11 and the first piston 13. Then refer to... Figure 4 The worker moves the top component 3 one hole to the left, aligning the second hole 31 with the valve body 1. The two fixing rods 60 are then passed through the second and fourth support holes respectively and connected to the corresponding support columns 61 to achieve locking support of the support component 6. Then, the second disassembly component 5 is used to push the second piston 14 and the second plug 12, causing the second piston 14 and the second plug 12 to fall out of the outer shell 10 and slide down the fixing hole 20 onto the worktable. This completes the disassembly of the second plug 12 and the second piston 14, thus completing the entire valve body 1 disassembly process.

[0050] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0051] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0052] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A device for disassembling a valve body, the valve body (1) comprising a housing (10), a first plug (11) and a second plug (12) respectively sealing the control end and the outlet end of the housing (10), and a first piston (13) and a second piston (14) disposed inside the housing (10), the first plug (11), the first piston (13), the second piston (14) and the second plug (12) being arranged sequentially along the length direction of the housing (10), characterized in that, The apparatus includes: The base (2) has a fixing hole (20) for fixing the air outlet of the outer shell (10); The top component (3) has a first hole (30) and a second hole (31) with different diameters. The first disassembly component (4) matches the first hole (30) and passes through the first hole (30) to connect with the first plug (11), thereby driving the first plug (11) to move away from the outer shell (10); The second disassembly component (5) matches the second hole (31). After the first plug (11) and the first piston (13) are removed, it passes through the second hole (31) and extends from the control end of the housing (10) into the interior of the housing (10) to abut against the second piston (14) so ​​as to push the second piston (14) so ​​that the second piston (14) and the second plug (12) both fall off from the air outlet end of the housing (10).

2. The appliance for disassembling a valve body according to claim 1, characterized in that, The longitudinal depth of the fixing hole (20) is greater than the length of the air outlet end of the outer shell (10), and the second piston (14) and the second plug (12) can pass through the fixing hole (20).

3. The appliance for disassembling a valve body according to claim 1 or 2, characterized in that, The first disassembly component (4) includes a threaded rod, and the first plug (11) has a threaded hole (110), the threaded rod being matched with the threaded hole (110).

4. The appliance for disassembling a valve body according to claim 1, characterized in that, The second disassembly component (5) includes a push rod that extends through the second hole (31) from the control end of the housing (10) into the interior of the housing (10) and abuts against the end of the second piston (14).

5. The apparatus for disassembling a valve body according to claim 1, characterized in that, The second piston (14) includes a piston rod with a protrusion at one end near the second plug (12). The second disassembly part (5) includes an abutment rod (50) and a hollow rod (51). One end of the hollow rod (51) extends from the control end of the housing (10) into the interior of the housing (10), is sleeved on the outer periphery of the piston rod and abuts against the protrusion, and the other end abuts against the abutment rod (50).

6. The apparatus for disassembling a valve body according to claim 1, characterized in that, The appliance also includes a support assembly (6) connected between the base (2) and the top component (3) for supporting the top component (3).

7. The appliance for disassembling a valve body according to claim 6, characterized in that, The support assembly (6) includes a fixing rod (60) and a support column (61). The base (2) also has a connection hole (21), and the top component (3) also has a support hole (32). One end of the support column (61) is connected to the connection hole (21), and the other end is connected to the fixing rod (60) that passes through the support hole (32).

8. The appliance for disassembling a valve body according to claim 7, characterized in that, One end of the support column (61) is provided with a connecting structure (610), which is engaged in the connecting hole (21). The other end is provided with a channel structure (620). The fixing rod (60) passes through the support hole (32) and is tightly fitted in the channel structure (620), so that the top component (3) abuts against the end face of the support column (61).

9. The appliance for disassembling a valve body according to claim 7, characterized in that, The first hole (30), the second hole (31) and the support hole (32) are arranged along the length of the top component (3).

10. The apparatus for disassembling a valve body according to any one of claims 7 to 9, characterized in that, The number of the support components (6) is two, and the two support components (6) and the valve body (1) are located on the diagonal of the base (2), and the valve body (1) is located between the two support components (6).

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