High-sensitivity displacement sensor based on magnetoelectric effect and multi-dimensional sensing device

Abstract

The utility model relates to detection sensor technical field provides a kind of high sensitivity displacement sensor and multidimensional sensing device based on magnetoelectric effect, and high sensitivity displacement sensor based on magnetoelectric effect includes: magnetic yoke sleeve, with accommodating space and with the air gap between the detected object;Magnetoelectric material component, configuration in the accommodating space;Excitation coil, provide active magnetic field excitation to make the magnetic yoke sleeve and the detected object between form closed magnetic circuit or make the magnetic yoke sleeve and the detected object on configuration follow-up component between form closed magnetic circuit;When the detected object generates displacement, the air gap changes in turn to make the magnetic field intensity acting on the magnetoelectric material component change to make the magnetoelectric material component produce and the magnetic field intensity corresponding electrical signal.The utility model has realized to the high sensitivity sensing detection of displacement.

Description

Technical Field

[0001] This utility model relates to the field of detection sensor technology, specifically to a high-sensitivity displacement sensor and multi-dimensional sensing device based on the magnetoelectric effect. Background Technology

[0002] Linear displacement sensors measure the linear displacement of an object by converting mechanical displacement into an electrical signal. They are widely used in various applications requiring precise displacement measurement, such as machine tool control, hydraulic systems, and automated equipment. Linear displacement sensors can accurately measure the offset of a target object relative to the sensor, thereby enabling position detection and control. Applications include robotic arms, automotive steering systems, and aerospace.

[0003] Non-contact linear displacement sensors have become key components in industrial automation and precision measurement due to their wear-free operation, high precision, strong environmental adaptability, and ease of integration. Existing non-contact displacement sensors are mainly divided into optical and electromagnetic categories. Optical non-contact displacement sensors, represented by laser displacement sensors, have complex structures, often requiring additional light sources and other accessories, limiting their application in complex industrial environments, and are also expensive. Electromagnetic non-contact displacement sensors, represented by eddy current sensors, have the advantage of high structural integration, but they suffer from high sensitivity to the materials of the measured object. On the one hand, the diameter of the measured object must be at least 1.5 times larger than the diameter of the probe head; on the other hand, they can only detect metallic materials, and different probe designs or calibrations are required for different materials. Therefore, a new sensor is needed to address these shortcomings. Utility Model Content

[0004] In view of the deficiencies in the existing technology, the purpose of this utility model is to provide a high-sensitivity displacement sensor and multi-dimensional sensing device based on the magnetoelectric effect.

[0005] A high-sensitivity displacement sensor based on the magnetoelectric effect provided by this utility model includes: The magnetic yoke sleeve has a receiving space and an air gap between it and the object being detected; A magnetoelectric material assembly, disposed in the receiving space, includes a magnetostrictive body and a piezoelectric body, both of which are disposed on the magnetic yoke sleeve and are in a pre-compressed state; The excitation coil enables a closed magnetic circuit to be formed between the magnetic yoke sleeve and the object being tested, or enables a closed magnetic circuit to be formed between the magnetic yoke sleeve and the follower component disposed on the object being tested.

[0006] Preferably, the object being detected is a magnetically conductive metal material, a non-magnetically conductive metal material, or a non-magnetically conductive material.

[0007] Preferably, the follower component is a magnetically conductive metal sheet, a non-magnetically conductive metal sheet, or an excitation coil.

[0008] Preferably, the magnetostrictive body and the piezoelectric body are connected in series; or the magnetostrictive body and the piezoelectric body are connected in parallel.

[0009] Preferably, it also includes a permanent magnet, wherein the permanent magnet, piezoelectric body, and magnetostrictive body are connected in series.

[0010] Preferably, the excitation coil is configured in any of the following ways: The excitation coil is arranged circumferentially along the magnetoelectric material assembly and configured in the receiving space; The excitation coil serves as a follower component and is fixed to the object being detected. The excitation coil is disposed in the receiving space and is arranged in series with the magnetoelectric material assembly and is positioned on the side close to the object being detected; The excitation coil is arranged at a distance from the magnetoelectric material assembly and is positioned on the side closer to the object being detected.

[0011] Preferably, a secondary excitation coil is also provided, which is arranged circumferentially along the yoke sleeve.

[0012] Preferably, the axial section of the magnetic yoke sleeve is U-shaped.

[0013] Preferably, the piezoelectric element is electrically connected to the charge amplifier.

[0014] According to the present invention, a multidimensional sensing device includes a plurality of high-sensitivity displacement sensors based on the magnetoelectric effect.

[0015] Compared with the prior art, the present invention has the following beneficial effects: This invention utilizes an excitation coil to provide active magnetic field excitation. A closed magnetic circuit is formed by the object being detected itself or a fixed follower component on the object. This composite magnetic field allows the magnetoelectric material assembly to operate in a resonant state with optimal sensitivity. Displacement of the follower component or the metal object being detected causes a change in the air gap between it and the magnetoelectric sensing probe, thereby causing a change in the magnetic field strength acting on the magnetoelectric material assembly. The magnetoelectric sensing probe can always operate at its optimal sensitivity, ultimately achieving highly sensitive displacement sensing and detection. It is not limited by the size of the object being detected and has advantages such as simple structure, high integration, ease of installation and use, and good versatility. Attached Figure Description

[0016] Other features, objects, and advantages of this invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings: Figure 1 This is a schematic diagram of the detection principle of the magnetically conductive metal material in Example 2; Figure 2 for Figure 1 A schematic diagram of the frequency response of the magnetic field sensitivity of the corresponding magnetoelectric material; Figure 3 This is a schematic diagram of the detection principle of the fixed magnetic metal sheet follower component for the non-metallic material object under test in Example 3; Figure 4 This is a schematic diagram of the detection principle of the fixed excitation coil follower component for the non-metallic material object being detected in Example 4; Figure 5 This is a schematic diagram of the detection principle of the non-metallic material object being tested, where a non-magnetic metal sheet is fixed to the follower component. Figure 6 This is a schematic diagram of the detection principle of the non-magnetic metal material being tested in Example 6; Figure 7 This is a schematic diagram of the magnetoelectric probe for detecting magnetically conductive metal materials in Example 7; Figure 8 This is a schematic diagram of the structure of the magnetoelectric probe with a secondary excitation coil in Example 8; Figure 9 This is a schematic diagram of the U-shaped magnetic circuit type magnetoelectric probe in Example 9; Figure 10 This is a schematic diagram of the parallel magnetoelectric material magnetoelectric probe in Example 10; Figure 11 This is a schematic diagram of the detection curve of the displacement sensor.

[0017] The diagram shows: Detected object 1; Magnetic yoke sleeve 2; Excitation coil 3; Magnetostrictive body 4; Piezoelectric element 5; Permanent magnet 6; Follower component 7; Secondary excitation coil 8. Detailed Implementation

[0018] The present invention will now be described in detail with reference to specific embodiments. These embodiments will help those skilled in the art to further understand the present invention, but do not limit the present invention in any way. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all fall within the protection scope of the present invention.

[0019] Example 1: This invention provides a high-sensitivity displacement sensor based on the magnetoelectric effect, comprising a magnetic yoke sleeve 2, an excitation coil 3, and a magnetoelectric material assembly. The magnetic yoke sleeve 2 and the magnetoelectric material assembly constitute a magnetoelectric sensing probe. The magnetic yoke sleeve 2 has a receiving space, in which the magnetoelectric material assembly is disposed. The axial cross-section of the magnetic yoke sleeve 2 is preferably U-shaped. An air gap exists between the magnetic yoke sleeve 2 and the object being detected 1. The excitation coil 3 provides active magnetic field excitation and is an electromagnetic coil. The object being detected 1 is made of a magnetically conductive metal material. A closed magnetic circuit is formed between the magnetic yoke sleeve 2 and the object being detected 1. When the excitation coil 3 operates at the resonant frequency of the magnetoelectric material assembly, the magnetic field sensitivity frequency response of the magnetoelectric material assembly is activated. The magnetoelectric material assembly can sense the change in the spatial magnetic field caused by the displacement of the object being detected 1 and output a sensing electrical signal. When the object being detected 1 undergoes displacement, the air gap changes, thereby changing the magnetic field strength acting on the magnetoelectric material assembly. This causes the magnetoelectric material assembly to generate an electrical signal corresponding to the magnetic field strength. Displacement measurement is achieved by acquiring this electrical signal. This invention realizes a highly integrated magnetoelectric displacement sensor structure. For magnetically conductive objects, no additional follower components are required. The structure is simple and easy to use.

[0020] This invention also provides a high-sensitivity displacement sensor based on the magnetoelectric effect, including a magnetic yoke sleeve 2, an excitation coil 3, and a magnetoelectric material assembly. The magnetic yoke sleeve 2 has a receiving space, and the magnetoelectric material assembly is disposed in the receiving space. There is an air gap between the magnetic yoke sleeve 2 and the object being detected 1. The excitation coil 3 provides active magnetic field excitation. The object being detected 1 is a non-magnetic material, which can be a non-magnetic metal material or a non-metallic material. A follower component 7 is disposed on the object being detected 1. The follower component 7 is a magnetically conductive metal sheet or the excitation coil 3. A closed magnetic circuit is formed between the magnetic yoke sleeve 2 and the follower component 7. When the excitation coil 3 operates at the resonant frequency of the magnetoelectric material assembly, the magnetic field sensitivity frequency response of the magnetoelectric material assembly is activated. When the object being detected 1 is displaced, the air gap changes, thereby changing the magnetic field strength acting on the magnetoelectric material assembly. This causes the magnetoelectric material assembly to generate an electrical signal corresponding to the magnetic field strength. The displacement is measured by acquiring the electrical signal.

[0021] Specifically, the magnetoelectric material assembly includes a magnetostrictive body 4 and a piezoelectric body 5, wherein the magnetostrictive body 4 and the piezoelectric body 5 are connected in series and are both in a pre-compressed state; or the magnetostrictive body 4 and the piezoelectric body 5 are connected in parallel and are both in a pre-compressed state.

[0022] Specifically, in this embodiment, a permanent magnet 6 can also be configured. The permanent magnet 6, piezoelectric element 5, and magnetostrictive element 4 are connected in series. The bias magnetic field Hdc provided by the permanent magnet 6, through the cooperation of the excitation coil 3 and the permanent magnet 6, achieves the optimal bias magnetic field and resonant motion in the closed magnetic circuit of the sensing, so that the sensor keeps working in the highest sensitivity state. When the air gap changes, a certain change will also occur. The influence of the change in bias magnetic field can be calibrated experimentally and eliminated in signal processing, thereby further ensuring the detection accuracy. This utility model achieves the optimal bias magnetic field and resonant motion in the closed magnetic circuit of the sensing by cooperating with the excitation coil 3 and the permanent magnet 6, so that the sensor keeps working in the highest sensitivity state. It realizes high sensitivity measurement of displacement in the low frequency range (0-5000 Hz) far below the resonant frequency of the magnetoelectric component (tens or even hundreds of kHz), and provides a new type of displacement sensor with performance comparable to or even better than that of eddy current sensors, which has important practical application value.

[0023] Specifically, the electrical signal is the output voltage, which is essentially the polarization charge generated by the piezoelectric body. After the output voltage is amplified and conditioned by a low-noise charge amplifier, it can be acquired using a general voltage signal acquisition device, thereby reducing the cost of the weak electrical signal acquisition system.

[0024] In this invention, the excitation coil 3 serves as the active magnetic field excitation component, enabling the magnetoelectric material assembly to operate in a resonant state with optimal sensitivity. The displacement synchronously generated by the follower component 7 and the object being detected 1, or the displacement generated by the metallic object being detected 1, will cause a change in the air gap between it and the magnetic yoke sleeve 2, thereby causing a change in the magnetic field strength acting on the magnetoelectric material assembly. Furthermore, the magnetoelectric sensing probe can always operate in its optimal sensitivity condition, ultimately achieving high-sensitivity displacement sensing and detection. This invention innovatively applies the magnetoelectric effect, which always operates in a resonant state, to high-sensitivity displacement sensing and detection, enabling high-sensitivity detection of displacements far below the resonant frequency (0-5000Hz).

[0025] It should be noted that when the material of the object being tested 1 is a magnetically conductive metal, the follower component 7 is not required. When the material of the object being tested 1 in this invention is a non-metallic material or a non-magnetically conductive metal, the follower component 7 is a necessary component; specifically, the follower component 7 is fixed to the object being tested 1 and moves in the same direction as the object being tested 1. The follower component 7 can be a magnetically conductive metal sheet, a non-magnetically conductive metal sheet, or directly an excitation coil 3.

[0026] The core component of the magnetoelectric sensing probe in this invention is a magnetoelectric material assembly, whose sensitive magnetic field strength generates a corresponding electrical signal. The matching of the magnetoelectric sensing probe structure with the follower component 7 or the object being detected 1 can take any of the following forms: Form 1: A magnetoelectric sensing probe matched with a magnetically conductive metal requires a magnetically conductive yoke sleeve 2, a bias permanent magnet 6, and an excitation coil 3 as the active magnetic field excitation component. Form 2: Matching non-magnetic metal magnetoelectric sensing probe, requires configuration of non-magnetic yoke sleeve 2, bias permanent magnet 6 and excitation coil 3 active magnetic field excitation component; Form 3: The matching excitation coil 3 is the magnetoelectric sensing probe of the follower component 7, which needs to be equipped with a non-magnetic yoke sleeve 2 and a bias permanent magnet 6.

[0027] This invention also provides a multi-dimensional sensing device, comprising multiple high-sensitivity displacement sensors based on the magnetoelectric effect. This multi-dimensional sensing device can detect the overall motion displacement of large moving objects. By statistically analyzing the displacement distribution of multiple measuring points in a plane, motion analysis of large moving objects is performed, including displacement consistency, whether tilting has occurred, and other aspects. It also includes multi-dimensional configuration, realizing multi-dimensional motion detection of the object (XYZ directions, multiple high-sensitivity displacement sensors based on the magnetoelectric effect arranged in an array, etc.). Simultaneously, this multi-dimensional sensing device also has broad application prospects in precision machining and manufacturing equipment such as semiconductor motion stages.

[0028] Furthermore, for the detection of a 5mm displacement, the sensor's detection curve is as follows: Figure 11 As shown, the detection sensitivity is 0.97 V / mm, the noise level of the sensor is 1 mV, and the sensing accuracy can reach 1 μm, obtained through linear fitting.

[0029] Example 2: This embodiment provides a high-sensitivity displacement sensor based on the magnetoelectric effect, including a magnetic yoke sleeve 2, an excitation coil 3, a permanent magnet 6, and a magnetoelectric material assembly. The magnetic yoke sleeve 2 has an internal accommodating space. The permanent magnet 6 is connected to the magnetoelectric material assembly and arranged sequentially in the accommodating space. The excitation coil 3 is arranged in the accommodating space and along the circumference of the permanent magnet 6 and the magnetoelectric material assembly. The magnetoelectric material assembly includes a magnetostrictive body 4 and a piezoelectric body 5. The object to be detected 1 is made of a magnetically conductive metal material and has an air gap between it and the magnetic yoke sleeve 2. The magnetic yoke sleeve 2 is made of a magnetically conductive material and serves as a magnetoelectric sensing probe. The excitation coil 3 provides active magnetic field excitation. d is the displacement of the object to be detected 1, δ(d) is the air gap between the magnetoelectric sensing probe and the object to be detected 1, H(d) is the magnetic field strength acting on the magnetoelectric material assembly, which refers to the amplitude of the alternating magnetic field strength, depending on the air gap δ(d), and V(d) is the output sensing electrical signal.

[0030] The working principle of this embodiment is as follows: Excitation coil 3 provides an alternating magnetic field excitation with frequency ω (hac = Hacsin(ωt)), and permanent magnet 6 provides a bias magnetic field (Hdc) of a certain intensity. When operating at the resonant frequency of the magnetoelectric material assembly, the assembly is most sensitive to changes in the amplitude of the alternating magnetic field intensity (Hac). The frequency response of the magnetoelectric material assembly's magnetic field sensitivity is as follows: Figure 2 As shown.

[0031] Because a closed magnetic circuit is formed between the magnetic yoke sleeve 2 and the object being tested 1, such as Figure 1 The magnetic circuit indicated by the middle arrow represents the magnetic field magnitude H(d) acting on the magnetoelectric material component, which refers to the amplitude of the alternating magnetic field strength and depends on the air gap δ(d). Therefore, when the object being detected 1 undergoes a displacement d, δ(d) changes, leading to a change in H(d). This ultimately generates a corresponding electrical signal V(d) from the magnetoelectric material component. The electrical signal V(d) is the output voltage, which can be amplified and conditioned by a low-noise charge amplifier and then acquired using a general-purpose voltage signal acquisition device. It should be noted that the bias magnetic field Hdc provided by the permanent magnet 6 also changes with the air gap. The influence of this bias magnetic field variation can be calibrated experimentally and eliminated during signal processing to further ensure detection accuracy.

[0032] Example 3: This embodiment provides a high-sensitivity displacement sensor based on the magnetoelectric effect. This embodiment also includes a follower component 7, such as... Figure 3 As shown, the object being tested 1 is a non-metallic material, the follower component 7 is a magnetically conductive metal sheet, the follower component 7 is fixed on the object being tested 1, the magnetic yoke sleeve 2 is made of a magnetically conductive material, and a closed magnetic circuit is formed between the magnetic yoke sleeve 2 and the magnetically conductive metal sheet. The working principle of this embodiment is the same as that of embodiment 2.

[0033] Example 4: The difference between this embodiment and embodiment 3 is that the magnetic yoke sleeve 2 is made of a non-magnetic material, and the follower component 7 is the excitation coil 3, such as... Figure 4 As shown.

[0034] The working principle of this embodiment is as follows: The follower component 7, fixed to the object being detected 1, is the excitation coil 3. The excitation coil 3 provides an alternating magnetic field excitation (hac=Hacsin(ωt)), and the frequency is the resonant frequency of the magnetoelectric material assembly. Therefore, the magnetic field H(d) acting on the magnetoelectric material assembly is an alternating magnetic field with frequency ω that depends on the displacement d of the object being detected 1. Thus, high-sensitivity displacement detection can be achieved through the magnetoelectric material assembly.

[0035] Example 5: The difference between this embodiment and embodiment 2 is that the magnetic yoke sleeve 2 is made of a non-magnetic material, and the follower component 7 is a non-magnetic metal sheet.

[0036] The working principle of this embodiment is as follows: like Figure 5 As shown, the high-frequency AC magnetic field excitation (hac=Hacsin(ωt)) generated by the excitation coil 3 will produce eddy currents when it acts on the non-magnetic metal sheet. The magnetic field He(d) formed by the eddy current is related to d. The magnetic field H(d) acting on the magnetoelectric material component is a structure in which hac and He(d) act together, ultimately achieving high-sensitivity displacement sensing.

[0037] Example 6: The difference between this embodiment and embodiment 5 is that the follower component 7 is omitted, and the object being detected 1 is a non-magnetic metal material, such as... Figure 6 As shown, the high-frequency AC magnetic field excitation (hac=Hacsin(ωt)) generated by the excitation coil 3 will produce eddy currents when it acts on the object being detected 1. The magnetic field He(d) formed by the eddy current is related to d. The magnetic field H(d) acting on the magnetoelectric material component is a structure in which hac and He(d) work together, ultimately achieving high-sensitivity displacement sensing.

[0038] Example 7: The difference between this embodiment and embodiment 2 is that the excitation coil 3 is disposed in the accommodating space and arranged in series with the magnetoelectric material assembly, and positioned close to the object being detected 1; the magnetic field between it and the object being detected 1 is more compact, and the structure is simpler, such as... Figure 7 As shown, the detection principle is the same as that in Example 2.

[0039] Example 8: The difference between this embodiment and embodiment 7 is that, to further enhance the detection signal, a secondary excitation coil 8 is introduced into the magnetoelectric probe structure. The secondary excitation coil 8 is arranged circumferentially on the magnetic yoke sleeve 2, as shown below. Figure 8 As shown, the detection principle is the same as Figure 7 As shown, due to the action of the excitation coil 3, a closed magnetic circuit is formed between the magnetic sleeve 2 and the magnetically conductive object 1 being detected, thereby generating an induced electromotive force in the secondary excitation coil 8, which in turn generates an induced magnetic field (hin) acting on the magnetoelectric material assembly. The amplitude of the magnetic field H(d) acting on the magnetoelectric material assembly is ultimately greater than that shown. Figure 7 The plan is larger.

[0040] Example 9: The difference between this embodiment and Embodiment 2 is that the magnetoelectric probe has a structure in which a series-connected magnetoelectric material assembly is embedded in the magnetic circuit of the U-shaped magnetic yoke sleeve 2. The series-connected magnetoelectric material assembly refers to the magnetostrictive body 4 and the piezoelectric body 5 being installed in series in the magnetic circuit. The excitation coil 3 is spaced apart from the magnetoelectric material assembly and positioned close to the object being detected 1. Its sensing principle lies in the deformation of the magnetostrictive material under the influence of a magnetic field. Since the magnetoelectric material assembly is initially in a pre-compressed state, the piezoelectric material will compress or loosen following the deformation of the magnetostrictive material, thereby generating an electrical signal V(d) corresponding to H(d). Figure 9 As shown, the working principle is the same as in Example 2.

[0041] Example 10: The difference between this embodiment and Embodiment 9 is that the magnetoelectric probe is structured as a parallel magnetoelectric material assembly embedded in the magnetic circuit of the U-shaped magnetic yoke sleeve 2. The parallel magnetoelectric material assembly refers to the magnetostrictive body 4 and the piezoelectric body 5 being installed in parallel within the magnetic circuit. Its sensing principle lies in the deformation of the magnetostrictive material under the influence of a magnetic field. Since both the magnetostrictive body 4 and the piezoelectric body 5 are initially in a pre-compressed state, the piezoelectric material follows the deformation of the magnetostrictive material, thereby generating an electrical signal V(d) corresponding to H(d), such as... Figure 10 As shown, the working principle is the same as in Example 2.

[0042] In the description of this application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0043] The specific embodiments of this utility model have been described above. It should be understood that this utility model is not limited to the specific embodiments described above, and those skilled in the art can make various changes or modifications within the scope of the claims, which do not affect the substantive content of this utility model. Unless otherwise specified, the embodiments and features described in this application can be arbitrarily combined with each other.

Claims

1. A high-sensitivity displacement sensor based on the magnetoelectric effect, characterized in that, include: The magnetic yoke sleeve (2) has a receiving space and an air gap between it and the object being tested (1); A magnetoelectric material assembly, disposed in the accommodating space, includes a magnetostrictive body (4) and a piezoelectric body (5), both of which are disposed on the magnetic yoke sleeve (2) and are in a pre-pressed state; The excitation coil (3) enables a closed magnetic circuit to be formed between the magnetic yoke sleeve (2) and the object being tested (1), or enables a closed magnetic circuit to be formed between the magnetic yoke sleeve (2) and the follower component (7) disposed on the object being tested (1).

2. The high-sensitivity displacement sensor based on the magnetoelectric effect according to claim 1, characterized in that, The object being tested (1) is a magnetic metal material, a non-magnetic metal material, or a non-magnetic material.

3. The high-sensitivity displacement sensor based on the magnetoelectric effect according to claim 1, characterized in that, The follower component (7) is a magnetic metal sheet, a non-magnetic metal sheet, or directly uses an excitation coil (3).

4. The high-sensitivity displacement sensor based on the magnetoelectric effect according to claim 1, characterized in that, The magnetostrictive body (4) and the piezoelectric body (5) are connected in series; or the magnetostrictive body (4) and the piezoelectric body (5) are connected in parallel.

5. The high-sensitivity displacement sensor based on the magnetoelectric effect according to claim 4, characterized in that, It also includes a permanent magnet (6), wherein the permanent magnet (6), the piezoelectric body (5), and the magnetostrictive body (4) are connected in series.

6. The high-sensitivity displacement sensor based on the magnetoelectric effect according to claim 1, characterized in that, The excitation coil (3) can be configured in any of the following ways: The excitation coil (3) is arranged circumferentially along the magnetoelectric material assembly and configured in the receiving space; The excitation coil (3) serves as a follower component (7) and is fixed to the object being tested (1); The excitation coil (3) is disposed in the receiving space and is arranged in series with the magnetoelectric material assembly and is disposed on the side close to the object being detected (1); The excitation coil (3) is arranged at a distance from the magnetoelectric material assembly and is positioned on the side close to the object being tested (1).

7. The high-sensitivity displacement sensor based on the magnetoelectric effect according to claim 1, characterized in that, It is also equipped with a secondary excitation coil (8), which is arranged circumferentially along the yoke sleeve (2).

8. The high-sensitivity displacement sensor based on the magnetoelectric effect according to claim 1, characterized in that, The axial section of the magnetic yoke sleeve (2) is U-shaped.

9. The high-sensitivity displacement sensor based on the magnetoelectric effect according to claim 4, characterized in that, The piezoelectric element (5) is electrically connected to the charge amplifier.

10. A multidimensional sensing device, characterized in that, It includes any one of the high-sensitivity displacement sensors based on the magnetoelectric effect according to claims 1 to 9.

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