Clamp for vacuum coating

Abstract

The utility model relates to a kind of clamp for vacuum coating, including clamp body, each clamping part for clamping substrate is arranged on the circumference of clamp body, clamping part is movably installed on clamp body, adjusting mechanism is also provided on clamp body, adjusting mechanism is used to adjust each clamping part around vertical direction and rotates itself. In the above scheme, by adjusting mechanism adjustment each clamping part rotates itself around the center, so each substrate can be adjusted and rotates itself, so that the substrate at each position on clamp is evenly coated, so that each place film layer thickness is consistent, reduces the formation of positive and negative sides.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment, and specifically to a fixture for vacuum coating. Background Technology

[0002] Vacuum coating technology involves evaporating or sputtering the material to be deposited under high vacuum conditions, causing its atoms or molecules to disperse and deposit on the workpiece surface, forming a uniform and dense film. This technology is widely used in semiconductor devices, optical components, decorative materials, functional coatings, and many other fields, significantly improving the performance and aesthetics of materials. As a revolutionary breakthrough in modern material surface treatment, its core lies in utilizing a vacuum environment to achieve a high-purity, high-precision thin film deposition process. Fixing and positioning the workpiece during vacuum coating is crucial to ensuring the uniformity of the coating layer and the quality of the workpiece; therefore, vacuum coating fixtures are required to hold the workpiece (substrate). Existing vacuum coating fixtures cannot guarantee the uniformity of the coating area or reduce the formation of uneven coatings during batch coating, thus necessitating a solution to this problem. Utility Model Content

[0003] The purpose of this invention is to provide a fixture for vacuum coating that can make the film thickness of the substrate at various positions on the fixture more uniform and reduce the formation of uneven surfaces.

[0004] A fixture for vacuum coating is characterized in that it includes a fixture body, and clamping parts for clamping a substrate are arranged at intervals along its circumference on the fixture body. The clamping parts are movably mounted on the fixture body, and the fixture body is also provided with an adjustment mechanism for adjusting the rotation of each clamping part around the vertical direction.

[0005] The specific solution is as follows: the clamping part includes a column, the outer contour of which is cylindrical, and the adjusting mechanism adjusts the column to rotate.

[0006] The upper end of the column extends into its body and has a circular hole, which is arranged concentrically with the column.

[0007] The upper end of the column extends to the upper side of the fixture body, and the substrate is assembled in the circular hole.

[0008] The fixture body is provided with circular assembly holes, and the column is inserted into the assembly holes.

[0009] The fixture body includes a clamping component, which has an assembly body in the shape of a ring. An assembly hole is provided through the assembly body. The lower end of the column extends to the lower side of the assembly body. An adjustment mechanism is arranged corresponding to the lower end of the column.

[0010] The lower end of the column is set to be flush. The adjustment mechanism includes an adjustment component with an adjustment body. The adjustment body is circular. The assembly body and the adjustment body are arranged correspondingly and concentrically. The lower end of the column and the upper surface of the adjustment body abut against each other. The height of the upper surface of the adjustment body gradually increases or decreases along direction A. Direction A is the direction from the center of the adjustment body along the radial direction of the adjustment body to the outside of the adjustment body. The adjustment body is rotated relative to the assembly body.

[0011] The height of the upper surface of the body gradually decreases along direction A of the body.

[0012] The lower surface of the assembly body has a protruding annular portion on its outer periphery. The adjusting body is located inside the annular portion. The mounting part also has an A1 connecting body, which is located inside the assembly body and protrudes from the lower surface of the assembly body. The adjusting part also has an annular A2 connecting body, which is located inside the adjusting body. The lower end of the A1 connecting body is located inside the A2 connecting body. The A1 connecting body and the A2 connecting body are connected by a ball bearing rotation assembly.

[0013] The adjusting component is a ring-shaped component, and a lever arranged radially along the lower surface of the adjusting component is provided.

[0014] In the above scheme, by setting an adjustment mechanism to adjust the rotation of each clamping part around its center, the rotation of each substrate can be adjusted, thereby making the substrate at each position on the fixture uniformly coated, so that the film thickness is consistent everywhere, and reducing the formation of uneven surfaces. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of this utility model.

[0016] Figure 2 for Figure 1 A bottom view.

[0017] Figure 3 This is a schematic diagram of the adjusting component.

[0018] Figure 4 This is a cross-sectional view of the present invention.

[0019] 00-Substrate, 10-Clamp body, 11-Column, 20-Adjusting component, 21-Adjusting body, 22-Lever, 23-Ball bearing. Detailed Implementation

[0020] To make the objectives and advantages of this utility model clearer, the following detailed description is provided in conjunction with embodiments. It should be understood that the following text is merely used to describe one or more specific embodiments of this utility model and does not strictly limit the scope of protection specifically claimed by this utility model.

[0021] As used herein, the terms “parallel,” “perpendicular,” and the like are not limited to their strict geometric definitions, but include tolerances for reasonable and inconsistent machining or human errors.

[0022] like Figure 1 , 2 As shown, a fixture for vacuum coating includes a fixture body 10. The fixture body 10 has clamping parts spaced circumferentially for clamping substrates 00. The clamping parts are movably mounted on the fixture body 10. The fixture body 10 also has an adjustment mechanism for adjusting the rotation of each clamping part around its center. In this invention, by adjusting the rotation of each clamping part around its center using the adjustment mechanism, the rotation of each substrate 00 (workpiece) can be adjusted, resulting in uniform coating of the substrate 00 at all positions on the fixture, ensuring consistent film thickness and reducing uneven coating.

[0023] A further design includes a clamping unit comprising a column 11, the outer contour of which is cylindrical. An adjustment mechanism allows the column 11 to rotate. A circular hole extends concentrically from the upper end of the column 11 into its body. The upper end of the column 11 extends to the upper side of the clamping body 10, and the substrate 00 is fitted into the circular hole. The clamping body 10 has circular mounting holes, into which the column 11 is inserted. In practice, the lower end of the column 11 is sealed off. Using this method, only the substrate 00 needs to be fitted into the mounting hole, improving the ease of substrate 00 fitting and increasing coating efficiency. The column 11 can be made of brass to enhance conductivity and improve coating uniformity. Because the rotation is driven by friction, there will be frictional wear, but this is sufficient for the required usage cycle. Replacement can be made according to production conditions and usage cycle to ensure stable and reliable production.

[0024] like Figure 3 , 4As shown: The fixture body 10 includes a clamping member with an assembly body that is annular in shape. An assembly hole is provided through the assembly body. The lower end of the column 11 extends to the lower side of the assembly body. An adjustment mechanism is arranged correspondingly to the lower end of the column 11. The lower end of the column 11 is flush with the lower end. The adjustment mechanism includes an adjustment member 20 with an adjustment body 21 that is annular in shape. The assembly body and the adjustment body 21 are arranged concentrically and correspondingly. The lower end of the column 11 abuts against the upper surface of the adjustment body 21. The height of the upper surface of the adjustment body 21 gradually increases or decreases along direction A, where direction A is the direction from the center of the adjustment body 21 along the radial direction of the adjustment body 21 to the outer side of the adjustment body 21. The adjustment body 21 is rotated relative to the assembly body. Preferably, the height of the upper surface of the adjustment body 21 gradually decreases along direction A. The lower surface of the mounting body has a protruding annular portion on its outer periphery. The adjusting body 21 is located inside the annular portion. The mounting component also has an A1 connecting body, which is located inside the mounting body and protrudes from the lower surface of the mounting body. The adjusting component 20 also has an annular A2 connecting body, which is located inside the adjusting body 21. The lower end of the A1 connecting body is located inside the A2 connecting body. The A1 connecting body and the A2 connecting body are rotatably connected by ball bearings 23. The adjusting component 20 is an annular component, and a lever 22 arranged radially along the lower surface of the adjusting component 20 is provided.

[0025] Specifically, the clamping component is composed of a circular part, and the clamping component and the adjusting component 20 are stacked and rotated together. In the above-described fixture, the clamping component and the adjusting component 20 are connected by ball bearings 23 (steel balls), and the rotation is continuous, smooth, and without jamming via a lever 22. By setting an inclined friction mechanism, during use, the adjusting component 20 rotates under the drive of the lever 22, while the clamping component remains stationary. The column 11 rotates under its own weight, friction, and the rotation of the adjusting component 20 driven by the lever 22, allowing the substrate 00 to rotate continuously. This improves the uniformity of the vacuum-deposited film layer on the substrate 00 and reduces the formation of uneven surfaces.

[0026] The above description is merely a preferred embodiment of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model. Structures, devices, and operating methods not specifically described or explained in this utility model, unless otherwise specified or limited, shall be implemented according to conventional methods in the field.

Claims

1. A fixture for vacuum coating, characterized in that: The fixture includes a fixture body, on which clamping parts for clamping substrates are arranged at intervals along its circumference. The clamping parts are movably mounted on the fixture body. The fixture body is also provided with an adjustment mechanism for adjusting the rotation of each clamping part around the vertical direction.

2. The fixture for vacuum coating according to claim 1, characterized in that: The clamping part includes a column, the outer contour of which is cylindrical, and an adjustment mechanism adjusts the column to rotate.

3. The fixture for vacuum coating according to claim 2, characterized in that: The upper end of the column extends into its body and has a circular hole, which is arranged concentrically with the column.

4. The fixture for vacuum coating according to claim 3, characterized in that: The upper end of the column extends to the upper side of the fixture body, and the substrate is assembled in the circular hole.

5. The fixture for vacuum coating according to claim 2, characterized in that: The fixture body is provided with circular assembly holes, and the column is inserted into the assembly holes.

6. The fixture for vacuum coating according to claim 5, characterized in that: The fixture body includes a clamping component, which has an assembly body in the shape of a ring. An assembly hole is provided through the assembly body. The lower end of the column extends to the lower side of the assembly body. An adjustment mechanism is arranged corresponding to the lower end of the column.

7. The fixture for vacuum coating according to claim 5, characterized in that: The lower end of the column is set to be flush. The adjustment mechanism includes an adjustment component with an adjustment body. The adjustment body is circular. The assembly body and the adjustment body are arranged correspondingly and concentrically. The lower end of the column and the upper surface of the adjustment body abut against each other. The height of the upper surface of the adjustment body gradually increases or decreases along direction A. Direction A is the direction from the center of the adjustment body along the radial direction of the adjustment body to the outside of the adjustment body. The adjustment body is rotated relative to the assembly body.

8. The fixture for vacuum coating according to claim 7, characterized in that: The height of the upper surface of the body gradually decreases along direction A of the body.

9. The fixture for vacuum coating according to claim 7, characterized in that: The lower surface of the assembly body has a protruding annular portion on its outer periphery. The adjusting body is located inside the annular portion. The mounting part also has an A1 connecting body, which is located inside the assembly body and protrudes from the lower surface of the assembly body. The adjusting part also has an annular A2 connecting body, which is located inside the adjusting body. The lower end of the A1 connecting body is located inside the A2 connecting body. The A1 connecting body and the A2 connecting body are connected by a ball bearing rotation assembly.

10. The fixture for vacuum coating according to claim 9, characterized in that: The adjusting component is a ring-shaped component, and a lever arranged radially along the lower surface of the adjusting component is provided.

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